EP1506326A1 - Systeme de couches structure - Google Patents

Systeme de couches structure

Info

Publication number
EP1506326A1
EP1506326A1 EP03711781A EP03711781A EP1506326A1 EP 1506326 A1 EP1506326 A1 EP 1506326A1 EP 03711781 A EP03711781 A EP 03711781A EP 03711781 A EP03711781 A EP 03711781A EP 1506326 A1 EP1506326 A1 EP 1506326A1
Authority
EP
European Patent Office
Prior art keywords
layer
workpiece
layer system
workpiece according
sliding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03711781A
Other languages
German (de)
English (en)
Inventor
Orlaw Massler
Christian Wohlrab
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Unaxis Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Balzers AG filed Critical Unaxis Balzers AG
Publication of EP1506326A1 publication Critical patent/EP1506326A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/10Construction relative to lubrication
    • F16C33/1025Construction relative to lubrication with liquid, e.g. oil, as lubricant
    • F16C33/106Details of distribution or circulation inside the bearings, e.g. details of the bearing surfaces to affect flow or pressure of the liquid
    • F16C33/1075Wedges, e.g. ramps or lobes, for generating pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/043Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/10Construction relative to lubrication
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/10Construction relative to lubrication
    • F16C33/1025Construction relative to lubrication with liquid, e.g. oil, as lubricant
    • F16C33/103Construction relative to lubrication with liquid, e.g. oil, as lubricant retained in or near the bearing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/02Carbon based material
    • F16C2206/04Diamond like carbon [DLC]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S384/00Bearings
    • Y10S384/90Cooling or heating
    • Y10S384/907Bearing material or solid lubricant
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/30Self-sustaining carbon mass or layer with impregnant or other layer

