EP1506326A1 - Systeme de couches structure - Google Patents
Systeme de couches structureInfo
- Publication number
- EP1506326A1 EP1506326A1 EP03711781A EP03711781A EP1506326A1 EP 1506326 A1 EP1506326 A1 EP 1506326A1 EP 03711781 A EP03711781 A EP 03711781A EP 03711781 A EP03711781 A EP 03711781A EP 1506326 A1 EP1506326 A1 EP 1506326A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- layer
- workpiece
- layer system
- workpiece according
- sliding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000576 coating method Methods 0.000 title description 18
- 239000011248 coating agent Substances 0.000 title description 16
- 238000000034 method Methods 0.000 claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 claims abstract description 12
- 239000010410 layer Substances 0.000 claims description 150
- 229910052799 carbon Inorganic materials 0.000 claims description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 239000012791 sliding layer Substances 0.000 claims description 11
- 239000012790 adhesive layer Substances 0.000 claims description 10
- 150000002739 metals Chemical class 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 238000001125 extrusion Methods 0.000 claims description 3
- 238000001020 plasma etching Methods 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910016001 MoSe Inorganic materials 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 claims description 2
- 229910052735 hafnium Inorganic materials 0.000 claims description 2
- 239000004922 lacquer Substances 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 229910052720 vanadium Inorganic materials 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 2
- 229910052804 chromium Inorganic materials 0.000 claims 2
- 238000003486 chemical etching Methods 0.000 claims 1
- 229910010037 TiAlN Inorganic materials 0.000 description 14
- 230000008569 process Effects 0.000 description 13
- 239000000463 material Substances 0.000 description 8
- 238000005240 physical vapour deposition Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000000314 lubricant Substances 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 238000005461 lubrication Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 238000010297 mechanical methods and process Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010273 cold forging Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000002480 mineral oil Substances 0.000 description 1
- 235000010446 mineral oil Nutrition 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000010099 solid forming Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/10—Construction relative to lubrication
- F16C33/1025—Construction relative to lubrication with liquid, e.g. oil, as lubricant
- F16C33/106—Details of distribution or circulation inside the bearings, e.g. details of the bearing surfaces to affect flow or pressure of the liquid
- F16C33/1075—Wedges, e.g. ramps or lobes, for generating pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/043—Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/10—Construction relative to lubrication
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/10—Construction relative to lubrication
- F16C33/1025—Construction relative to lubrication with liquid, e.g. oil, as lubricant
- F16C33/103—Construction relative to lubrication with liquid, e.g. oil, as lubricant retained in or near the bearing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/02—Carbon based material
- F16C2206/04—Diamond like carbon [DLC]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S384/00—Bearings
- Y10S384/90—Cooling or heating
- Y10S384/907—Bearing material or solid lubricant
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Definitions
- the invention relates to a workpiece coated with a layer system according to the preamble of patent claims 1 and 4, and to a method for producing such a workpiece according to the preamble of patent claims 18 and 20.
- Preferred embodiments of the invention are in the corresponding dependent claims 2 to 3, 5 to 17, and 19 and 21 to 27 claimed.
- US Pat. No. 4,573,690 discloses a body moved against a sealing ring with defined depressions on the surface and a mechanical method for producing the depressions.
- the latter in use, cause pressure fluctuations of a lubricant introduced between the sealing ring and the body, which is to avoid tearing off the lubricating film and thus direct contact with solid surfaces.
- No. 5,473,138 describes a method for enlarging metallic and ceramic surfaces by means of laser radiation.
- WO 98/14710 describes a method for producing a plain bearing, with an optimized pore distribution, for example is generated by means of a pulse laser on a sliding surface of a bearing.
- a disadvantage of the above-mentioned components is that, in the event of insufficient lubrication conditions, contact between two materials that are similar or even identical in terms of their surface properties is still possible. Cold welding or seizure of, for example, a metallic material combination (eg sealing ring / counter body) cannot always be reliably avoided under such conditions. This also applies in particular to complex machines with tribologically stressed parts, on which, due to high relative speeds and / or surface pressures, conditions of insufficient lubrication and correspondingly increased wear can occur. Examples from engine construction are valve drives in modern, high-performance internal combustion engines, in which bucket tappets and piston rings in particular are exposed to extremely high loads. Tools with a textured surface structure are also known from U. Popp et al.
