CN100564886C - Holweck vacuum pump - Google Patents

Holweck vacuum pump Download PDF

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Publication number
CN100564886C
CN100564886C CNB2006800058256A CN200680005825A CN100564886C CN 100564886 C CN100564886 C CN 100564886C CN B2006800058256 A CNB2006800058256 A CN B2006800058256A CN 200680005825 A CN200680005825 A CN 200680005825A CN 100564886 C CN100564886 C CN 100564886C
Authority
CN
China
Prior art keywords
rotor
blade
support ring
vacuum pump
convex shoulder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2006800058256A
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Chinese (zh)
Other versions
CN101128674A (en
Inventor
罗兰·布卢门塔尔
拉尔夫·阿达米茨
迪尔克·卡利施
海因茨·恩伦德尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of CN101128674A publication Critical patent/CN101128674A/en
Application granted granted Critical
Publication of CN100564886C publication Critical patent/CN100564886C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Reciprocating Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)

Abstract

The present invention relates to a kind of Holweck vacuum pump, it comprises pump rotor (16), pump stator (12,14) and impeller of rotor (28), pump rotor (16) has tube rotor (24), each pump stator (12,14) has spiral type thread groove (21,23) and is positioned at the radial outside and the radially inner side of tube rotor (24), and impeller of rotor (28) comprises the support ring (30) of support rotor pipe (24).The blade of impeller (18) has convex shoulder (40) on rotor-side, convex shoulder (40) supporting support ring (30).