Definitions

  • the invention relates to a workpiece coated with a layer system according to the preamble of patent claims 1 and 4, and to a method for producing such a workpiece according to the preamble of patent claims 18 and 20.
  • Preferred embodiments of the invention are in the corresponding dependent claims 2 to 3, 5 to 17, and 19 and 21 to 27 claimed.
  • US Pat. No. 4,573,690 discloses a body moved against a sealing ring with defined depressions on the surface and a mechanical method for producing the depressions.
  • the latter in use, cause pressure fluctuations of a lubricant introduced between the sealing ring and the body, which is to avoid tearing off the lubricating film and thus direct contact with solid surfaces.
  • No. 5,473,138 describes a method for enlarging metallic and ceramic surfaces by means of laser radiation.
  • WO 98/14710 describes a method for producing a plain bearing, with an optimized pore distribution, for example is generated by means of a pulse laser on a sliding surface of a bearing.
  • a disadvantage of the above-mentioned components is that, in the event of insufficient lubrication conditions, contact between two materials that are similar or even identical in terms of their surface properties is still possible. Cold welding or seizure of, for example, a metallic material combination (eg sealing ring / counter body) cannot always be reliably avoided under such conditions. This also applies in particular to complex machines with tribologically stressed parts, on which, due to high relative speeds and / or surface pressures, conditions of insufficient lubrication and correspondingly increased wear can occur. Examples from engine construction are valve drives in modern, high-performance internal combustion engines, in which bucket tappets and piston rings in particular are exposed to extremely high loads. Tools with a textured surface structure are also known from U. Popp et al.
  • microstructures into a layer system applied at least partially on the functional surface (s) of a workpiece such that the vertical expansion of the (three-dimensional) microstructure extends from the surface of the layer system through the layer into the workpiece extends so that it is uncoated in a lower region of the structure.
  • a ratio d / s of the layer thickness d to the structure depth s between 0.05 and 0.9, preferably between 0.1 and 0.6.
  • the for setting the retention of lubricants as well as the structural depth • and geometry substantial area coverage, ⁇ ie the ratio of the surface of the microstructure to the total with a textured pattern provided surface was set between 10 and 50%, the best results but with a degree of area coverage achieved by 15-35%.
  • the cross section of the recesses was used for small structures or structural cross sections, i.e. Structures with the largest lateral dimension between 5 and 350 ⁇ m, circular, but preferably chosen conical.
  • the tangential angle i.e. the angle between the surface horizontal and a straight line that is intended to be adjacent to the sloping structure flank, as flat as possible, i.e. below 20 °, but preferably below 10 ° or 5 °.
  • the structures were produced using a laser beam, with circular structures being produced for the sake of simplicity.
  • circular structures being produced for the sake of simplicity.
  • differently shaped structures for example circular, elliptical, linear, triangular, quadrangular or polygonal, or else more complex structures, can also be used advantageously in individual applications.
  • test results also surprisingly showed that workpieces coated with DLC and with Me / C, MeC / C or WC / C sliding layer systems, even with conventionally produced structures, significantly improve the tribological properties compared to structured hard layers such as e.g. Enable TiAlN or previously known structured TiN layers.
  • aC: H: Si, ie silicon / carbon layers, aC: H: Si: Me, ie silicon / carbon / metal layers, aC: H / a- Si: 0, ie carbon / silicon oxide layers are suitable, which can be produced with properties similar to the above-mentioned carbon-containing layers.
  • tungsten In addition to the tungsten mentioned here, other metals, such as Ti, Zr, Hf, V, Nb, Ta, Mo, or Fe, but preferably Cr for the Me / C, MeC / C and aC: H: Si: Me layers are used. A combination of several metals is also possible.
  • the first layer of the layer system is advantageously an adhesive layer consisting of one or more metals of the abovementioned selection. If the layer system consists of at least one hard layer and at least one carbon-containing sliding layer, an additional metallic intermediate layer which separates the hard layer and sliding layer can be advantageous. A combination of several metals, in particular those mentioned above, is also possible.
  • graded layer transitions can also be used to optimize the layer properties. For example, it is advantageous to provide carbon-containing layers with a proportion of carbon rising from a metallic adhesive layer towards the surface.
  • the total layer thickness of the layer system can be set between 0.5-20 ⁇ m depending on the planned application. Due to the abrasive wear due to the introduction of particles, which often also occurs in lubricated tribological systems, a minimum layer thickness of one micrometer is preferable in many cases. Due to the economics of the process when depositing PVD layers, a maximum layer thickness of approx.
  • Layers structured according to the invention can be used particularly advantageously on components which have at least one functional surface designed as a sliding surface. Examples of this are plain bearings, sliding seals, sealing rings, piston rings, bucket tappets, rocker arms or crankshafts.
  • Layers structured according to the invention can also be applied to tools which have at least one functional surface designed as a sliding surface.
  • tools which have at least one functional surface designed as a sliding surface. Examples of this are, in particular, cutting tools with at least one rake face for turning, broaching or milling applications or forming tools with at least one extrusion surface such as, for example, massive solid forming tools.
  • these are first coated using a combined PVD / CVD process, a layer system having been deposited on the functional surface.
  • an adhesive layer is applied using a PVD sputtering process and then an increasing proportion carbon-containing gas mixed with the working gas.
  • this proportion is increased to a desired maximum value and the coating process is then stopped (reactive PVD process step).
  • the layer system is to be completed with a DLC layer, the sputtering process is stopped at a certain point in time, a pulsed bias voltage is applied to the substrate, and the DLC layer is then deposited.
  • This last process step corresponds to a CVD process, since no physical evaporation takes place here. Further information on the methods used can be found in the examples below.
  • the structuring after the layer system had been applied to at least part of the functional area (s) was carried out using laser processing systems from different companies (for example Lambda Physik, SurTech, CMT Rickenbach).
  • the points were with a diameter between 50-250 microns and a depth of 10-15 microns in cubic and hexagonal
  • test series were largely carried out with circular structures with a largest diameter between 80 to 100 ⁇ m, in a cubic or hexagonal arrangement and an area coverage between 15 and 40%. This arrangement has given particularly good results in previous tests.
  • the workpieces were pretreated before or after the structure was applied using a customary cleaning process, attached to a substrate holder and held in a rotating rotating BAI 830-DLC coating system.
  • the DLC layer was deposited in accordance with a PVD / CVD method known from WO 0179585A1 with a chrome adhesive layer, a gradient layer and a pure DLC or a: C-H layer, the total layer thickness being approximately 2 ⁇ m.
  • the parameters used to deposit the a: C-H layer are given in the table below.
  • a hardness of 2500 HK 005 was measured on the deposited DLC layer. There was no increase in roughness compared to uncoated polished samples.
  • Geometry differs in that in addition to the two planar magnetron sputter sources equipped with Cr targets, another six sources of the same type equipped with pure WC or Co-bound WC targets are attached to the inner chamber circumference. Furthermore, a DC bias supply, but no pulse bias supply, is provided on this system.
  • a chrome adhesive layer is applied by applying a negative substrate bias (-75V ) sputtered on. Then a MeC: C-H layer with rising to the surface
  • a layer thickness of 2.0 ⁇ m and a layer hardness of 1000 HK 0 were measured on the deposited WC: CH layer.
  • the roughness was increased by approx. 0.01-0.02 Ra compared to uncoated polished samples.
  • Plasma sources - eight arc sources fixed to the inner circumference of the chamber in two different planes with a target diameter of 154 mm. Four of them (two at the top, two at the bottom) are equipped with Ti or Ti 05 Al 05 targets.
  • the applied layer system consists of a TiN adhesive layer, a multilayer with a layer sequence of alternating TiAlN layers with different Ti / Al Ratio, as well as a TiAlN top layer. Details can be found in the following table 7).
  • a layer thickness of 2.5 ⁇ m and a layer hardness of 3000 HK 005 were measured on the deposited TiAlN layer.
  • the increase in roughness was between 0.06-0.20 Ra compared to uncoated polished samples.
  • a WC: C-H layer deposited according to 4 was applied to a TiAlN layer produced according to 5).
  • a layer thickness of approx.4.5 ⁇ m and a layer hardness of 1500 were obtained on the deposited TiAlN / MeC: C-H layers
  • HK 005 measured.
  • the increase in roughness was between 0.06-0.20 Ra compared to uncoated polished samples.
  • FIG. 6 is a top view of a cubic structural pattern with circular microstructures
  • FIG. 7 is a top view of a hexagonal structure pattern with circular microstructures.
  • the section shown in FIG. 1 shows a known surface structure 3 on a workpiece 1 coated with a functional layer 2.
  • a structure was created on the uncoated body and the layer was then applied.
  • the section shown in FIG. 2 shows another known surface structure 3 ⁇ that was subsequently applied to the functional layer.
  • the structure depth is less than the layer thickness.
  • the section shown in FIG. 3 shows a microstructure 5 according to the invention with a layer system 4 on a workpiece 1.
  • the structure depth s is selected in a ratio, as described above, to the layer thickness d.
  • FIG. 4 shows micro structures 5 X with circular
  • 6 and 7 serve to explain the preferred cubic or hexagonal arrangements of surface structures according to the invention with hole spacing (center to center) of a and a, respectively.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Sliding-Contact Bearings (AREA)
  • Shafts, Cranks, Connecting Bars, And Related Bearings (AREA)
  • Pistons, Piston Rings, And Cylinders (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