- microstructures into a layer system applied at least partially on the functional surface (s) of a workpiece such that the vertical expansion of the (three-dimensional) microstructure extends from the surface of the layer system through the layer into the workpiece extends so that it is uncoated in a lower region of the structure.
- a ratio d / s of the layer thickness d to the structure depth s between 0.05 and 0.9, preferably between 0.1 and 0.6.
- the for setting the retention of lubricants as well as the structural depth • and geometry substantial area coverage, ⁇ ie the ratio of the surface of the microstructure to the total with a textured pattern provided surface was set between 10 and 50%, the best results but with a degree of area coverage achieved by 15-35%.
- the cross section of the recesses was used for small structures or structural cross sections, i.e. Structures with the largest lateral dimension between 5 and 350 ⁇ m, circular, but preferably chosen conical.
- the tangential angle i.e. the angle between the surface horizontal and a straight line that is intended to be adjacent to the sloping structure flank, as flat as possible, i.e. below 20 °, but preferably below 10 ° or 5 °.
- the structures were produced using a laser beam, with circular structures being produced for the sake of simplicity.
- circular structures being produced for the sake of simplicity.
- differently shaped structures for example circular, elliptical, linear, triangular, quadrangular or polygonal, or else more complex structures, can also be used advantageously in individual applications.
- test results also surprisingly showed that workpieces coated with DLC and with Me / C, MeC / C or WC / C sliding layer systems, even with conventionally produced structures, significantly improve the tribological properties compared to structured hard layers such as e.g. Enable TiAlN or previously known structured TiN layers.
- aC: H: Si, ie silicon / carbon layers, aC: H: Si: Me, ie silicon / carbon / metal layers, aC: H / a- Si: 0, ie carbon / silicon oxide layers are suitable, which can be produced with properties similar to the above-mentioned carbon-containing layers.
- tungsten In addition to the tungsten mentioned here, other metals, such as Ti, Zr, Hf, V, Nb, Ta, Mo, or Fe, but preferably Cr for the Me / C, MeC / C and aC: H: Si: Me layers are used. A combination of several metals is also possible.
- the first layer of the layer system is advantageously an adhesive layer consisting of one or more metals of the abovementioned selection. If the layer system consists of at least one hard layer and at least one carbon-containing sliding layer, an additional metallic intermediate layer which separates the hard layer and sliding layer can be advantageous. A combination of several metals, in particular those mentioned above, is also possible.
- graded layer transitions can also be used to optimize the layer properties. For example, it is advantageous to provide carbon-containing layers with a proportion of carbon rising from a metallic adhesive layer towards the surface.
- the total layer thickness of the layer system can be set between 0.5-20 ⁇ m depending on the planned application. Due to the abrasive wear due to the introduction of particles, which often also occurs in lubricated tribological systems, a minimum layer thickness of one micrometer is preferable in many cases. Due to the economics of the process when depositing PVD layers, a maximum layer thickness of approx.
- Layers structured according to the invention can be used particularly advantageously on components which have at least one functional surface designed as a sliding surface. Examples of this are plain bearings, sliding seals, sealing rings, piston rings, bucket tappets, rocker arms or crankshafts.
- Layers structured according to the invention can also be applied to tools which have at least one functional surface designed as a sliding surface.
- tools which have at least one functional surface designed as a sliding surface. Examples of this are, in particular, cutting tools with at least one rake face for turning, broaching or milling applications or forming tools with at least one extrusion surface such as, for example, massive solid forming tools.
- these are first coated using a combined PVD / CVD process, a layer system having been deposited on the functional surface.
- an adhesive layer is applied using a PVD sputtering process and then an increasing proportion carbon-containing gas mixed with the working gas.
- this proportion is increased to a desired maximum value and the coating process is then stopped (reactive PVD process step).
