WO2008027388B1 - Vacuum pumps with improved pumping channel cross sections - Google Patents

Vacuum pumps with improved pumping channel cross sections

Info

Publication number
WO2008027388B1
WO2008027388B1 PCT/US2007/018929 US2007018929W WO2008027388B1 WO 2008027388 B1 WO2008027388 B1 WO 2008027388B1 US 2007018929 W US2007018929 W US 2007018929W WO 2008027388 B1 WO2008027388 B1 WO 2008027388B1
Authority
WO
WIPO (PCT)
Prior art keywords
channel
vacuum pump
pump according
disk
rotation
Prior art date
Application number
PCT/US2007/018929
Other languages
French (fr)
Other versions
WO2008027388A2 (en
WO2008027388A3 (en
Inventor
Marsbed Hablanian
Original Assignee
Varian Spa
Marsbed Hablanian
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa, Marsbed Hablanian filed Critical Varian Spa
Priority to EP07837449A priority Critical patent/EP2069639A2/en
Priority to JP2009526681A priority patent/JP2010502875A/en
Publication of WO2008027388A2 publication Critical patent/WO2008027388A2/en
Publication of WO2008027388A3 publication Critical patent/WO2008027388A3/en
Publication of WO2008027388B1 publication Critical patent/WO2008027388B1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps

Abstract

A vacuum pump includes a housing having an inlet port and an exhaust port, at least one molecular drag stage within the housing, the molecular drag stage including a rotor in the form of a molecular drag disk and a stator that defines a tangential flow channel which opens onto a surface of the disk, the rotor having an axis of rotation, and a motor that rotates the rotor so that gas is pumped from the inlet port to the exhaust port. The channel has a cross-section in a plane that contains the axis of rotation which varies in dimension as a function of distance from the axis of rotation. The channel cross-section is selected to limit the tendency for backflow in viscous or partially viscous flow conditions.

Claims

AMENDED CLAIMS received by the International Bureau on 01 May 2008 (01.05.2008)
1. A vacuum pump comprising: a housing having an inlet port and an exhaust port; at least one molecular drag stage located within the housing and disposed between the inlet port and the exhaust port, the molecular drag stage including a rotor comprising a molecular drag disk and a stator, the stator defining a circular tangential flow channel which opens onto a surface of the disk and a baffle that blocks the channel at a circumferential location, the disk having an axis of rotation defining a radial direction and having a peripheral velocity, the channel having a dimension between the disk and the stator that increases with increasing radius in the radial direction according to local pumping effects of the peripheral velocity of the disk; and a motor to rotate the rotor of the molecular drag stage about the axis of rotation so that gas is pumped from the inlet port to the exhaust port.
2. The vacuum pump according to claim 1, wherein the dimension of the channel between the disk and the stator increases with increasing distance from the axis of rotation.
3. The vacuum pump according to claim 1, wherein the dimension of the channel between the disk and the stator increases linearly with increasing distance from the axis of rotation.
4. The vacuum pump according to claim 1, wherein the stator includes a circumferential divider that extends into the channel and defines inner and outer subchannels.
5. The vacuum pump according to claim 4, wherein the inner and outer subchannels have different axial dimensions.
6. The vacuum pump according to claim 1, wherein the dimension of the channel between the disk and the stator varies continuously in the radial direction.
7. The vacuum pump according to claim 1, wherein an outer periphery of the disk extends into the channel and wherein outer corners of the channel are beveled or rounded.
8. The vacuum pump according to claim 1 , wherein the channel has beveled or rounded corners.
9. The vacuum pump according to claim 1, wherein the stator includes two or more circumferential dividers that extend into the channel and each defining inner and outer subchannels, where the circumferential divider is spaced from the disk and does not fully isolate the inner and outer subchannels.
10. The vacuum pump according to claim 1, wherein an axial dimension of the channel between the disk and the stator is configured to produce in the channel a substantially uniform pressure gradient as a function of distance from the axis of rotation.
11. The vacuum pump according to claim 1, wherein the channel having a channel cross-section in a plane that contains the axis of rotation, which varies in a dimension as a function of distance from the axis of rotation, over at least part of the channel cross-section.
12. The vacuum pump according to claim 11, wherein the dimension of the channel cross-section increases with increasing distance from the axis of rotation.
13. The vacuum pump according to claim 11, wherein the dimension of the channel cross-section increases linearly with increasing distance from the axis of rotation.
14. The vacuum pump according to claim 11, wherein an outer periphery of the disk extends into the channel and wherein outer corners of the channel are beveled or rounded.
13
15. The vacuum pump according to claim 11, wherein the channel cross-section has exclusive beveled or rounded inner corners.
16. The vacuum pump according to claim 11, wherein the channel cross-section is configured to avoid a region of zero gas flow velocity in the channel.
17. The vacuum pump as in any one of the preceding claims, further comprising one or more additional vacuum pumping stages to define a multistage vacuum pump.
14
PCT/US2007/018929 2006-08-31 2007-08-29 Vacuum pumps with improved pumping channel cross sections WO2008027388A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP07837449A EP2069639A2 (en) 2006-08-31 2007-08-29 Vacuum pumps with improved pumping channel cross sections
JP2009526681A JP2010502875A (en) 2006-08-31 2007-08-29 Vacuum pump with improved pumping channel cross section

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/513,769 US20080056886A1 (en) 2006-08-31 2006-08-31 Vacuum pumps with improved pumping channel cross sections
US11/513,769 2006-08-31

Publications (3)

Publication Number Publication Date
WO2008027388A2 WO2008027388A2 (en) 2008-03-06
WO2008027388A3 WO2008027388A3 (en) 2008-04-17
WO2008027388B1 true WO2008027388B1 (en) 2008-06-26

Family

ID=39033904

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/018929 WO2008027388A2 (en) 2006-08-31 2007-08-29 Vacuum pumps with improved pumping channel cross sections

Country Status (4)

Country Link
US (1) US20080056886A1 (en)
EP (1) EP2069639A2 (en)
JP (1) JP2010502875A (en)
WO (1) WO2008027388A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007044945A1 (en) * 2007-09-20 2009-04-09 Pfeiffer Vacuum Gmbh vacuum pump
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
US10641282B2 (en) * 2016-12-28 2020-05-05 Nidec Corporation Fan device and vacuum cleaner including the same
US11519419B2 (en) * 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB332879A (en) * 1929-01-04 1930-07-31 Karl Manne Georg Siegbahn Improvements in or relating to rotary vacuum pumps
US3280752A (en) * 1963-10-31 1966-10-25 Siemen & Hinsch Gmbh Pumps
DE2738208B1 (en) * 1977-08-24 1978-05-11 Siemens Ag Side channel blower
JPS57171191U (en) * 1981-04-22 1982-10-28
JPS58222997A (en) * 1982-06-21 1983-12-24 Nippon Denso Co Ltd Pumping device
JPS61247893A (en) * 1985-04-26 1986-11-05 Hitachi Ltd Vacuum pump
US5221179A (en) * 1988-07-13 1993-06-22 Osaka Vacuum, Ltd. Vacuum pump
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
JP2757646B2 (en) * 1992-01-22 1998-05-25 株式会社デンソー Fuel pump
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
US5257916A (en) * 1992-11-27 1993-11-02 Walbro Corporation Regenerative fuel pump
JP3307019B2 (en) * 1992-12-08 2002-07-24 株式会社デンソー Regenerative pump
DE4314418A1 (en) * 1993-05-03 1994-11-10 Leybold Ag Friction vacuum pump with differently designed pump sections
IT1281025B1 (en) * 1995-11-10 1998-02-11 Varian Spa TURBOMOLECULAR PUMP.
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19622560A1 (en) * 1996-06-05 1997-12-11 Bosch Gmbh Robert Unit for delivering fuel from a reservoir to the internal combustion engine of a motor vehicle
DE19749404C1 (en) * 1997-11-07 1999-05-06 Mannesmann Vdo Ag Feed pump for motor vehicle fuel tank
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE10013908A1 (en) * 2000-03-21 2001-09-27 Mannesmann Vdo Ag Fuel or washing fluid supply pump for vehicle has angles of blades in their radial extend increasing proportionally from center point with decrease in spacing
US6607351B1 (en) * 2002-03-12 2003-08-19 Varian, Inc. Vacuum pumps with improved impeller configurations
ITTO20020370A1 (en) * 2002-05-06 2003-11-06 Varian Spa PUMPING STAGE FOR VACUUM PUMP.
US6974302B2 (en) * 2002-06-06 2005-12-13 Hitachi Unisia Automotive, Ltd. Turbine fuel pump

Also Published As

Publication number Publication date
WO2008027388A2 (en) 2008-03-06
EP2069639A2 (en) 2009-06-17
JP2010502875A (en) 2010-01-28
WO2008027388A3 (en) 2008-04-17
US20080056886A1 (en) 2008-03-06

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