ATE425365T1 - HOLWECK VACUUM PUMP - Google Patents

HOLWECK VACUUM PUMP

Info

Publication number
ATE425365T1
ATE425365T1 AT06707774T AT06707774T ATE425365T1 AT E425365 T1 ATE425365 T1 AT E425365T1 AT 06707774 T AT06707774 T AT 06707774T AT 06707774 T AT06707774 T AT 06707774T AT E425365 T1 ATE425365 T1 AT E425365T1
Authority
AT
Austria
Prior art keywords
rotor
vacuum pump
pipe
axial length
vanes
Prior art date
Application number
AT06707774T
Other languages
German (de)
Inventor
Dr Roland Blumenthal
Ralf Adamietz
Dirk Kalisch
Heinz Englaender
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Application granted granted Critical
Publication of ATE425365T1 publication Critical patent/ATE425365T1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Reciprocating Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Rotary Pumps (AREA)

Abstract

The Holweck pump (10) has a pump rotor (16) with rotating tube (24) and a rotor vane disc (28) on the inlet side with a support ring (30) supporting the rotor pipe. The vanes (18) of the vane disc have on the rotor side shoulders (40) to support the supporting ring. The rotor pipe can cover the entire axial length of the support ring. The axial length of the vanes reduces radially inwards from the shoulder. The rotor pipe is made from a fibre-reinforced material such as chlorofluorocarbon .
AT06707774T 2005-02-25 2006-01-20 HOLWECK VACUUM PUMP ATE425365T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005008643A DE102005008643A1 (en) 2005-02-25 2005-02-25 Holweck vacuum pump has shoulders on rotor side of vanes of vane disc to support supporting ring

Publications (1)

Publication Number Publication Date
ATE425365T1 true ATE425365T1 (en) 2009-03-15

Family

ID=36216200

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06707774T ATE425365T1 (en) 2005-02-25 2006-01-20 HOLWECK VACUUM PUMP

Country Status (9)

Country Link
US (1) US20080260518A1 (en)
EP (1) EP1851440B1 (en)
JP (1) JP4996486B2 (en)
KR (1) KR20070103759A (en)
CN (1) CN100564886C (en)
AT (1) ATE425365T1 (en)
CA (1) CA2598866A1 (en)
DE (2) DE102005008643A1 (en)
WO (1) WO2006089823A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20100070A1 (en) * 2010-02-01 2011-08-02 Varian Spa VACUUM PUMP, IN PARTICULAR TURBOMOLECULAR VACUUM PUMP.
DE102011112691A1 (en) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh vacuum pump
EP2757266B1 (en) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotary vacuum pump
JP6142630B2 (en) * 2013-03-29 2017-06-07 株式会社島津製作所 Vacuum pump
DE202013010195U1 (en) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vacuum pump rotor device and vacuum pump
JP6390098B2 (en) * 2013-12-25 2018-09-19 株式会社島津製作所 Vacuum pump
JP6386737B2 (en) * 2014-02-04 2018-09-05 エドワーズ株式会社 Vacuum pump

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1544318A (en) * 1923-09-12 1925-06-30 Westinghouse Electric & Mfg Co Turbine-blade lashing
US3258245A (en) * 1964-07-20 1966-06-28 Gen Electric Blade stiffening means
NL8602052A (en) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv HIGH VACUUM PUMP.
DE58907244D1 (en) * 1989-07-20 1994-04-21 Leybold Ag Friction pump with bell-shaped rotor.
JPH03222895A (en) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd Thread-grooved vacuum pump
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE19915307A1 (en) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Turbomolecular friction vacuum pump, with annular groove in region of at least one endface of rotor
DE19937392A1 (en) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Friction vacuum pump with active pump elements
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement

Also Published As

Publication number Publication date
DE102005008643A1 (en) 2006-08-31
JP2008531909A (en) 2008-08-14
DE502006003092D1 (en) 2009-04-23
CN101128674A (en) 2008-02-20
EP1851440A1 (en) 2007-11-07
EP1851440B1 (en) 2009-03-11
JP4996486B2 (en) 2012-08-08
CA2598866A1 (en) 2006-08-31
CN100564886C (en) 2009-12-02
KR20070103759A (en) 2007-10-24
US20080260518A1 (en) 2008-10-23
WO2006089823A1 (en) 2006-08-31

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee