EP1851440B1 - Pompe a vide holweck - Google Patents

Pompe a vide holweck Download PDF

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Publication number
EP1851440B1
EP1851440B1 EP06707774A EP06707774A EP1851440B1 EP 1851440 B1 EP1851440 B1 EP 1851440B1 EP 06707774 A EP06707774 A EP 06707774A EP 06707774 A EP06707774 A EP 06707774A EP 1851440 B1 EP1851440 B1 EP 1851440B1
Authority
EP
European Patent Office
Prior art keywords
rotor
support ring
vacuum pump
holweck
wings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP06707774A
Other languages
German (de)
English (en)
Other versions
EP1851440A1 (fr
Inventor
Dr. Roland Blumenthal
Ralf Adamietz
Dirk Kalisch
Heinz ENGLÄNDER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1851440A1 publication Critical patent/EP1851440A1/fr
Application granted granted Critical
Publication of EP1851440B1 publication Critical patent/EP1851440B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Definitions

  • the invention relates to a Holweck vacuum pump with a pump rotor with a rotating tube.
  • a two-pass Holweck vacuum pump having radially inside and outside the rotor tube a pump stator each formed by a helical thread groove.
  • a rotor blade is provided on the inlet side, which has a support ring which carries the rotor tube.
  • the axial length of the support ring is greater than that of the wing of the wing disc, so that the Supporting ring passes through the wings, ie the wings are divided radially into two sections.
  • a portion of the support ring projects axially out of the plane of the rotor blades.
  • the rotor tube On the overhanging part of the support ring, the rotor tube is fixed, for example by the outside rests on the support ring. All forces acting between the support ring and the rotor tube are transmitted directly to the wings of the wing disc. Experiments have shown that in particular caused by the centrifugal forces radial and tangential forces represent a significant mechanical load on the wings and in particular for the support ring and reduce their life.
  • the object of the invention in contrast, is to create a two-way Holweck vacuum pump with improved blade life.
  • the wings of the wing disc on the rotor side proximal paragraphs which carry the support ring.
  • the support ring does not overhang the wings axially, but is supported by a corresponding stepped shoulder in the wings radially inward.
  • the wings therefore have a greater axial length radially inward of the support ring than radially outwardly of the support ring.
  • the paragraphs of the wings are designed such that the support ring rests radially outward on the stepped shoulder. As a result, the support ring is supported substantially over its entire axial length by the wings of the wing disc.
  • the support structure bearing wing structure is considerably solidified, so that the forces acting between the wings and the support ring forces lead to lower punctual peak loads of the wings.
  • the rotor tube On the supported by the wing part of the support ring is pushed radially outward, the rotor tube.
  • the rotor tube which preferably consists of a very tensile and lightweight material, bandaged the support ring such that it against the at high speeds of several 10,000 rev / min high centrifugal forces is supported. As a result, the tangential forces generated in the support ring are kept so small that the support ring tolerates correspondingly high speeds.
  • the support ring does not protrude axially into the stepless region of the wings.
  • the axial length of the support ring corresponds approximately to the axial length of the wing axial stages.
  • the support ring does not penetrate most of the wings over their entire radial length. This ensures that forces acting between the rotor tube and the support ring are introduced directly into the wings only in the region of the wing shoulders, but not over the entire axial length of the wings.
  • By limiting the axial extent of the support ring to the axial length of the shoulder ensures that the support ring is supported in the entire axial length of the rotor tube on the outside against high centrifugal forces.