- the layer system is to be completed with a DLC layer, the sputtering process is stopped at a certain point in time, a pulsed bias voltage is applied to the substrate, and the DLC layer is then deposited.
- This last process step corresponds to a CVD process, since no physical evaporation takes place here. Further information on the methods used can be found in the examples below.
- the structuring after the layer system had been applied to at least part of the functional area (s) was carried out using laser processing systems from different companies (for example Lambda Physik, SurTech, CMT Rickenbach).
- the points were with a diameter between 50-250 microns and a depth of 10-15 microns in cubic and hexagonal
- test series were largely carried out with circular structures with a largest diameter between 80 to 100 ⁇ m, in a cubic or hexagonal arrangement and an area coverage between 15 and 40%. This arrangement has given particularly good results in previous tests.
- the workpieces were pretreated before or after the structure was applied using a customary cleaning process, attached to a substrate holder and held in a rotating rotating BAI 830-DLC coating system.
- the DLC layer was deposited in accordance with a PVD / CVD method known from WO 0179585A1 with a chrome adhesive layer, a gradient layer and a pure DLC or a: C-H layer, the total layer thickness being approximately 2 ⁇ m.
- the parameters used to deposit the a: C-H layer are given in the table below.
- a hardness of 2500 HK 005 was measured on the deposited DLC layer. There was no increase in roughness compared to uncoated polished samples.
- Geometry differs in that in addition to the two planar magnetron sputter sources equipped with Cr targets, another six sources of the same type equipped with pure WC or Co-bound WC targets are attached to the inner chamber circumference. Furthermore, a DC bias supply, but no pulse bias supply, is provided on this system.
- a chrome adhesive layer is applied by applying a negative substrate bias (-75V ) sputtered on. Then a MeC: C-H layer with rising to the surface
- a layer thickness of 2.0 ⁇ m and a layer hardness of 1000 HK 0 were measured on the deposited WC: CH layer.
- the roughness was increased by approx. 0.01-0.02 Ra compared to uncoated polished samples.
- Plasma sources - eight arc sources fixed to the inner circumference of the chamber in two different planes with a target diameter of 154 mm. Four of them (two at the top, two at the bottom) are equipped with Ti or Ti 05 Al 05 targets.
- the applied layer system consists of a TiN adhesive layer, a multilayer with a layer sequence of alternating TiAlN layers with different Ti / Al Ratio, as well as a TiAlN top layer. Details can be found in the following table 7).
- a layer thickness of 2.5 ⁇ m and a layer hardness of 3000 HK 005 were measured on the deposited TiAlN layer.
- the increase in roughness was between 0.06-0.20 Ra compared to uncoated polished samples.
- a WC: C-H layer deposited according to 4 was applied to a TiAlN layer produced according to 5).
- a layer thickness of approx.4.5 ⁇ m and a layer hardness of 1500 were obtained on the deposited TiAlN / MeC: C-H layers
- HK 005 measured.
- the increase in roughness was between 0.06-0.20 Ra compared to uncoated polished samples.
- FIG. 6 is a top view of a cubic structural pattern with circular microstructures
- FIG. 7 is a top view of a hexagonal structure pattern with circular microstructures.
- the section shown in FIG. 1 shows a known surface structure 3 on a workpiece 1 coated with a functional layer 2.
- a structure was created on the uncoated body and the layer was then applied.
- the section shown in FIG. 2 shows another known surface structure 3 ⁇ that was subsequently applied to the functional layer.
- the structure depth is less than the layer thickness.
- the section shown in FIG. 3 shows a microstructure 5 according to the invention with a layer system 4 on a workpiece 1.
- the structure depth s is selected in a ratio, as described above, to the layer thickness d.
