EP1760760A3 - x-ray or XUV generation unit - Google Patents

x-ray or XUV generation unit Download PDF

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Publication number
EP1760760A3
EP1760760A3 EP06016388A EP06016388A EP1760760A3 EP 1760760 A3 EP1760760 A3 EP 1760760A3 EP 06016388 A EP06016388 A EP 06016388A EP 06016388 A EP06016388 A EP 06016388A EP 1760760 A3 EP1760760 A3 EP 1760760A3
Authority
EP
European Patent Office
Prior art keywords
deflection
particle beam
point
ray
generation unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06016388A
Other languages
German (de)
French (fr)
Other versions
EP1760760A2 (en
Inventor
Alfred Reinhold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Comet GmbH
Original Assignee
Comet GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Comet GmbH filed Critical Comet GmbH
Publication of EP1760760A2 publication Critical patent/EP1760760A2/en
Publication of EP1760760A3 publication Critical patent/EP1760760A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/087—Deviation, concentration or focusing of the beam by electric or magnetic means by electrical means
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/30—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • X-Ray Techniques (AREA)
  • Electron Beam Exposure (AREA)
  • Particle Accelerators (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

Eine erfindungsgemäße Vorrichtung 2 zur Erzeugung von Röntgen- oder XUV-Strahlung weist Mittel zum Richten eines Teilchenstrahles 12 elektrisch geladener Teilchen auf ein Target 16 auf. Erfindungsgemäß sind Ablenkmittel zum Ablenken des Teilchenstrahles 12 derart, daß die Zentralachse 18 des Teilchenstrahles 12 durch einen ersten Ablenkpunkt 20 und einen zu dem ersten Ablenkpunkt 20 in Strahlrichtung beabstandeten zweiten Ablenkpunkt 22 verläuft, wobei der erste und der zweite Ablenkpunkt 20, 22 in Achse mit einem vorgebenen oder vorgebbaren Auftreffpunkt 24 des Teilchenstrahles 12 auf dem Target 16 liegen und wobei der Teilchenstrahl durch die Ablenkmittel in Strahlrichtung im Bereich eines Ablenkpunktes 20, 22 unabhängig von einer Ablenkung des Teilchenstrahles 12 im Bereich des anderen Ablenkpunktes 22, 20 ablenkbar ist.

Figure imgaf001
A device 2 according to the invention for generating X-ray or XUV radiation has means for directing a particle beam 12 of electrically charged particles onto a target 16. In accordance with the invention, deflection means for deflecting the particle beam 12 are such that the central axis 18 of the particle beam 12 passes through a first deflection point 20 and a second deflection point 22 spaced from the first deflection point 20 in the beam direction, with the first and second deflection points 20, 22 in axis a predetermined or predetermined impingement point 24 of the particle beam 12 lie on the target 16 and wherein the particle is deflected by the deflection means in the beam direction in the region of a deflection point 20, 22 regardless of a deflection of the particle beam 12 in the region of the other deflection point 22, 20.
Figure imgaf001
EP06016388A 2005-09-03 2006-08-05 x-ray or XUV generation unit Withdrawn EP1760760A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005041923A DE102005041923A1 (en) 2005-09-03 2005-09-03 Device for generating X-ray or XUV radiation

Publications (2)

Publication Number Publication Date
EP1760760A2 EP1760760A2 (en) 2007-03-07
EP1760760A3 true EP1760760A3 (en) 2008-07-09

Family

ID=37114464

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06016388A Withdrawn EP1760760A3 (en) 2005-09-03 2006-08-05 x-ray or XUV generation unit

Country Status (11)

Country Link
US (1) US20070051907A1 (en)
EP (1) EP1760760A3 (en)
JP (1) JP2007073517A (en)
KR (1) KR20070026024A (en)
CN (1) CN1959924A (en)
AU (1) AU2006203782A1 (en)
CA (1) CA2558216A1 (en)
DE (1) DE102005041923A1 (en)
IL (1) IL177803A0 (en)
RU (1) RU2006131616A (en)
TW (1) TW200715337A (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7839979B2 (en) 2006-10-13 2010-11-23 Koninklijke Philips Electronics N.V. Electron optical apparatus, X-ray emitting device and method of producing an electron beam
DE102006062452B4 (en) 2006-12-28 2008-11-06 Comet Gmbh X-ray tube and method for testing an X-ray tube target
DE102008038569A1 (en) * 2008-08-20 2010-02-25 Siemens Aktiengesellschaft X-ray tube
JP5687001B2 (en) * 2009-08-31 2015-03-18 浜松ホトニクス株式会社 X-ray generator
JP5167475B2 (en) * 2010-12-27 2013-03-21 双葉電子工業株式会社 Photodisinfection device and ultraviolet X-ray generator
JP5347138B2 (en) * 2010-12-27 2013-11-20 双葉電子工業株式会社 Photodisinfection device and ultraviolet X-ray generator
EP2862182B1 (en) * 2012-06-14 2018-01-31 Excillum AB Limiting migration of target material
DE102012216977B4 (en) * 2012-09-21 2016-01-21 Siemens Aktiengesellschaft Device for generating X-ray radiation
EP2763156A1 (en) * 2013-02-05 2014-08-06 Nordson Corporation X-ray source with improved target lifetime
DE102020134487A1 (en) * 2020-12-21 2022-06-23 Helmut Fischer GmbH Institut für Elektronik und Messtechnik X-ray source and method of operation therefor
DE102020134488A1 (en) * 2020-12-21 2022-06-23 Helmut Fischer GmbH Institut für Elektronik und Messtechnik X-ray source and method of operation therefor

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1063286B (en) * 1958-01-22 1959-08-13 Foerderung Forschung Gmbh Method and device for adjusting the position of the focal spot generated by a cathode ray on the anti-cathode of an X-ray tube
DE2364142A1 (en) * 1972-12-27 1974-07-04 Jeol Ltd X-RAY SOURCE
JPH0218844A (en) * 1988-07-07 1990-01-23 Jeol Ltd Automatic diaphragm centering device for electron microscope
US20010001010A1 (en) * 1997-04-08 2001-05-10 Wilkins Stephen William High resolution x-ray imaging of very small objects
JP2001319608A (en) * 2000-05-10 2001-11-16 Shimadzu Corp Micro-focusing x-ray generator
WO2003032359A2 (en) * 2001-10-10 2003-04-17 Applied Materials Isreal Limited Method and device for aligning a charged particle beam column
JP2003344596A (en) * 2002-05-30 2003-12-03 Shimadzu Corp Method of aligning optical axis of x-ray tube
JP2004014402A (en) * 2002-06-10 2004-01-15 Shimadzu Corp X-ray apparatus
EP1557864A1 (en) * 2004-01-23 2005-07-27 Tohken Co., Ltd. X-ray microscopic inspection apparatus

Family Cites Families (15)

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Publication number Priority date Publication date Assignee Title
US1057284A (en) * 1912-11-08 1913-03-25 Karl Kamillo Schmidt Process of artificially staining woods.
US3138729A (en) * 1961-09-18 1964-06-23 Philips Electronic Pharma Ultra-soft X-ray source
CH542510A (en) * 1971-12-27 1973-09-30 Siemens Ag X-ray tube
US4075489A (en) * 1977-01-21 1978-02-21 Simulation Physics Method and apparatus involving the generation of x-rays
US4523327A (en) * 1983-01-05 1985-06-11 The United States Of America As Represented By The Secretary Of The Air Force Multi-color X-ray line source
DE3401749A1 (en) * 1984-01-19 1985-08-01 Siemens AG, 1000 Berlin und 8000 München X-RAY DIAGNOSTIC DEVICE WITH AN X-RAY TUBE
US4933552A (en) * 1988-10-06 1990-06-12 International Business Machines Corporation Inspection system utilizing retarding field back scattered electron collection
US5136167A (en) * 1991-01-07 1992-08-04 International Business Machines Corporation Electron beam lens and deflection system for plural-level telecentric deflection
US5224137A (en) * 1991-05-23 1993-06-29 Imatron, Inc. Tuning the scanning electron beam computed tomography scanner
DE19513291C2 (en) * 1995-04-07 1998-11-12 Siemens Ag X-ray tube
FI102697B1 (en) * 1997-06-26 1999-01-29 Metorex Int Oy X-ray fluorescence measurement arrangement that uses polarized excitation radiation and an X-ray tube
US6639221B2 (en) * 2002-01-18 2003-10-28 Nikon Corporation Annular illumination method for charged particle projection optics
DE20213975U1 (en) * 2002-09-06 2002-12-19 Lzh Laserzentrum Hannover Ev Device for generating UV radiation, in particular EUV radiation
DE10301071A1 (en) * 2003-01-14 2004-07-22 Siemens Ag Adjusting x-ray tube focal spot position involves measuring spot position signal, generating deflection signal depending on position signal, applying deflection signal to electron beam deflector
US7218703B2 (en) * 2003-11-21 2007-05-15 Tohken Co., Ltd. X-ray microscopic inspection apparatus

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1063286B (en) * 1958-01-22 1959-08-13 Foerderung Forschung Gmbh Method and device for adjusting the position of the focal spot generated by a cathode ray on the anti-cathode of an X-ray tube
DE2364142A1 (en) * 1972-12-27 1974-07-04 Jeol Ltd X-RAY SOURCE
JPH0218844A (en) * 1988-07-07 1990-01-23 Jeol Ltd Automatic diaphragm centering device for electron microscope
US20010001010A1 (en) * 1997-04-08 2001-05-10 Wilkins Stephen William High resolution x-ray imaging of very small objects
JP2001319608A (en) * 2000-05-10 2001-11-16 Shimadzu Corp Micro-focusing x-ray generator
WO2003032359A2 (en) * 2001-10-10 2003-04-17 Applied Materials Isreal Limited Method and device for aligning a charged particle beam column
JP2003344596A (en) * 2002-05-30 2003-12-03 Shimadzu Corp Method of aligning optical axis of x-ray tube
JP2004014402A (en) * 2002-06-10 2004-01-15 Shimadzu Corp X-ray apparatus
EP1557864A1 (en) * 2004-01-23 2005-07-27 Tohken Co., Ltd. X-ray microscopic inspection apparatus

Also Published As

Publication number Publication date
CA2558216A1 (en) 2007-03-03
EP1760760A2 (en) 2007-03-07
CN1959924A (en) 2007-05-09
US20070051907A1 (en) 2007-03-08
AU2006203782A1 (en) 2007-03-22
TW200715337A (en) 2007-04-16
IL177803A0 (en) 2006-12-31
RU2006131616A (en) 2008-03-10
JP2007073517A (en) 2007-03-22
DE102005041923A1 (en) 2007-03-08
KR20070026024A (en) 2007-03-08

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