EP1760760A3 - Vorrichtung zur Erzeugung von Röntgen- oder XUV-Strahlung - Google Patents
Vorrichtung zur Erzeugung von Röntgen- oder XUV-Strahlung Download PDFInfo
- Publication number
- EP1760760A3 EP1760760A3 EP06016388A EP06016388A EP1760760A3 EP 1760760 A3 EP1760760 A3 EP 1760760A3 EP 06016388 A EP06016388 A EP 06016388A EP 06016388 A EP06016388 A EP 06016388A EP 1760760 A3 EP1760760 A3 EP 1760760A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- deflection
- particle beam
- point
- ray
- generation unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
- G21K1/087—Deviation, concentration or focusing of the beam by electric or magnetic means by electrical means
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/147—Spot size control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/153—Spot position control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
- H01J35/30—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- X-Ray Techniques (AREA)
- Particle Accelerators (AREA)
- Measurement Of Radiation (AREA)
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005041923A DE102005041923A1 (de) | 2005-09-03 | 2005-09-03 | Vorrichtung zur Erzeugung von Röntgen- oder XUV-Strahlung |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1760760A2 EP1760760A2 (de) | 2007-03-07 |
EP1760760A3 true EP1760760A3 (de) | 2008-07-09 |
Family
ID=37114464
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06016388A Withdrawn EP1760760A3 (de) | 2005-09-03 | 2006-08-05 | Vorrichtung zur Erzeugung von Röntgen- oder XUV-Strahlung |
Country Status (11)
Country | Link |
---|---|
US (1) | US20070051907A1 (de) |
EP (1) | EP1760760A3 (de) |
JP (1) | JP2007073517A (de) |
KR (1) | KR20070026024A (de) |
CN (1) | CN1959924A (de) |
AU (1) | AU2006203782A1 (de) |
CA (1) | CA2558216A1 (de) |
DE (1) | DE102005041923A1 (de) |
IL (1) | IL177803A0 (de) |
RU (1) | RU2006131616A (de) |
TW (1) | TW200715337A (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE602007012126D1 (de) * | 2006-10-13 | 2011-03-03 | Philips Intellectual Property | Röntgenstrahlemissionsvorrichtung und verfahren zug eines röntgenstrahls in einer röntgenstrahlemissionsvorrichtung |
DE102006062452B4 (de) | 2006-12-28 | 2008-11-06 | Comet Gmbh | Röntgenröhre und Verfahren zur Prüfung eines Targets einer Röntgenröhre |
DE102008038569A1 (de) * | 2008-08-20 | 2010-02-25 | Siemens Aktiengesellschaft | Röntgenröhre |
JP5687001B2 (ja) * | 2009-08-31 | 2015-03-18 | 浜松ホトニクス株式会社 | X線発生装置 |
JP5347138B2 (ja) * | 2010-12-27 | 2013-11-20 | 双葉電子工業株式会社 | 光殺菌装置および紫外線エックス線発生装置 |
JP5167475B2 (ja) * | 2010-12-27 | 2013-03-21 | 双葉電子工業株式会社 | 光殺菌装置および紫外線エックス線発生装置 |
WO2013185829A1 (en) * | 2012-06-14 | 2013-12-19 | Excillum Ab | Limiting migration of target material |
DE102012216977B4 (de) * | 2012-09-21 | 2016-01-21 | Siemens Aktiengesellschaft | Vorrichtung zur Erzeugung von Röntgenstrahlung |
EP2763156A1 (de) * | 2013-02-05 | 2014-08-06 | Nordson Corporation | Röntgenstrahlquelle mit erhöhter Lebensdauer des Targets |
DE102020134487A1 (de) * | 2020-12-21 | 2022-06-23 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Röntgenquelle und Betriebsverfahren hierfür |
DE102020134488A1 (de) * | 2020-12-21 | 2022-06-23 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Röntgenquelle und Betriebsverfahren hierfür |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1063286B (de) * | 1958-01-22 | 1959-08-13 | Foerderung Forschung Gmbh | Verfahren und Einrichtung zum Einstellen der Lage des durch einen Kathodenstrahl erzeugten Brennflecks auf der Antikathode einer Roentgenroehre |
DE2364142A1 (de) * | 1972-12-27 | 1974-07-04 | Jeol Ltd | Roentgenstrahlenquelle |
JPH0218844A (ja) * | 1988-07-07 | 1990-01-23 | Jeol Ltd | 電子顕微鏡の自動絞り軸合わせ装置 |
US20010001010A1 (en) * | 1997-04-08 | 2001-05-10 | Wilkins Stephen William | High resolution x-ray imaging of very small objects |
JP2001319608A (ja) * | 2000-05-10 | 2001-11-16 | Shimadzu Corp | マイクロフォーカスx線発生装置 |
WO2003032359A2 (en) * | 2001-10-10 | 2003-04-17 | Applied Materials Isreal Limited | Method and device for aligning a charged particle beam column |
JP2003344596A (ja) * | 2002-05-30 | 2003-12-03 | Shimadzu Corp | X線管の光軸合わせ方法 |
JP2004014402A (ja) * | 2002-06-10 | 2004-01-15 | Shimadzu Corp | X線装置 |
EP1557864A1 (de) * | 2004-01-23 | 2005-07-27 | Tohken Co., Ltd. | Röntgenmikroskopischer Inspektionsapparat |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1057284A (en) * | 1912-11-08 | 1913-03-25 | Karl Kamillo Schmidt | Process of artificially staining woods. |
US3138729A (en) * | 1961-09-18 | 1964-06-23 | Philips Electronic Pharma | Ultra-soft X-ray source |
CH542510A (de) * | 1971-12-27 | 1973-09-30 | Siemens Ag | Röntgenröhre |
US4075489A (en) * | 1977-01-21 | 1978-02-21 | Simulation Physics | Method and apparatus involving the generation of x-rays |
US4523327A (en) * | 1983-01-05 | 1985-06-11 | The United States Of America As Represented By The Secretary Of The Air Force | Multi-color X-ray line source |
DE3401749A1 (de) * | 1984-01-19 | 1985-08-01 | Siemens AG, 1000 Berlin und 8000 München | Roentgendiagnostikeinrichtung mit einer roentgenroehre |
US4933552A (en) * | 1988-10-06 | 1990-06-12 | International Business Machines Corporation | Inspection system utilizing retarding field back scattered electron collection |
US5136167A (en) * | 1991-01-07 | 1992-08-04 | International Business Machines Corporation | Electron beam lens and deflection system for plural-level telecentric deflection |
US5224137A (en) * | 1991-05-23 | 1993-06-29 | Imatron, Inc. | Tuning the scanning electron beam computed tomography scanner |
DE19513291C2 (de) * | 1995-04-07 | 1998-11-12 | Siemens Ag | Röntgenröhre |
FI102697B1 (fi) * | 1997-06-26 | 1999-01-29 | Metorex Int Oy | Polarisoitua herätesäteilyä hyödyntävä röntgenfluoresenssimittausjärjestely ja röntgenputki |
US6639221B2 (en) * | 2002-01-18 | 2003-10-28 | Nikon Corporation | Annular illumination method for charged particle projection optics |
DE20213975U1 (de) * | 2002-09-06 | 2002-12-19 | LZH Laserzentrum Hannover e.V., 30419 Hannover | Einrichtung zur Erzeugung von UV-Strahlung, insbesondere EUV-Strahlung |
DE10301071A1 (de) * | 2003-01-14 | 2004-07-22 | Siemens Ag | Vorrichtung und Verfahren zum Einstellen der Brennfleckposition einer Röntgenröhre |
US7218703B2 (en) * | 2003-11-21 | 2007-05-15 | Tohken Co., Ltd. | X-ray microscopic inspection apparatus |
-
2005
- 2005-09-03 DE DE102005041923A patent/DE102005041923A1/de not_active Ceased
-
2006
- 2006-08-05 EP EP06016388A patent/EP1760760A3/de not_active Withdrawn
- 2006-08-22 KR KR1020060079227A patent/KR20070026024A/ko not_active Application Discontinuation
- 2006-08-30 AU AU2006203782A patent/AU2006203782A1/en not_active Abandoned
- 2006-08-30 CA CA002558216A patent/CA2558216A1/en not_active Abandoned
- 2006-08-31 IL IL177803A patent/IL177803A0/en unknown
- 2006-09-01 RU RU2006131616/28A patent/RU2006131616A/ru not_active Application Discontinuation
- 2006-09-04 CN CNA2006101291762A patent/CN1959924A/zh active Pending
- 2006-09-04 TW TW095132577A patent/TW200715337A/zh unknown
- 2006-09-04 JP JP2006239476A patent/JP2007073517A/ja active Pending
- 2006-09-05 US US11/515,382 patent/US20070051907A1/en not_active Abandoned
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1063286B (de) * | 1958-01-22 | 1959-08-13 | Foerderung Forschung Gmbh | Verfahren und Einrichtung zum Einstellen der Lage des durch einen Kathodenstrahl erzeugten Brennflecks auf der Antikathode einer Roentgenroehre |
DE2364142A1 (de) * | 1972-12-27 | 1974-07-04 | Jeol Ltd | Roentgenstrahlenquelle |
JPH0218844A (ja) * | 1988-07-07 | 1990-01-23 | Jeol Ltd | 電子顕微鏡の自動絞り軸合わせ装置 |
US20010001010A1 (en) * | 1997-04-08 | 2001-05-10 | Wilkins Stephen William | High resolution x-ray imaging of very small objects |
JP2001319608A (ja) * | 2000-05-10 | 2001-11-16 | Shimadzu Corp | マイクロフォーカスx線発生装置 |
WO2003032359A2 (en) * | 2001-10-10 | 2003-04-17 | Applied Materials Isreal Limited | Method and device for aligning a charged particle beam column |
JP2003344596A (ja) * | 2002-05-30 | 2003-12-03 | Shimadzu Corp | X線管の光軸合わせ方法 |
JP2004014402A (ja) * | 2002-06-10 | 2004-01-15 | Shimadzu Corp | X線装置 |
EP1557864A1 (de) * | 2004-01-23 | 2005-07-27 | Tohken Co., Ltd. | Röntgenmikroskopischer Inspektionsapparat |
Also Published As
Publication number | Publication date |
---|---|
CA2558216A1 (en) | 2007-03-03 |
IL177803A0 (en) | 2006-12-31 |
EP1760760A2 (de) | 2007-03-07 |
US20070051907A1 (en) | 2007-03-08 |
KR20070026024A (ko) | 2007-03-08 |
RU2006131616A (ru) | 2008-03-10 |
CN1959924A (zh) | 2007-05-09 |
JP2007073517A (ja) | 2007-03-22 |
AU2006203782A1 (en) | 2007-03-22 |
DE102005041923A1 (de) | 2007-03-08 |
TW200715337A (en) | 2007-04-16 |
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Legal Events
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