CN100564886C - 霍尔威克真空泵 - Google Patents

霍尔威克真空泵 Download PDF

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Publication number
CN100564886C
CN100564886C CNB2006800058256A CN200680005825A CN100564886C CN 100564886 C CN100564886 C CN 100564886C CN B2006800058256 A CNB2006800058256 A CN B2006800058256A CN 200680005825 A CN200680005825 A CN 200680005825A CN 100564886 C CN100564886 C CN 100564886C
Authority
CN
China
Prior art keywords
rotor
blade
support ring
vacuum pump
convex shoulder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2006800058256A
Other languages
English (en)
Chinese (zh)
Other versions
CN101128674A (zh
Inventor
罗兰·布卢门塔尔
拉尔夫·阿达米茨
迪尔克·卡利施
海因茨·恩伦德尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of CN101128674A publication Critical patent/CN101128674A/zh
Application granted granted Critical
Publication of CN100564886C publication Critical patent/CN100564886C/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Reciprocating Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Rotary Pumps (AREA)
CNB2006800058256A 2005-02-25 2006-01-20 霍尔威克真空泵 Expired - Fee Related CN100564886C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005008643.8 2005-02-25
DE102005008643A DE102005008643A1 (de) 2005-02-25 2005-02-25 Holweck-Vakuumpumpe

Publications (2)

Publication Number Publication Date
CN101128674A CN101128674A (zh) 2008-02-20
CN100564886C true CN100564886C (zh) 2009-12-02

Family

ID=36216200

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2006800058256A Expired - Fee Related CN100564886C (zh) 2005-02-25 2006-01-20 霍尔威克真空泵

Country Status (9)

Country Link
US (1) US20080260518A1 (fr)
EP (1) EP1851440B1 (fr)
JP (1) JP4996486B2 (fr)
KR (1) KR20070103759A (fr)
CN (1) CN100564886C (fr)
AT (1) ATE425365T1 (fr)
CA (1) CA2598866A1 (fr)
DE (2) DE102005008643A1 (fr)
WO (1) WO2006089823A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20100070A1 (it) * 2010-02-01 2011-08-02 Varian Spa Pompa da vuoto, in particolare pompa da vuoto turbomolecolare.
DE102011112691A1 (de) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2757266B1 (fr) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Pompe à vide rotative
JP6142630B2 (ja) * 2013-03-29 2017-06-07 株式会社島津製作所 真空ポンプ
DE202013010195U1 (de) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe
JP6390098B2 (ja) * 2013-12-25 2018-09-19 株式会社島津製作所 真空ポンプ
JP6386737B2 (ja) * 2014-02-04 2018-09-05 エドワーズ株式会社 真空ポンプ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1544318A (en) * 1923-09-12 1925-06-30 Westinghouse Electric & Mfg Co Turbine-blade lashing
US3258245A (en) * 1964-07-20 1966-06-28 Gen Electric Blade stiffening means
NL8602052A (nl) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv Hoogvacuumpomp.
EP0408791B1 (fr) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Pompe à effet visqueux à rotor en forme de cloche
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement

Also Published As

Publication number Publication date
EP1851440A1 (fr) 2007-11-07
DE502006003092D1 (de) 2009-04-23
DE102005008643A1 (de) 2006-08-31
EP1851440B1 (fr) 2009-03-11
US20080260518A1 (en) 2008-10-23
WO2006089823A1 (fr) 2006-08-31
ATE425365T1 (de) 2009-03-15
CN101128674A (zh) 2008-02-20
JP2008531909A (ja) 2008-08-14
CA2598866A1 (fr) 2006-08-31
JP4996486B2 (ja) 2012-08-08
KR20070103759A (ko) 2007-10-24

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SE01 Entry into force of request for substantive examination
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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20091202

Termination date: 20160120

EXPY Termination of patent right or utility model