EP1458977B2 - Micropompe peristaltique - Google Patents

Micropompe peristaltique Download PDF

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Publication number
EP1458977B2
EP1458977B2 EP03792417A EP03792417A EP1458977B2 EP 1458977 B2 EP1458977 B2 EP 1458977B2 EP 03792417 A EP03792417 A EP 03792417A EP 03792417 A EP03792417 A EP 03792417A EP 1458977 B2 EP1458977 B2 EP 1458977B2
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EP
European Patent Office
Prior art keywords
membrane
valve
membrane region
pump body
pumping chamber
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EP03792417A
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German (de)
English (en)
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EP1458977A1 (fr
EP1458977B1 (fr
Inventor
Martin Richter
Martin Wackerle
Yücel CONGAR
Julia Nissen
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members

Definitions

  • the present invention relates to a micropump, and more particularly to a micropump operating on a peristaltic pumping principle.
  • Micropumps operating on a peristaltic pumping principle are known in the art. So is the article " Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology ", by Li Cao et al., Sensors and Actuators, A94 (2001), pages 117 to 125 , comprising a peristaltic micropump having an inlet, three pumping chambers, three silicon diaphragms, three normally-closed active valves, three PZT piezo stack actuators, microchannels between the pumping chambers, and an outlet. The three pumping chambers are of equal size and are etched into a silicon wafer.
  • a peristaltic micropump which has three membrane regions in a continuous substrate surface.
  • a pump channel is formed which communicates with a fluid reservoir.
  • a transverse rib is formed in the region of an inlet valve and an outlet valve, on which an associated membrane portion rests in the unactuated state to close the inlet valve and the outlet valve in the unactuated state.
  • the actuator element consists of a threefold composite of metal membrane, continuous ceramic layer and segmented electrode arrangement.
  • the ceramic layer must be segmented polarized, which is technically difficult.
  • Such a segmented piezo-bending element is thus expensive and only allows low stroke volumes, so that such a pump can not work bladeless tolerant and self-priming.
  • micro-diaphragm pump in which a pumping chamber adjacent to a pumping membrane is actuated by a piezoelectric actuator. A fluid inlet and a fluid outlet of the pumping chamber are each provided with passive check valves.
  • the compression ratio of the micropump ie the ratio of stroke volume of the pumping membrane to total pumping chamber volume depending on the maximum valve geometry and valve wetting dependent pressure required to open the valves, is set to provide a bubble tolerant self-priming operation to allow local micromembrane pump.
  • the object of the present invention is to provide a peristaltic micromembrane pump which can be easily assembled and which enables a bubble-tolerant, self-priming operation.
  • this object is achieved by a peristaltic micropump according to claim 1.
  • the present invention thus provides a peristaltic micropump in which the first and second valves are open in the unactuated state and in which the first and second valves are moved by moving the membrane can be closed to the pump body, while the volume of the pumping chamber can also be reduced by moving the second membrane area towards the pump body.
  • the peristaltic micropump according to the invention makes it possible to realize bubble-tolerant, self-priming pumps, even if piezoelements arranged on a membrane are used as piezo actuators.
  • piezo actuators also so-called piezo-stacks (piezo stacks) can be used, which are disadvantageous to piezo membrane transducers in that they are large and expensive, problems with the connection technique between stack and membrane and problems in adjusting the stack supply and thus are associated with a higher total effort.
  • the inventive peristaltic micropump can work bubble-tolerant and self-priming, it is preferably dimensioned such that the ratio of stroke volume and dead volume is greater than a ratio of delivery pressure and atmospheric pressure, the displacement being the volume displaceable by the pump membrane, the dead volume the volume remaining between the inlet port and the outlet port of the micropump, when the pumping diaphragm is actuated and one of the valves is closed and one is open, the atmospheric pressure is at most about 1050 hPa (worst case consideration), and the delivery pressure is that in the fluid chamber region Micropump, d. H. in the pressure chamber, necessary pressure is to maintain a liquid / gas interface at a location which is a flow restriction in the microperistaltic pump, i. between the pumping chamber and the passage opening of the first or second valve, including this passage opening, to move past.
  • the peristaltic micropump works bubble-tolerant and self-priming. This applies both when using the peristaltic micropump for conveying liquids, when a gas bubble, usually an air bubble, enters the fluid region of the pump, as well as when using the micropump according to the invention as a gas pump when accidentally condensed moisture from the gas to be pumped and Thus, a gas / liquid interface may occur in the fluid region of the pump.
  • Compression ratios satisfying the above condition can be realized in the present invention, for example, by making the volume of the pump chamber larger than that of the valve chambers formed between the respective valve diaphragm portions and opposite pump body portions. In preferred embodiments, this can be realized by the distance between the membrane and surface and pump body surface in the pump chamber is greater than in the region of the valve chambers.
  • a further increase in the compression ratio of a peristaltic micropump according to the invention can be achieved by moving the contour of a pumping chamber structured in the pump body to the bending line of the pumping membrane, i. H. the curved contour of the same in the actuated state, adapted so that the pumping membrane in the actuated state can displace substantially the entire volume of the pumping chamber.
