EP1851440A1 - Holweck vacuum pump - Google Patents

Holweck vacuum pump

Info

Publication number
EP1851440A1
EP1851440A1 EP06707774A EP06707774A EP1851440A1 EP 1851440 A1 EP1851440 A1 EP 1851440A1 EP 06707774 A EP06707774 A EP 06707774A EP 06707774 A EP06707774 A EP 06707774A EP 1851440 A1 EP1851440 A1 EP 1851440A1
Authority
EP
European Patent Office
Prior art keywords
support ring
rotor
wings
vacuum pump
holweck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06707774A
Other languages
German (de)
French (fr)
Other versions
EP1851440B1 (en
Inventor
Dr. Roland Blumenthal
Ralf Adamietz
Dirk Kalisch
Heinz ENGLÄNDER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1851440A1 publication Critical patent/EP1851440A1/en
Application granted granted Critical
Publication of EP1851440B1 publication Critical patent/EP1851440B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Definitions

  • the invention relates to a Holweck vacuum pump with a pump rotor with a rotating tube.
  • a two-way Holweck vacuum pump which has radially inside and outside of the rotor tube, a pump stator, which is each formed by a helical thread groove.
  • a rotor blade is provided on the inlet side, which has a support ring which carries the rotor tube.
  • the axial length of the support ring is greater than that of the wing of the wing disc, so that the Supporting ring passes through the wings, ie the wings are divided radially into two sections. A portion of the support ring projects axially out of the plane of the rotor blades.
  • the rotor tube On the overhanging part of the support ring, the rotor tube is fixed, for example by the outside rests on the support ring. All forces acting between the support ring and the rotor tube are transmitted directly to the wings of the wing disc. Experiments have shown that in particular caused by the centrifugal forces radial and tangential forces represent a significant mechanical load on the wings and in particular for the support ring and reduce their life.
  • the object of the invention in contrast, is to create a two-fold Holweck vacuum pump with improved blade life.
  • the wings of the wing disc on the rotor side proximal paragraphs which carry the support ring.
  • the support ring does not overhang the wings axially, but is supported by a corresponding stepped shoulder in the wings radially inward.
  • the wings therefore have a greater axial length radially inward of the support ring than radially outwardly of the support ring.
  • the paragraphs of the wings are designed such that the support ring rests radially outward on the stepped shoulder. As a result, the support ring is supported substantially over its entire axial length by the wings of the wing disc.
  • the support structure bearing wing structure is considerably solidified, so that the forces acting between the wings and the support ring forces lead to lower punctual peak loads of the wings.
  • the rotor tube On the supported by the wing part of the support ring is pushed radially outward, the rotor tube.
  • the rotor tube which preferably consists of a very tensile and lightweight material, bandaged the support ring such that it against the at high speeds of several 10,000 rev / min high centrifugal forces is supported. As a result, the tangential forces generated in the support ring are kept so small that the support ring tolerates correspondingly high speeds.
  • the support ring does not protrude axially into the stepless region of the wings.
  • the axial length of the support ring corresponds approximately to the axial length of the wing axial stages.
  • the support ring does not penetrate most of the wings over their entire radial length. This ensures that between the rotor tube and the support ring forces acting directly only in the area of the wing paragraphs in the flights! are introduced, but not on the entire axial length of the wings.
  • By limiting the axial extent of the support ring to the axial length of the shoulder ensures that the support ring is supported in the entire axial length of the rotor tube on the outside against high centrifugal forces.
  • the wings of the wing disc on the suction side (distal) step-like shoulders which carry a support ring.
  • the support shoulders bearing step-paragraphs are thus axially opposite the support ring bearing step-paragraphs of the wings, while the axially intermediate area is formed step and tragringok.
  • the axial length of the wings decreases radially inward from the shoulder.
  • the contour of the adjacent inner pump stator is adjusted accordingly.
