EP1482540A1 - Verfahren zur bildung eines dünnfilms - Google Patents

Verfahren zur bildung eines dünnfilms Download PDF

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Publication number
EP1482540A1
EP1482540A1 EP03743556A EP03743556A EP1482540A1 EP 1482540 A1 EP1482540 A1 EP 1482540A1 EP 03743556 A EP03743556 A EP 03743556A EP 03743556 A EP03743556 A EP 03743556A EP 1482540 A1 EP1482540 A1 EP 1482540A1
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EP
European Patent Office
Prior art keywords
patterned electrode
patterned
wiring board
cutout
led chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03743556A
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English (en)
French (fr)
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EP1482540A4 (de
EP1482540A9 (de
Inventor
Norikazu Nishiyama
Yoshiaki Oku
Shunsuke Tanaka
Korekazu Ueyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
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Rohm Co Ltd
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Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Publication of EP1482540A1 publication Critical patent/EP1482540A1/de
Publication of EP1482540A9 publication Critical patent/EP1482540A9/de
Publication of EP1482540A4 publication Critical patent/EP1482540A4/de
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
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    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
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    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
    • H01L21/02197—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides the material having a perovskite structure, e.g. BaTiO3
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    • H01L21/02203—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being porous
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    • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
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    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
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    • H01L21/02337—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour
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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314—Inorganic layers
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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314—Inorganic layers
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314—Inorganic layers
    • H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
    • H01L21/31695—Deposition of porous oxides or porous glassy oxides or oxide based porous glass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
    • H10B53/30—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors characterised by the memory core region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
    • H—ELECTRICITY
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    • H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
    • H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
    • H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
    • H01L21/02216—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
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    • H01—ELECTRIC ELEMENTS
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
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    • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
    • H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition

Definitions

  • the present invention relates to a light emitting device including an LED chip mounted on e.g. a printed wiring board and packaged in a lens member made of a synthetic resin, while also relating to a method of making such a device.
  • a typical light emitting device of the above-described type includes a pair of first patterned electrode and second patterned electrode formed on an upper surface of a wiring board. On the upper surface of the second patterned electrode is mounted an LED chip, which is electrically connected to the first patterned electrode by wire bonding using a thin metal wire. A lens member made of a transparent synthetic resin is formed on the upper surface of the wiring board at the portion where the LED chip is mounted to package the LED chip and the metal wire.
  • Figs. 10 and 11 show a structure disclosed in JP-A 4-28269 as a prior art device.
  • a second patterned electrode 2 of a metal film is formed into a circular configuration on the upper surface of a wiring board 1, and an LED chip is mounted at the center of the circle.
  • the circular secondpatterned electrode 2 is formed with a cutout 4 extending radially inward from the circumference of the circle toward the LED chip 3.
  • a first patterned electrode 5 of a metal film is formed on the upper surface of the wiring board 1 to extend radially outward from a portion within the cutout 4.
  • the inner end of the first patterned electrode 5 is electrically connected to the LED chip 3 by wire bonding using a thin metal wire 6.
  • a lens member 7 formed by dropping an appropriate amount of transparent synthetic resin in a liquid state onto the second patterned electrode for bulging the resin into a hemispherical configuration and then hardening the resin.
  • the lens member 7 is provided on the second patterned electrode 2 in the form of a circular metal film, the circular second patterned electrode 2 serves as a reflection film of the light emitted from the LED chip 3, whereby the brightness of the emitted light is enhanced.
  • the following problem is caused by the provision of the cutout 4 extending from the circumference of the second patterned electrode 2 toward the LED chip 3 and the provision of the first patterned electrode 5 of the metal film in the cutout 4 to extend radially outward.
  • the transparent synthetic resin for forming the lens member 7 When the transparent synthetic resin for forming the lens member 7 is dropped, in a liquid state, onto the upper surface of the circular second patterned electrode 2, the transparent synthetic resin spreads radially outward over the circular second patterned electrode 2 to reach the outer circumference of the second patterned electrode 2 and bulges into a generally hemispherical configuration on the second patterned electrode due to the surface tension. In this state, the synthetic resin is hardened to become the lens member 7.
  • the outer circumference of the second patterned electrode 2 is interrupted at the portion formed with the cutout 4, and the first patterned electrode 5 is provided at the cutout 4 to project outward, part of the transparent synthetic resin dropped in a liquid state onto the second patterned electrode 2 spreads through the cutout 4, i.e. along the upper surface of the first patterned electrode 5 to project outward from the outer circumference of the second patterned electrode 2.
  • the lens member 7 after the hardening does not become a round circle corresponding to the configuration of the second patterned electrode 2 as viewed in plan but becomes an irregular shape partially projecting outward at the portion where the first patterned electrode 5 is provided. Further, the configuration cannot be made generally uniform with respect to a plurality of lens members 7, and the variation of the configuration of the lens members is large.
  • a dam ring 8 surrounding the LED chip 3 and the metal wire 6 is provided on the upper surface of the circular second patterned electrode 2, as shown in Fig. 12.
  • the dam ring 8 blocks the light emitted from the LED chip 3 to reduce the amount of light.
  • an object of the present invention to provide a light emitting device capable of solving the above-described problems and to provide a method of making such a device.
  • a light emitting device comprising: a first patterned electrode and a second patterned electrode both of which are made of a metal film and provided on an obverse surface of a wiring board; an LED chip mounted on the second patterned electrode; a metal wire electrically connecting the LED chip and the first patterned electrode to each other; and a lens member made of a transparent synthetic resin and provided on the obverse surface of the wiring board for packaging the LED chip and the metal wire.
  • the first patterned electrode is circular and has a central cutout, and the second patterned electrode is arranged in the cutout.
  • the second patterned electrode since the second patterned electrode is disposed in the cutout formed at the center of the circular first patterned electrode, the circular first patterned electrode completely surrounds the entire circumference of the second patterned electrode to which the LED chip is mounted.
  • the outer circumference of the first patterned electrode becomes a completely closed circle with no interruption. Therefore, when an appropriate amount of transparent synthetic resin in a liquid state is dropped onto the first patterned electrode, the liquid transparent synthetic resin spreads radially outward over the upper surface of the first patterned electrode to reach the outer circumference of the first patterned electrode and bulges, due to the surface tension, into a generally hemispherical configuration without spreading beyond the outer circumference of the first patterned electrode. Therefore, unlike the prior art structure, projecting of the bulged transparent synthetic resin beyond the circumference of the circle, which results in an irregular configuration of the lens member, can be reliably prevented.
  • both of the circular first patterned electrode and the second patterned electrode arranged in the cutout of the first patterned electrode are made of a metal film, the light emitted from the LED chip can be reflected away from the wiring board.
  • the light emitted from the LED chip can be reliably reflected toward the lens member by each of the patterned electrodes.
  • the lens member can be formed into a predetermined configuration, and variation of the lens configuration can be reduced.
  • a dam ring for surrounding the lens member need not be provided, so that the brightness of the light can be enhanced.