  • the contours of valve chambers formed in the pump body can be adapted accordingly to the bending line of the respective opposite membrane sections, so that in the optimal case in the closed state, the actuated membrane region displaces substantially the entire valve chamber volume.
  • the micro-diaphragm pump comprises a membrane element 10 which has three membrane sections 12, 14 and 16.
  • Each of the membrane sections 12, 14 and 16 is provided with a piezo element 22, 24 and 26, respectively, and forms together with the same a piezo membrane transducer.
  • the piezo elements 22, 24, 26 may be glued to the respective membrane sections or may be formed by screen printing or other thick film techniques on the membrane.
  • the membrane element is circumferentially joined to a pump body 30 at outer portions thereof, so that there is a fluid-tight connection therebetween.
  • a pump body 30 In the pump body 30, two fluid passages 32 and 34 are formed, one of which, depending on the pumping direction, a fluid inlet and the other represents a fluid outlet.
  • the fluid passages 32, 34 are each surrounded by a sealing lip 36.
  • the underside of the membrane element 10 and the top of the pump body 30 are structured to define a fluid chamber 40 therebetween.
  • both the membrane element 10 and the pump body 30 are implemented in a respective silicon wafer, so that they can be joined together, for example, by silicon fusion bonding.
  • the membrane element 10 in the upper side of the same three recesses and in the bottom thereof has a recess to define the three membrane regions 12, 14 and 16.
  • the piezoelectric elements or piezoceramics 22, 24 and 26 By the piezoelectric elements or piezoceramics 22, 24 and 26, the diaphragm sections 12, 14 and 16 respectively in the direction of the pump body 30 to be actuated, so that the diaphragm portion 12 together with the fluid passage 32 is an inlet valve 62, which by actuation of the membrane portion 12th can be closed.
  • the diaphragm section 16 and the fluid passage 34 together constitute an outlet valve 64 which can be closed by actuating the diaphragm section 16 by means of the piezoelectric element 26.
  • the volume of the pumping chamber region 42 arranged between the valves can be reduced.
  • the peristaltic micropump shown will first be briefly the fluid system environment in which the micropump according to Fig. 1 is installed described.
  • the pump is glued to the pump body 30 on a support block 50, optionally, as in Fig. 1 shown grooves 52 may be provided in the support block 50 to receive excess adhesive.
  • the grooves 52 may be provided, for example, surrounding the fluid channels 54 and 56 formed in the support block 50 to receive excess adhesive and prevent it from entering the fluid channels 54, 56 and the fluid passages 32, 34, respectively.
  • the pump body 30 is bonded to the support block such that the fluid passage 32 is in fluid communication with the fluid passage 54 and that the fluid passage is in fluid communication with the fluid passage 56.
  • a further channel 58 may be provided as a cross leak protection in the support block 50.
  • connecting pieces 60 are provided, for example, for attaching hoses to the in Fig. 1 can serve shown fluid system.
  • a housing 61 which is joined, for example using an adhesive bond to the support block 50 to provide protection for the micropump and terminate the piezoelectric elements moisture-proof.
  • the in Fig. 1 shown pump is initially assumed from an initial state in which the inlet valve 62 is closed, the pump diaphragm corresponding to the second diaphragm portion 14 is in the unactuated state and the exhaust valve 64 is open.
  • the pumping membrane 14 is moved downward by actuation of the piezoelectric element 24, which corresponds to the pressure stroke, whereby the stroke volume through the open outlet valve in the outlet, that is, the fluid channel 56 is promoted.
  • the compression of the pumping chamber 42 during the pressure stroke by the stroke volume leads to an overpressure in the pumping chamber, which degrades by the fluid movement through the outlet valve.
  • Piezoelectric converters or piezoelectric bending converters are preferably used according to the invention as piezo actuators.
  • Such a bending transducer performs an optimum stroke when the lateral dimensions of the piezoceramic correspond to approximately 80% of the underlying membrane.
  • deflections of several 10 ⁇ m stroke and thus volume strokes in the range from 0.1 ⁇ l to 10 ⁇ l can thus be achieved.
  • Preferred embodiments of the present invention have volume strokes at least in such a range, since in such a volume stroke advantageous bubble tolerant peristaltic pumps can be realized.
  • Fig. 2a shows a piezoceramic 100, which is provided on both surfaces thereof with metallizations 102.
  • the piezoceramic preferably has a large d31 coefficient and is in the direction of arrow 104 in FIG Fig. 2a polarized. According to Fig. 2a no voltage is applied to the piezoceramic.
  • a piezo-membrane transducer is now in Fig. 2a shown piezoceramic 100 fixedly mounted on a membrane 106, for example glued, as in Fig. 2b is shown.
  • the membrane shown is a silicon membrane, but the membrane may be formed by any other materials as long as it can be electrically contacted, for example, as a metallized silicon membrane, as a metal foil, or as a plastic membrane rendered conductive by a two-component injection molding.
  • a positive voltage ie a voltage in the polarization direction, U> 0, is applied to the piezoceramic, then the piezoceramic contracts, see Fig. 2c , Due to the firm connection of the piezoceramic 100 to the membrane 106, the membrane 106 is deflected downwards by this contraction, as indicated by arrows in FIG Fig. 2d is clarified.
