EP1760760A3 - Vorrichtung zur Erzeugung von Röntgen- oder XUV-Strahlung - Google Patents

Vorrichtung zur Erzeugung von Röntgen- oder XUV-Strahlung Download PDF

Info

Publication number
EP1760760A3
EP1760760A3 EP06016388A EP06016388A EP1760760A3 EP 1760760 A3 EP1760760 A3 EP 1760760A3 EP 06016388 A EP06016388 A EP 06016388A EP 06016388 A EP06016388 A EP 06016388A EP 1760760 A3 EP1760760 A3 EP 1760760A3
Authority
EP
European Patent Office
Prior art keywords
deflection
particle beam
point
ray
generation unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06016388A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1760760A2 (de
Inventor
Alfred Reinhold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Comet GmbH
Original Assignee
Comet GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Comet GmbH filed Critical Comet GmbH
Publication of EP1760760A2 publication Critical patent/EP1760760A2/de
Publication of EP1760760A3 publication Critical patent/EP1760760A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/087—Deviation, concentration or focusing of the beam by electric or magnetic means by electrical means
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/30—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • X-Ray Techniques (AREA)
  • Particle Accelerators (AREA)
  • Electron Beam Exposure (AREA)
  • Measurement Of Radiation (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
EP06016388A 2005-09-03 2006-08-05 Vorrichtung zur Erzeugung von Röntgen- oder XUV-Strahlung Withdrawn EP1760760A3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005041923A DE102005041923A1 (de) 2005-09-03 2005-09-03 Vorrichtung zur Erzeugung von Röntgen- oder XUV-Strahlung

Publications (2)

Publication Number Publication Date
EP1760760A2 EP1760760A2 (de) 2007-03-07
EP1760760A3 true EP1760760A3 (de) 2008-07-09

Family

ID=37114464

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06016388A Withdrawn EP1760760A3 (de) 2005-09-03 2006-08-05 Vorrichtung zur Erzeugung von Röntgen- oder XUV-Strahlung

Country Status (11)

Country Link
US (1) US20070051907A1 (ru)
EP (1) EP1760760A3 (ru)
JP (1) JP2007073517A (ru)
KR (1) KR20070026024A (ru)
CN (1) CN1959924A (ru)
AU (1) AU2006203782A1 (ru)
CA (1) CA2558216A1 (ru)
DE (1) DE102005041923A1 (ru)
IL (1) IL177803A0 (ru)
RU (1) RU2006131616A (ru)
TW (1) TW200715337A (ru)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602007012126D1 (de) * 2006-10-13 2011-03-03 Philips Intellectual Property Röntgenstrahlemissionsvorrichtung und verfahren zug eines röntgenstrahls in einer röntgenstrahlemissionsvorrichtung
DE102006062452B4 (de) 2006-12-28 2008-11-06 Comet Gmbh Röntgenröhre und Verfahren zur Prüfung eines Targets einer Röntgenröhre
DE102008038569A1 (de) * 2008-08-20 2010-02-25 Siemens Aktiengesellschaft Röntgenröhre
JP5687001B2 (ja) * 2009-08-31 2015-03-18 浜松ホトニクス株式会社 Ｘ線発生装置
JP5347138B2 (ja) * 2010-12-27 2013-11-20 双葉電子工業株式会社 光殺菌装置および紫外線エックス線発生装置
JP5167475B2 (ja) * 2010-12-27 2013-03-21 双葉電子工業株式会社 光殺菌装置および紫外線エックス線発生装置
EP2862182B1 (en) * 2012-06-14 2018-01-31 Excillum AB Limiting migration of target material
DE102012216977B4 (de) * 2012-09-21 2016-01-21 Siemens Aktiengesellschaft Vorrichtung zur Erzeugung von Röntgenstrahlung
EP2763156A1 (en) * 2013-02-05 2014-08-06 Nordson Corporation X-ray source with improved target lifetime
DE102020134488A1 (de) * 2020-12-21 2022-06-23 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Röntgenquelle und Betriebsverfahren hierfür
DE102020134487A1 (de) * 2020-12-21 2022-06-23 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Röntgenquelle und Betriebsverfahren hierfür
US20240130028A1 (en) * 2022-10-18 2024-04-18 Carl Zeiss X-ray Microscopy, Inc. Reflection target X-ray source with steered beam on target

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1063286B (de) * 1958-01-22 1959-08-13 Foerderung Forschung Gmbh Verfahren und Einrichtung zum Einstellen der Lage des durch einen Kathodenstrahl erzeugten Brennflecks auf der Antikathode einer Roentgenroehre
DE2364142A1 (de) * 1972-12-27 1974-07-04 Jeol Ltd Roentgenstrahlenquelle
JPH0218844A (ja) * 1988-07-07 1990-01-23 Jeol Ltd 電子顕微鏡の自動絞り軸合わせ装置
US20010001010A1 (en) * 1997-04-08 2001-05-10 Wilkins Stephen William High resolution x-ray imaging of very small objects
JP2001319608A (ja) * 2000-05-10 2001-11-16 Shimadzu Corp マイクロフォーカスｘ線発生装置
WO2003032359A2 (en) * 2001-10-10 2003-04-17 Applied Materials Isreal Limited Method and device for aligning a charged particle beam column
JP2003344596A (ja) * 2002-05-30 2003-12-03 Shimadzu Corp Ｘ線管の光軸合わせ方法
JP2004014402A (ja) * 2002-06-10 2004-01-15 Shimadzu Corp Ｘ線装置
EP1557864A1 (en) * 2004-01-23 2005-07-27 Tohken Co., Ltd. X-ray microscopic inspection apparatus

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1057284A (en) * 1912-11-08 1913-03-25 Karl Kamillo Schmidt Process of artificially staining woods.
US3138729A (en) * 1961-09-18 1964-06-23 Philips Electronic Pharma Ultra-soft X-ray source
CH542510A (de) * 1971-12-27 1973-09-30 Siemens Ag Röntgenröhre
US4075489A (en) * 1977-01-21 1978-02-21 Simulation Physics Method and apparatus involving the generation of x-rays
US4523327A (en) * 1983-01-05 1985-06-11 The United States Of America As Represented By The Secretary Of The Air Force Multi-color X-ray line source
DE3401749A1 (de) * 1984-01-19 1985-08-01 Siemens AG, 1000 Berlin und 8000 München Roentgendiagnostikeinrichtung mit einer roentgenroehre
US4933552A (en) * 1988-10-06 1990-06-12 International Business Machines Corporation Inspection system utilizing retarding field back scattered electron collection
US5136167A (en) * 1991-01-07 1992-08-04 International Business Machines Corporation Electron beam lens and deflection system for plural-level telecentric deflection
US5224137A (en) * 1991-05-23 1993-06-29 Imatron, Inc. Tuning the scanning electron beam computed tomography scanner
DE19513291C2 (de) * 1995-04-07 1998-11-12 Siemens Ag Röntgenröhre
FI102697B (fi) * 1997-06-26 1999-01-29 Metorex Internat Oy Polarisoitua herätesäteilyä hyödyntävä röntgenfluoresenssimittausjärje stely ja röntgenputki
US6639221B2 (en) * 2002-01-18 2003-10-28 Nikon Corporation Annular illumination method for charged particle projection optics
DE20213975U1 (de) * 2002-09-06 2002-12-19 LZH Laserzentrum Hannover e.V., 30419 Hannover Einrichtung zur Erzeugung von UV-Strahlung, insbesondere EUV-Strahlung
DE10301071A1 (de) * 2003-01-14 2004-07-22 Siemens Ag Vorrichtung und Verfahren zum Einstellen der Brennfleckposition einer Röntgenröhre
US7218703B2 (en) * 2003-11-21 2007-05-15 Tohken Co., Ltd. X-ray microscopic inspection apparatus

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1063286B (de) * 1958-01-22 1959-08-13 Foerderung Forschung Gmbh Verfahren und Einrichtung zum Einstellen der Lage des durch einen Kathodenstrahl erzeugten Brennflecks auf der Antikathode einer Roentgenroehre
DE2364142A1 (de) * 1972-12-27 1974-07-04 Jeol Ltd Roentgenstrahlenquelle
JPH0218844A (ja) * 1988-07-07 1990-01-23 Jeol Ltd 電子顕微鏡の自動絞り軸合わせ装置
US20010001010A1 (en) * 1997-04-08 2001-05-10 Wilkins Stephen William High resolution x-ray imaging of very small objects
JP2001319608A (ja) * 2000-05-10 2001-11-16 Shimadzu Corp マイクロフォーカスｘ線発生装置
WO2003032359A2 (en) * 2001-10-10 2003-04-17 Applied Materials Isreal Limited Method and device for aligning a charged particle beam column
JP2003344596A (ja) * 2002-05-30 2003-12-03 Shimadzu Corp Ｘ線管の光軸合わせ方法
JP2004014402A (ja) * 2002-06-10 2004-01-15 Shimadzu Corp Ｘ線装置
EP1557864A1 (en) * 2004-01-23 2005-07-27 Tohken Co., Ltd. X-ray microscopic inspection apparatus

Also Published As

Publication number Publication date
DE102005041923A1 (de) 2007-03-08
CN1959924A (zh) 2007-05-09
CA2558216A1 (en) 2007-03-03
EP1760760A2 (de) 2007-03-07
JP2007073517A (ja) 2007-03-22
IL177803A0 (en) 2006-12-31
US20070051907A1 (en) 2007-03-08
RU2006131616A (ru) 2008-03-10
AU2006203782A1 (en) 2007-03-22
TW200715337A (en) 2007-04-16
KR20070026024A (ko) 2007-03-08

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