  • a light emitting device comprising: a first patterned electrode and a plurality of second patterned electrodes, the first and second patterned electrodes being made of a metal film and provided on an obverse surface of a wiring board; LED chips each mounted on a respective one of the second patterned electrodes; metal wires each electrically connecting a respective one of the LED chips and the first patterned electrode; and a lens member made of a transparent synthetic resin and provided on the obverse surface of the wiring board for packaging the LED chips and the metal wires.
  • the first patterned electrode is circular and has a central cutout.
  • the second patterned electrodes are arranged in the cutout while being equally spaced from each other along the circumference of a circle which is generally concentric with the circle of the first patterned electrode.
  • the metal wires electrically connecting the LED chips mounted on the second patterned electrodes to the first patterned electrode extend radially outward.
  • the metal wires for a plurality of LED chips provided in the single lens member extend radially outward. Therefore, the radially outward flow of the liquid transparent synthetic resin dropped onto the first patterned electrode occurs generally in the same manner at respective portions provided with the metal wires. As a result, the liquid transparent synthetic resin reliably spreads to become a round circle. Therefore, the same advantages as described above can be provided with respect to a light emitting device provided with a plurality of LED chips.
  • the wiring board has a reverse surface formed with a power supply wiring pattern for electrical connection to the first patterned electrode and the second patterned electrode via a through-hole formed in the wiring board.
  • the power supply for the first patterned electrode and the second patterned electrode can be performed by the power supply wiring pattern formed on the reverse surface of the wiring board, and the formation of the power supply wiring pattern on the reverse surface can be performed easily.
  • the cutout of the first patterned electrode may have a peripheral edge which includes an indentation entering between the second patterned electrodes.
  • a method which comprises the steps of: forming, on a wiring board, a first patterned electrode of a metal film into a circular configuration while forming a cutout at the center of the first patterned electrode; forming a second patterned electrode of a metal film in the cutout; mounting an LED chip on the second patterned electrode; electrically connecting the LED chip and the first patterned electrode to each other via a metal wire; and forming a lens member by dropping transparent synthetic resin in a liquid state onto the first patterned electrode so that the transparent synthetic resin bulges to cover the LED chip and the metal wire and then hardening the synthetic resin.
  • a light emitting device having the above-described advantages can be manufactured at low cost without using a dam ring surrounding the lens member.
  • Figs. 1 and 2 show a first embodiment of the present invention. In this embodiment, a single LED chip is utilized.
  • a wiring board made of an insulating material such as glass-fiber-reinforced epoxy resin (glass fibers hardened with an epoxy resin).
  • a first patterned electrode 12 and a second patterned electrode 13 which are made of a metal film comprising a copper foil and a gold plating layer formed thereon via an underlying nickel plating layer, for example.
  • the first patterned electrode 12 is circular with a diameter D.
  • the first patterned electrode 12 has a cutout 14 at the center thereof.
  • the second patterned electrode 13 is circular with a smaller diameter d and arranged in the cutout 14 of the first patterned electrode 12 while being spaced from the first patterned electrode 12 like an island.
  • the wiring patterns 15 and 16 are electrically connected to the patterned electrodes 12 and 13, respectively, via through holes 17 and 18 penetrating the wiring board 11.
  • an LED chip 19 is mounted, by die bonding, at a portion corresponding to the center of the circle of the first patterned electrode 12.
  • the LED chip 19 is electrically connected to the first patterned electrode 12 by wire bonding using a thin metal wire 20.
  • An appropriate amount of transparent synthetic resin such as an epoxy resin in a liquid state is dropped onto the upper surface of the wiring board 11 at the portion formed with the first patterned electrode 12 (preferably at the general center of the first patterned electrode 12) by potting which is conventionally known.
  • the circular first patterned electrode 12 completely surrounds the entire circumference of the second patterned electrode 13 to which the LED chip 19 is mounted, and the outer circumference of the first patterned electrode is a completely closed circle with no interruption. Therefore, the transparent synthetic resin dropped thereon in a liquid state spreads radially outward over the upper surface of the first patterned electrode 12 to reach the outer circumference of the first patterned electrode 12 and bulges, due to the surface tension, into a generally hemispherical configuration without spreading beyond the outer circumference.
  • the liquid transparent synthetic resin bulged in the above manner is then hardened by heating or ultraviolet irradiation, thereby providing a generally hemispherical lens member 21 which packages the LED chip 19 and the metal wire 20.
  • Figs. 3 and 4 show a second embodiment of the present invention.
  • two LED chips 19a, 19a' for emitting light of the same color or different colors are utilized.
  • Designated by the reference sign 11a in these figures is a wiring board made of an insulating material. On the upper surface of the wiring board 11a are formed a first patterned electrode 12a and two second patterned electrode 13a, 13a', which are made of a metal film similarly to those of the first embodiment.
  • the first patterned electrode 12a is circular with a diameter D.
  • the first patterned electrode 12a has a cutout 14a at the center thereof.
  • Each of the two second patterned electrodes 13a, 13a' is circular with a smaller diameter d.
  • the two second patterned electrodes 13a, 13a' are arranged in the cutout 14a of the first patterned electrode 12a while being equally spaced, like islands, along the circumference of a circle s which is generally concentric with the circular first patterned electrode 12 and has a radius r, as viewed in plan (Fig. 3).
  • a power supply wiring pattern 15a electrically connected to the first patterned electrode 12a via a through hole 17a
  • a power supply wiring pattern 16a electrically connected to the second patterned electrode 13a via a through hole 18a
  • a power supply wiring pattern 16a' electrically connected to the second patterned electrode 13a' via a through hole 18a'.
  • LED chips 19a and 19a' are mounted on the second patterned electrodes 13a and 13a', respectively at the generally center thereof, by die bonding.