  • a negative voltage ie a voltage opposite to the direction of polarization
  • a depolarization of the piezoceramic even at low field strengths in the opposite direction, as in Fig. 2e is indicated by an arrow 108.
  • Typical depolarization field strengths of lead zirconate titanate ceramics (PZT ceramics) are, for example, -4000 V / cm.
  • a bending transducer is a preferred embodiment of the present invention, since this form of transducer has numerous advantages.
  • they have a fast response, on the order of about 1 millisecond with low power consumption.
  • a scaling with dimensions of piezoceramic and membrane over large areas is possible, so that a large stroke (10 .... 200 microns) and a large force (switching pressures 10 4 Pa to 10 6 Pa) are possible, with a larger Hub decreases the achievable force and vice versa.
  • the medium to be switched is separated from the piezoceramic by the membrane.
  • the micro-peristaltic pumps of the invention are to be used in applications where bubble-tolerant, self-priming behavior is required, the micro-peristaltic pumps must be designed to comply with a compression ratio design rule that defines the ratio of stroke volume to dead volume.
  • a compression ratio design rule that defines the ratio of stroke volume to dead volume.
  • Fig. 3a schematically shows a pump body 200 having an upper surface thereof, in which a pumping chamber 202 is structured.
  • a diaphragm 204 is schematically shown, which is provided with an inlet valve piezoactuator 206, a pumping chamber piezoactuator 208 and an outlet valve piezoactuator 210.
  • the piezoactuators 206, 208 and 210 By means of the piezoactuators 206, 208 and 210, respective regions of the membrane 204 can be moved downwards, ie in the direction of the pump body 200, as indicated by arrows in FIG Fig. 3a is shown.
  • Through the line 212 is in Fig.
  • the difference of the pumping chamber volume between the undeflected state of the membrane 204 and the deflected state 212 of the membrane 204 represents the stroke volume ⁇ V of the pumping membrane.
  • the channel regions 214 and 216 disposed below the inlet valve piezoactuator 206 and below the outlet valve piezoactuator 210 may be closed by a respective actuation of the corresponding piezoelectric actuator by resting the respective membrane regions on the underlying regions of the pump body.
  • FIGS. 3a to 3c merely rough schematic representations, wherein the respective elements are designed so that a closing of respective valve openings is possible.
  • an intake valve 62 and an exhaust valve 64 are formed.
  • Fig. 3b a situation is shown in which the volume of the pumping chamber 202 is reduced by operating the pumping chamber piezoactuator 208 and in which the inlet valve 62 is closed.
  • the situation shown thus represents the state after ejection of a fluid amount from the exhaust valve 64, wherein the volume of the remaining between the closed inlet valve 62 and the passage opening of the open exhaust valve 64 fluid area represents the dead volume V 0 with respect to the pressure stroke, as indicated by the hatched area in Fig. 3b is shown.
  • the dead volume with respect to a suction stroke in which the inlet valve 62 is opened and the outlet valve 64 is closed is defined by the volume of the fluid area remaining between the closed outlet valve 64 and the passage opening of the open inlet valve 62, as in FIG Fig. 3c is shown by the hatched area.
  • the respective dead volume is defined by the respective closed valve up to the passage opening at which a significant pressure drop occurs at the moment of a respective change in volume of the pumping chamber.
  • the dead volumes V 0 for the pressure stroke and the suction stroke are identical. If different dead volumes occur due to an asymmetry for a pressure stroke and a suction stroke, then, in the sense of a worst-case analysis, it is assumed in the following that the larger of the two dead volumes is used to determine the respective compression ratio.
  • a worst-case view is assumed in which the entire pump area is filled with a compressible fluid (gas).
  • the volume / pressure conditions occurring in the peristaltic pump in a peristaltic pumping cycle as described above are shown in the graph of FIG Fig. 4 shown.
  • Fig. 4 in each case both the isothermal volume / pressure characteristics and the adiabatic volume / pressure characteristics are shown, wherein in the sense of a worst-case consideration in the following of isothermal conditions, as they occur in slow state changes, is assumed.
  • the overpressure p Ü during the pressure stroke, and the negative pressure p U during the suction stroke, exceed a minimum value during the compression stroke or during the intake stroke must fall below.
  • the pressure amount during the compression stroke and the suction stroke must exceed a minimum value, which may be referred to as delivery pressure p F.
  • This delivery pressure is the pressure in the pressure chamber which must at least prevail to bypass a liquid / gas interface at a location which is a flow point between the pumping chamber and the passageway of the first or second valve, including this passageway move.
  • This delivery pressure can be determined as follows, depending on the size of this flow point.
  • Capillary forces must be overcome if free surfaces, for example in the form of gas bubbles (eg air bubbles), are moved in the fluid areas within the pump.
  • the delivery pressure to be provided is defined by Equation 2 at the location within the flow path of the microperistaltic pump where the sum of the inverse radii of curvature r 1 and r 2 of a liquid / gas interface having a given surface tension is at a maximum. This point corresponds to the Flu touchgstelle.
  • a channel 220 (FIG. Fig. 5a ) with a width d, where the height of the channel is also d.
  • the channel 220 has a cross-sectional change at both channel ends 222, for example below the valve membrane or the pumping membrane.