  • the wings of the wing disc on the suction side (distal) step-like shoulders which carry a support ring.
  • the support shoulders bearing step-paragraphs are thus axially opposite the support ring bearing step-paragraphs of the wings, while the axially intermediate area is formed step and tragringok.
  • the axial length of the wings decreases radially inward from the shoulder.
  • the contour of the adjacent inner pump stator is adjusted accordingly. With the axial length of the wings decreasing radially inward, the geometry is maintained optimally in terms of flow, with sufficient vane stability. As a result, higher overall pumping speeds can be achieved.
  • the rotor tube is made of a fiber-reinforced material.
  • non-metallic materials are suitable, such as CFRP.
  • Fiber-reinforced non-metallic materials are relatively light with high mechanical stability, especially at high tensile strength.
  • the existing of a fiber reinforced material rotor tube can therefore be rotated at high speeds, without increasing the diameter while significantly. This circumstance is of great importance for the realization of small gaps between rotor and stator.
  • the high tensile strength ensures that the rotor tube can also support the support ring against destructive tangential forces.
  • the threads of the thread grooves that is, their thread bottoms, taper radially from the inlet to the outlet. This reduces the depth and the cross section of the thread groove from the inlet to the outlet. As a result, the inlet cross section of the two Holweck stages or trains is relatively large, so that the pumping speed of the Holweck stage is improved.
  • a Holweck vacuum pump 10,50 which has two parallel Holweck pump stages 12,14. Both are facing the inlet Holweck vacuum pumps 10.50 each have a rotor blade 28,28 ', each having a plurality of wings 18,58.
  • the two Holweck pump stages 12, 14 are essentially formed by a respective radially outer pump stator 20, a radially inner pump stator 22, and a rotating rotor tube 24 between the two stators 20, 22.
  • Both the inner and the outer pump stator 20, 22 each have a helical thread groove 21, 23, the groove bottom of which tapers radially towards the outlet in each case.
  • the pump rotor 16 consists essentially of a shaft 26 which is supported by rolling bearings and / or magnetic bearings, a hub 27, the wings 18, a support ring 30, and the rotor tube 24.
  • the pump rotor 56 of the vacuum pump 50 of Fig. 2 also has a second support ring 60.
  • the hub 27, the wings 18 and the support ring 30, and possibly the support ring 60 are integrally formed with each other and made of aluminum, but can also be manufactured individually and mounted together. In particular, the support ring 60 can be made separately, and then mounted to the wings 58.
  • the rotor tube 24 is made of a fiber-reinforced material, such as CFRP.
  • the wings 18, 58 have a stepped shoulder 40 on the rotor side, on which the support ring 30 is supported.
  • the axial shoulder length is approximately equal to the axial length of the support ring 30.
  • the support ring 30 does not axially project toward the pump inlet into the vanes 18, so that the radial gaps between the vanes 18 are radially continuous outside of the shoulders 40.
  • the support ring 30 is circular cylindrical and carries the rotor tube 24 which is clamped or pressed onto the support ring 30.
  • the axial length of the wings 18 is reduced from the shoulder 40 radially inward. However, the axial length of the wings 18 near the hub is greater than the axial length of the wings 18 radially outward of the shoulders 40 and the support ring 30th
  • the support ring 30 is best supported in the area in which it carries the rotor tube 24.
  • the introduction of forces transmitted between the rotor tube 24, the support ring 30 and the shoulders 40 is significantly reduced.
  • the generation of tangential forces in the support ring 30 is significantly reduced, since the support ring 30 is supported over its entire axial length radially by the rotor tube 24 against the centrifugal forces.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Reciprocating Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)

Claims (7)