  • the LED chips 19a, 19a' are electrically connected to the first patterned electrode 12a by wire bonding using thin metal wires 20a, 20a'.
  • the metal wires 20a, 20a' are so arranged as to extend in opposite directions from the LED chip 19a, 19a' as viewed in plan (Fig. 3), i.e., extend radially outward.
  • an appropriate amount of transparent synthetic resin in a liquid state is dropped onto the upper surface of the wiring board 11a at the portion formed with the first patterned electrode 12a (preferably at the general center of the first patterned electrode 12a) to cause the resin to bulge into a hemispherical configuration, and then the bulged resin is hardened.
  • a hemispherical lens member 21a is provided which packages the LED chips 19a, 19a' and the metal wires 20a, 20a'.
  • the metal wires 20a, 20a' for the LED chips 19a, 19a' extend in opposite directions from each other, i.e., extend radially outward. Therefore, the radially outward flow of the liquid transparent synthetic resin dropped onto the first patterned electrode 12a occurs generally in the same manner at respective portions provided with the metal wires 20a and 20a'. As a result, the liquid transparent synthetic resin reliably spreads to become a round circle, as viewed in plan (Fig. 3).
  • the peripheral edge of the cutout 14a of the first patterned electrode 12a includes indentations 12a', 12a'' entering between the second patterned electrodes 13a and 13a'.
  • Figs. 5 and 6 show a third embodiment of the present invention.
  • three LED chips i.e., an LED chip 19b for emitting red light, an LED chip 19b' for emitting green light, and an LED chip 19b'' for emitting blue light are utilized.
  • Designated by the reference sign 11b in these figures is a wiring board made of an insulating material.
  • a first patterned electrode 12b and three second patterned electrode 13b, 13b', 13b'' are formed, which are made of a metal film similarly to those of the first and the second embodiments.
  • the first patterned electrode 12b is circular with a diameter D.
  • the first patterned electrode 12b has a cutout 14b at the center thereof.
  • Each of the three second patterned electrodes 13b, 13b' , 13b'' is circular with a smaller diameter d.
  • the three second patterned electrodes 13b, 13b', 13b'' are arranged, like islands, in the cutout 14b of the first patterned electrode 12b while being equally spaced from each other i.e., spaced 120 degrees apart along the circumference of a circle s which is generally concentric with the circular first patterned electrode 12b and has a radius r, as viewed in plan (Fig. 5).
  • a power supply wiring pattern 15b electrically connected to the first patterned electrode 12b via a through hole 17b
  • a power supply wiring pattern 16b electrically connected to the second patterned electrode 13b via a through hole 18b
  • a power supply wiring pattern 16b' electrically connected to the second patterned electrode 13b' via a through hole 18b'
  • a power supply wiring pattern 16b'' electrically connected to the second patterned electrode 13b'' via a through hole 18b''.
  • the LED chip 19b for emitting red light, the LED chip 19b' for emitting green light, and the LED chip 19b'' for emitting blue light are mounted on the second wiring patterns 13b, 13b' and 13b'', respectively, by die bonding.
  • the LED chips 19b, 19b' and 19b" are electrically connected to the first patterned electrode 12b by wire bonding using thin metal wires 20b, 20b' and 20b'', respectively.
  • the metal wires 20b, 20b' and 20b" are so arranged as to extend radially outward as viewed in plan (Fig. 5).
  • an appropriate amount of transparent synthetic resin in a liquid state is dropped onto the upper surface of the wiring board 11b at the portion formed with the first patterned electrode 12b (preferably at the general center of the first patterned electrode 12b) to cause the resin to bulge into a hemispherical configuration, and then the bulged resin is hardened.
  • a hemispherical lens member 21b is provided which packages the LED chips 19b, 19b', 19b'' and the metal wires 20b, 20b', 20b''.
  • the metal wires 20b, 20b', 20b'' for the LED chips 19b, 19b', 19b'' extend radially outward. Therefore, the radially outward flow of the liquid transparent synthetic resin dropped onto the first patterned electrode 12b occurs generally in the same manner at respective portions provided with the metal wires 20b, 20b' , 20b''. As a result, the liquid transparent synthetic resin reliably spreads to become a round circle, as viewed in plan (Fig. 5).
  • the peripheral edge of the cutout 14b of the first patterned electrode 12b includes indentations 12b' entering between the second patterned electrodes 13b, 13b', 13b''.
  • the provision of the indentations 12b' increases the light reflective surface comprising the first patterned electrode 12b by as much as the portions entering between the second patterned electrodes 13b, 13b' and 13b''.
  • Figs. 7, 8 and 9 show a fourth embodiment.
  • a number of light emitting devices 22 according to the third embodiment are arranged in a matrix of rows and columns on a single common wiring board 23, thereby providing a panel for displaying letters or images in full color utilizing three primary colors of light.
  • a conductor pattern 24 is formed on the entire upper surface of the common wiring board 23 except the portions formed with the first circular patterned electrodes 12b, with a ring-like gap 25 formed between the conductor pattern 24 and each of the first patterned electrodes 12b.
  • the conductor pattern 24 is electrically connected to the first patterned electrode 12b of each light emitting device 22 via a power supply wiring pattern 26 formed on the lower surface of the common wiring board 23 and through holes 27, 28, 29.
  • the obverse surface of the conductor pattern 24 is covered with an insulating film 30.
  • the above-described advantages can be obtained, because the ring-like gap 25 is provided between the first patterned electrode 12b of each light emitting device 22 and the conductor pattern 24 and the first patterned electrode 12b is in the form of a complete circle.
  • the power supply for the first patterned electrode 12b of each light emitting device 22 can be performed by the conductor pattern 24 formed on the upper surface of the common wiring board 23. Accordingly, the structure of the power supply wiring pattern for the light emitting device 22 can be simplified. Further, the entirety of the conductor pattern 24 can be advantageously utilized as a light reflective surface.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Led Device Packages (AREA)
EP03743556A 2002-03-04 2003-03-03 Verfahren zur bildung eines dünnfilms Withdrawn EP1482540A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002057855 2002-03-04
JP2002057855 2002-03-04
PCT/JP2003/002433 WO2003075335A1 (fr) 2002-03-04 2003-03-03 Procede de formation d'une couche mince

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EP1482540A1 true EP1482540A1 (de) 2004-12-01
EP1482540A9 EP1482540A9 (de) 2005-11-02
EP1482540A4 EP1482540A4 (de) 2009-11-25

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EP03743556A Withdrawn EP1482540A4 (de) 2002-03-04 2003-03-03 Verfahren zur bildung eines dünnfilms

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EP (1) EP1482540A4 (de)
JP (1) JP4391240B2 (de)
KR (1) KR100863386B1 (de)
CN (1) CN1327497C (de)
TW (1) TWI277138B (de)
WO (1) WO2003075335A1 (de)

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US7427570B2 (en) 2005-09-01 2008-09-23 Micron Technology, Inc. Porous organosilicate layers, and vapor deposition systems and methods for preparing same
TW200730042A (en) 2005-10-14 2007-08-01 Ibiden Co Ltd Method for manufacturing high-dielectric sheet
US20070107818A1 (en) * 2005-11-16 2007-05-17 Bowe Donald J Deoxygenation of furnaces with hydrogen-containing atmoshperes
JP5205763B2 (ja) * 2006-09-19 2013-06-05 株式会社リコー 有機薄膜トランジスタ
JP5156256B2 (ja) * 2007-04-17 2013-03-06 花王株式会社 メソポーラスシリカ膜
US20110198214A1 (en) * 2008-12-04 2011-08-18 Canon Kabushiki Kaisha Mesoporous silica film and process for production thereof
CN116981976A (zh) 2020-12-24 2023-10-31 富士胶片株式会社 内窥镜用挠性管、内窥镜型医疗器械以及它们的制造方法

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EP1094506A3 (de) * 1999-10-18 2004-03-03 Applied Materials, Inc. Schutzschicht für Filme mit besonders kleiner Dielektrizitätskonstante
EP1124252A2 (de) * 2000-02-10 2001-08-16 Applied Materials, Inc. Verfahren und Vorrichtung zur Verarbeitung von Substraten
KR100816698B1 (ko) 2000-04-03 2008-03-27 가부시키가이샤 알박 다공성 ｓｏｇ 필름의 제조방법
JP4574054B2 (ja) * 2000-04-28 2010-11-04 三井化学株式会社 撥水性多孔質シリカ、その製造方法および用途
US6573131B2 (en) * 2000-07-13 2003-06-03 The Regents Of The University Of California Silica zeolite low-k dielectric thin films and methods for their production
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EP1408539A1 (de) 2001-06-29 2004-04-14 Rohm Co., Ltd. Halbleiterbauelement und herstellungsverfahren dafür
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Title
CHANG H K ET AL: "Mesocrystal engineering using non-bonded interaction to obtain optically transparent mesoporous silica films and plates with uniform orientation" MICROPOROUS AND MESOPOROUS MATERIALS, ELSEVIER SCIENCE PUBLISHING, NEW YORK, US, vol. 21, no. 4-6, 1 May 1998 (1998-05-01), pages 235-243, XP004128368 ISSN: 1387-1811 *
See also references of WO03075335A1 *

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KR100863386B1 (ko) 2008-10-13
JP4391240B2 (ja) 2009-12-24
CN1639851A (zh) 2005-07-13
JPWO2003075335A1 (ja) 2005-06-30
TWI277138B (en) 2007-03-21
US20050106802A1 (en) 2005-05-19
KR20040088579A (ko) 2004-10-16
CN1327497C (zh) 2007-07-18
WO2003075335A1 (fr) 2003-09-12
EP1482540A4 (de) 2009-11-25
US7105459B2 (en) 2006-09-12
TW200305933A (en) 2003-11-01
EP1482540A9 (de) 2005-11-02

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