  • Fig. 5a the channel is completely filled with a liquid 224 flowing in the direction of the arrow 226.
  • Fig. 5b An air bubble 228 now encounters the change in cross section at the entrance of the channel 220.
  • a wetting angle ⁇ occurs.
  • Fig. 5c the situation is illustrated when the air bubble or meniscus 230 reaches the cross-sectional change 222 at the end of the channel 220.
  • This pressure barrier is not negligible in microperistaltic pumps of the type according to the invention due to the small dimensions of geometry, if such a channel represents the bottleneck of the pump.
  • the mentioned constriction is generally defined by the distance between the valve membrane and the opposite region of the pump body (for example a sealing lip) when the valve is open.
  • r d 2
  • half of the smallest ascending wall distance can be considered independently of the tilt angle ⁇ , wetting angle ⁇ or abrupt changes in cross section.
  • the peristaltic pump has a constriction at the inlet or outlet valve, which is defined by the gap geometry dependent on the valve lift d.
  • Ap ⁇ ⁇ 2 d
  • the respective constriction (channel constriction or valve constriction in the open state), at which larger capillary forces must be overcome, can be regarded as a flow point of the microperistaltic pump.
  • communication channels within the peristaltic pump are designed such that the diameter of the channel is at least twice that of the valve throat, i. the distance between diaphragm and pump body in the open valve state, exceeds.
  • the valve gap represents the flow point of the microperistaltic pump.
  • communication channels having a smallest dimension, i. Bottleneck be provided by 50 ⁇ m.
  • the upper limit of the channel diameter is determined by the dead volume of the channel.
  • the capillary force to be overcome depends on the surface tension at the liquid / gas interface. This surface tension in turn depends on the partners involved. For a water / air interface, the surface tension is about 0.075 N / m and varies slightly with temperature. Organic solvents generally have a significantly lower surface tension, while the surface tension at a mercury / air interface, for example, about 0.475 N / m.
  • a peristaltic pump designed to overcome the capillary force at a surface tension of 0.1 N / m is thus suitable for pumping virtually all known liquids and gases in a bubble-tolerant and self-priming manner.
  • the compression ratio of a micro-peristaltic pump according to the invention can be made correspondingly higher in order to enable such pumping, for example, also for mercury.
  • suction stroke differs by the initial position of the volumes.
  • Equation 11 The left side of Equation 11 represents the state before expansion, while the right side represents the state after expansion.
  • the negative pressure p U during the pressure stroke must be smaller than the necessary negative delivery pressure p F.
  • the discharge pressure p F in terms of absolute value in the consideration of the pressure stroke, in terms of absolute value in the consideration of the suction stroke. It follows: p U > p F
  • Preferred embodiments of microperistaltic pumps according to the invention are thus designed such that the compression ratio satisfies the above condition, wherein the minimum necessary delivery pressure corresponds to the pressure defined in equation 8 if channel narrows occurring in the peristaltic pump have minimum dimensions which are at least twice as large as the valve gap.
  • the minimum required delivery pressure may correspond to the pressure defined in Equation 3 or Equation 7 if the flow location of the microperistaltic pump is not defined by a gap but a channel.
  • a microperistaltic pump according to the invention is to be used when pressure boundary conditions of a negative pressure p 1 at the inlet or a counterpressure p 2 prevail at the outlet, the compression ratio of a microperistaltic pump must be correspondingly greater in order to allow pumping against these inlet pressures or outlet pressures.
  • the pressure boundary conditions are defined by the intended application of the microperistaltic pump and can range from a few hPa to several 1000 hPa. For such cases occurring in the pumping chamber pressure p T, or negative pressure p U must achieve these back pressures at least, so that a pumping action occurs. For example, only the height difference of a possible inlet vessel or outlet vessel of 50 cm in water leads to counter pressures of 50 hPa.
  • the desired delivery rate is a constraint that places additional demands.
  • T 1 / f both the suction stroke and the pressure stroke of the peristaltic pump must be performed, in particular the displacement .DELTA.V must be implemented.
  • the available time is therefore maximum T / 2 for suction stroke and pressure stroke.
  • the time required to promote the stroke volume through the pumping chamber inlet and the valve throat now depends on the one hand on the flow resistance, on the other hand on the pressure amplitude in the pumping chamber.
  • foam-like substances are to be pumped with a microperistaltic pump according to the invention, it may be necessary for a plurality of capillary forces, as described above, to be overcome since a plurality of corresponding liquid / gas interfaces occur.
  • the micro-peristaltic pump must be designed to have a compression ratio in order to be able to produce correspondingly higher delivery pressures.
  • the compression ratio of a microperistaltic invention must be appropriately higher when necessary in the microperistaltic delivery pressure p F in addition to the aforementioned capillary forces also depends on the boundary conditions of the application.
  • the delivery pressure is considered relative to the atmospheric pressure, that is, a positive delivery pressure p F is assumed in the pressure stroke, while a negative delivery pressure p F is assumed in the intake stroke.
  • a compression ratio of ⁇ > 9 must be maintained according to Equation 14 above in order to allow pumping against such negative pressure.
  • Fig. 6b shows a schematic cross-sectional view of a peristaltic micropump with membrane element 300 and pump body 302 along the line BB of Fig. 6a and Fig. 6c
  • Fig. 6a a schematic plan view of the membrane element 300
  • Fig. 6c a schematic plan view of the pump body 302 shows.
  • the membrane element 300 in turn has three membrane sections 12, 14 and 16 which are each provided with piezoactuators 22, 24 and 26.
  • an inlet opening 32 and an outlet opening 34 is formed, such that the inlet port 32 defines an inlet valve together with the diaphragm portion 12, while the outlet port 34 defines an outlet valve with the diaphragm portion 16.
  • a pumping chamber 304 is formed in the pump body 302. Furthermore, fluid channels 306 are formed in the pump body 302, which are fluidly connected to the diaphragm areas 12 and 16 associated valve chamber 308 and 310.
  • the valve chambers 308 and 310 are formed in the embodiment shown by recesses in the membrane element 300, wherein in the membrane element 300 further to the pumping chamber 304 contributing recess 312 is formed.
  • the pumping chamber volume 304 is made larger than the volumes of the valve chambers 308 and 310. This is achieved in the illustrated embodiment by forming a pumping chamber depression in which a structuring in the form of a pumping chamber depression is formed in the pump body 302.
  • the stroke of the pump diaphragm 14 is preferably designed so that it can largely displace the volume of the pumping chamber 304.
  • a further increase of the pumping chamber volume compared to the valve chamber volume is in the in the Fig. 6a to 6c shown embodiment in that the pumping chamber membrane 14 in terms of area (in the plane of the diaphragm member 300 and the pump body 302) is made larger than the valve chamber membranes, as best in Fig. 6a you can see. This results in a larger in terms of area compared with the valve chambers pump chamber.
  • the supply channels 306 in the surface of the pump body 302 are structured. These fluid channels 306 provide reduced flow resistance without significantly degrading the compression ratio of the peristaltic micropump.
  • the surface of the pump body 302 could be realized with three stage depressions to implement the pumping chamber of increased depth (compared to the valve chambers), while the top chip is a substantially unstructured membrane. Such two-stage subsidence are technologically more difficult to implement than that in the Fig. 6a to 6c shown embodiment.
  • FIG. 7 An enlarged view of the left part of the in Fig. 6b shown cross-sectional view is in Fig. 7 shown in FIG Fig. 7 the height H of the pumping chamber 304 is displayed.
  • the patterns forming the pumping chamber 304 in the pump body 302 and in the membrane member 300 have equal depths, it is preferable to make the patterns in the pump body 302 deeper in depth than those in the membrane member to provide the flow channel 306 with a sufficient flow area without unduly compromising the compression ratio.
  • the patterns in the pump body 302 that contribute to the fluid channel 306 and the pumping chamber 304 may have a depth of 22 ⁇ m, while the patterns in the membrane element 300 that define the valve chambers 308 and the pressure chamber 304, respectively, have a depth of 8 microns may have.
  • FIG. 12 is a schematic cross-sectional view of an enlargement of the section A of FIG Fig. 7 but in a modified form.
  • the web is spaced from the opening 32 in the direction of the channel 206.
  • mounting tolerances can be taken into account in a double-sided lithography.
  • wafer thickness variations that may result in valve openings with different cross-sectional sizes, have no negative impact.
  • Fig. 8 defines the distance x to the diaphragm 12, the Flu typegstelle between the pumping chamber and valve port with the valve open.
  • the compression ratio of the peristaltic pump is made large to ensure self-filling behavior and robust operation with respect to bladder tolerance.
  • a first possibility to realize such an adaptation is to implement a round pumping chamber, ie a pumping chamber whose circumferential shape is adapted to the deflection of the pumping membrane.
  • a round pumping chamber ie a pumping chamber whose circumferential shape is adapted to the deflection of the pumping membrane.
  • FIG Fig. 9a A schematic plan view of the pumping chamber and fluid channel section of a pump body having such a pumping chamber is shown in FIG Fig. 9a shown.
  • round pumping chamber 330 open similar to the representation of Fig. 6c the fluid channels 306, which produce a fluid connection to valve chambers, which in turn may be structured, for example, in a membrane element.
  • the pumping chamber can be configured under the pumping membrane so that its contour facing the pumping membrane follows in a precise fit the bending line of the pumping membrane.
  • a contour of the pumping chamber can be achieved for example by a correspondingly shaped injection molding tool or by an embossing punch.
  • a schematic plan view of a pump body 340, in which such a bending line of the actuator membrane following fluid chamber 342 is structured, is in Fig. 9b shown.
  • Fig. 9b illustrated in the pump body structured fluid channels 344 which lead to the fluid chamber 342 and away from the same.
  • a schematic cross-sectional view along the line cc of Fig. 9b is in Fig.
  • FIG. 9c shown in FIG Fig. 9c
  • a flow through the fluid channels 344 is in Fig. 9c indicated by arrows 350.
  • the membrane 346 facing to the bending line of the membrane (in the actuated state) adapted contour 352 of the fluid chamber or pumping chamber 342 to recognize.