  1. Pompe à vide Holweck (10) comprenant
    un rotor de pompe (16) avec un tuyau rotatif (24) et une disque hélice (28) du rotor au coté d'admission comprenant un anneau de support (30) supportant le tuyau du rotor (24), et
    un stator de pompe (20, 22) respectif prévu radialement à l'intérieur et à l'extérieur du tuyau du rotor (24), chacun comprenant une gorge de filet en forme d'hélice (21, 23),
    caractérisée en ce que
    les ailes (18) de la disque hélice (28) comprend des épaulements (40) au coté du rotor, qui supportent l'anneau de support (30).
  2. Pompe à vide Holweck (10) selon la revendication 1, caractérisée en ce que l'anneau de support (30) ne saille pas axialement dans la région non-épaulée des ailes (18).
  3. Pompe à vide Holweck (10) selon la revendication 2, caractérisée en ce que le tuyau du rotor (24) recouvre la totalité de la longueur axiale de l'anneau de support (30).
  4. Pompe à vide Holweck (50) selon une des revendications 1 à 3, caractérisée en ce que les ailes (58) de la disque hélice (28') aussi comprend des épaulements (62) au coté d'admission qui portent un anneau de support (60).
  5. Pompe à vide Holweck (10) selon une des revendications 1 à 4, caractérisée en ce que la longueur axiale des ailes (18, 58) s'effile de l'épaulement (40, 62) vers la surface radialement intérieure.
  6. Pompe à vide Holweck (10) selon une des revendications 1 à 5, caractérisée en ce que le tuyau du rotor (24) est fabriqué d'un matériau renforcé par fibres, en particulier de plastique renforcé de fibres de carbone.
  7. Pompe à vide Holweck (10) selon une des revendications 1 à 6, caractérisée en ce que les gorges de filet du stator (21, 23) s'effilent radialement de l'admission vers la sortie.
EP06707774A 2005-02-25 2006-01-20 Pompe a vide holweck Not-in-force EP1851440B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005008643A DE102005008643A1 (de) 2005-02-25 2005-02-25 Holweck-Vakuumpumpe
PCT/EP2006/050325 WO2006089823A1 (fr) 2005-02-25 2006-01-20 Pompe a vide holweck

Publications (2)

Publication Number Publication Date
EP1851440A1 EP1851440A1 (fr) 2007-11-07
EP1851440B1 true EP1851440B1 (fr) 2009-03-11

Family

ID=36216200

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06707774A Not-in-force EP1851440B1 (fr) 2005-02-25 2006-01-20 Pompe a vide holweck

Country Status (9)

Country Link
US (1) US20080260518A1 (fr)
EP (1) EP1851440B1 (fr)
JP (1) JP4996486B2 (fr)
KR (1) KR20070103759A (fr)
CN (1) CN100564886C (fr)
AT (1) ATE425365T1 (fr)
CA (1) CA2598866A1 (fr)
DE (2) DE102005008643A1 (fr)
WO (1) WO2006089823A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20100070A1 (it) * 2010-02-01 2011-08-02 Varian Spa Pompa da vuoto, in particolare pompa da vuoto turbomolecolare.
DE102011112691A1 (de) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2757266B1 (fr) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Pompe à vide rotative
JP6142630B2 (ja) * 2013-03-29 2017-06-07 株式会社島津製作所 真空ポンプ
DE202013010195U1 (de) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe
JP6390098B2 (ja) 2013-12-25 2018-09-19 株式会社島津製作所 真空ポンプ
JP6386737B2 (ja) * 2014-02-04 2018-09-05 エドワーズ株式会社 真空ポンプ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1544318A (en) * 1923-09-12 1925-06-30 Westinghouse Electric & Mfg Co Turbine-blade lashing
US3258245A (en) * 1964-07-20 1966-06-28 Gen Electric Blade stiffening means
NL8602052A (nl) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv Hoogvacuumpomp.
DE58907244D1 (de) * 1989-07-20 1994-04-21 Leybold Ag Reibungspumpe mit glockenförmigem Rotor.
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement

Also Published As

Publication number Publication date
DE502006003092D1 (de) 2009-04-23
DE102005008643A1 (de) 2006-08-31
CA2598866A1 (fr) 2006-08-31
ATE425365T1 (de) 2009-03-15
CN101128674A (zh) 2008-02-20
KR20070103759A (ko) 2007-10-24
CN100564886C (zh) 2009-12-02
JP2008531909A (ja) 2008-08-14
JP4996486B2 (ja) 2012-08-08
US20080260518A1 (en) 2008-10-23
WO2006089823A1 (fr) 2006-08-31
EP1851440A1 (fr) 2007-11-07

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