EP2597313A3 - Rotor tournant rapidement pour une pompe à vide - Google Patents

Rotor tournant rapidement pour une pompe à vide Download PDF

Info

Publication number
EP2597313A3
EP2597313A3 EP12191948.4A EP12191948A EP2597313A3 EP 2597313 A3 EP2597313 A3 EP 2597313A3 EP 12191948 A EP12191948 A EP 12191948A EP 2597313 A3 EP2597313 A3 EP 2597313A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
high speed
speed rotor
sleeve
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12191948.4A
Other languages
German (de)
English (en)
Other versions
EP2597313B1 (fr
EP2597313A2 (fr
Inventor
Matthias Mädler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to JP2012256006A priority Critical patent/JP6017278B2/ja
Publication of EP2597313A2 publication Critical patent/EP2597313A2/fr
Publication of EP2597313A3 publication Critical patent/EP2597313A3/fr
Application granted granted Critical
Publication of EP2597313B1 publication Critical patent/EP2597313B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP12191948.4A 2011-11-26 2012-11-09 Rotor tournant rapidement pour une pompe à vide Active EP2597313B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012256006A JP6017278B2 (ja) 2011-11-26 2012-11-22 真空ポンプ用の高速回転ロータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011119506A DE102011119506A1 (de) 2011-11-26 2011-11-26 Schnell drehender Rotor für eine Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2597313A2 EP2597313A2 (fr) 2013-05-29
EP2597313A3 true EP2597313A3 (fr) 2014-11-12
EP2597313B1 EP2597313B1 (fr) 2018-07-25

Family

ID=47227516

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12191948.4A Active EP2597313B1 (fr) 2011-11-26 2012-11-09 Rotor tournant rapidement pour une pompe à vide

Country Status (3)

Country Link
EP (1) EP2597313B1 (fr)
JP (1) JP6017278B2 (fr)
DE (1) DE102011119506A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013207269A1 (de) 2013-04-22 2014-10-23 Pfeiffer Vacuum Gmbh Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe
DE202013006436U1 (de) * 2013-07-17 2014-10-22 Oerlikon Leybold Vacuum Gmbh Rotorelement für eine Vakuumpumpe
DE202013009462U1 (de) * 2013-10-28 2015-01-29 Oerlikon Leybold Vacuum Gmbh Trägerelement für Rohrelemente einer Holweckstufe
DE102014100622A1 (de) * 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
EP3611381B1 (fr) * 2018-08-13 2023-10-04 Pfeiffer Vacuum Gmbh Procédé de fabrication d'une pompe à vide

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1408237A1 (fr) * 2002-10-11 2004-04-14 Alcatel Pompe turbomoléculaire
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
JP2009108752A (ja) * 2007-10-30 2009-05-21 Edwards Kk 真空ポンプ
EP2722528A1 (fr) * 2011-06-16 2014-04-23 Edwards Japan Limited Rotor et pompe à vide

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19632375A1 (de) 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
GB0424199D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Vacuum pump
JP5763660B2 (ja) * 2010-09-28 2015-08-12 エドワーズ株式会社 排気ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1408237A1 (fr) * 2002-10-11 2004-04-14 Alcatel Pompe turbomoléculaire
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
JP2009108752A (ja) * 2007-10-30 2009-05-21 Edwards Kk 真空ポンプ
EP2722528A1 (fr) * 2011-06-16 2014-04-23 Edwards Japan Limited Rotor et pompe à vide

Also Published As

Publication number Publication date
EP2597313B1 (fr) 2018-07-25
EP2597313A2 (fr) 2013-05-29
JP2013113300A (ja) 2013-06-10
JP6017278B2 (ja) 2016-10-26
DE102011119506A1 (de) 2013-05-29

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