  • This shape of the fluid chamber 352 allows substantially all the volume of the fluid chamber 342 to be displaced upon actuation of the diaphragm 346 by the piezoactuator 348, whereby a high compression ratio can be achieved.
  • FIG. 10b An embodiment of a peristaltic micropump, in which both the pumping chamber 342 and valve chambers 360 are adapted to the bending lines of the respective associated membrane sections 12, 14 and 16, is in the 10a and 10b shown, where Fig. 10b a schematic plan view of the pump body 340 shows while Fig. 10a a schematic cross-sectional view taken along the line aa of Fig. 10b shows.
  • the shape and contour of the valve chamber 360 and 362 as explained above with reference to the pumping chamber 342, adapted to the bending line of the respective associated membrane portion 12 and 16 respectively.
  • FIG. 10b a schematic plan view of the pump body 340 shows
  • Fig. 10a a schematic cross-sectional view taken along the line aa of Fig. 10b shows.
  • the shape and contour of the valve chamber 360 and 362 as explained above with reference to the pumping chamber 342, adapted to the bending line of the respective associated membrane portion 12 and 16 respectively.
  • fluid channels 344a, 344b, 344c, and 344d are formed in the pump body 340.
  • the fluid channel 344a constitutes an input fluid channel
  • the fluid channel 344b connects the valve chamber 360 to the pumping chamber 342
  • the fluid channel 344 connects the pumping chamber 342 to the valve chamber 362
  • the fluid channel 344d constitutes an outlet channel.
  • the membrane element 380 in this embodiment is an unstructured membrane element which is inserted into a recess provided in the pump body 340 to define the valve chambers and the pump chamber together with the fluid regions formed in the pump body 340.
  • connection channels 344b and 344c between the actuator chambers are connected so that they contain a small dead volume compared to the stroke volume. At the same time, these fluid channels reduce the flow resistance between the actuator chambers significantly, so that even larger pumice frequencies and thus larger flow rates, such a stream in turn by arrows 350 in Fig. 10a is displayed, become possible.
  • the fluid passages are separated by actuating the membrane sections 12 and 16, respectively, through the fully deflected membrane sections so that fluid separation occurs between the fluid passages 344a and 344b and between the fluid passages 344c and 344d, respectively.
  • a web 390 may be provided in the respective valve chamber in the region of the largest stroke of the diaphragm portion 12, which is shaped accordingly, so that it can be completely sealed by the bending of the diaphragm portion 12. More specifically, the web bends up to the edges of the valve chamber, according to the shape of the valve chamber adapted to the bending line. This web can protrude into the respective valve chamber, wherein alternatively, as in Fig.
  • the depth of the connection channels 344 may be greater than the stroke y of the membrane portion 12, in which the membrane portion abuts against the pump body, so that the web 390 is sunk, so to speak. If the depth of the connection channels is greater than the maximum stroke, this results in the cost of the compression ratio, but allows low flow resistance between the actuator chambers.
  • FIG Fig. 12 An alternative embodiment of a valve chamber 360 is shown in FIG Fig. 12 shown where the depth of the connecting channels 344 is smaller than the maximum stroke y of the diaphragm portion 12, and thus as the depth of the the bending line of the diaphragm portion 12 adapted valve chamber 360 in the region of the largest stroke of the diaphragm portion 12. This allows a secure seal in the closed state of the valve can be achieved.
  • a web 390a in the valve chamber 360 which does not simulate the maximum possible bending line of the actuator element, ie the membrane section 12 together with the piezoactuator 22 in Fig. 13 is shown.
  • the maximum possible bending line of the membrane section 12 is in Fig. 13 shown by a dashed line 400, while the line 410 corresponds to the maximum possible deflection of the diaphragm portion 12 due to the provision of the web 390a.
  • the bending line of the membrane will often not be perfectly concentric with the membrane center, for example due to assembly tolerances of the piezoceramics and due to inhomogeneities in the application of adhesive, by which the piezoceramics are attached to the membranes. Therefore, the area of the land seal can be slightly increased, for example, by about 5 to 20 ⁇ m, depending on the stroke of the actuator, relative to the rest of the fluid chamber in order to ensure reliable contact of the membrane with the web and thus a secure seal. This also corresponds to the in Fig. 13 shown situation. It should be noted, however, that this increases the dead volume and the compression ratio is reduced.
  • a plastically deformable material for example silicone
  • silicone can be used as the fluid chamber material at least in the region below the movable membrane.
  • the thickness of the membrane sections 12, 14 and 16 and thus the thickness of the membrane element 380 can be, for example, 40 ⁇ m, while the thickness of the piezoactuators can be, for example, 100 ⁇ m.
  • a piezoceramic a PZT ceramic with a large d31 coefficient can be used.
  • the side length of the membranes may for example be 10 mm, while the side length of the piezoelectric actuators may be 8 mm, for example.
  • the voltage swing for actuating the actuators in the aforementioned actuator geometry can be, for example, 140 V, which results in a maximum stroke of approximately 100 to 200 ⁇ m with a stroke volume of the pump diaphragm of approximately 2 to 4 ⁇ l.
  • the dead volume of the three fluid chambers required for the peristaltic pump drops, so that only the connection channels connecting the valve chambers to the pumping chamber remain.
  • such fluid modules are bubble tolerant and self-priming and can deliver both liquids and gases.
  • such fluid pumps can in principle build up several bar pressure for compressible and liquid media, depending on the design of the piezoelectric actuator.
  • the maximum pressure that can be generated is no longer limited by the compression ratio, but defined by the maximum force of the drive element and by the tightness of the valves.
  • several ml / min can be delivered by a suitable channel dimensioning with a low flow resistance.
  • the inlet fluid passage 344a and the outlet fluid passage 344d are guided laterally, d. H. the fluid channels are in the same plane as the fluid chambers. As stated above, in such a course, the sealing of the channels may be difficult. However, it is advantageous in the lateral course of the fluid channels that the entire fluid system, including reservoirs connected to the inlet channel 344a and / or the outlet channel 344d, can be formed with a manufacturing step, such as injection molding or stamping.
  • Fig. 14 an embodiment of a micro-peristaltic pump according to the invention is shown in which the inlet fluid channel 412 and the outlet fluid channel 414 are vertically recessed in the pump body 340.
  • the fluid channels 412 and 414 have a substantially vertical portion 412a and 414a, each of which opens into the valve chambers 360 and 362 substantially centrally below the associated membrane portions 12 and 16, respectively.
  • the advantage of in Fig. 14 shown embodiment of the fluid channels is that the fluid channels can be sealed sealed.
  • the disadvantage, however, is that such vertical sunken fluid channels are difficult to produce manufacturing technology.
  • the peristaltic micropumps according to the invention are preferably activated by the membrane, for example the metal membrane or the semiconductor membrane, being at a ground potential, while the piezoceramics are moved through a typical peristaltic cycle by respectively corresponding voltages be applied to the piezoceramics.
  • a peristaltic micropump according to the invention can have further fluid chambers, for example a further fluid chamber 420, which is connected to the pumping chamber 342 via a fluid channel 422.
  • a further fluid chamber 420 which is connected to the pumping chamber 342 via a fluid channel 422.
  • a first reservoir 424 is connected to the valve chamber 360 via the fluid channel 344a
  • a second reservoir 426 is connected to the valve chamber 420 via a fluid channel 428
  • a third reservoir 430 is connected to the valve chamber 362 via the fluid channel 344d.
  • a structure with four fluid chambers, as in Fig. 15 is shown, for example, form a branching structure or a mixer, in which the mixed streams can be actively promoted.
  • the extension to four fluid chambers with four associated fluid actuators, such as in Fig. 15 the realization of three peristaltic pumps, wherein each pumping direction between all reservoirs 424, 426 and 430 can be realized in both directions.
  • a single membrane element covers all fluid chambers and reservoir container, wherein a separate piezoelectric actuator is provided for each fluid chamber.
  • the entire fluidics can be made very flat, wherein the functional fluidic structures including fluid chambers, channels, membranes, piezo actuators and support structures can have an overall height in the order of 200 to 400 microns.
  • systems are conceivable that can be integrated into smart cards.
  • even flexible fluidic systems are conceivable.
  • fluid chambers can be connected as desired in one plane.
  • different reservoirs z. B. are each assigned a Mikroperistaltikpumpe, which then, for example, reagents perform a chemical reaction (for example, in a fuel cell), or perform a calibration sequence for an analysis system, for example in a water analysis.
  • the piezoceramics can be glued, for example, to the respective membrane sections.
  • the piezoceramics for example PZT, can be applied directly in thick film technology, for example by screen printing processes with suitable intermediate layers.
  • FIG Fig. 16 An alternative embodiment of a microperistaltic pump of the invention with recessed inlet fluid passage 412 and recessed outlet fluid passage 414 is shown in FIG Fig. 16 shown.
  • the inlet flow channel 412 in turn opens substantially centrally below the membrane portion 12 in a valve chamber 442, while the Auslwithfluidkanal 414 opens substantially centrally below the diaphragm portion 16 in a valve chamber 444.
  • the respective orifices of the inlet channel 412 and the outlet channel 414 are provided with a sealing lip 450.
  • a pumping chamber 452 is formed in the pump body 440 which is fluidly connected to the valve chambers 442 and 444 by fluid passages in walls 454. According to the in Fig.
  • the three membrane sections 12, 14 and 16 in turn form a membrane element 456.
  • the membrane sections are driven by piezo stack actuators 460, 462 and 464, which can be placed on the corresponding membrane sections.
  • the piezo stack actuators using suitable housing parts 470 and 472, the in Fig. 16 remote from the pump body and the membrane element are used.
  • Piezostapelaktoren are advantageous in that they need not be firmly connected to the membrane element, so that they allow a modular structure.
  • the actuators do not actively retract a diaphragm section when an actuation thereof is terminated. Rather, a return movement of the membrane portion can be done only by the restoring force of the elastic membrane itself.
  • the peristaltic micropumps of the present invention can be made using a variety of materials of manufacture and manufacturing techniques.
  • the pump body may for example be made of silicon, be made of plastic by injection molding or manufactured by machining technically.
  • the membrane element which forms the drive diaphragm for the two valves and the pumping chamber can be made of silicon, can be formed by a metal foil, for example stainless steel or titanium, can be formed by a plastic membrane provided with conductive coatings in two-component injection molding technique. or may be realized by an elastomeric membrane.