  • the geometry is maintained optimally in terms of flow, with sufficient vane stability.
  • higher overall pumping speeds can be achieved.
  • the rotor tube is made of a fiber-reinforced material.
  • non-metallic materials are suitable, such as CFRP.
  • Fiber-reinforced non-metallic materials are relatively light with high mechanical stability, especially at high tensile strength.
  • the existing of a fiber reinforced material rotor tube can therefore be rotated at high speeds, without increasing the diameter while significantly. This circumstance is of great importance for the realization of small gaps between rotor and stator.
  • the high tensile strength ensures that the rotor tube can also support the support ring against destructive tangential forces.
  • the threads of the thread grooves that is, their thread bottoms, taper radially from the inlet to the outlet. This reduces the depth and the cross section of the thread groove from the inlet to the outlet. As a result, the inlet cross-section of the two Holweck stages or trains is relatively large, so that the pumping speed of the Holweck stage is improved.
  • Figure 1 is a Holweck vacuum pump in longitudinal section with a
  • Figure 2 is a Holweck vacuum pump in longitudinal section with a
  • Wing disc with a support ring and a support ring.
  • FIGS. 1 and 2 each show a Holweck vacuum pump 10, 50, which has two parallel Holweck pump stages 12, 14. Both are facing the inlet Holweck vacuum pumps 10.50 each have a rotor blade 28,28 ', each having a plurality of wings 18,58.
  • the two Holweck pump stages 12, 14 are essentially formed by a respective radially outer pump stator 20, a radially inner pump stator 22, and a rotating rotor tube 24 between the two stators 20, 22.
  • Both the inner and the outer pump stator 20, 22 each have a helical thread groove 21, 23, the groove bottom of which tapers radially towards the outlet in each case.
  • the pump rotor 16 consists essentially of a shaft 26, which is supported by rolling bearings and / or magnetic bearings, a hub 27, the wings 18, a support ring 30, and the rotor tube 24.
  • the pump rotor 56 of the vacuum pump 50 of FIG .. 2 also has a second support ring 60.
  • the hub 27, the wings 18 and the support ring 30, and possibly the support ring 60 are integrally formed with each other and made of aluminum, but can also be manufactured individually and mounted together. In particular, the Stauerr ⁇ ng 60 can be made separately, and then mounted on the wings 58.
  • the rotor tube 24 is made of a fiber-reinforced material, such as CFRP.
  • the wings 18, 58 have a stepped shoulder 40 on the rotor side, on which the support ring 30 is supported.
  • the axial shoulder length is approximately equal to the axial length of the support ring 30.
  • the support ring 30 does not axially project toward the pump inlet into the vanes 18, so that the radial gaps between the vanes 18 are radially continuous outside of the shoulders 40.
  • the support ring 30 is circular cylindrical and carries the rotor tube 24 which is clamped or pressed onto the support ring 30.
  • the axial length of the wings 18 is reduced from the shoulder 40 radially inward. However, the axial length of the wings 18 near the hub is greater than the axial length of the wings 18 radially outward of the shoulders 40 and the support ring 30th
  • the wings 58 on the inlet side a second shoulder 62, which carries the support ring 60. Also in the inlet-side region, the axial length of the wings 58 to the hub 27 decreases steadily.
  • the support ring 30 is best supported in the area in which it carries the rotor tube 24.
  • the introduction of forces transmitted between the rotor tube 24, the support ring 30 and the shoulders 40 is significantly reduced.
  • the generation of tangential forces in the support ring 30 is significantly reduced, since the support ring 30 is supported over its entire axial length radially by the rotor tube 24 against the centrifugal forces.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Reciprocating Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Rotary Pumps (AREA)

Abstract

The Holweck pump (10) has a pump rotor (16) with rotating tube (24) and a rotor vane disc (28) on the inlet side with a support ring (30) supporting the rotor pipe. The vanes (18) of the vane disc have on the rotor side shoulders (40) to support the supporting ring. The rotor pipe can cover the entire axial length of the support ring. The axial length of the vanes reduces radially inwards from the shoulder. The rotor pipe is made from a fibre-reinforced material such as chlorofluorocarbon .

