EP2597313B1 - Rotor tournant rapidement pour une pompe à vide - Google Patents

Rotor tournant rapidement pour une pompe à vide Download PDF

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Publication number
EP2597313B1
EP2597313B1 EP12191948.4A EP12191948A EP2597313B1 EP 2597313 B1 EP2597313 B1 EP 2597313B1 EP 12191948 A EP12191948 A EP 12191948A EP 2597313 B1 EP2597313 B1 EP 2597313B1
Authority
EP
European Patent Office
Prior art keywords
sleeve
rotor
accordance
stator
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP12191948.4A
Other languages
German (de)
English (en)
Other versions
EP2597313A3 (fr
EP2597313A2 (fr
Inventor
Matthias Mädler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to JP2012256006A priority Critical patent/JP6017278B2/ja
Publication of EP2597313A2 publication Critical patent/EP2597313A2/fr
Publication of EP2597313A3 publication Critical patent/EP2597313A3/fr
Application granted granted Critical
Publication of EP2597313B1 publication Critical patent/EP2597313B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Definitions

  • the invention relates to a fast-rotating rotor according to the preamble of claim 1.
  • Holweck molecular pumping stages have been successful for years in the field of vacuum technology. As a rule, they are used in turbomolecular pump stages as the fore-vacuum side pumping stage, so that the turbomolecular pump can eject against higher prevacuum pressures. After Holweck rotates a smooth sleeve in a provided with helical grooves stator. Several pods may be present, so the beats DE 196 32 375 A1 to allow cores of different axial length in the gas stream to act in parallel.
  • sleeves of carbon fiber reinforced material as this has a low expansion under the action of heat and centrifugal forces.
  • the disadvantage is that the sleeve must be carried on the rotor and in this case a material is used in a carrier component, which is subject to a greater extent and thus generates high voltages in the sleeve.
  • This disadvantage complicates the design of the rotor and limits the vacuum technical performance, for example by speed and temperature limits.
  • Vacuum performance includes, for example, the compression achieved and the pumping speed.
  • a fast rotating rotor having a first sleeve and a support structure in which a second sleeve is disposed within the first sleeve and the first and second sleeves form a composite.
  • the design with the features of claim 1 ensures that the voltage difference between the support structure and sleeve is reduced. Due to the lower voltage difference, the vacuum technical performance is improved because speed and working temperature can be selected higher.
  • the first sleeve can be supported directly by the support structure, while the second sleeve is supported by the first sleeve and thus only indirectly connected to the support structure via the first sleeve.
  • the second sleeve connected to the support structure and the first sleeve of the second sleeve be worn.
  • both sleeves are directly connected to the support structure.
  • the composite formed by the two sleeves is designed in such a way that the forces generated by the second sleeve under the action of centrifugal forces on the first sleeve approximate those forces which are due to the expansion of the support structure, in particular a hub of the support structure, to the first Interact with the sleeve.
  • the dependent claims 2 to 15 indicate advantageous developments of the invention, which additionally increase the aforementioned advantage.
  • the first sleeve and the second sleeve with respect to the material from which the sleeves are made differ from each other.
  • the materials differ in terms of expansion under the action of heat and / or centrifugal forces.
  • first sleeve and the second sleeve can be connected to one another over a wide area, in particular over the whole area.
  • the composite can be formed by forming the two sleeves an adhesive bond or a shrink joint.
  • the shrink-fit connection is in particular produced such that the first sleeve and the second sleeve are brought to different temperatures and then arranged one inside the other, in particular into one another pushed or inserted into each other. Following this, ie when returning to "normal temperature", the previously relatively “cooled” sleeve expands again, while the previously relatively “heated” sleeve contracts. This creates a firm connection between the two sleeves, for which in particular no additional fastening means are needed. It is provided in particular that it is the inner sleeve, in this case the second sleeve, which is "cooled” while the first sleeve, ie the outer sleeve, is brought to an elevated temperature.
  • the composite can also be formed by pressing or pressing the two sleeves together so that the two sleeves are welded together, or by screwing the two sleeves together, the latter being achieved in particular by the outer sleeve being on its inside and the inner sleeve is threaded on each of its outer sides and the two sleeves are screwed by screwing the inner sleeve into the outer sleeve.
  • a cohesive connection can exist between the two sleeves to form the composite.
  • a positive or non-positive connection is made between the two sleeves.
  • the one sleeve forms a reinforcement or coating of the other sleeve, wherein the reinforcement or coating can be formed either by the first sleeve or by the second sleeve.
  • FIG. 1 a vacuum pump 2, which is detachably connected by means of a flange 4 with a container, not shown, to be evacuated. Gas enters through the suction port 6, is compressed in the vacuum pump and discharged through the gas outlet 8. As a rule, a backing pump is connected to the gas outlet.
  • a rotor 10 which comprises a shaft 12. This is rotatably supported by a first bearing 34 and a second bearing 36.
  • a drive magnet 32 may be provided, which cooperates with a drive coil 30 to enable the rotor in rapid rotation.