- FIG. 4 shows micro structures 5 X with circular
- 6 and 7 serve to explain the preferred cubic or hexagonal arrangements of surface structures according to the invention with hole spacing (center to center) of a and a, respectively.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Sliding-Contact Bearings (AREA)
- Shafts, Cranks, Connecting Bars, And Related Bearings (AREA)
- Pistons, Piston Rings, And Cylinders (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH7022002 | 2002-04-25 | ||
CH702022002 | 2002-04-25 | ||
PCT/CH2003/000262 WO2003091474A1 (fr) | 2002-04-25 | 2003-04-22 | Systeme de couches structure |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1506326A1 true EP1506326A1 (fr) | 2005-02-16 |
Family
ID=29256406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03711781A Withdrawn EP1506326A1 (fr) | 2002-04-25 | 2003-04-22 | Systeme de couches structure |
Country Status (9)
Country | Link |
---|---|
US (1) | US7318847B2 (fr) |
EP (1) | EP1506326A1 (fr) |
JP (1) | JP2006509967A (fr) |
KR (1) | KR20050003384A (fr) |
AU (1) | AU2003218594A1 (fr) |
BR (1) | BR0309661A (fr) |
MX (1) | MXPA04010516A (fr) |
WO (1) | WO2003091474A1 (fr) |
ZA (1) | ZA200407565B (fr) |
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1769100A1 (fr) * | 2004-04-29 | 2007-04-04 | OC Oerlikon Balzers AG | Revetement en un materiau dur dlc sur des materiaux a teneur en cuivre pour paliers |
JP2006138404A (ja) * | 2004-11-12 | 2006-06-01 | Kobe Steel Ltd | 水系環境下での耐摩耗性に優れた摺動部材 |
ATE433069T1 (de) * | 2006-04-14 | 2009-06-15 | Bhdt Gmbh | Dichtung in hochdruckeinrichtungen |
FR2907356B1 (fr) * | 2006-10-20 | 2009-05-22 | Hef Soc Par Actions Simplifiee | Piece de frottement en milieu lubrifie et dont la surface est texturee. |
FR2907470B1 (fr) | 2006-10-20 | 2009-04-17 | Hef Soc Par Actions Simplifiee | Piece en contact glissant, en regime lubrifie, revetue d'une couche mince. |
US20080131604A1 (en) * | 2006-11-30 | 2008-06-05 | Shuangbiao Liu | Textured coating on a component surface |
US8568827B2 (en) | 2006-11-30 | 2013-10-29 | Caterpillar Inc. | Textured coating on a component surface |
DE102007051774B4 (de) | 2007-10-30 | 2018-08-02 | Minebea Mitsumi Inc. | Flüssigkeitslager mit verbesserten Abriebeigenschaften |
DE102008016864B3 (de) * | 2008-04-02 | 2009-10-22 | Federal-Mogul Burscheid Gmbh | Kolbenring |
FR2934608B1 (fr) * | 2008-08-01 | 2010-09-17 | Commissariat Energie Atomique | Revetement a couche mince supraglissante, son procede d'obtention et un dispositif comprenant un tel revetement. |
USD640473S1 (en) | 2009-03-10 | 2011-06-28 | The Procter & Gamble Company | Paper product |
USD632896S1 (en) | 2009-03-10 | 2011-02-22 | The Procter & Gamble Company | Paper product |
DE102009060924B4 (de) * | 2009-12-18 | 2017-01-26 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Herstellungsverfahren für eine Festschmierstoffstruktur eine mit dem Herstellungsverfahren hergestellte Festschmierstoffstruktur sowie Verwendungen |
DE102010002686A1 (de) | 2010-03-09 | 2011-09-15 | Federal-Mogul Burscheid Gmbh | Gleitelement, insbesondere Kolbenring, und Verfahren zur Beschichtung eines Gleitelements |
