WO2006089823A1 - Pompe a vide holweck - Google Patents

Pompe a vide holweck Download PDF

Info

Publication number
WO2006089823A1
WO2006089823A1 PCT/EP2006/050325 EP2006050325W WO2006089823A1 WO 2006089823 A1 WO2006089823 A1 WO 2006089823A1 EP 2006050325 W EP2006050325 W EP 2006050325W WO 2006089823 A1 WO2006089823 A1 WO 2006089823A1
Authority
WO
WIPO (PCT)
Prior art keywords
support ring
rotor
wings
vacuum pump
holweck
Prior art date
Application number
PCT/EP2006/050325
Other languages
German (de)
English (en)
Inventor
Dr. Roland Blumenthal
Ralf Adamietz
Dirk Kalisch
Heinz ENGLÄNDER
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Priority to JP2007556578A priority Critical patent/JP4996486B2/ja
Priority to EP06707774A priority patent/EP1851440B1/fr
Priority to CA002598866A priority patent/CA2598866A1/fr
Priority to DE502006003092T priority patent/DE502006003092D1/de
Priority to US11/884,896 priority patent/US20080260518A1/en
Publication of WO2006089823A1 publication Critical patent/WO2006089823A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Definitions

  • the invention relates to a Holweck vacuum pump with a pump rotor with a rotating tube.
  • a two-way Holweck vacuum pump which has radially inside and outside of the rotor tube, a pump stator, which is each formed by a helical thread groove.
  • a rotor blade is provided on the inlet side, which has a support ring which carries the rotor tube.
  • the axial length of the support ring is greater than that of the wing of the wing disc, so that the Supporting ring passes through the wings, ie the wings are divided radially into two sections. A portion of the support ring projects axially out of the plane of the rotor blades.
  • the rotor tube On the overhanging part of the support ring, the rotor tube is fixed, for example by the outside rests on the support ring. All forces acting between the support ring and the rotor tube are transmitted directly to the wings of the wing disc. Experiments have shown that in particular caused by the centrifugal forces radial and tangential forces represent a significant mechanical load on the wings and in particular for the support ring and reduce their life.
  • the object of the invention in contrast, is to create a two-fold Holweck vacuum pump with improved blade life.
  • the wings of the wing disc on the rotor side proximal paragraphs which carry the support ring.
  • the support ring does not overhang the wings axially, but is supported by a corresponding stepped shoulder in the wings radially inward.
  • the wings therefore have a greater axial length radially inward of the support ring than radially outwardly of the support ring.
  • the paragraphs of the wings are designed such that the support ring rests radially outward on the stepped shoulder. As a result, the support ring is supported substantially over its entire axial length by the wings of the wing disc.
  • the support structure bearing wing structure is considerably solidified, so that the forces acting between the wings and the support ring forces lead to lower punctual peak loads of the wings.
  • the rotor tube On the supported by the wing part of the support ring is pushed radially outward, the rotor tube.
  • the rotor tube which preferably consists of a very tensile and lightweight material, bandaged the support ring such that it against the at high speeds of several 10,000 rev / min high centrifugal forces is supported. As a result, the tangential forces generated in the support ring are kept so small that the support ring tolerates correspondingly high speeds.
  • the support ring does not protrude axially into the stepless region of the wings.
  • the axial length of the support ring corresponds approximately to the axial length of the wing axial stages.
  • the support ring does not penetrate most of the wings over their entire radial length. This ensures that between the rotor tube and the support ring forces acting directly only in the area of the wing paragraphs in the flights! are introduced, but not on the entire axial length of the wings.
  • By limiting the axial extent of the support ring to the axial length of the shoulder ensures that the support ring is supported in the entire axial length of the rotor tube on the outside against high centrifugal forces.
  • the wings of the wing disc on the suction side (distal) step-like shoulders which carry a support ring.
