US20080260518A1 - Holweck Vacuum Pump - Google Patents

Holweck Vacuum Pump Download PDF

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Publication number
US20080260518A1
US20080260518A1 US11/884,896 US88489606A US2008260518A1 US 20080260518 A1 US20080260518 A1 US 20080260518A1 US 88489606 A US88489606 A US 88489606A US 2008260518 A1 US2008260518 A1 US 2008260518A1
Authority
US
United States
Prior art keywords
blades
rotor
supporting ring
vacuum pump
holweck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/884,896
Other languages
English (en)
Inventor
Roland Blumenthal
Ralf Adamietz
Dirk Kalisch
Heinz Englander
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Assigned to OERLIKON LEYBOLD VACUUM GMBH reassignment OERLIKON LEYBOLD VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ADAMIETZ, RALF, BLUMENTHAL, ROLAND, ENGLANDER, HEINZ, KALISCH, DIRK
Publication of US20080260518A1 publication Critical patent/US20080260518A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Definitions

  • the invention relates to a Holweck vacuum pump comprising a pump rotor and a rotating tube.
  • a two-pass Holweck vacuum pump which comprises a pump stator radially inside and outside the rotor tube, said pump stator being respectively defined by a helical thread groove.
  • a rotor blade disk is provided on the inlet side, said rotor blade disk comprising a supporting ring which supports the rotor tube.
  • the axial length of the supporting ring is larger than that of the blades of the blade disk such that the supporting ring penetrates the blades, i.e. radially separates the blades into two sections.
  • a portion of the supporting ring axially extends from the plane of the rotor blade.
  • the rotor tube is fastened by being fitted to the outside of the supporting ring, for example. All forces acting between the supporting ring and the rotor tube are directly transmitted to the blades of the blade disk. Tests have revealed that in particular the radial and tangential forces produced by the centrifugal forces exert a considerable mechanical stress on the blades and in particular the supporting ring, and reduce their service life.
  • the blades of the blade disk comprise rotor-side proximal shoulders which support the supporting ring.
  • the supporting ring no longer axially projects beyond the blades but is radially inwardly supported by a corresponding stepped shoulder defined in the blades.
  • the blades thus have a larger axial length radially inside the supporting ring than radially outside the supporting ring.
  • the shoulders of the blades are configured such that the supporting ring bears on the radial outside of the stepped shoulder.
  • the blade structure supporting the supporting ring is considerably strengthened such that the forces acting between the blades and the supporting ring result in lower local peak stresses acting on the blades.
  • the rotor tube is pushed from radially outside onto the portion of the supporting ring supported by the blades.
  • the rotor tube which is preferably made from a lightweight material highly resistant to tensile strength, embraces the supporting ring such that the rotor tube is supported to withstand the high centrifugal forces occurring at the high rotational speed of several 10,000 rpm. This allows the tangential forces generated in the supporting ring to be kept at such a low level that the supporting ring is capable of withstanding correspondingly high rotational speeds.
  • the supporting ring does not axially extend into the non-stepped region of the blades.
  • the axial length of the supporting ring approximately corresponds to the axial length of the axial steps of the blades.
  • the major portion of the blades is not penetrated by the supporting ring over their overall radial length.
  • the limitation of the axial extension of the supporting ring to the axial length of the shoulder ensures that the overall axial length of the supporting ring is supported on the outside by the rotor tube to withstand high centrifugal forces.
  • the blades of the blade disk comprise intake-side (distal) stepped shoulders which support a backing ring.
  • the stepped shoulders supporting the backing ring are thus axially arranged opposite the stepped shoulders of the blades supporting the supporting ring, while the axially intermediate region does not comprise any step and supporting ring.
  • the axial length of the blades radially decreases from the shoulder towards the inside.
  • the contour of the adjacent inner pump stator is correspondingly adapted to this.
  • the axial length of the blades radially decreasing towards the inside allows the inner geometry to be kept at as optimum a level as possible in terms of flow when the blades are sufficiently rigid. This allows higher intakes capacities to be realized.
  • the rotor tube is made from a fiber-reinforced material.