Description

Holweck- Vakuumpumpe Holweck vacuum pump
Die Erfindung bezieht sich auf eine Holweck-Vakuumpumpe mit einem Pumpenrotor mit einem rotierenden Rohr.The invention relates to a Holweck vacuum pump with a pump rotor with a rotating tube.
Aus WO 2004/055375 Al ist eine zweizügige Holweck-Vakuumpumpe bekannt, die radial innerhalb und außerhalb des Rotor-Rohres einen Pumpenstator aufweist, der jeweils von einer schraubenförmigen Gewindenut gebildet wird. Zur Verbesserung der Pumpeigenschaften ist einlassseitig eine Rotor-Flügelscheibe vorgesehen, die einen Tragring aufweist, der das Rotor-Rohr trägt. Die axiale Länge des Tragringes ist größer als die der Flügel der Flügelscheibe, so dass der Tragring die Flügel durchsetzt, d.h. die Flügel radial in zwei Abschnitte unterteilt. Ein Teil des Tragringes ragt axial aus der Ebene der Rotor-Flügel heraus. Auf dem überkragenden Teil des Tragringes ist das Rotor-Rohr befestigt, beispielsweise indem es außenseitig auf dem Tragring aufliegt. Alle Kräfte, die zwischen dem Tragring und dem Rotor-Rohr wirken, werden unmittelbar auf die Flügel der Flügelscheibe übertragen. Versuche haben ergeben, dass insbesondere die durch die Fliehkräfte verursachten radialen und tangentialen Kräfte eine erhebliche mechanische Belastung für die Flügel und insbesondere für den Tragring darstellen und ihre Lebensdauer reduzieren.From WO 2004/055375 Al a two-way Holweck vacuum pump is known, which has radially inside and outside of the rotor tube, a pump stator, which is each formed by a helical thread groove. To improve the pump properties, a rotor blade is provided on the inlet side, which has a support ring which carries the rotor tube. The axial length of the support ring is greater than that of the wing of the wing disc, so that the Supporting ring passes through the wings, ie the wings are divided radially into two sections. A portion of the support ring projects axially out of the plane of the rotor blades. On the overhanging part of the support ring, the rotor tube is fixed, for example by the outside rests on the support ring. All forces acting between the support ring and the rotor tube are transmitted directly to the wings of the wing disc. Experiments have shown that in particular caused by the centrifugal forces radial and tangential forces represent a significant mechanical load on the wings and in particular for the support ring and reduce their life.
Aufgabe der Erfindung ist es demgegenüber, eine zweizügige Holweck- Vakuumpumpe mit verbesserter Flügelscheiben-Lebensdauer zu schaffen.The object of the invention, in contrast, is to create a two-fold Holweck vacuum pump with improved blade life.
Diese Aufgabe wird erfindungsgemäß mit den Merkmalen des Patentanspruches 1 gelöst.This object is achieved by the features of claim 1.
Bei der erfindungsgemäßen Holweck-Vakuumpumpe weisen die Flügel der Flügelscheibe rotorseitige proximale Absätze auf, die den Tragring tragen. Der Tragring überkragt die Flügel nicht mehr axial, sondern ist durch einen entsprechenden stufenförmigen Absatz in den Flügeln nach radial innen abgestützt. Die Flügel weisen also radial innenseitig des Tragringes eine größere axiale Länge auf, als radial außenseitig des Tragringes. Die Absätze der Flügel sind derart ausgebildet, dass der Tragring radial außen auf dem Stufenabsatz aufliegt. Hierdurch wird der Tragring im Wesentlichen über seine gesamte axiale Länge durch die Flügel der Flügelscheibe abgestützt. Die den Tragring tragende Flügel-Struktur ist erheblich verfestigt, so dass die zwischen den Flügeln und dem Tragring wirkenden Kräfte zu geringeren punktuellen Spitzenbelastungen der Flügel führen. Auf den durch die Flügel abgestützten Teil des Tragringes ist von radial außen das Rotor-Rohr aufgeschoben. Das Rotor-Rohr, das bevorzugt aus einem sehr zugfesten und leichten Material besteht, bandagiert den Tragring derart, dass es gegen die bei hohen Drehzahlen von mehreren 10.000 U/min hohen Fliehkräfte abgestützt ist. Dadurch werden die in dem Tragring erzeugten Tangentialkräfte so klein gehalten, dass der Tragring entsprechend hohe Drehzahlen verträgt.In the Holweck vacuum pump according to the invention, the wings of the wing disc on the rotor side proximal paragraphs, which carry the support ring. The support ring does not overhang the wings axially, but is supported by a corresponding stepped shoulder