  • the support shoulders bearing step-paragraphs are thus axially opposite the support ring bearing step-paragraphs of the wings, while the axially intermediate area is formed step and tragringok.
  • the axial length of the wings decreases radially inward from the shoulder.
  • the contour of the adjacent inner pump stator is adjusted accordingly.
  • the geometry is maintained optimally in terms of flow, with sufficient vane stability.
  • higher overall pumping speeds can be achieved.
  • the rotor tube is made of a fiber-reinforced material.
  • non-metallic materials are suitable, such as CFRP.
  • Fiber-reinforced non-metallic materials are relatively light with high mechanical stability, especially at high tensile strength.
  • the existing of a fiber reinforced material rotor tube can therefore be rotated at high speeds, without increasing the diameter while significantly. This circumstance is of great importance for the realization of small gaps between rotor and stator.
  • the high tensile strength ensures that the rotor tube can also support the support ring against destructive tangential forces.
  • the threads of the thread grooves that is, their thread bottoms, taper radially from the inlet to the outlet. This reduces the depth and the cross section of the thread groove from the inlet to the outlet. As a result, the inlet cross-section of the two Holweck stages or trains is relatively large, so that the pumping speed of the Holweck stage is improved.
  • Figure 1 is a Holweck vacuum pump in longitudinal section with a
  • Figure 2 is a Holweck vacuum pump in longitudinal section with a
  • Wing disc with a support ring and a support ring.
  • FIGS. 1 and 2 each show a Holweck vacuum pump 10, 50, which has two parallel Holweck pump stages 12, 14. Both are facing the inlet Holweck vacuum pumps 10.50 each have a rotor blade 28,28 ', each having a plurality of wings 18,58.
  • the two Holweck pump stages 12, 14 are essentially formed by a respective radially outer pump stator 20, a radially inner pump stator 22, and a rotating rotor tube 24 between the two stators 20, 22.
  • Both the inner and the outer pump stator 20, 22 each have a helical thread groove 21, 23, the groove bottom of which tapers radially towards the outlet in each case.
  • the pump rotor 16 consists essentially of a shaft 26, which is supported by rolling bearings and / or magnetic bearings, a hub 27, the wings 18, a support ring 30, and the rotor tube 24.
  • the pump rotor 56 of the vacuum pump 50 of FIG .. 2 also has a second support ring 60.
  • the hub 27, the wings 18 and the support ring 30, and possibly the support ring 60 are integrally formed with each other and made of aluminum, but can also be manufactured individually and mounted together. In particular, the Stauerr ⁇ ng 60 can be made separately, and then mounted on the wings 58.
  • the rotor tube 24 is made of a fiber-reinforced material, such as CFRP.
  • the wings 18, 58 have a stepped shoulder 40 on the rotor side, on which the support ring 30 is supported.
  • the axial shoulder length is approximately equal to the axial length of the support ring 30.
  • the support ring 30 does not axially project toward the pump inlet into the vanes 18, so that the radial gaps between the vanes 18 are radially continuous outside of the shoulders 40.
  • the support ring 30 is circular cylindrical and carries the rotor tube 24 which is clamped or pressed onto the support ring 30.
  • the axial length of the wings 18 is reduced from the shoulder 40 radially inward. However, the axial length of the wings 18 near the hub is greater than the axial length of the wings 18 radially outward of the shoulders 40 and the support ring 30th
  • the wings 58 on the inlet side a second shoulder 62, which carries the support ring 60. Also in the inlet-side region, the axial length of the wings 58 to the hub 27 decreases steadily.
  • the support ring 30 is best supported in the area in which it carries the rotor tube 24.
  • the introduction of forces transmitted between the rotor tube 24, the support ring 30 and the shoulders 40 is significantly reduced.
  • the generation of tangential forces in the support ring 30 is significantly reduced, since the support ring 30 is supported over its entire axial length radially by the rotor tube 24 against the centrifugal forces.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Reciprocating Pumps (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Rotary Pumps (AREA)