Description

Holweck vacuum pump
Technical field
The present invention relates to a kind of Holweck (Holweck) vacuum pump, it comprises the pump rotor that has tube rotor.
Background technique
From WO 2004/055375 A1 round trip Holweck vacuum pump as can be known, it is included in the pump stator of tube rotor radially inner side and radial outside, and described pump stator is made of the spiral type thread groove respectively.In order to improve pump performance, impeller of rotor is arranged on the inlet side, and described impeller of rotor comprises the support ring of support rotor pipe.The axial length of support ring is bigger than the blade axial length of impeller, makes support ring penetrate blade, that is, and diametrically with the blade separated into two parts.The part of support ring is extended in the axial direction from the plane of rotor blade.For example, tube rotor is fastened on the bracketed part of support ring by installing to the support ring outside.All power between support ring and the tube rotor of acting on directly are sent to the blade of impeller.Test shows that especially radial force and the tangential force that is produced by centrifugal force applies sizable mechanical stress on the blade---especially on support ring---, and reduced their working life.
Summary of the invention
The purpose of this invention is to provide a kind of round trip Holweck vacuum pump, it has improved the working life of impeller.
According to the present invention, reached this purpose by a kind of Holweck vacuum pump.Described Holweck vacuum pump comprises: pump rotor, it has tube rotor and inlet side impeller of rotor, described impeller of rotor is provided with the support ring that supports described tube rotor, and pump stator, it is separately positioned on the radially inner side of described tube rotor and radial outside and is provided with the spiral type thread groove, it is characterized in that the blade of described impeller comprises the rotor-side convex shoulder, described convex shoulder supports described support ring.
In Holweck vacuum pump according to the present invention, the blade of impeller comprises the nearside convex shoulder of rotor-side, convex shoulder supported ring.Support ring is outstanding no longer vertically crosses blade, but corresponding step-like convex shoulder supports towards radially inner side in the blade by being limited to.Thereby, blade at the axial length of support ring radially inner side greater than axial length at the support ring radial outside.The convex shoulder of blade is configured such that support ring is bearing on the radial outside of step-like convex shoulder.Thereby support ring is supported by the blade of impeller on whole axial length basically.The blade structure of supported ring is strengthened significantly, makes the power between blade and the support ring of acting on cause the less localized peak stress that acts on the blade.Tube rotor is pulled on the part by the blade support of support ring from radial outside.Preferably the tube rotor of being made by the lightweight material of high-tensile surrounds support ring, makes tube rotor supported bearing 10, the high centrifugal force that produces during the high rotating speed of 000rpm.This tangential force that allows to result from support ring remains on so low level, makes support ring can bear corresponding high rotating speed.
Preferably, support ring does not extend to the non-step-like zone of blade vertically.The axial length of support ring is similar to the axial length corresponding to the axial step of blade.Support ring does not penetrate the major part of blade on their whole radial lengths.Thereby the power that has guaranteed to act between tube rotor and the support ring only directly affacts on the blade near the blade convex shoulder, rather than affacts on the whole axial length of blade.Guarantee that by the axial length that extending axially of support ring is restricted to convex shoulder support ring is supported to bear high centrifugal force by tube rotor in the outside on its whole axial length.
According to preferred implementation, the blade of impeller comprises the step-like convex shoulder in suction side (distally), its supporting bead.Be arranged to step-like convex shoulder on thereby the step-like convex shoulder of supporting bead is axial, and axially zone line does not comprise any step and support ring with respect to the blade of supported ring.When tube rotor clipped to the support ring outside, corresponding packing ring can compensate nipped tube rotor and be applied to stress uneven on the blade.By this way, packing ring improves the well-balanced property of the power that affacts blade.
Preferably, the axial length of blade reduces towards radially inner side from convex shoulder.The profile of the internal pump stator that closes on correspondingly is suitable for this shape.The blade that axial length reduces towards radially inner side when blade hardness is enough, allows interior shape to remain on optimal level aspect flow as far as possible.This allows to realize higher pump energy-absorbing power.
According to preferred implementation, tube rotor is made by fibre reinforced materials.Nonmetallic material are especially suitable, for example, and the cfrp material.The fiber reinforcement nonmetallic material are lighter relatively, and high mechanical stability, especially high tensile strength are provided again simultaneously.Therefore the tube rotor of being made by fibre reinforced materials can high speed rotating, and its diameter can not increase significantly.This situation is to realizing that the little gap between rotor and the stator is very important.In addition, high-tensile guarantees that tube rotor also can overcome destructive tangential force supporting bead.
Preferably, the screw thread of thread groove, just their thread bottom is tapered towards outlet diametrically from inlet.Thereby the degree of depth of thread groove and cross section reduce towards outlet from inlet.Therefore, the entrance cross-section of two Holweck pump stages or two Holweck pump journeys is quite big, makes the pump energy-absorbing power of Holweck pump stage improve.
Description of drawings
Describe two kinds of mode of executions of the present invention with reference to the accompanying drawings in detail, among the figure:
Fig. 1 illustrates the sectional arrangement drawing of the Holweck vacuum pump that comprises the impeller that is provided with support ring, and
Fig. 2 illustrates the sectional arrangement drawing that the Hall that comprises the impeller that is provided with support ring and packing ring becomes the gram vacuum pump.
Embodiment
Fig. 1 and 2 illustrates the Holweck vacuum pump 10,50 that comprises two parallel Holweck pump stages 12,14 respectively.At inlet side, two Holweck vacuum pumps 10,50 comprise impeller of rotor 28,28 ' respectively, and impeller of rotor 28,28 ' has a plurality of blades 18,58 respectively.
Two Holweck pump stages 12,14 are made of radially outer pump stator 20, inner radial pump stator 22 and the tube rotor 24 that is arranged between two stators 20,22 respectively basically.Inside and outside pump stator 20,22 comprises spiral type thread groove 21,23 respectively, and the groove bottom of spiral type thread groove 21,23 is tapered diametrically towards outlet respectively.
Pump rotor 16 consists essentially of axle 26, hub 27, blade 18, support ring 30 and tube rotor 24, and axle 26 is supported by rolling bearing and/or magnetic bearing.The pump rotor 56 of vacuum pump 50 shown in Figure 2 also comprises second packing ring 60.Hub 27, blade 18 and support ring 30 and possible packing ring 60 form mutually, and made of aluminum, but also can make independent parts, are assembled together then.Especially, packing ring 60 can be made for independent parts, is attached to blade 58 then.Tube rotor 24 is made by fibre reinforced materials, is for example made by the cfrp material.
On rotor-side, blade 18,58 comprises step-like convex shoulder 40, step-like convex shoulder 40 supported rings 30.Axially convex shoulder length approximates the axial length of support ring 30 greatly.Along the direction of pump intake, support ring 30 does not extend axially in the blade 18, makes that the radial space between the blade 18 in convex shoulder 40 outsides is continuous diametrically.Support ring 30 is columniform, and support rotor pipe 24, and tube rotor 24 is fitted on or is press fitted on the support ring 30 by folder.
The axial length of blade 18 reduces towards radially inner side from convex shoulder 40.Yet blade 18 surpasses blade 18 in the convex shoulder 40 and/or the axial length of support ring 30 radially outers near the axial length of hubs.
In Holweck vacuum pump shown in Figure 2 50, blade 58 comprises second convex shoulder, 62, the second convex shoulders, 62 supporting beads 60 on inlet side.Near inlet, the axial length of blade 58 also reduces continuously towards hub 27.
By at blade 18 places convex shoulder 40 being set, support ring 30 is may best mode being supported in the zone of its support rotor pipe 24.Because this allows support ring 30 not penetrate near the blade 18 of oral-lateral, so the effect of the power of transmitting between tube rotor 24, support ring 30 and convex shoulder 40 reduces significantly.In addition, the tangential force that produces in the support ring 30 significantly reduces, and overcomes centrifugal force because support ring 30 footpath on its whole axial length is upwards supported by tube rotor 24.

