JP2008531909A - ホルウェック型真空ポンプ - Google Patents
ホルウェック型真空ポンプ Download PDFInfo
- Publication number
- JP2008531909A JP2008531909A JP2007556578A JP2007556578A JP2008531909A JP 2008531909 A JP2008531909 A JP 2008531909A JP 2007556578 A JP2007556578 A JP 2007556578A JP 2007556578 A JP2007556578 A JP 2007556578A JP 2008531909 A JP2008531909 A JP 2008531909A
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- vacuum pump
- holweck
- retaining ring
- blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/40—Organic materials
- F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/603—Composites; e.g. fibre-reinforced
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Rotary Pumps (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Reciprocating Pumps (AREA)
- Valves And Accessory Devices For Braking Systems (AREA)
Abstract
Description
Claims (7)
- ホルウェック型真空ポンプ(10)であって、
ポンプロータ(16)を有していて、該ポンプロータは回転する管(24)と、該ロータ管(24)を保持する保持リング(30)を備えた入口側のロータ羽根車(28)とを備えており、
前記ロータ管(24)の半径方向内側および外側にそれぞれ1つのポンプステータ(20,22)を有していて、該ポンプステータは螺旋状のねじ山溝(21,23)を有している形式のものにおいて、
羽根車(28)の羽根(18)がロータ側の段部(40)を有しいて、該段部に保持リング(30)が支持されていることを特徴とする、ホルウェック型真空ポンプ。 - 保持リング(30)が軸方向で、羽根(18)の段のない領域に突入しない、請求項1記載のホルウェック型真空ポンプ。
- ロータ管(24)が、保持リング(30)の軸方向の長さ全体をカバーしている、請求項2記載のホルウェック型真空ポンプ。
- 羽根車(28′)の羽根(58)が、入口側でも段部(62)を有しており、該段部に支持リング(60)が支持されている、請求項1から3までのいずれか1項記載のホルウェック型真空ポンプ。
- 羽根(18,58)の軸方向の長さが段部(40,62)から半径方向内側に向かって減少している、請求項1から4までのいずれか1項記載のホルウェック型真空ポンプ。
- ロータ管(24)が繊維強化材料、特にCFKから成っている、請求項1から5までのいずれか1項記載のホルウェック型真空ポンプ。
- ステータねじ山溝(21,23)が入口から出口に向かって半径方向で減径している、請求項1から6までのいずれか1項記載のホルウェック型真空ポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005008643.8 | 2005-02-25 | ||
DE102005008643A DE102005008643A1 (de) | 2005-02-25 | 2005-02-25 | Holweck-Vakuumpumpe |
PCT/EP2006/050325 WO2006089823A1 (de) | 2005-02-25 | 2006-01-20 | Holweck-vakuumpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008531909A true JP2008531909A (ja) | 2008-08-14 |
JP4996486B2 JP4996486B2 (ja) | 2012-08-08 |
Family
ID=36216200
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007556578A Expired - Fee Related JP4996486B2 (ja) | 2005-02-25 | 2006-01-20 | ホルウェック型真空ポンプ |
Country Status (9)
Country | Link |
---|---|
US (1) | US20080260518A1 (ja) |
EP (1) | EP1851440B1 (ja) |
JP (1) | JP4996486B2 (ja) |
KR (1) | KR20070103759A (ja) |
CN (1) | CN100564886C (ja) |
AT (1) | ATE425365T1 (ja) |
CA (1) | CA2598866A1 (ja) |
DE (2) | DE102005008643A1 (ja) |
WO (1) | WO2006089823A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014196724A (ja) * | 2013-03-29 | 2014-10-16 | 株式会社島津製作所 | 真空ポンプ |
JP2015124616A (ja) * | 2013-12-25 | 2015-07-06 | 株式会社島津製作所 | 真空ポンプ |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITTO20100070A1 (it) * | 2010-02-01 | 2011-08-02 | Varian Spa | Pompa da vuoto, in particolare pompa da vuoto turbomolecolare. |
DE102011112691A1 (de) * | 2011-09-05 | 2013-03-07 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP2757266B1 (en) * | 2013-01-22 | 2016-03-16 | Agilent Technologies, Inc. | Rotary vacuum pump |
