CA2598866A1 - Pompe a vide holweck - Google Patents

Pompe a vide holweck Download PDF

Info

Publication number
CA2598866A1
CA2598866A1 CA002598866A CA2598866A CA2598866A1 CA 2598866 A1 CA2598866 A1 CA 2598866A1 CA 002598866 A CA002598866 A CA 002598866A CA 2598866 A CA2598866 A CA 2598866A CA 2598866 A1 CA2598866 A1 CA 2598866A1
Authority
CA
Canada
Prior art keywords
blades
rotor
supporting ring
vacuum pump
holweck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002598866A
Other languages
English (en)
Inventor
Roland Blumenthal
Ralf Adamietz
Dirk Kalisch
Heinz Englaender
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2598866A1 publication Critical patent/CA2598866A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/02Selection of particular materials
    • F04D29/023Selection of particular materials especially adapted for elastic fluid pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044Holweck-type pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00Materials; Properties thereof
    • F05D2300/40Organic materials
    • F05D2300/43Synthetic polymers, e.g. plastics; Rubber
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00Materials; Properties thereof
    • F05D2300/60Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603Composites; e.g. fibre-reinforced

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Reciprocating Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Rotary Pumps (AREA)
CA002598866A 2005-02-25 2006-01-20 Pompe a vide holweck Abandoned CA2598866A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005008643.8 2005-02-25
DE102005008643A DE102005008643A1 (de) 2005-02-25 2005-02-25 Holweck-Vakuumpumpe
PCT/EP2006/050325 WO2006089823A1 (fr) 2005-02-25 2006-01-20 Pompe a vide holweck

Publications (1)

Publication Number Publication Date
CA2598866A1 true CA2598866A1 (fr) 2006-08-31

Family

ID=36216200

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002598866A Abandoned CA2598866A1 (fr) 2005-02-25 2006-01-20 Pompe a vide holweck

Country Status (9)

Country Link
US (1) US20080260518A1 (fr)
EP (1) EP1851440B1 (fr)
JP (1) JP4996486B2 (fr)
KR (1) KR20070103759A (fr)
CN (1) CN100564886C (fr)
AT (1) ATE425365T1 (fr)
CA (1) CA2598866A1 (fr)
DE (2) DE102005008643A1 (fr)
WO (1) WO2006089823A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20100070A1 (it) * 2010-02-01 2011-08-02 Varian Spa Pompa da vuoto, in particolare pompa da vuoto turbomolecolare.
DE102011112691A1 (de) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2757266B1 (fr) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Pompe à vide rotative
JP6142630B2 (ja) * 2013-03-29 2017-06-07 株式会社島津製作所 真空ポンプ
DE202013010195U1 (de) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe
JP6390098B2 (ja) * 2013-12-25 2018-09-19 株式会社島津製作所 真空ポンプ
JP6386737B2 (ja) * 2014-02-04 2018-09-05 エドワーズ株式会社 真空ポンプ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1544318A (en) * 1923-09-12 1925-06-30 Westinghouse Electric & Mfg Co Turbine-blade lashing
US3258245A (en) * 1964-07-20 1966-06-28 Gen Electric Blade stiffening means
NL8602052A (nl) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv Hoogvacuumpomp.
EP0408791B1 (fr) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Pompe à effet visqueux à rotor en forme de cloche
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement

Also Published As

Publication number Publication date
EP1851440A1 (fr) 2007-11-07
DE502006003092D1 (de) 2009-04-23
DE102005008643A1 (de) 2006-08-31
EP1851440B1 (fr) 2009-03-11
US20080260518A1 (en) 2008-10-23
CN100564886C (zh) 2009-12-02
WO2006089823A1 (fr) 2006-08-31
ATE425365T1 (de) 2009-03-15
CN101128674A (zh) 2008-02-20
JP2008531909A (ja) 2008-08-14
JP4996486B2 (ja) 2012-08-08
KR20070103759A (ko) 2007-10-24

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Legal Events

Date Code Title Description
FZDE Discontinued