in the wings radially inward. The wings therefore have a greater axial length radially inward of the support ring than radially outwardly of the support ring. The paragraphs of the wings are designed such that the support ring rests radially outward on the stepped shoulder. As a result, the support ring is supported substantially over its entire axial length by the wings of the wing disc. The support structure bearing wing structure is considerably solidified, so that the forces acting between the wings and the support ring forces lead to lower punctual peak loads of the wings. On the supported by the wing part of the support ring is pushed radially outward, the rotor tube. The rotor tube, which preferably consists of a very tensile and lightweight material, bandaged the support ring such that it against the at high speeds of several 10,000 rev / min high centrifugal forces is supported. As a result, the tangential forces generated in the support ring are kept so small that the support ring tolerates correspondingly high speeds.
Vorzugsweise ragt der Tragring axial nicht in den stufenfreien Bereich der Flügel hinein. Die axiale Länge des Tragringes entspricht ungefähr der axialen Länge der Flügel-Axialstufen, Der Tragring durchdringt den größten Teil der Flügel über ihre gesamte radiale Länge nicht. Hierdurch wird sichergestellt, dass zwischen dem Rotor-Rohr und dem Tragring wirkende Kräfte unmittelbar nur im Bereich der Flügel-Absätze in die Flüge! eingeleitet werden, nicht jedoch auf der gesamten axialen Länge der Flügel. Durch die Beschränkung der axialen Erstreckung des Tragringes auf die axiale Länge des Absatzes wird sichergestellt, dass der Tragring in seiner gesamten axialen Länge von dem Rotor-Rohr außenseitig gegen hohe Fliehkräfte abgestützt wird.Preferably, the support ring does not protrude axially into the stepless region of the wings. The axial length of the support ring corresponds approximately to the axial length of the wing axial stages. The support ring does not penetrate most of the wings over their entire radial length. This ensures that between the rotor tube and the support ring forces acting directly only in the area of the wing paragraphs in the flights! are introduced, but not on the entire axial length of the wings. By limiting the axial extent of the support ring to the axial length of the shoulder ensures that the support ring is supported in the entire axial length of the rotor tube on the outside against high centrifugal forces.
Gemäß einer bevorzugten Ausgestaltung weisen die Flügel der Flügelscheibe auch ansaugseitig (distal) stufenförmige Absätze auf, die einen Stützring tragen. Die den Stützring tragenden Stufen-Absätze liegen also axial gegenüber den den Tragring tragenden Stufen-Absätzen der Flügel, während der axial dazwischen liegende Bereich stufen- und tragringfrei ausgebildet ist. Wenn das Rotor-Rohr auf den Tragring außenseitig aufgespannt ist, kann mit einem entsprechenden Stützring eine durch das gespannte Rotor-Rohr auf die Flügel wirkende ungleichförmige Belastung ausgeglichen werden. Der Stützring verbessert auf diese Weise die Symmetrie der in die Flügel eingeleiteten Kräfte.According to a preferred embodiment, the wings of the wing disc on the suction side (distal) step-like shoulders, which carry a support ring. The support shoulders bearing step-paragraphs are thus axially opposite the support ring bearing step-paragraphs of the wings, while the axially intermediate area is formed step and tragringfrei. When the rotor tube is clamped on the outside of the support ring, a non-uniform load acting on the wings by the tensioned rotor tube can be compensated with a corresponding support ring. The support ring improves in this way the symmetry of the forces introduced into the wings.