  • the rotational speed is dimensioned such that a molecular pump effect is brought about by the interaction of the rotor and a stator 40.
  • the stator has a helical groove 42 on a radially inner surface.
  • a support structure On the shaft of the rotor, a support structure is attached, which may be designed as a disc-like hub 14 designed. With this hub a first sleeve 16 is connected rotatably. Within this first sleeve 16, a second sleeve 18 is arranged and both sleeves form a composite. This composite is preferably chemically stable, heat and speed resistant. In this way, the first and second sleeves remain connected under the operating conditions. As the rotor rotates, centrifugal forces begin to act on the rotating parts, but especially on the hub and sleeves.
  • the expansion of the second sleeve is impeded by the first sleeve, in particular if the first sleeve is formed from a fiber-reinforced material, for example a carbon-fiber-reinforced plastic.
  • the second sleeve is now designed according to material and geometry such that the forces generated by them under the action of centrifugal forces on the first sleeve those forces come close, which act on the first sleeve by the extension of the hub.
  • the goal is in particular, in design of hub and second sleeve, the voltages in the first To bring the sleeve to a level that is compatible with its material constants. As a result, an overload of the first sleeve is avoided. It is advantageous that can be achieved with a much larger amount of operating conditions by the additional design degrees of freedom using the second sleeve, the overload of the first sleeve, wherein an operating condition is determined by among other things temperature, speed and gas load.
  • a hub 14 to which the first sleeve 16 is attached.
  • a composite forming the second sleeve 18 is provided.
  • a stator 40 is provided which cooperates with the outer surface of the first sleeve, so that the first stator and the first sleeve form a first pumping stage.
  • a second stator 44 cooperating with an inner surface of the second sleeve so that the second sleeve and the second stator form a second pumping stage.
  • the pumping stages can be flowed through in series one behind the other, the gas then follows the arrow 100. It may be desirable to operate the pumping stages in parallel.
  • at least one passage 52 can be provided in the hub, through which gas can pass through the hub into the second pumping stage along the dashed arrow 102.
  • connection 50 are connected by the second sleeve and hub.
  • Hub and second sleeve can be made in one piece at this point.
  • a pump-active structure on the inner surface of the second sleeve. This may be, for example, at least one helical groove 20. This pump-active structure increases pumping speed and compression.
  • the training according Fig. 3 refers to the supporting structure. This is designed according to the development as a support plate 60.
  • the support disk has an inner ring 66 with a shaft receiver 68, with which the support disk can be mounted on the shaft.
  • a circumferential ring of blades 62 adjoins the inner ring, so that a disk of substantially turbomolecular design is formed.
  • a support ring 64 is connected or made in one piece, to which the first sleeve 16 is fixed, which forms a composite with the second sleeve 18.
  • a rotor disk 82 of turbomolecular design for forming a turbomolecular pump section can still be provided on the shaft 12.
  • a plurality of rotor disks may be disposed on the shaft and form a first disk portion 84 and a second disk portion 86.
  • Other disc sections may be present. This creates a powerful vacuum pump for differential evacuation of a multi-chamber system.
  • the rotor after Fig. 4 In addition to a first sleeve 16 connected to the sleeve 16 has a third sleeve 78, which may also be attached to the hub 14 or on its own support structure.
  • a first stator 40 cooperates with the outer surface of the first sleeve to form a pumping stage.
  • a second stator 44 creates a pumping action with the inner surface of the second sleeve and the outer surface of the third sleeve to create a second and a third pumping stage.
  • a gas inlet 88 may be provided to admit gas between the first and second stator in the second pumping stage.
  • the rotor after Fig. 4 can be rotatably mounted with a permanent magnet bearing 80 and a second bearing 36, which may be designed as a rolling bearing or active magnetic bearing.
  • FIG. 5 Rotor and stator of a vacuum pump are shown schematically and cut, the gas flow is illustrated by arrows.
  • the shaft 12 of the rotor is supported at its suction end by a permanent magnet bearing 80.
  • a roller bearing 92 serves to support the shaft.
  • a disc-shaped hub 14 is connected to the shaft.
  • a first sleeve 16 mitrotierbar, chemical and heat resistant attached.
  • the first sleeve extends from the hub toward the suction side 104.
  • a second sleeve 18 disposed radially within the first sleeve forms a bond with the first sleeve.
  • the second sleeve may have on its radially inner surface a pump structure, for example at least one helical groove.
  • the radially inner surface of the sleeve cooperates with a second stator 44 and forms with it a molecular pumping stage.
  • the radially outer surface of the first sleeve, however, together with the stator 40 forms a molecular pumping stage.
  • One or both of the stators may have a pumping structure. In this way, a compact molecular vacuum pump created. Due to the additional pumping structure on the inner surface of the second sleeve, a high pumping speed can be achieved in this pumping stage, whereby an advantageous Saugoutheasternsabstufung the pumping stages to each other is possible.
  • the second sleeve may be integral with the hub.
  • the pumping speed of the vacuum pump after Fig. 5 can be further increased by a rotor disk 82 is mounted on the rotor on the suction side.
  • a further increase results from a stator disk 90 following in the gas flow of the rotor disk.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (14)