DE202013010195U1 (de) * | 2013-11-12 | 2015-02-18 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe |
JP6386737B2 (ja) * | 2014-02-04 | 2018-09-05 | エドワーズ株式会社 | 真空ポンプ |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11351190A (ja) * | 1998-05-20 | 1999-12-21 | Boc Group Plc:The | 真空ポンプ |
WO2004055375A1 (en) * | 2002-12-17 | 2004-07-01 | The Boc Group Plc | Vacuum pumping arrangement |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1544318A (en) * | 1923-09-12 | 1925-06-30 | Westinghouse Electric & Mfg Co | Turbine-blade lashing |
US3258245A (en) * | 1964-07-20 | 1966-06-28 | Gen Electric | Blade stiffening means |
NL8602052A (nl) * | 1986-08-12 | 1988-03-01 | Ultra Centrifuge Nederland Nv | Hoogvacuumpomp. |
DE58907244D1 (de) * | 1989-07-20 | 1994-04-21 | Leybold Ag | Reibungspumpe mit glockenförmigem Rotor. |
JPH03222895A (ja) * | 1990-01-26 | 1991-10-01 | Hitachi Koki Co Ltd | ねじ溝真空ポンプ |
DE19915307A1 (de) * | 1999-04-03 | 2000-10-05 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit |
DE19937392A1 (de) * | 1999-08-07 | 2001-02-08 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit pumpaktiven Elementen |
GB9927493D0 (en) * | 1999-11-19 | 2000-01-19 | Boc Group Plc | Improved vacuum pumps |
-
2005
- 2005-02-25 DE DE102005008643A patent/DE102005008643A1/de not_active Withdrawn
-
2006
- 2006-01-20 DE DE502006003092T patent/DE502006003092D1/de active Active
- 2006-01-20 CN CNB2006800058256A patent/CN100564886C/zh not_active Expired - Fee Related
- 2006-01-20 CA CA002598866A patent/CA2598866A1/en not_active Abandoned
- 2006-01-20 JP JP2007556578A patent/JP4996486B2/ja not_active Expired - Fee Related
- 2006-01-20 US US11/884,896 patent/US20080260518A1/en not_active Abandoned
- 2006-01-20 KR KR1020077018537A patent/KR20070103759A/ko not_active Application Discontinuation
- 2006-01-20 WO PCT/EP2006/050325 patent/WO2006089823A1/de active Application Filing
- 2006-01-20 AT AT06707774T patent/ATE425365T1/de not_active IP Right Cessation
- 2006-01-20 EP EP06707774A patent/EP1851440B1/de not_active Not-in-force
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11351190A (ja) * | 1998-05-20 | 1999-12-21 | Boc Group Plc:The | 真空ポンプ |
WO2004055375A1 (en) * | 2002-12-17 | 2004-07-01 | The Boc Group Plc | Vacuum pumping arrangement |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014196724A (ja) * | 2013-03-29 | 2014-10-16 | 株式会社島津製作所 | 真空ポンプ |
JP2015124616A (ja) * | 2013-12-25 | 2015-07-06 | 株式会社島津製作所 | 真空ポンプ |
US10132329B2 (en) | 2013-12-25 | 2018-11-20 | Shimadzu Corporation | Vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
ATE425365T1 (de) | 2009-03-15 |
KR20070103759A (ko) | 2007-10-24 |
US20080260518A1 (en) | 2008-10-23 |
DE102005008643A1 (de) | 2006-08-31 |
JP4996486B2 (ja) | 2012-08-08 |
WO2006089823A1 (de) | 2006-08-31 |
DE502006003092D1 (de) | 2009-04-23 |
EP1851440A1 (de) | 2007-11-07 |
CN101128674A (zh) | 2008-02-20 |
EP1851440B1 (de) | 2009-03-11 |
CN100564886C (zh) | 2009-12-02 |
CA2598866A1 (en) | 2006-08-31 |
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