JP2012026023A (ja) * | 2010-07-28 | 2012-02-09 | Hitachi Powdered Metals Co Ltd | 鉄基焼結部材 |
DE102010040158B4 (de) * | 2010-09-02 | 2017-12-21 | Federal-Mogul Wiesbaden Gmbh | Strukturierte Schmutzdepots in Gleitlageroberflächen |
DE102010040154B4 (de) | 2010-09-02 | 2018-02-01 | Federal-Mogul Wiesbaden Gmbh | Schmutzdepots in Gleitlagern |
JP5174108B2 (ja) * | 2010-09-13 | 2013-04-03 | トヨタ自動車株式会社 | 摺動部材及びその製造方法 |
DE102010037958B4 (de) * | 2010-10-04 | 2012-04-26 | Matthias Schmidt | Verfahren zur Herstellung eines Umformwerkzeuges für Dichtungen oder Einzellagen von Dichtungen, Umformwerkzeug, Dichtung und Presse |
KR101843196B1 (ko) * | 2010-11-18 | 2018-03-29 | 두산인프라코어 주식회사 | 내마모성이 개선된 로커암 샤프트 및 이를 포함하는 로커암 샤프트-부시 조립체 |
JP5721481B2 (ja) * | 2011-03-10 | 2015-05-20 | 株式会社iMott | 保護膜の製造方法 |
GB2490924B (en) * | 2011-05-18 | 2013-07-10 | Volnay Engineering Services Ltd | Improvements in and relating to downhole tools |
JP5799258B2 (ja) * | 2011-06-15 | 2015-10-21 | パナソニックIpマネジメント株式会社 | 摺動部材及び圧縮機 |
JP5842169B2 (ja) * | 2011-06-15 | 2016-01-13 | パナソニックIpマネジメント株式会社 | 摺動部材及び圧縮機 |
JP5741299B2 (ja) * | 2011-08-02 | 2015-07-01 | 日産自動車株式会社 | 超音波溶接工具のローレット面再加工方法 |
DE102011114413A1 (de) * | 2011-09-26 | 2013-03-28 | Esk Ceramics Gmbh & Co. Kg | Hydrodynamisches Axiallager |
EP2618029B1 (fr) * | 2012-01-18 | 2015-04-08 | Siemens Aktiengesellschaft | Roue dentée revêtue |
CN102673043A (zh) * | 2012-05-15 | 2012-09-19 | 北京有色金属研究总院 | 一种纺织钢领用高硬度、低摩擦系数耐磨涂层及其沉积方法 |
CN104813042A (zh) * | 2012-06-04 | 2015-07-29 | 美艾格工业自动化系统股份有限公司 | 对滑动面的局部构型 |
DE102012022268B4 (de) | 2012-11-14 | 2014-07-17 | Federal-Mogul Burscheid Gmbh | Verfahren zur Herstellung eines Kolbenrings sowie danach hergestellter Kolbenring |
DE102012023260A1 (de) | 2012-11-29 | 2014-06-05 | Oerlikon Trading Ag, Trübbach | Verfahren zur Strukturierung von Schichtoberflächen und Vorrichtung dazu |
DE102013206801A1 (de) * | 2013-04-16 | 2014-10-16 | Federal-Mogul Nürnberg GmbH | Verfahren zur Herstellung eines beschichteten Kolbens |
DE102013206729B4 (de) * | 2013-04-16 | 2017-01-05 | Federal-Mogul Burscheid Gmbh | Kolbenring und Verfahren zu seiner Herstellung |
US9771978B2 (en) | 2014-06-04 | 2017-09-26 | Koninklijke Philips N.V. | Hydrodynamic bearings |
ES2556541B1 (es) * | 2014-07-18 | 2016-11-03 | Wartsila Ibérica, S.A. | Método de tratamiento de superficies metálicas, cerámicas o pétreas y superficie obtenible con dicho método |
DE102015221041A1 (de) | 2015-01-14 | 2016-07-14 | Schaeffler Technologies AG & Co. KG | Verfahren zur Herstellung einer Gleitfläche an einem Maschinenelement |
JP6616094B2 (ja) * | 2015-04-16 | 2019-12-04 | 株式会社iMott | 保護膜の製造方法 |
US10737462B2 (en) * | 2016-08-24 | 2020-08-11 | Hyundai Motor Company | Method for coating surface of moving part of vehicle and moving part of vehicle manufactured by the same |
DE102017202958A1 (de) * | 2017-02-23 | 2018-08-23 | Robert Bosch Gmbh | Düsenbaugruppe für einen Kraftstoffinjektor, Kraftstoffinjektor |
FR3068428B1 (fr) * | 2017-07-03 | 2019-08-23 | H.E.F. | Axe couple a un palier, procede de fabrication d'un tel axe, et systeme mecanique comprenant un tel axe |