Vorzugsweise verringert sich die Axiallänge der Flügel von dem Absatz nach radial innen. Die Kontur des angrenzenden inneren Pumpenstators ist entsprechend angepasst. Mit der sich nach radial innen verringernden Axiallänge der Flügel wird bei ausreichender Flügelstabilität die Geometrie innen strömungstechnisch möglichst optimal gehalten. Hierdurch lassen sich insgesamt höhere Saugvermögen realisieren. Gemäß einer bevorzugten Ausgestaltung besteht das Rotor-Rohr aus einem faserverstärkten Werkstoff. Hierzu sind insbesondere nicht-metailische Werkstoffe geeignet, beispielsweise CFK. Faserverstärkte nicht-metallische Werkstoffe sind bei hoher mechanischer Stabilität, insbesondere bei hoher Zugfestigkeit, relativ leicht. Das aus einem faserverstärkten Werkstoff bestehende Rotor-Rohr kann daher mit hohen Drehzahlen rotiert werden, ohne sich im dabei Durchmesser erheblich zu vergrößern. Dieser Umstand ist für die Realisierung kleiner Spalte zwischen Rotor und Stator von großer Wichtigkeit. Ferner stellt die hohe Zugfestigkeit sicher, dass das Rotor-Rohr auch den Stützring gegen zerstörerische Tangentialkräfte abstützen kann.Preferably, the axial length of the wings decreases radially inward from the shoulder. The contour of the adjacent inner pump stator is adjusted accordingly. With the axial length of the wings decreasing radially inward, the geometry is maintained optimally in terms of flow, with sufficient vane stability. As a result, higher overall pumping speeds can be achieved. According to a preferred embodiment, the rotor tube is made of a fiber-reinforced material. For this purpose, in particular non-metallic materials are suitable, such as CFRP. Fiber-reinforced non-metallic materials are relatively light with high mechanical stability, especially at high tensile strength. The existing of a fiber reinforced material rotor tube can therefore be rotated at high speeds, without increasing the diameter while significantly. This circumstance is of great importance for the realization of small gaps between rotor and stator. Furthermore, the high tensile strength ensures that the rotor tube can also support the support ring against destructive tangential forces.
Vorzugsweise verjüngen sich die Gewinde der Gewindenuten, das heißt ihre Gewindeböden, radial vom Einlass zum Auslass hin. Hierdurch verkleinert sich die Tiefe und der Querschnitt der Gewindenut vom Einlass zum Auslass hin. Dadurch ist der Einlass-Querschnitt der beiden Holweck-Stufen bzw, -Züge ist relativ groß, so dass das Saugvermögen der Holweck-Stufe verbessert ist.Preferably, the threads of the thread grooves, that is, their thread bottoms, taper radially from the inlet to the outlet. This reduces the depth and the cross section of the thread groove from the inlet to the outlet. As a result, the inlet cross-section of the two Holweck stages or trains is relatively large, so that the pumping speed of the Holweck stage is improved.
Im Folgenden werden unter Bezugnahme auf die Zeichnungen zwei Ausführungsbeispiele der Erfindung näher erläutert.In the following two embodiments of the invention will be explained in more detail with reference to the drawings.
Es zeigen:Show it:
Figur 1 eine Holweck-Vakuumpumpe im Längsschnitt mit einerFigure 1 is a Holweck vacuum pump in longitudinal section with a
Flügelscheibe mit Tragring, undWing disc with support ring, and
Figur 2 eine Holweck-Vakuumpumpe im Längsschnitt mit einerFigure 2 is a Holweck vacuum pump in longitudinal section with a
Flügelscheibe mit einem Tragring und einem Stützring.Wing disc with a support ring and a support ring.
In den Figuren 1 und 2 ist jeweils eine Holweck-Vakuumpumpe 10,50 dargestellt, die zwei parallele Holweck-Pumpstufen 12,14 aufweist. Einlassseitig weisen beide Holweck-Vakuumpumpen 10,50 jeweils eine Rotor-Flügelscheibe 28,28' auf, die jeweils eine Vielzahl von Flügeln 18,58 aufweist.FIGS. 1 and 2 each show a Holweck vacuum pump 10, 50, which has two parallel Holweck pump stages 12, 14. Both are facing the inlet Holweck vacuum pumps 10.50 each have a rotor blade 28,28 ', each having a plurality of wings 18,58.
Die beiden Holweck-Pumpenstufen 12,14 werden im Wesentlichen gebildet durch jeweils einen radial äußeren Pumpenstator 20, einen radial inneren Pumpenstator 22, sowie ein rotierendes Rotor-Rohr 24 zwischen den beiden Statoren 20,22. Sowohl der innere als auch der äußere Pumpenstator 20,22 weisen jeweils eine schraubenförmige Gewindenut 21,23 auf, deren Nutboden sich zum Auslass hin jeweils radial verjüngt.The two Holweck pump stages 12, 14 are essentially formed by a respective radially outer pump stator 20, a radially inner pump stator 22, and a rotating rotor tube 24 between the two stators 20, 22. Both the inner and the outer pump stator 20, 22 each have a helical thread groove 21, 23, the groove bottom of which tapers radially towards the outlet in each case.
Der Pumpenrotor 16 besteht im Wesentlichen aus einer Welle 26, die durch Wälzlager und/oder Magnetlager gelagert ist, einer Nabe 27, den Flügeln 18, einem Tragring 30, sowie dem Rotor-Rohr 24. Der Pumpenrotor 56 der Vakuumpumpe 50 der Fig. 2 weist ferner noch einen zweiten Stützring 60 auf. Die Nabe 27, die Flügel 18 und der Tragring 30, und ggf. der Stützring 60 sind einstückig miteinander ausgebildet und bestehen aus Aluminium, können aber auch einzeln gefertigt und zusammen montiert sein. Insbesondere der Stützrϊng 60 kann separat gefertigt, und anschließend an die Flügel 58 montiert sein. Das Rotor-Rohr 24 besteht aus einem faserverstärkten Werkstoff, beispielsweise aus CFK.The pump rotor 16 consists essentially of a shaft 26, which is supported by rolling bearings and / or magnetic bearings, a hub 27, the wings 18, a support ring 30, and the rotor tube 24. The pump rotor 56 of the vacuum pump 50 of FIG .. 2 also has a second support ring 60. The hub 27, the wings 18 and the support ring 30, and possibly the support ring 60 are integrally formed with each other and made of aluminum, but can also be manufactured individually and mounted together. In particular, the Stützrϊng 60 can be made separately, and then mounted on the wings 58. The rotor tube 24 is made of a fiber-reinforced material, such as CFRP.
Die Flügel 18;58 weisen rotorseitig einen stufenförmigen Absatz 40 auf, auf dem der Tragring 30 abgestützt ist. Die axiale Absatzlänge ist ungefähr gleich der axialen Länge des Tragringes 30. Der Tragring 30 ragt axial in Richtung des Pumpeneinlasses nicht in die Flügel 18 hinein, so dass die radialen Zwischenräume zwischen den Flügeln 18 außerhalb der Absätze 40 radial durchgehend sind. Der Tragring 30 ist kreiszylinderförmig und trägt das Rotor- Rohr 24, das auf den Tragring 30 aufgespannt oder aufgepresst ist. Die Axiallänge der Flügel 18 verringert sich von dem Absatz 40 aus nach radial innen. Die axiale Länge der Flügel 18 in Nabennähe ist jedoch größer als die axiale Länge der Flügel 18 radial außen der Absätze 40 bzw. des Tragringes 30.The wings 18, 58 have a stepped shoulder 40 on the rotor side, on which the support ring 30 is supported. The axial shoulder length is approximately equal to the axial length of the support ring 30. The support ring 30 does not axially project toward the pump inlet into the vanes 18, so that the radial gaps between the vanes 18 are radially continuous outside of the shoulders 40. The support ring 30 is circular cylindrical and carries the rotor tube 24 which is clamped or pressed onto the support ring 30. The axial length of the wings 18 is reduced from the shoulder 40 radially inward. However, the axial length of the wings 18 near the hub is greater than the axial length of the wings 18 radially outward of the shoulders 40 and the support ring 30th
Bei der Holweck-Vakuumpumpe 50 der Figur 2 weisen die Flügel 58 einlassseitig einen zweiten Absatz 62 auf, der den Stützring 60 trägt. Auch in dem einlassseitigen Bereich verringert sich die Axiallänge der Flügel 58 zur Nabe 27 hin stetig.In the Holweck vacuum pump 50 of Figure 2, the wings 58 on the inlet side a second shoulder 62, which carries the support ring 60. Also in the inlet-side region, the axial length of the wings 58 to the hub 27 decreases steadily.
Durch das Vorsehen eines Absatzes 40 an den Flügeln 18 wird der Tragring 30 in dem Bereich, in dem er das Rotor-Rohr 24 trägt, bestmöglich abgestützt. Durch den hierdurch möglichen Verzicht einer Durchdringung der Flügel 18 im einlassseitigen Bereich wird die Einleitung von Kräften, die zwischen dem Rotor- Rohr 24, dem Tragring 30 und den Absätzen 40 übertragen werden, erheblich reduziert. Ferner wird die Erzeugung von tangentialen Kräften in dem Tragring 30 erheblich verringert, da der Tragring 30 über seine gesamte axiale Länge radial durch das Rotor-Rohr 24 gegen die Zentrifugal-Kräfte abgestützt ist. By providing a shoulder 40 on the wings 18, the support ring 30 is best supported in the area in which it carries the rotor tube 24. By thus eliminating the penetration of the wings 18 in the inlet side region, the introduction of forces transmitted between the rotor tube 24, the support ring 30 and the shoulders 40 is significantly reduced. Furthermore, the generation of tangential forces in the support ring 30 is significantly reduced, since the support ring 30 is supported over its entire axial length radially by the rotor tube 24 against the centrifugal forces.