Abstract

L'invention concerne une pompe à vide Holweck comportant un rotor (16) doté d'un tube rotatif (24), dans un stator (12,14) pourvu d'une gorge filetée hélicoïdale (21,23) et disposé de manière radiale interne et externe relativement au tube (24) du rotor, ainsi qu'un disque à palettes (28) de rotor monté côté entrée et équipé d'un anneau porteur (30) qui supporte le tube (24) du rotor. Les palettes (18) du disque à palettes comportent des épaulements (40) côté rotor, lesquels portent l'anneau porteur (30).
PCT/EP2006/050325 2005-02-25 2006-01-20 Pompe a vide holweck WO2006089823A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007556578A JP4996486B2 (ja) 2005-02-25 2006-01-20 ホルウェック型真空ポンプ
EP06707774A EP1851440B1 (fr) 2005-02-25 2006-01-20 Pompe a vide holweck
CA002598866A CA2598866A1 (fr) 2005-02-25 2006-01-20 Pompe a vide holweck
DE502006003092T DE502006003092D1 (de) 2005-02-25 2006-01-20 Holweck-vakuumpumpe
US11/884,896 US20080260518A1 (en) 2005-02-25 2006-01-20 Holweck Vacuum Pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005008643.8 2005-02-25
DE102005008643A DE102005008643A1 (de) 2005-02-25 2005-02-25 Holweck-Vakuumpumpe

Publications (1)

Publication Number Publication Date
WO2006089823A1 true WO2006089823A1 (fr) 2006-08-31

Family

ID=36216200

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/050325 WO2006089823A1 (fr) 2005-02-25 2006-01-20 Pompe a vide holweck

Country Status (9)

Country Link
US (1) US20080260518A1 (fr)
EP (1) EP1851440B1 (fr)
JP (1) JP4996486B2 (fr)
KR (1) KR20070103759A (fr)
CN (1) CN100564886C (fr)
AT (1) ATE425365T1 (fr)
CA (1) CA2598866A1 (fr)
DE (2) DE102005008643A1 (fr)
WO (1) WO2006089823A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20100070A1 (it) * 2010-02-01 2011-08-02 Varian Spa Pompa da vuoto, in particolare pompa da vuoto turbomolecolare.
DE102011112691A1 (de) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2757266B1 (fr) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Pompe à vide rotative
JP6142630B2 (ja) * 2013-03-29 2017-06-07 株式会社島津製作所 真空ポンプ
DE202013010195U1 (de) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe
JP6390098B2 (ja) * 2013-12-25 2018-09-19 株式会社島津製作所 真空ポンプ
JP6386737B2 (ja) * 2014-02-04 2018-09-05 エドワーズ株式会社 真空ポンプ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0260733A1 (fr) * 1986-08-12 1988-03-23 Ultra-Centrifuge Nederland N.V. Pompe sous vide élevé
EP0408791A1 (fr) * 1989-07-20 1991-01-23 Leybold Aktiengesellschaft Pompe à effet visqueux à rotor en forme de cloche
EP1101945A2 (fr) * 1999-11-19 2001-05-23 The BOC Group plc Pompes à vide
WO2004055375A1 (fr) * 2002-12-17 2004-07-01 The Boc Group Plc Agencement de pompage a vide

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1544318A (en) * 1923-09-12 1925-06-30 Westinghouse Electric & Mfg Co Turbine-blade lashing
US3258245A (en) * 1964-07-20 1966-06-28 Gen Electric Blade stiffening means
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0260733A1 (fr) * 1986-08-12 1988-03-23 Ultra-Centrifuge Nederland N.V. Pompe sous vide élevé
EP0408791A1 (fr) * 1989-07-20 1991-01-23 Leybold Aktiengesellschaft Pompe à effet visqueux à rotor en forme de cloche
EP1101945A2 (fr) * 1999-11-19 2001-05-23 The BOC Group plc Pompes à vide
WO2004055375A1 (fr) * 2002-12-17 2004-07-01 The Boc Group Plc Agencement de pompage a vide

Also Published As

Publication number Publication date
EP1851440A1 (fr) 2007-11-07
DE502006003092D1 (de) 2009-04-23
DE102005008643A1 (de) 2006-08-31
EP1851440B1 (fr) 2009-03-11
US20080260518A1 (en) 2008-10-23
CN100564886C (zh) 2009-12-02
ATE425365T1 (de) 2009-03-15
CN101128674A (zh) 2008-02-20
JP2008531909A (ja) 2008-08-14
CA2598866A1 (fr) 2006-08-31
JP4996486B2 (ja) 2012-08-08
KR20070103759A (ko) 2007-10-24

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