EP2139824A1 - Keramischer werkstoff mit einer zusammensetzung, die auf einen durch einen metallischen werkstoff vorgegebenen wärmeausdehnungskoeffizient abgestimmt ist - Google Patents

Keramischer werkstoff mit einer zusammensetzung, die auf einen durch einen metallischen werkstoff vorgegebenen wärmeausdehnungskoeffizient abgestimmt ist

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Publication number
EP2139824A1
EP2139824A1 EP08735921A EP08735921A EP2139824A1 EP 2139824 A1 EP2139824 A1 EP 2139824A1 EP 08735921 A EP08735921 A EP 08735921A EP 08735921 A EP08735921 A EP 08735921A EP 2139824 A1 EP2139824 A1 EP 2139824A1
Authority
EP
European Patent Office
Prior art keywords
thermal expansion
coefficient
ceramic
mgo
sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08735921A
Other languages
German (de)
English (en)
French (fr)
Inventor
Alfred Thimm
Jürgen RUSKA
Johannes Ernst
Stefan Stolz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ceramtec GmbH
Original Assignee
Ceramtec GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ceramtec GmbH filed Critical Ceramtec GmbH
Publication of EP2139824A1 publication Critical patent/EP2139824A1/de
Withdrawn legal-status Critical Current

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    • C04B35/03Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on magnesium oxide, calcium oxide or oxide mixtures derived from dolomite
    • C04B35/04Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on magnesium oxide, calcium oxide or oxide mixtures derived from dolomite based on magnesium oxide
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y10T428/00Stock material or miscellaneous articles
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    • Y10T428/249953Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249976Voids specified as closed