Claims

Patentansprüche claims
1. Holweck-Vakuumpumpe (10) mit1. Holweck vacuum pump (10) with
einem Pumpenrotor (16) mit einem rotierenden Rohr (24) und einer einlassseitigen Rotor-Flügelscheibe (28) mit einem Tragring (30), der das Rotor-Rohr (24) trägt, unda pump rotor (16) having a rotating tube (24) and an inlet side rotor vane (28) having a support ring (30) supporting the rotor tube (24), and
jeweils einem eine schraubenförmige Gewindenut (21,23) aufweisenden Pumpenstator (20,22) radial innen und außen des Rotor-Rohres (24),in each case a pump stator (20, 22) having a helical thread groove (21, 23), radially inward and outward of the rotor tube (24),
d a d u r c h g e k e n n z e i c h n e t ,characterized ,
dass die Flügel (18) der Flügelscheibe (28) rotorseitige Absätze (40) aufweisen, die den Tragring (30) tragen.in that the wings (18) of the wing disc (28) have rotor-side shoulders (40) which carry the supporting ring (30).
2. Holweck-Vakuumpumpe (10) nach Anspruch 1, dadurch gekennzeichnet, dass der Tragring (30) axial nicht in den stufenfreien Bereich der Flügel (18) hineinragt.2. Holweck vacuum pump (10) according to claim 1, characterized in that the support ring (30) axially does not protrude into the stepless region of the wings (18).
3. Holweck-Vakuumpumpe (10) nach Anspruch 2, dadurch gekennzeichnet, dass das Rotor-Rohr (24) die gesamte axiale Länge des Tragringes (30) abdeckt.3. Holweck vacuum pump (10) according to claim 2, characterized in that the rotor tube (24) covers the entire axial length of the support ring (30).
4. Holweck-Vakuumpumpe (50) nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass die Flügel (58) an der Flügelscheibe (281) auch einlassseitig Absätze (62) aufweisen, die einen Stützring (60) tragen. 4. Holweck vacuum pump (50) according to one of claims 1 to 3, characterized in that the wings (58) on the wing disc (28 1 ) also on the inlet side paragraphs (62) which carry a support ring (60).
5. Holweck-Vakuumpumpe (10) nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass sich die Axiallänge der Flügel (18,58) von dem Absatz (40,62) nach radial innen jeweils verringert.5. Holweck vacuum pump (10) according to one of claims 1 to 4, characterized in that the axial length of the wings (18,58) of the shoulder (40,62) reduces radially inward in each case.
6. Holweck-Vakuumpumpe (10) nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass das Rotor-Rohr (24) aus einem faserverstärkten Werkstoff, insbesondere aus CFK, besteht.6. Holweck vacuum pump (10) according to one of claims 1 to 5, characterized in that the rotor tube (24) consists of a fiber-reinforced material, in particular of CFRP.
7. Holweck-Vakuumpumpe (10) nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass die Statoren-Gewindenuten (21,23) sich radial vom Einlass zum Auslass hin verjüngen. 7. Holweck vacuum pump (10) according to one of claims 1 to 6, characterized in that the stators-thread grooves (21,23) taper radially from the inlet to the outlet.
EP06707774A 2005-02-25 2006-01-20 Holweck vacuum pump Not-in-force EP1851440B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005008643A DE102005008643A1 (en) 2005-02-25 2005-02-25 Holweck vacuum pump has shoulders on rotor side of vanes of vane disc to support supporting ring
PCT/EP2006/050325 WO2006089823A1 (en) 2005-02-25 2006-01-20 Holweck vacuum pump