  1. Rotor (10) tournant rapidement pour une pompe à vide (2), comprenant une première douille (16) et une structure porteuse (14 ; 60),
    une seconde douille (18) étant agencée à l'intérieur de la première douille (16), et la première douille (16) et la seconde douille (18) formant un composite,
    caractérisé en ce que
    le composite est conçu en fonction du matériau et/ou de la géométrie au moins de la seconde douille (18) de telle sorte que les forces engendrées par la seconde douille (18) sous l'action de forces centrifuges sur la première douille (16) se rapprochent des forces qui agissent par l'extension de la structure porteuse (14 ; 60), en particulier d'un moyeu (14), sur la première douille (16).
  2. Rotor selon la revendication 1,
    caractérisé en ce que
    la première douille (16) et la seconde douille (18) diffèrent l'une de l'autre quant au matériau à partir duquel elles sont réalisées, en particulier quant à l'extension sous l'action de chaleur et/ou de forces centrifuges.
  3. Rotor selon la revendication 1 ou 2,
    caractérisé en ce que
    la première douille (16) et la seconde douille (18) sont reliées l'une à l'autre par leur surface, en particulier par toute leur surface.
  4. Rotor selon l'une des revendications précédentes,
    caractérisé en ce que
    la première douille (16) comprend un matériau renforcé par des fibres de carbone.
  5. Rotor selon l'une des revendications précédentes,
    caractérisé en ce que
    la seconde douille (18) comprend un alliage de métal.
  6. Rotor selon l'une des revendications précédentes,
    caractérisé en ce que
    la seconde douille (18) présente une gorge (20) en forme de ligne hélicoïdale sur une surface intérieure.
  7. Rotor selon l'une des revendications précédentes,
    caractérisé en ce que
    la première douille (16) et la seconde douille (18) constituent une liaison collée ou une liaison rétractée.
  8. Rotor selon l'une des revendications précédentes,
    caractérisé en ce que
    la seconde douille (18) et une partie au moins de la structure porteuse (14 ; 60) sont réalisées d'un seul tenant, ou
    en ce que la première douille (16) et une partie au moins de la structure porteuse (14 ; 60) sont reliées l'une à l'autre au moyen d'un point de collage.
  9. Rotor selon l'une des revendications précédentes,
    caractérisé en ce que
    le rotor comprend un disque de rotor (82) selon le type de construction turbomoléculaire, pour constituer au moins une portion de pompage turbomoléculaire.
  10. Rotor selon l'une des revendications précédentes,
    caractérisé en ce que
    la structure porteuse comprend un moyeu (14).
  11. Pompe à vide (2),
    caractérisée en ce que
    elle comprend un rotor (10) tournant rapidement selon l'une des revendications précédentes.
  12. Pompe à vide (2) selon la revendication 11,
    caractérisée en ce que
    elle comprend un premier stator (40) pourvu d'un canal en forme de ligne hélicoïdale qui coopère avec une surface extérieure de la première douille (16), de sorte que le premier stator et la première douille constituent un étage de pompage, en particulier un premier étage de pompage.
  13. Pompe à vide (2) selon la revendication 11 ou 12,
    caractérisée en ce que
    elle comprend un second stator (44) coopérant avec une surface intérieure de la seconde douille (18), de sorte que la seconde douille (18) et le second stator (44) constituent un étage de pompage, en particulier un second étage de pompage.
  14. Pompe à vide (2) selon l'une des revendications 11 à 13,
    caractérisée en ce que
    elle comprend une entrée de gaz (88) à travers laquelle le gaz parvient entre le premier stator (40) et le second stator (44) jusque dans un second étage de pompage comprenant le second stator (44).
EP12191948.4A 2011-11-26 2012-11-09 Rotor tournant rapidement pour une pompe à vide Active EP2597313B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012256006A JP6017278B2 (ja) 2011-11-26 2012-11-22 真空ポンプ用の高速回転ロータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011119506A DE102011119506A1 (de) 2011-11-26 2011-11-26 Schnell drehender Rotor für eine Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2597313A2 EP2597313A2 (fr) 2013-05-29
EP2597313A3 EP2597313A3 (fr) 2014-11-12
EP2597313B1 true EP2597313B1 (fr) 2018-07-25

Family

ID=47227516

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12191948.4A Active EP2597313B1 (fr) 2011-11-26 2012-11-09 Rotor tournant rapidement pour une pompe à vide

Country Status (3)

Country Link
EP (1) EP2597313B1 (fr)
JP (1) JP6017278B2 (fr)
DE (1) DE102011119506A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013207269A1 (de) 2013-04-22 2014-10-23 Pfeiffer Vacuum Gmbh Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe
DE202013006436U1 (de) * 2013-07-17 2014-10-22 Oerlikon Leybold Vacuum Gmbh Rotorelement für eine Vakuumpumpe
DE202013009462U1 (de) * 2013-10-28 2015-01-29 Oerlikon Leybold Vacuum Gmbh Trägerelement für Rohrelemente einer Holweckstufe
DE102014100622A1 (de) * 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
EP3611381B1 (fr) * 2018-08-13 2023-10-04 Pfeiffer Vacuum Gmbh Procédé de fabrication d'une pompe à vide

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19632375A1 (de) 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
FR2845737B1 (fr) * 2002-10-11 2005-01-14 Cit Alcatel Pompe turbomoleculaire a jupe composite
GB0424199D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Vacuum pump
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
JP2009108752A (ja) * 2007-10-30 2009-05-21 Edwards Kk 真空ポンプ
CN102834620B (zh) * 2010-09-28 2016-03-02 埃地沃兹日本有限公司 排气泵
JP6047091B2 (ja) * 2011-06-16 2016-12-21 エドワーズ株式会社 ロータ及び真空ポンプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
JP6017278B2 (ja) 2016-10-26
EP2597313A3 (fr) 2014-11-12
EP2597313A2 (fr) 2013-05-29
DE102011119506A1 (de) 2013-05-29
JP2013113300A (ja) 2013-06-10

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