Definitions

  • Ceramic material having a composition that is tuned to a given by a metallic material thermal expansion coefficient
  • the invention relates to a non-conductive ceramic material having a composition which is tuned to a predetermined by a metallic material, with which it is materially bonded, the coefficient of thermal expansion, that the coefficients of thermal expansion match, and a method for its preparation.
  • Electrically nonconductive ceramic materials are used for the separation of electrical potentials due to their high electrical breakdown resistance, which can be greater than 15 kV / mm. If, due to the use, a material bond has to be made with the metal, for example by gluing or soldering, in order to separate the electrical potentials of the ceramic material, stresses arise due to the different coefficients of thermal expansion of metal and ceramic during heat loadings. For example, the coefficient of thermal expansion of alumina is 7 » 10 " 6 / K, and that of zirconia is 1O10 ⁇ 6 / K.
  • the coefficient of thermal expansion of steels is between 9 and 14 » 10 " 6 / K, for example, of conventional carbon steels, depending on the alloying constituents at 13 » 10 " 6 / K, from mild steel at 12 » 10 " 6 / K.
  • the connection of the ceramic with the metal is usually by gluing or soldering, for example, with glass solder. Glue or solder, however, can not compensate for the stresses between the metal and the ceramic which occur during a heat load. Because metal usually expands more than ceramic, the ceramic can crack or even peel off. If the ceramic layer on the metal is damaged by cracks or spalling, due to the equipotential bonding, short circuits occur due to faults in the ceramic.
  • the object of the invention is therefore to find a ceramic material whose thermal expansion coefficient is equalized to the coefficient of thermal expansion of the metallic material, with which it is materially connected.
  • An exemplary embodiment of the base material of the ceramic material according to the invention is magnesium oxide (MgO).
  • the thermal expansion coefficient of pure magnesium oxide is 14 » 10 " 6 / K in the range of 20 to 800 0 C.
  • ZrO 2 zirconium oxide
  • Al 2 O 3 aluminum oxide
  • MgAl 2 O 4 a material can be assembled in each case, the coefficient of thermal expansion is adapted to the thermal expansion coefficients of metallic materials, such as steels.
  • the properties of the material according to the invention such as thermal conductivity, thermal expansion coefficient, bending strength or density may not change fundamentally, for example, by the sudden formation of new phases. In particular, no percolating, ie continuous pores may occur.
  • the sintering temperature of the new material compared to that of pure MgO is reduced to a range of 1400 0 C to 1550 0 C.
  • Any contamination or deliberate addition of oxidic materials to pure MgO also lowers the coefficient of thermal expansion of the MgO by up to 0.25 * 10 -6 / K per 1 wt% doping.
  • a steel with a coefficient of thermal expansion of 13.3 ⁇ 10 -6 / K is predefined
  • the coefficient of thermal expansion of the ceramic material according to the invention is set to this value, a) if 90% by weight of MgO a proportion of 10% by weight ZrO 2 is added b) if 97.5% by weight of MgO a proportion of 2.5% by weight of Al 2 O 3 is added, c) if 93.75% by weight of MgO have a content of 1.25% by weight % Al 2 O 3 and a proportion of 5 wt .-% ZrO 2 is added.
  • the production of the material according to the invention will be described below with reference to exemplary embodiments.
  • From the material for example thin plates, preferably with a thickness of less than 1 mm.
  • preference is given to using finely divided powder having a particle size of d 50 ⁇ 10 ⁇ m.
  • preference is given to a monoclinic, finely divided powder having a particle size of d 50 ⁇ 1 ⁇ m.
  • the shaping of the green body takes place by means of the film casting process, but can also be effected by dry pressing.
  • the green bodies are lying in a gas or electrically heated furnace at temperatures of 1500 0 C to 1600 0 C in a non-reactive burning plates, for example of sintered up to a theoretical density of> 95% sintered.
  • the result is a sintered magnesia material with embedded ZrO2 when using ZrO2, or a proportion of MgAI 2 O 4 when using Al 2 O 3 , to vote on the thermal expansion coefficient of the metallic material.
  • ceramic films made of this material were glued between two metallic partners using glass solder.
  • a composite consisting of a 0.4 mm thick ceramic plate glued between two steel plates was heated repeatedly in air and in a reducing atmosphere up to 900 ° C. In the process, a potential difference of up to 5 V was maintained between the metallic partners.
  • Such a composite remains mechanically stable with temperature changes in a range of -20 0 C to 900 0 C.
  • the solvent used was a mixture of 920 g of xylene and 3050 g of butanol, 800 g of PVB as binder, 270 g of phthalic acid ester as plasticizer and 50 g of fish oil as dispersant.
  • the slurry was made into a film by the Doctor Blade method, which had a thickness of 0.3 mm after drying.
  • a ceramic molding of the embodiment had a thermal expansion coefficient of 13.3 * 10 -6 / K in the temperature range between 20 ° C. and 800 ° C. and a bending strength of 136 MPa Pore size was between 5 microns and 10 microns and the density at 3.6 g / cm 3 , which corresponds to a theoretical density of 95% ..
  • the dielectric strength was over 20 kV / mm.
  • This molding was coated with a metallic partner with a thermal expansion coefficient via a solder glass of 13.3 * 10 "6 / K.
  • the MgO contained as impurities in percent by weight 0.3% CaO, 0.4% SiO 2 , 0.5% Al 2 O 3 and 0.1% further oxides such as Fe 2 O 3 and B 2 O 3 . Except for the structure-stabilizing Y 2 O 3 in ZrO 2 , all components lower the thermal expansion coefficient.
  • the solvent used was a mixture of 920 g of xylene and 3050 g of butanol, 800 g of PVB as binder, 270 g of phthalic acid ester as plasticizer and 50 g of fish oil as dispersant.
  • the slurry was made into a film by the Doctor Blade method, which had a thickness of 0.3 mm after drying.
  • a ceramic molding of the exemplary embodiment had a thermal expansion coefficient of 13.3 ⁇ 10 -6 / K in the temperature range between 20 ° C. and 800 ° C. and a flexural strength of 131 MPa.
  • An SEM examination showed no open porosity and 10 microns and the density of 3.53 g / cm 3, which corresponds to a theoretical density of 94%. the dielectric strength was over 20 kV / mm.
  • the solvent used was a mixture of 920 g of xylene and 3050 g of butanol, as binder 800 g of PVB, as plasticizer 270 g of phthalic acid ester and as dispersant 50 g of fish oil.
  • the slurry was made into a film by the Doctor Blade method, which had a thickness of 0.3 mm after drying.
  • a ceramic molding of the embodiment had a thermal expansion coefficient of 13.3 * 10 "6 / K in the temperature range between 20 0 C and 800 0 C and a bending strength of 110 MPa, closed pores with a pore size between 5 .mu.m and 10 .mu.m and the density at 3.36 g / cm 3 , which corresponds to a theoretical density of over 95%
  • the dielectric strength was over 20 kV / mm.
  • the equivalent amount of MgAl 2 O 4 can also be added to the MgO to control the thermal expansion coefficient.
  • 1% by weight of MgAl 2 O 4 corresponds to 0.72% by weight of Al 2 O 3 . 10 to reach the thermal expansion coefficient of 13.3 * "6 / K of the steel, there is a mixture of 96.55 wt .-% MgO and 3.45 wt .-% MgAl 2 O 4.
  • the procedures and the sintering result correspond to those in the embodiment b).
  • the weight ratio was therefore 93.75% MgO (impurities included) too 1, 25 AI2O3 and 5% ZrO2.
  • the MgO contained as impurities in percent by weight 0.3% CaO, 0.4% SiO 2 , 0.5% Al 2 O 3 and 0.1% further oxides such as Fe 2 O 3 and B 2 O 3 .
  • the solvent used was a mixture of 920 g of xylene and 3050 g of butanol, 800 g of PVB as binder, 270 g of phthalic acid ester as plasticizer and 50 g of fish oil as dispersant.
  • the slurry was made into a film by the Doctor Blade method, which had a thickness of 0.3 mm after drying.
  • Sheets of 200 mm x 200 mm were punched out of the film and sintered at a temperature of 1550 ° C. in an oxidizing atmosphere, lying on non-reactive fuel plates.
  • the sintered plates with a thickness of 0.2 mm were shaped by means of lasers.
  • a ceramic molding of the embodiment had a thermal expansion coefficient of 13.3 * 10 "6 / K in the temperature range between 20 0 C and 800 0 C and a bending strength of 115 MPa, closed pores with a pore size between 5 .mu.m and 10 .mu.m, a density of 3.5 g / cm 3 , which corresponds to a theoretical density of 94%, and had a dielectric strength of over 20 kV / mm.
  • the preparation can be made by the dry press process.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Ceramic Products (AREA)
EP08735921A 2007-04-18 2008-04-08 Keramischer werkstoff mit einer zusammensetzung, die auf einen durch einen metallischen werkstoff vorgegebenen wärmeausdehnungskoeffizient abgestimmt ist Withdrawn EP2139824A1 (de)