Publications (2)

Publication Number Publication Date
EP1851440A1 true EP1851440A1 (en) 2007-11-07
EP1851440B1 EP1851440B1 (en) 2009-03-11

Family

ID=36216200

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06707774A Not-in-force EP1851440B1 (en) 2005-02-25 2006-01-20 Holweck vacuum pump

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US (1) US20080260518A1 (en)
EP (1) EP1851440B1 (en)
JP (1) JP4996486B2 (en)
KR (1) KR20070103759A (en)
CN (1) CN100564886C (en)
AT (1) ATE425365T1 (en)
CA (1) CA2598866A1 (en)
DE (2) DE102005008643A1 (en)
WO (1) WO2006089823A1 (en)

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ITTO20100070A1 (en) * 2010-02-01 2011-08-02 Varian Spa VACUUM PUMP, IN PARTICULAR TURBOMOLECULAR VACUUM PUMP.
DE102011112691A1 (en) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh vacuum pump
EP2757266B1 (en) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotary vacuum pump
JP6142630B2 (en) * 2013-03-29 2017-06-07 株式会社島津製作所 Vacuum pump
DE202013010195U1 (en) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vacuum pump rotor device and vacuum pump
JP6390098B2 (en) 2013-12-25 2018-09-19 株式会社島津製作所 Vacuum pump
JP6386737B2 (en) * 2014-02-04 2018-09-05 エドワーズ株式会社 Vacuum pump

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US3258245A (en) * 1964-07-20 1966-06-28 Gen Electric Blade stiffening means
NL8602052A (en) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv HIGH VACUUM PUMP.
DE58907244D1 (en) * 1989-07-20 1994-04-21 Leybold Ag Friction pump with bell-shaped rotor.
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DE19915307A1 (en) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Turbomolecular friction vacuum pump, with annular groove in region of at least one endface of rotor
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Also Published As

Publication number Publication date
EP1851440B1 (en) 2009-03-11
DE502006003092D1 (en) 2009-04-23
DE102005008643A1 (en) 2006-08-31
CA2598866A1 (en) 2006-08-31
ATE425365T1 (en) 2009-03-15
CN101128674A (en) 2008-02-20
KR20070103759A (en) 2007-10-24
CN100564886C (en) 2009-12-02
JP2008531909A (en) 2008-08-14
JP4996486B2 (en) 2012-08-08
US20080260518A1 (en) 2008-10-23
WO2006089823A1 (en) 2006-08-31

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