EP3625469B1 (fr) * | 2017-07-03 | 2023-11-22 | Hydromecanique Et Frottement | Axe couplé a un palier, procédé de fabrication d'un tel axe, et système mécanique comprenant un tel axe |
US20190120291A1 (en) * | 2017-10-24 | 2019-04-25 | Hamilton Sundstrand Corporation | Air bearing |
US11186795B2 (en) * | 2017-12-28 | 2021-11-30 | Nissan Motor Co., Ltd. | Low friction sliding mechanism |
JP7181806B2 (ja) * | 2018-02-16 | 2022-12-01 | 大同メタル工業株式会社 | 摺動部材 |
JP6629391B2 (ja) * | 2018-06-27 | 2020-01-15 | 株式会社アドマップ | SiCコート |
CN109161857A (zh) * | 2018-11-02 | 2019-01-08 | 苏州工业职业技术学院 | 改善材料表面高温摩擦学行为的图案薄膜及其制备方法 |
DE102019200682A1 (de) * | 2019-01-21 | 2020-07-23 | Technische Universität Dresden | Schneidwerkzeug mit räumlich strukturierter Beschichtung |
DE102019200681B4 (de) * | 2019-01-21 | 2022-09-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Schneidwerkzeug mit amorphem Kohlenstoff und Multilagenbeschichtung und Verfahren zu dessen Herstellung |
US11346235B2 (en) * | 2019-06-04 | 2022-05-31 | Raytheon Technologies Corporation | Bushing for variable vane in a gas turbine engine |
CN113873738B (zh) * | 2021-09-26 | 2024-01-12 | 中国工程物理研究院激光聚变研究中心 | 一种自支撑碳基电容器靶及其制备方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1209505B (it) * | 1984-02-24 | 1989-08-30 | North Bel Spa | Procedimento per l'ottenimento di utensili diamantati, in specie per odontoiatria, a zone diamantate delimitate da solchi con doppio effetto di taglio e d'abrasione. |
JPS60255970A (ja) * | 1984-05-29 | 1985-12-17 | Mazda Motor Corp | 耐摩耗性に優れた摺接部材の製造法 |
DE3634708A1 (de) * | 1986-10-11 | 1988-04-28 | Goetze Ag | Gleitender reibung ausgesetztes maschinenteil, wie insbesonder kolbenring |
JPH01152298A (ja) * | 1987-12-10 | 1989-06-14 | Nippon Piston Ring Co Ltd | シリンダライナ |
DE69205762T2 (de) * | 1991-08-08 | 1996-05-02 | Canon Kk | Verfahren zur Herstellung von Rillen auf einer Achse. |
JPH05156425A (ja) * | 1991-12-03 | 1993-06-22 | Seiko Epson Corp | 装飾部材およびその製造方法 |
EP0930953B1 (fr) * | 1996-09-30 | 2004-07-28 | Surface Technologies Ltd. | Palier presentant des micropores et son procede d'elaboration |
US5834094A (en) * | 1996-09-30 | 1998-11-10 | Surface Technologies Ltd. | Bearing having micropores and design method thereof |
JP2000178720A (ja) * | 1998-12-14 | 2000-06-27 | Sumitomo Metal Mining Co Ltd | 固体潤滑膜付き部材 |
DE10018143C5 (de) * | 2000-04-12 | 2012-09-06 | Oerlikon Trading Ag, Trübbach | DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems |
-
2003
- 2003-04-22 EP EP03711781A patent/EP1506326A1/fr not_active Withdrawn
- 2003-04-22 BR BR0309661-0A patent/BR0309661A/pt not_active IP Right Cessation
- 2003-04-22 WO PCT/CH2003/000262 patent/WO2003091474A1/fr active Application Filing
- 2003-04-22 KR KR10-2004-7017040A patent/KR20050003384A/ko not_active Application Discontinuation
- 2003-04-22 JP JP2003587996A patent/JP2006509967A/ja active Pending
- 2003-04-22 US US10/511,981 patent/US7318847B2/en not_active Expired - Fee Related
- 2003-04-22 MX MXPA04010516A patent/MXPA04010516A/es active IP Right Grant
- 2003-04-22 AU AU2003218594A patent/AU2003218594A1/en not_active Abandoned
-
2004
- 2004-09-21 ZA ZA2004/07565A patent/ZA200407565B/en unknown
Non-Patent Citations (1)
Title |
---|
See references of WO03091474A1 * |
Also Published As
Publication number | Publication date |
---|---|
MXPA04010516A (es) | 2004-12-13 |
WO2003091474A1 (fr) | 2003-11-06 |
JP2006509967A (ja) | 2006-03-23 |
US7318847B2 (en) | 2008-01-15 |
AU2003218594A1 (en) | 2003-11-10 |
BR0309661A (pt) | 2005-02-22 |
US20050175837A1 (en) | 2005-08-11 |
ZA200407565B (en) | 2005-11-30 |
KR20050003384A (ko) | 2005-01-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1506326A1 (fr) | Systeme de couches structure | |
DE102004043550B4 (de) | Verschleißfeste Beschichtung, ihre Verwendung und Verfahren zur Herstellung derselben | |
EP3091100B1 (fr) | Coulisseau, en particulier bague de piston comprenant un revetement et procede de fabrication d'un coulisseau | |
DE102006029415B4 (de) | Verschleißfeste Beschichtung sowie Herstellverfahren hierfür | |
DE602005003762T2 (de) | Gleitelement mit ausgezeichneter Abnutzungsbeständigkeit in einer wasserbasierten Umgebung | |
EP0858518B1 (fr) | Procede de production d'une surface de frottement sur un alliage des metaux legers | |
EP2209927B1 (fr) | Revêtement résistant à la corrosion | |
EP1767662B1 (fr) | Revêtement résistant à l'usure et procédé pour sa fabrication | |
EP0858519A1 (fr) | Procede de production d'une surface de frottement sur une piece metallique | |
EP1123989A2 (fr) | Procédé de fabrication de revêtements et objet | |
DE102004041234A1 (de) | Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben | |
EP1769100A1 (fr) | Revetement en un materiau dur dlc sur des materiaux a teneur en cuivre pour paliers | |
EP2912207B1 (fr) | Composant doté d'un revêtement et procédé pour le fabriquer | |
DE19824310C1 (de) | Gleitlager und Verfahren zu seiner Herstellung | |
DE102011076410A1 (de) | Maschinenelement | |
EP0770698B2 (fr) | Procédé de fabrication d'un surface de glisse sur une pièce métallique | |
DE102016206094A1 (de) | Kolbenring für Verbrennungsmotoren | |
AT523638B1 (de) | Verfahren zur Herstellung einer Hartstoffschicht auf einer Metalloberfläche | |
EP1136574A1 (fr) | Procédé de fabrication et utilisation d'outils de bosselage | |
EP1117846B1 (fr) | Procede pour modifier les proprietes de surfaces de pieces | |
DE19628786A1 (de) | Verfahren zum Herstellen einer Gleitfläche auf einem metallischen Werkstück | |
DE102012017033A1 (de) | PVD Lichtbogenbeschichtung mit verbesserten reibungsmindernden und verschleissreduzierenden Eigenschaften | |
EP0662161B1 (fr) | Outil pour le traitement de surfaces d'elements de construction et substrat pour ledit outil | |
DE102021110359A1 (de) | Lagerteil für ein Gleitlager, Lagerschale, Gleitlager, Maschine, Verfahren zur Herstellung eines Lagerteils für ein Gleitlager | |
DE102006027501A1 (de) | Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20041125 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL LT LV MK |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: WOHLRAB, CHRISTIAN Inventor name: MASSLER, ORLAW |
|
17Q | First examination report despatched |
Effective date: 20070227 |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: OERLIKON TRADING AG, TRUEBBACH |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20151103 |