EP2288739A1 - Système de couches barrières transparent - Google Patents

Système de couches barrières transparent

Info

Publication number
EP2288739A1
EP2288739A1 EP09731834A EP09731834A EP2288739A1 EP 2288739 A1 EP2288739 A1 EP 2288739A1 EP 09731834 A EP09731834 A EP 09731834A EP 09731834 A EP09731834 A EP 09731834A EP 2288739 A1 EP2288739 A1 EP 2288739A1
Authority
EP
European Patent Office
Prior art keywords
layer
substrate
barrier layer
barrier
transparent barrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09731834A
Other languages
German (de)
English (en)
Inventor
John Fahlteich
Matthias Fahland
Waldemar SCHÖNBERGER
Nicolas Schiller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP2288739A1 publication Critical patent/EP2288739A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree

Definitions

  • EP 0 31 1 432 A2 discloses an SiO 2 layer having a gradient with respect to the material properties. This is intended to achieve a mechanical adaptation of the permeation barrier to the plastic film and thus a better mechanical resistance. Basically, this method is also not suitable for a roll-to-roll coating, since the formation of the gradient layer by a time-varying process management also requires a stationary process control.
  • magnetron plasmas for plasma polymerization in the deposition of diffusion barrier layers, ie barrier layers (EP 0 815 283 B1); [S. Fujimaki, H. Kashiwase, Y. Kokaku, Vacuum 59 (2000) p. 657-664].
  • diffusion barrier layers ie barrier layers
  • EP 0 815 283 B1 ie barrier layers
  • S. Fujimaki, H. Kashiwase, Y. Kokaku, Vacuum 59 (2000) p. 657-664 PECVD processes that are directly maintained by the plasma of a magnetron discharge.
  • An example of this is the use of a magnetron plasma for PECVD coating for the deposition of layers with a carbon monoxide. scaffold, with the precursor CH 4 is used.
  • such layers also have an insufficient barrier effect for display applications.
  • the invention is therefore the technical problem of providing a barrier film with a transparent barrier layer system, by means of which the disadvantages of the prior art can be overcome.
  • the barrier layer system should have very good barrier properties to oxygen and water vapor.
  • the barrier film should be producible by means of roll-to-roll processes.
  • the barrier layer system should have a high barrier effect.
  • activation energy comes from the analytical description of the permeation mechanism.
  • permeation through a layer is described by the following relationship:
  • P stands for the permeation
  • P 0 stands for the permeation coefficient
  • R is the universal gas constant
  • T is the temperature
  • E P is the activation energy.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

L'invention porte sur un système de couches barrières transparent sur un substrat, le système de couches barrières comprenant une suite de couches individuelles, les couches individuelles étant constituées en alternance d'une couche A et d'une couche B, une couche A se distinguant d'une couche B, au niveau de son énergie d'activation lors d'une perméation de vapeur d'eau, par une différence d'au moins 1,5 kJ/mole.
EP09731834A 2008-04-18 2009-04-09 Système de couches barrières transparent Withdrawn EP2288739A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008019665A DE102008019665A1 (de) 2008-04-18 2008-04-18 Transparentes Barriereschichtsystem
PCT/EP2009/002678 WO2009127373A1 (fr) 2008-04-18 2009-04-09 Système de couches barrières transparent

Publications (1)

Publication Number Publication Date
EP2288739A1 true EP2288739A1 (fr) 2011-03-02

Family

ID=40848367

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09731834A Withdrawn EP2288739A1 (fr) 2008-04-18 2009-04-09 Système de couches barrières transparent

Country Status (6)

Country Link
US (1) US20110033680A1 (fr)
EP (1) EP2288739A1 (fr)
JP (1) JP5538361B2 (fr)
DE (1) DE102008019665A1 (fr)
TW (1) TW200944617A (fr)
WO (1) WO2009127373A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2431995A1 (fr) 2010-09-17 2012-03-21 Asociacion de la Industria Navarra (AIN) Dispositif d'ionisation
DE102011017404A1 (de) * 2011-04-18 2012-10-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Abscheiden eines transparenten Barriereschichtsystems
DE102011017403A1 (de) * 2011-04-18 2012-10-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Abscheiden eines transparenten Barriereschichtsystems
JP6306392B2 (ja) * 2014-03-27 2018-04-04 積水化学工業株式会社 積層バリアシート
JP6497023B2 (ja) * 2014-10-06 2019-04-10 凸版印刷株式会社 ガスバリア性積層体
KR102089409B1 (ko) * 2016-03-31 2020-03-16 주식회사 엘지화학 배리어 필름
DE102016226191B4 (de) * 2016-12-23 2018-12-13 HS-Group GmbH Verfahren und Vorrichtung zur Herstellung eines mit einer Sperrschicht und einer Schutzschicht beschichteten Substrats
KR20240129772A (ko) * 2023-02-21 2024-08-28 한국화학연구원 항균 특성을 갖는 기체차단용 박막 및 이의 제조방법

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5100720A (en) 1987-10-07 1992-03-31 Mitsubishi Monsanto Chemical Company Limited Laminated film having gas barrier properties
JP3319164B2 (ja) * 1994-08-01 2002-08-26 凸版印刷株式会社 透明ガスバリア材
JP3070404B2 (ja) * 1994-09-08 2000-07-31 凸版印刷株式会社 透明で印刷層を有するガスバリア性積層フィルム
AU4936196A (en) 1995-03-14 1996-10-02 Eidgenossische Materialprufungs- Und Forschungsanstalt Empa Plasma chamber
DE19650286C2 (de) 1996-02-28 2002-07-11 Fraunhofer Ges Forschung Verpackungsmaterial
JP4121608B2 (ja) * 1998-03-17 2008-07-23 大日本印刷株式会社 酸化アルミニウム蒸着フィルム、それを使用した複合フィルムおよびその製造法
JP2000332277A (ja) * 1999-05-17 2000-11-30 Dainippon Printing Co Ltd 太陽電池モジュ−ル用保護シ−トおよびそれを使用した太陽電池モジュ−ル
JP4478255B2 (ja) * 1999-09-09 2010-06-09 大日本印刷株式会社 酸化アルミニウム蒸着フィルムおよびその製造法
US6413645B1 (en) * 2000-04-20 2002-07-02 Battelle Memorial Institute Ultrabarrier substrates
US7083880B2 (en) * 2002-08-15 2006-08-01 Freescale Semiconductor, Inc. Lithographic template and method of formation and use
US7288311B2 (en) * 2003-02-10 2007-10-30 Dai Nippon Printing Co., Ltd. Barrier film
JP2004327402A (ja) * 2003-04-28 2004-11-18 Kureha Chem Ind Co Ltd 防湿エレクトロルミネッセンス素子及びその製造方法
JP4349078B2 (ja) * 2003-10-29 2009-10-21 凸版印刷株式会社 強密着蒸着フィルムの製造方法および強密着蒸着フィルム
JP2005212230A (ja) * 2004-01-29 2005-08-11 Tomoegawa Paper Co Ltd 透明ガスバリアフィルムおよびエレクトロルミネッセンス素子
DE102004005313A1 (de) 2004-02-02 2005-09-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung eines Ultrabarriere-Schichtsystems
JP5275543B2 (ja) * 2005-08-31 2013-08-28 株式会社吉野工業所 高いバリア性を有する合成樹脂製容器
JP2007216435A (ja) * 2006-02-14 2007-08-30 Tomoegawa Paper Co Ltd ガスバリアフィルム基板、電極付きガスバリアフィルム基板、及びそれらを用いた表示素子
DE102007019994A1 (de) * 2007-04-27 2008-10-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Transparente Barrierefolie und Verfahren zum Herstellen derselben

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2009127373A1 *

Also Published As

Publication number Publication date
US20110033680A1 (en) 2011-02-10
JP2011519318A (ja) 2011-07-07
JP5538361B2 (ja) 2014-07-02
DE102008019665A1 (de) 2009-10-22
TW200944617A (en) 2009-11-01
WO2009127373A1 (fr) 2009-10-22

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