CA2598866A1 - Pompe a vide holweck - Google Patents
Pompe a vide holweck Download PDFInfo
- Publication number
- CA2598866A1 CA2598866A1 CA002598866A CA2598866A CA2598866A1 CA 2598866 A1 CA2598866 A1 CA 2598866A1 CA 002598866 A CA002598866 A CA 002598866A CA 2598866 A CA2598866 A CA 2598866A CA 2598866 A1 CA2598866 A1 CA 2598866A1
- Authority
- CA
- Canada
- Prior art keywords
- blades
- rotor
- supporting ring
- vacuum pump
- holweck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000008093 supporting effect Effects 0.000 claims description 52
- 230000004323 axial length Effects 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 4
- 239000004918 carbon fiber reinforced polymer Substances 0.000 claims description 3
- 239000007769 metal material Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 239000003562 lightweight material Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/40—Organic materials
- F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/603—Composites; e.g. fibre-reinforced
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Reciprocating Pumps (AREA)
- Valves And Accessory Devices For Braking Systems (AREA)
- Rotary Pumps (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005008643.8 | 2005-02-25 | ||
DE102005008643A DE102005008643A1 (de) | 2005-02-25 | 2005-02-25 | Holweck-Vakuumpumpe |
PCT/EP2006/050325 WO2006089823A1 (fr) | 2005-02-25 | 2006-01-20 | Pompe a vide holweck |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2598866A1 true CA2598866A1 (fr) | 2006-08-31 |
Family
ID=36216200
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002598866A Abandoned CA2598866A1 (fr) | 2005-02-25 | 2006-01-20 | Pompe a vide holweck |
Country Status (9)
Country | Link |
---|---|
US (1) | US20080260518A1 (fr) |
EP (1) | EP1851440B1 (fr) |
JP (1) | JP4996486B2 (fr) |
KR (1) | KR20070103759A (fr) |
CN (1) | CN100564886C (fr) |
AT (1) | ATE425365T1 (fr) |
CA (1) | CA2598866A1 (fr) |
DE (2) | DE102005008643A1 (fr) |
WO (1) | WO2006089823A1 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITTO20100070A1 (it) * | 2010-02-01 | 2011-08-02 | Varian Spa | Pompa da vuoto, in particolare pompa da vuoto turbomolecolare. |
DE102011112691A1 (de) * | 2011-09-05 | 2013-03-07 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP2757266B1 (fr) * | 2013-01-22 | 2016-03-16 | Agilent Technologies, Inc. | Pompe à vide rotative |
JP6142630B2 (ja) * | 2013-03-29 | 2017-06-07 | 株式会社島津製作所 | 真空ポンプ |
DE202013010195U1 (de) * | 2013-11-12 | 2015-02-18 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe |
JP6390098B2 (ja) * | 2013-12-25 | 2018-09-19 | 株式会社島津製作所 | 真空ポンプ |
JP6386737B2 (ja) * | 2014-02-04 | 2018-09-05 | エドワーズ株式会社 | 真空ポンプ |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1544318A (en) * | 1923-09-12 | 1925-06-30 | Westinghouse Electric & Mfg Co | Turbine-blade lashing |
US3258245A (en) * | 1964-07-20 | 1966-06-28 | Gen Electric | Blade stiffening means |
NL8602052A (nl) * | 1986-08-12 | 1988-03-01 | Ultra Centrifuge Nederland Nv | Hoogvacuumpomp. |
EP0408791B1 (fr) * | 1989-07-20 | 1994-03-16 | Leybold Aktiengesellschaft | Pompe à effet visqueux à rotor en forme de cloche |
JPH03222895A (ja) * | 1990-01-26 | 1991-10-01 | Hitachi Koki Co Ltd | ねじ溝真空ポンプ |
GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
DE19915307A1 (de) * | 1999-04-03 | 2000-10-05 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit |
DE19937392A1 (de) * | 1999-08-07 | 2001-02-08 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit pumpaktiven Elementen |
GB9927493D0 (en) * | 1999-11-19 | 2000-01-19 | Boc Group Plc | Improved vacuum pumps |
GB0229355D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
-
2005
- 2005-02-25 DE DE102005008643A patent/DE102005008643A1/de not_active Withdrawn
-
2006
- 2006-01-20 AT AT06707774T patent/ATE425365T1/de not_active IP Right Cessation
- 2006-01-20 CN CNB2006800058256A patent/CN100564886C/zh not_active Expired - Fee Related
- 2006-01-20 KR KR1020077018537A patent/KR20070103759A/ko not_active Application Discontinuation
- 2006-01-20 EP EP06707774A patent/EP1851440B1/fr not_active Not-in-force
- 2006-01-20 WO PCT/EP2006/050325 patent/WO2006089823A1/fr active Application Filing
- 2006-01-20 US US11/884,896 patent/US20080260518A1/en not_active Abandoned
- 2006-01-20 CA CA002598866A patent/CA2598866A1/fr not_active Abandoned
- 2006-01-20 DE DE502006003092T patent/DE502006003092D1/de active Active
- 2006-01-20 JP JP2007556578A patent/JP4996486B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1851440A1 (fr) | 2007-11-07 |
DE502006003092D1 (de) | 2009-04-23 |
DE102005008643A1 (de) | 2006-08-31 |
EP1851440B1 (fr) | 2009-03-11 |
US20080260518A1 (en) | 2008-10-23 |
CN100564886C (zh) | 2009-12-02 |
WO2006089823A1 (fr) | 2006-08-31 |
ATE425365T1 (de) | 2009-03-15 |
CN101128674A (zh) | 2008-02-20 |
JP2008531909A (ja) | 2008-08-14 |
JP4996486B2 (ja) | 2012-08-08 |
KR20070103759A (ko) | 2007-10-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FZDE | Discontinued |