  • non-metallic materials are suitable, for example a carbon fiber-reinforced plastic material.
  • Fiber-reinforced non-metallic materials are relatively lightweight while offering a high mechanical rigidity, in particular a high tensile strength.
  • the rotor tube made from a fiber-reinforced material can thus be rotated at high rotational speeds without its diameter increasing to a considerable extent. This fact is of great importance to the realization of small gaps between rotor and stator. Further, the high tensile strength ensures that the rotor tube is also capable of supporting the backing ring against destructive tangential forces.
  • the threads of the thread grooves that is their thread bottoms, radially taper from the inlet towards the outlet.
  • the depth and the cross section of the thread groove decrease from the inlet towards the outlet. Therefore the inlet cross section of the two Holweck stages or passes is relatively large such that the intake capacity of the Holweck stage is enhanced.
  • FIG. 1 shows a longitudinal section of a Holweck vacuum pump comprising a blade disk provided with a supporting ring, and
  • FIG. 2 shows a longitudinal section of a Holweck vacuum pump comprising a blade disk provided with a supporting ring and a backing ring.
  • FIGS. 1 and 2 show a Holweck vacuum pump 10 , 50 comprising two parallel Holweck pump stages 12 , 14 .
  • the two Holweck vacuum pumps 10 , 50 comprise a respective rotor blade disk 28 , 28 ′ having a respective plurality of blades 18 , 58 .
  • the two Holweck pump stages 12 , 14 are essentially defined by a radially outer pump stator 20 , a radially inner pump stator 22 and a rotating rotor tube 24 arranged between the two stators 20 , 22 .
  • Both the inner and the outer pump stator 20 , 22 comprise a helical thread groove 21 , 23 whose respective groove bottom radially tapers from the outlet.
  • the pump rotor 16 essentially comprises a shaft 26 supported by roller bearings and/or magnetic bearings, a hub 27 , the blades 18 , a supporting ring 30 and the rotor tube 24 .
  • the pump rotor 56 of the vacuum pump 50 shown in FIG. 2 further comprises a second backing ring 60 .
  • the hub 27 , the blades 18 and the supporting ring 30 and possibly the supporting ring 60 are formed in one piece and are made from aluminum, but may also be manufactured as individual components and then be assembled. In particular the supporting ring 60 may be manufactured as a separate component and then be attached to the blades 58 .
  • the rotor tube 24 is made from a fiber-reinforced material, for example a carbon fiber-reinforced plastic material.
  • the blades 18 , 58 comprise a stepped shoulder 40 which supports the supporting ring 30 .
  • the axial shoulder length approximately equals the axial length of the supporting ring 30 .
  • the supporting ring 30 does not axially extend into the blade 18 such that the radial spaces between the blades 18 outside the shoulders 40 are radially continuous.
  • the supporting ring 30 is circular cylindrical and supports the rotor tube 24 which is clamped or pressed to the supporting ring 30 .
  • the axial length of the blades 18 radially decreases from the shoulder 40 towards the inside. However, the axial length of the blades 18 near the hub exceeds the axial length of the blades 18 radially outside the shoulders 40 and/or the supporting ring 30 .
  • the blades 58 comprise a second shoulder 62 on the inlet side, which supports the backing ring 60 . In the inlet-side region, too, the axial length of the blades 58 continuously decreases towards the hub 27 .
  • the supporting ring 30 is supported in the best manner possible in the region in which it supports the rotor tube 24 . Since this allows the supporting ring 30 not to penetrate the blades 18 in the inlet-side region, the application of forces transmitted between the rotor tube 24 , the supporting ring 30 and the shoulders 40 is considerably reduced. Further, the generation of tangential forces in the supporting ring 30 is considerably reduced since the rotor tube 24 radially supports the supporting ring 30 over its overall axial length against the centrifugal forces.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Reciprocating Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Rotary Pumps (AREA)
US11/884,896 2005-02-25 2006-01-20 Holweck Vacuum Pump Abandoned US20080260518A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005008643.8 2005-02-25
DE102005008643A DE102005008643A1 (de) 2005-02-25 2005-02-25 Holweck-Vakuumpumpe
PCT/EP2006/050325 WO2006089823A1 (fr) 2005-02-25 2006-01-20 Pompe a vide holweck

Publications (1)

Publication Number Publication Date
US20080260518A1 true US20080260518A1 (en) 2008-10-23

Family

ID=36216200

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/884,896 Abandoned US20080260518A1 (en) 2005-02-25 2006-01-20 Holweck Vacuum Pump

Country Status (9)

Country Link
US (1) US20080260518A1 (fr)
EP (1) EP1851440B1 (fr)
JP (1) JP4996486B2 (fr)
KR (1) KR20070103759A (fr)
CN (1) CN100564886C (fr)
AT (1) ATE425365T1 (fr)
CA (1) CA2598866A1 (fr)
DE (2) DE102005008643A1 (fr)
WO (1) WO2006089823A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130045094A1 (en) * 2010-02-01 2013-02-21 Agilent Technologies Italia S.P.A. High-vacuum pump
US20140205432A1 (en) * 2013-01-22 2014-07-24 Agilent Technologies, Inc. Rotary vacuum pump
JP2015124616A (ja) * 2013-12-25 2015-07-06 株式会社島津製作所 真空ポンプ
US20170002832A1 (en) * 2014-02-04 2017-01-05 Edwards Japan Limited Vacuum pump

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011112691A1 (de) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6142630B2 (ja) * 2013-03-29 2017-06-07 株式会社島津製作所 真空ポンプ
DE202013010195U1 (de) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1544318A (en) * 1923-09-12 1925-06-30 Westinghouse Electric & Mfg Co Turbine-blade lashing
US3258245A (en) * 1964-07-20 1966-06-28 Gen Electric Blade stiffening means
US5154572A (en) * 1990-01-26 1992-10-13 Hitachi Koki Company Limited Vacuum pump with helically threaded cylinders
US5165872A (en) * 1989-07-20 1992-11-24 Leybold Aktiengesellschaft Gas friction pump having a bell-shaped rotor
US6599084B1 (en) * 1999-04-03 2003-07-29 Leybold Vakuum Gmbh Rotor fixture for a friction vacuum pump
US20060140795A1 (en) * 2002-12-17 2006-06-29 Schofield Nigel P Vacuum pumping arrangement

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8602052A (nl) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv Hoogvacuumpomp.
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1544318A (en) * 1923-09-12 1925-06-30 Westinghouse Electric & Mfg Co Turbine-blade lashing
US3258245A (en) * 1964-07-20 1966-06-28 Gen Electric Blade stiffening means
US5165872A (en) * 1989-07-20 1992-11-24 Leybold Aktiengesellschaft Gas friction pump having a bell-shaped rotor
US5154572A (en) * 1990-01-26 1992-10-13 Hitachi Koki Company Limited Vacuum pump with helically threaded cylinders
US6599084B1 (en) * 1999-04-03 2003-07-29 Leybold Vakuum Gmbh Rotor fixture for a friction vacuum pump
US20060140795A1 (en) * 2002-12-17 2006-06-29 Schofield Nigel P Vacuum pumping arrangement

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130045094A1 (en) * 2010-02-01 2013-02-21 Agilent Technologies Italia S.P.A. High-vacuum pump
US10968915B2 (en) * 2010-02-01 2021-04-06 Agilent Technologies, Inc. High-vacuum pump
US20140205432A1 (en) * 2013-01-22 2014-07-24 Agilent Technologies, Inc. Rotary vacuum pump
US9670931B2 (en) * 2013-01-22 2017-06-06 Agilent Technologies Inc. Rotary vacuum pump
JP2015124616A (ja) * 2013-12-25 2015-07-06 株式会社島津製作所 真空ポンプ
US10132329B2 (en) 2013-12-25 2018-11-20 Shimadzu Corporation Vacuum pump
US20170002832A1 (en) * 2014-02-04 2017-01-05 Edwards Japan Limited Vacuum pump
US11009040B2 (en) * 2014-02-04 2021-05-18 Edwards Japan Limited Vacuum pump

Also Published As

Publication number Publication date
EP1851440A1 (fr) 2007-11-07
DE502006003092D1 (de) 2009-04-23
DE102005008643A1 (de) 2006-08-31
EP1851440B1 (fr) 2009-03-11
CN100564886C (zh) 2009-12-02
WO2006089823A1 (fr) 2006-08-31
ATE425365T1 (de) 2009-03-15
CN101128674A (zh) 2008-02-20
JP2008531909A (ja) 2008-08-14
CA2598866A1 (fr) 2006-08-31
JP4996486B2 (ja) 2012-08-08
KR20070103759A (ko) 2007-10-24

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Legal Events

Date Code Title Description
AS Assignment

Owner name: OERLIKON LEYBOLD VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BLUMENTHAL, ROLAND;ADAMIETZ, RALF;KALISCH, DIRK;AND OTHERS;REEL/FRAME:019787/0447

Effective date: 20070813

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION