EP1759776A4 - DEVICE FOR REMOVING STATIC LOADS AND DUST - Google Patents

DEVICE FOR REMOVING STATIC LOADS AND DUST

Info

Publication number
EP1759776A4
EP1759776A4 EP05751544A EP05751544A EP1759776A4 EP 1759776 A4 EP1759776 A4 EP 1759776A4 EP 05751544 A EP05751544 A EP 05751544A EP 05751544 A EP05751544 A EP 05751544A EP 1759776 A4 EP1759776 A4 EP 1759776A4
Authority
EP
European Patent Office
Prior art keywords
air
processing space
dust
static charge
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05751544A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1759776A1 (en
Inventor
Takahiro Ishijima
Jun Inomata
Shigeru Ohkawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koganei Corp
Original Assignee
Koganei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koganei Corp filed Critical Koganei Corp
Publication of EP1759776A1 publication Critical patent/EP1759776A1/en
Publication of EP1759776A4 publication Critical patent/EP1759776A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
    • B08B15/023—Fume cabinets or cupboards, e.g. for laboratories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B6/00—Cleaning by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2215/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B2215/003—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area with the assistance of blowing nozzles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning In General (AREA)
  • Elimination Of Static Electricity (AREA)
EP05751544A 2004-06-22 2005-06-15 DEVICE FOR REMOVING STATIC LOADS AND DUST Withdrawn EP1759776A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004184158A JP2006007012A (ja) 2004-06-22 2004-06-22 除電除塵装置
PCT/JP2005/010924 WO2005123284A1 (ja) 2004-06-22 2005-06-15 除電除塵装置

Publications (2)

Publication Number Publication Date
EP1759776A1 EP1759776A1 (en) 2007-03-07
EP1759776A4 true EP1759776A4 (en) 2008-05-21

Family

ID=35509500

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05751544A Withdrawn EP1759776A4 (en) 2004-06-22 2005-06-15 DEVICE FOR REMOVING STATIC LOADS AND DUST

Country Status (6)

Country Link
US (1) US20090158537A1 (zh)
EP (1) EP1759776A4 (zh)
JP (1) JP2006007012A (zh)
CN (1) CN1972763A (zh)
TW (1) TW200600200A (zh)
WO (1) WO2005123284A1 (zh)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4919794B2 (ja) * 2006-12-20 2012-04-18 株式会社キーエンス 除電装置
WO2009018679A1 (fr) * 2007-08-06 2009-02-12 Acxing Industrial Co., Ltd. Dispositif générateur de rideau d'air
US8147616B2 (en) * 2007-10-22 2012-04-03 Stokely-Van Camp, Inc. Container rinsing system and method
US9168569B2 (en) 2007-10-22 2015-10-27 Stokely-Van Camp, Inc. Container rinsing system and method
JP2009285627A (ja) * 2008-05-30 2009-12-10 Sunx Ltd 除電除塵装置
JP2010000486A (ja) * 2008-06-23 2010-01-07 Sunx Ltd 除電除塵装置
JP2010005600A (ja) * 2008-06-30 2010-01-14 Sunx Ltd 除塵装置
US8141190B2 (en) * 2008-07-28 2012-03-27 Gentex Optics, Inc. Walk-up workstation employing ionizing air nozzles and insulating panels
CN101683649A (zh) * 2008-09-26 2010-03-31 无锡海达安全玻璃有限公司 一种改良的印刷玻璃的除尘装置
JP2010095267A (ja) * 2008-10-15 2010-04-30 Trinc:Kk 容器用除塵機
JP5336949B2 (ja) * 2009-06-30 2013-11-06 サントリーホールディングス株式会社 樹脂製容器の帯電除去方法、樹脂製容器の殺菌充填方法、樹脂製容器の充填キャッピング方法、樹脂製容器の帯電除去装置および樹脂製容器の殺菌充填システム
JP5541564B2 (ja) * 2009-09-03 2014-07-09 株式会社テクノ菱和 イオナイザーシステム
TW201136674A (en) * 2010-04-21 2011-11-01 Hon Hai Prec Ind Co Ltd Dust elimination device
US8370989B2 (en) * 2010-07-31 2013-02-12 Cheng Uei Precision Industry Co., Ltd. Static eliminator with dust removal feature
US8508907B2 (en) 2010-11-01 2013-08-13 eFluxor LLC Method and device for collecting electrostatic charge from the atmosphere
DE202011101114U1 (de) * 2010-11-13 2012-08-28 Waldner Laboreinrichtungen Gmbh & Co. Kg Abzugvorrichtung
CN102284450A (zh) * 2011-06-15 2011-12-21 震宇（芜湖）实业有限公司 一种塑件静电除尘装置
PT2535034E (pt) 2011-06-17 2014-07-28 Kiro Robotics Sl Máquina e método para a preparação automática de medicação intravenosa
ES2606203T3 (es) 2011-06-17 2017-03-23 Kiro Robotics, S.L. Máquina y método para la preparación automática de medicación intravenosa
CN102652945A (zh) * 2011-12-31 2012-09-05 东莞华贝电子科技有限公司 电路板自动除尘装置
CN102601075A (zh) * 2012-03-12 2012-07-25 四川科伦药业股份有限公司 一种吊环清洗记数装置
CN103381412B (zh) * 2012-05-03 2016-05-25 珠海格力电器股份有限公司 除尘装置
CN102641643B (zh) * 2012-05-14 2016-06-01 昆山天卓贸易有限公司 静电除尘系统
CN102814301A (zh) * 2012-09-07 2012-12-12 高精科技(苏州)有限公司 静电除尘装置
CN102861741A (zh) * 2012-09-19 2013-01-09 成都果范创想科技有限公司 除尘力度可控型除尘装置
CN102873061A (zh) * 2012-10-04 2013-01-16 天津天星电子有限公司 下排风的风淋室
JP5814902B2 (ja) * 2012-11-22 2015-11-17 株式会社伸興 除塵装置
CN103008290B (zh) * 2012-11-27 2016-01-20 安徽鑫龙电器股份有限公司 一种静电除尘装置
CN103861842A (zh) * 2012-12-17 2014-06-18 中国振华集团永光电子有限公司 Led模块灌封前的吹尘方法及装置
CN103068134A (zh) * 2012-12-20 2013-04-24 深圳市华测检测技术股份有限公司 检测前处理设备及方法
US9211568B2 (en) * 2013-03-12 2015-12-15 Taiwan Semiconductor Manufacturing Company Limited Clean function for semiconductor wafer scrubber
KR101771830B1 (ko) * 2013-05-20 2017-08-25 오므론 가부시키가이샤 세정 위치 확인 장치, 유체 도달 위치 확인 장치, 세정 위치 확인 시스템 및 유체 도달 위치 확인 방법
TWI483704B (zh) * 2013-05-28 2015-05-11 Uni Ring Tech Co Ltd Self - propelled cleaning equipment - Dust detection method and device
KR101531653B1 (ko) * 2013-07-16 2015-06-25 제이케이엔지니어링주식회사 터널식 용기 세정장치
CN103495574B (zh) * 2013-10-18 2015-06-03 宁波泰立电子科技有限公司 腔体滤波器离子风机腔体清洁设备
KR101666150B1 (ko) * 2014-02-17 2016-10-24 한국생산기술연구원 주사용 앰플 캡 세척장치
CN104259137A (zh) * 2014-08-29 2015-01-07 京东方光科技有限公司 一种除尘除静电装置
CN104294415B (zh) * 2014-10-08 2016-10-19 泉州市中研智能机电研究院有限公司 一种除尘弹花机
CN104624558A (zh) * 2014-12-30 2015-05-20 昆山恩都照明有限公司 自动吹气除尘装置
CN105215040B (zh) * 2015-09-28 2018-02-02 芜湖宏景电子股份有限公司 汽车导航配件除尘装置
CN105161992B (zh) * 2015-10-12 2018-11-27 浙江国正安全技术有限公司 一种净化除尘的10kv开关柜
CN105327897A (zh) * 2015-11-30 2016-02-17 重庆市贵荣塑胶制品有限公司 电脑键盘的人工静电除尘方法
CN105855242A (zh) * 2016-04-25 2016-08-17 昆山瑞鸿诚自动化设备科技有限公司 一种等离子吹风除尘设备
CN106238428B (zh) * 2016-09-19 2018-06-29 连云港康达智精密技术有限公司 镜片除尘机
CN106669311A (zh) * 2016-12-15 2017-05-17 中航复合材料有限责任公司 一种蜂窝芯材除尘装置
CN108745818A (zh) * 2018-06-28 2018-11-06 江阴名鸿车顶系统有限公司 静电除尘系统
CN108787625B (zh) * 2018-07-18 2023-09-29 郴州市海利微电子科技有限公司 离子风表面处理机
CN108746077A (zh) * 2018-08-21 2018-11-06 江西联益光学有限公司 镜头清洁设备
CN109877116A (zh) * 2019-03-14 2019-06-14 合肥清若科技有限公司 一种计算机专用的除尘装置
CN109985859B (zh) * 2019-04-24 2023-11-28 伟通工业设备（江苏）有限公司 Uv固化防雾涂装线用均匀离子型静电除尘装置
CN111251973B (zh) * 2020-03-18 2022-08-12 周家祥 一种快速除静电的石油运输车
JP7037210B2 (ja) * 2020-07-01 2022-03-16 有限会社タクショー クリーナ
CN112090912A (zh) * 2020-09-22 2020-12-18 东南大学 一种模块化气幕分隔下吸式焊接烟尘收集装置
JP7501353B2 (ja) * 2020-12-25 2024-06-18 トヨタ自動車株式会社 除塵装置、車両及び除塵方法
CN113230761A (zh) * 2021-05-28 2021-08-10 威斯坦(厦门)实业有限公司 一种用于3d打印机的烟尘过滤系统及其控制方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02154423A (ja) * 1988-12-06 1990-06-13 Nec Corp 半導体装置の製造方法
US4987630A (en) * 1989-01-17 1991-01-29 Delco Electronics Overseas Corporation Destaticizing and cleaning apparatus
US5008594A (en) * 1989-02-16 1991-04-16 Chapman Corporation Self-balancing circuit for convection air ionizers
GB2253271A (en) * 1991-02-27 1992-09-02 Seiko Instr Inc Dust cleaner and dust cleaning method
US5506744A (en) * 1994-04-28 1996-04-09 Fortrend Engineering Ionized airflow manifold for static reduction
US20020152636A1 (en) * 2000-07-24 2002-10-24 Ernst Gerard W. Apparatus and method for cleaning charged particles from objects
US6490746B1 (en) * 2000-07-24 2002-12-10 Eastman Kodak Company Apparatus and method for cleaning objects having generally irregular, undulating surface features
US6565669B1 (en) * 2000-10-31 2003-05-20 Intel Corporation Vibrating wafer particle cleaner

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4194232A (en) * 1978-03-31 1980-03-18 Cumming James M Ion treatment of photographic film
JP3112987B2 (ja) * 1991-07-11 2000-11-27 ヒムエレクトロ株式会社 除塵装置
EP1297384B1 (de) * 2000-06-27 2006-11-02 Brooks-PRI Automation (Switzerland) GmbH Vorrichtung und verfahren zur reinigung von in der produktion von halbleiterelementen benutzten objekten
JP3466581B2 (ja) * 2001-05-22 2003-11-10 株式会社ディスカバリー ヘアブラシ清掃器
JP2002213786A (ja) * 2001-11-01 2002-07-31 Hitachi Ltd エアシャワ装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02154423A (ja) * 1988-12-06 1990-06-13 Nec Corp 半導体装置の製造方法
US4987630A (en) * 1989-01-17 1991-01-29 Delco Electronics Overseas Corporation Destaticizing and cleaning apparatus
US5008594A (en) * 1989-02-16 1991-04-16 Chapman Corporation Self-balancing circuit for convection air ionizers
GB2253271A (en) * 1991-02-27 1992-09-02 Seiko Instr Inc Dust cleaner and dust cleaning method
US5506744A (en) * 1994-04-28 1996-04-09 Fortrend Engineering Ionized airflow manifold for static reduction
US20020152636A1 (en) * 2000-07-24 2002-10-24 Ernst Gerard W. Apparatus and method for cleaning charged particles from objects
US6490746B1 (en) * 2000-07-24 2002-12-10 Eastman Kodak Company Apparatus and method for cleaning objects having generally irregular, undulating surface features
US6565669B1 (en) * 2000-10-31 2003-05-20 Intel Corporation Vibrating wafer particle cleaner

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2005123284A1 *

Also Published As

Publication number Publication date
CN1972763A (zh) 2007-05-30
JP2006007012A (ja) 2006-01-12
US20090158537A1 (en) 2009-06-25
EP1759776A1 (en) 2007-03-07
TW200600200A (en) 2006-01-01
WO2005123284A1 (ja) 2005-12-29

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