Claims (8)

1. a Holweck vacuum pump (10) comprising:
Pump rotor (16), it has tube rotor (24) and inlet side impeller of rotor (28), and described impeller of rotor (28) is provided with the support ring (30) that supports described tube rotor (24), and
Pump stator (20,22), it is separately positioned on the radially inner side of described tube rotor (24) and radial outside and is provided with spiral type thread groove (21,23),
It is characterized in that the blade (18) of described impeller (28) comprises rotor-side convex shoulder (40), described convex shoulder (40) supports described support ring (30).
2. Holweck vacuum pump as claimed in claim 1 (10) is characterized in that, described support ring (30) does not extend to the non-step-like zone of described blade (18) vertically.
3. Holweck vacuum pump as claimed in claim 2 (10) is characterized in that, described tube rotor (24) covers the whole axial length of described support ring (30).
4. as each described Holweck vacuum pump (50) in the claim 1 to 3, it is characterized in that the described blade (58) of described impeller (28 ') also includes oral-lateral convex shoulder (62), described convex shoulder (62) supporting bead (60).
5. Holweck vacuum pump as claimed in claim 4 (10) is characterized in that, the axial length of described blade (18,58) reduces towards radially inner side from described convex shoulder (40,62) respectively.
6. as each described Holweck vacuum pump (10) in the claim 1 to 3, it is characterized in that described tube rotor (24) is made by fibre reinforced materials.
7. Holweck vacuum pump as claimed in claim 6 (10) is characterized in that, described fibre reinforced materials is the cfrp material.
8. as each described Holweck vacuum pump (10) in the claim 1 to 3, it is characterized in that described stator thread groove (21,23) radially is tapered towards outlet from inlet.
CNB2006800058256A 2005-02-25 2006-01-20 Holweck vacuum pump Expired - Fee Related CN100564886C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005008643A DE102005008643A1 (en) 2005-02-25 2005-02-25 Holweck vacuum pump has shoulders on rotor side of vanes of vane disc to support supporting ring
DE102005008643.8 2005-02-25

Publications (2)

Publication Number Publication Date
CN101128674A CN101128674A (en) 2008-02-20
CN100564886C true CN100564886C (en) 2009-12-02

Family

ID=36216200

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2006800058256A Expired - Fee Related CN100564886C (en) 2005-02-25 2006-01-20 Holweck vacuum pump

Country Status (9)

Country Link
US (1) US20080260518A1 (en)
EP (1) EP1851440B1 (en)
JP (1) JP4996486B2 (en)
KR (1) KR20070103759A (en)
CN (1) CN100564886C (en)
AT (1) ATE425365T1 (en)
CA (1) CA2598866A1 (en)
DE (2) DE102005008643A1 (en)
WO (1) WO2006089823A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20100070A1 (en) * 2010-02-01 2011-08-02 Varian Spa VACUUM PUMP, IN PARTICULAR TURBOMOLECULAR VACUUM PUMP.
DE102011112691A1 (en) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh vacuum pump
EP2757266B1 (en) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotary vacuum pump
JP6142630B2 (en) * 2013-03-29 2017-06-07 株式会社島津製作所 Vacuum pump
DE202013010195U1 (en) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vacuum pump rotor device and vacuum pump
JP6390098B2 (en) 2013-12-25 2018-09-19 株式会社島津製作所 Vacuum pump
JP6386737B2 (en) * 2014-02-04 2018-09-05 エドワーズ株式会社 Vacuum pump

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1544318A (en) * 1923-09-12 1925-06-30 Westinghouse Electric & Mfg Co Turbine-blade lashing
US3258245A (en) * 1964-07-20 1966-06-28 Gen Electric Blade stiffening means
NL8602052A (en) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv HIGH VACUUM PUMP.
DE58907244D1 (en) * 1989-07-20 1994-04-21 Leybold Ag Friction pump with bell-shaped rotor.
JPH03222895A (en) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd Thread-grooved vacuum pump
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE19915307A1 (en) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Turbomolecular friction vacuum pump, with annular groove in region of at least one endface of rotor
DE19937392A1 (en) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Friction vacuum pump with active pump elements
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement

Also Published As

Publication number Publication date
US20080260518A1 (en) 2008-10-23
CN101128674A (en) 2008-02-20
ATE425365T1 (en) 2009-03-15
JP4996486B2 (en) 2012-08-08
JP2008531909A (en) 2008-08-14
DE502006003092D1 (en) 2009-04-23
CA2598866A1 (en) 2006-08-31
EP1851440B1 (en) 2009-03-11
WO2006089823A1 (en) 2006-08-31
DE102005008643A1 (en) 2006-08-31
EP1851440A1 (en) 2007-11-07
KR20070103759A (en) 2007-10-24

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