L'invention concerne une pièce d'usinage enduite à surface microstructurée, ainsi qu'un procédé de fabrication associé. La profondeur s des microstructures est réglée de manière à être supérieure ou dans un rapport déterminé relativement à l'épaisseur de la couche d.
EP03711781A 2002-04-25 2003-04-22 Systeme de couches structure Withdrawn EP1506326A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH7022002 2002-04-25
CH702022002 2002-04-25
PCT/CH2003/000262 WO2003091474A1 (fr) 2002-04-25 2003-04-22 Systeme de couches structure

Publications (1)

Publication Number Publication Date
EP1506326A1 true EP1506326A1 (fr) 2005-02-16

Family

ID=29256406

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03711781A Withdrawn EP1506326A1 (fr) 2002-04-25 2003-04-22 Systeme de couches structure

Country Status (9)

Country Link
US (1) US7318847B2 (fr)
EP (1) EP1506326A1 (fr)
JP (1) JP2006509967A (fr)
KR (1) KR20050003384A (fr)
AU (1) AU2003218594A1 (fr)
BR (1) BR0309661A (fr)
MX (1) MXPA04010516A (fr)
WO (1) WO2003091474A1 (fr)
ZA (1) ZA200407565B (fr)

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WO2003091474A1 (fr) 2003-11-06
JP2006509967A (ja) 2006-03-23
US7318847B2 (en) 2008-01-15
AU2003218594A1 (en) 2003-11-10
BR0309661A (pt) 2005-02-22
US20050175837A1 (en) 2005-08-11
ZA200407565B (en) 2005-11-30
KR20050003384A (ko) 2005-01-10

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