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Application Number Priority Date Filing Date Title
DE200710018610 DE102007018610A1 (de) 2007-04-18 2007-04-18 Keramischer Werkstoff mit einer Zusammensetzung, die auf einen durch einen metallischen Werkstoff vorgegebenen Wärmeausdehnungskoeffizient abgestimmt ist
PCT/EP2008/054190 WO2008128885A1 (de) 2007-04-18 2008-04-08 Keramischer werkstoff mit einer zusammensetzung, die auf einen durch einen metallischen werkstoff vorgegebenen wärmeausdehnungskoeffizient abgestimmt ist

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EP2139824A1 true EP2139824A1 (de) 2010-01-06

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US (1) US8889273B2 (ja)
EP (1) EP2139824A1 (ja)
JP (1) JP2010524816A (ja)
CN (1) CN101795993B (ja)
AU (1) AU2008240798B2 (ja)
DE (1) DE102007018610A1 (ja)
WO (1) WO2008128885A1 (ja)

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JP6038698B2 (ja) * 2013-03-22 2016-12-07 日本碍子株式会社 セラミックス部材及び半導体製造装置用部材
JP6246938B2 (ja) * 2013-12-12 2017-12-13 カウンシル オブ サイエンティフィック アンド インダストリアル リサーチ プリンテッドエレクトロニクス用途の自己回復性シリカ系誘電性インク
CN107207353A (zh) * 2014-11-10 2017-09-26 圣戈本陶瓷及塑料股份有限公司 烧结陶瓷部件及其形成方法
JP6951657B2 (ja) * 2017-01-30 2021-10-20 日本電気硝子株式会社 無機多孔質シートの製造方法
KR20190052797A (ko) * 2017-11-09 2019-05-17 한국기계연구원 고열전도성 마그네시아 조성물 및 마그네시아 세라믹스
KR102143817B1 (ko) * 2020-04-29 2020-08-13 한국기계연구원 고열전도성 마그네시아 조성물 및 마그네시아 세라믹스
CN112557264A (zh) * 2020-11-23 2021-03-26 中国电子科技集团公司第四十九研究所 一种高温金属屑传感器敏感芯体及其制备方法

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Also Published As

Publication number Publication date
AU2008240798A1 (en) 2008-10-30
JP2010524816A (ja) 2010-07-22
US8889273B2 (en) 2014-11-18
US20100233497A1 (en) 2010-09-16
CN101795993A (zh) 2010-08-04
DE102007018610A1 (de) 2008-10-23
CN101795993B (zh) 2014-12-17
WO2008128885A1 (de) 2008-10-30
AU2008240798B2 (en) 2014-01-09

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