  • a non-silicone Silicon Fusion Bonding can take place.
  • anodic bonding may preferably be used.
  • Other possibilities are a eutectic wafer bonding or a wafer life.
  • the basic structure is made of plastic and the membrane element is a metal foil
  • lamination can be performed if a bonding agent is used between the membrane element and the basic structure.
  • bonding may be carried out with a high shear adhesive, in which case capillary stop trenches are preferably formed in the base structure in order to avoid penetration of adhesive into the fluid structure.
  • both membrane element and pump body are made of plastic, ultrasonic welding can be used to connect them. If one of the two structures is optically transparent, a laser welding can alternatively take place. In the case of an elastomeric membrane, the sealing properties of the membrane may also be used to provide a seal by clamping.
  • the bonding layer material which may be an adhesive or an adhesive, is used e.g. dispensed by dispensing or by a suitably shaped stamp on the joining layer.
  • the membrane is fitted onto the base body. Possible burrs, e.g. can be at the edge of the membrane, find in a corresponding receptacle for the burr place, so that a defined position of the membrane is ensured especially in the direction perpendicular to the surface thereof, which is important in terms of dead volume and tightness.
  • a stamp on the pump body, so that the adhesive layer remains as thin and defined.
  • a capillary stop trench may be provided surrounding the fluid areas formed in the pump body.
  • excess adhesive can not get into the fluid chambers.
  • the adhesive can be defined and cured thin. Curing may be at room temperature or accelerated in the oven or by UV irradiation using UV-curable adhesives.
  • the base body or pump body can be dissolved by suitable solvents and a plastic membrane can be bonded to the base body as a joining technique.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Claims (17)

  1. Micropompe péristaltique aux caractéristiques suivantes :
    une première zone de membrane (12) avec un premier actionneur piézoélectrique (22 ; 460) destiné à actionner la première zone de membrane ;
    une deuxième zone de membrane (14) avec un deuxième actionneur piézoélectrique (24 ; 462) destiné à actionner la deuxième zone de membrane ;
    une troisième zone de membrane (16) avec un troisième actionneur piézoélectrique (26 ; 464) destiné à actionner la troisième zone de membrane ; et
    un corps de pompe (30 ; 302 ; 340 ; 440),
    qui constitue, ensemble avec la première zone de membrane (12), une première soupape (62) dont l'ouverture de passage (32) est ouverte à l'état non actionné de la première zone de membrane et dont l'ouverture de passage peut être obturée en actionnant la première zone de membrane,
    qui constitue, ensemble avec la deuxième zone de membrane (14), une chambre de pompage (42 ; 304 ; 330 ; 342 ; 452) dont le volume peut être réduit en actionnant la deuxième zone de membrane, et
    qui constitue, ensemble avec la troisième zone de membrane (16), une deuxième soupape (64) dont l'ouverture de passage est (34) ouverte à l'état non actionné de la troisième zone de membrane et dont l'ouverture de passage peut être obturée en actionnant la troisième zone de membrane,
    les première et deuxième soupapes (62, 64) étant reliées en fluide à la chambre de pompage,
    le rapport suivant étant d'application entre un volume de déplacement ΔV, un volume mort V0, une pression de refoulement Pr et la pression atmosphérique P0: ΔV / V 0 > p r / P 0 ,
    Figure imgb0022
     le volume de déplacement ΔV étant le volume refoulé en cas d'actionnement de la deuxième zone de membrane (14), le volume mort Vo étant un volume qui est présent entre l'ouverture de passage (32 ; 34) ouverte de l'une des soupapes (62, 64) et de l'ouverture de passage (32, 34) fermée de l'autre des soupapes (62, 54) à l'état actionné de la deuxième zone de membrane (14), et la pression de refoulement pr étant la pression nécessaire dans la chambre de pompage (42 ; 304 ; 330 ; 342 ; 452) pour faire passer une interface liquide/gaz par un étranglement d'écoulement dans la micropompe péristaltique.
  2. Micropompe péristaltique selon la revendication 1, dans laquelle est formée, entre la première zone de membrane (12) et le corps de pompe (302 ; 340 ; 440), une première chambre de soupape (308 ; 360 ; 442) et dans laquelle est formée, entre la troisième zone de membrane (16) et le corps de pompe (302 ; 340 ; 440), une deuxième chambre de soupape (310 ; 362 ; 444), les chambres de soupape étant reliées en fluide à la chambre de pompage (42 ; 304 ; 330 ; 342 ; 452).
  3. Micropompe péristaltique selon la revendication 2, dans laquelle le volume de la chambre de pompage (304) est supérieur au volume de la première ou de la deuxième chambre de soupape (308, 310).
  4. Micropompe péristaltique selon la revendication 3, dans laquelle une distance entre la surface de membrane et la surface de corps de pompe est plus grande à l'endroit de la chambre de pompage (304) qu'à l'endroit de la chambre de soupape (308, 310).
  5. Micropompe péristaltique selon la revendication 3 ou 4, dans laquelle la deuxième zone de membrane (14) et la chambre de pompage est, quant à la surface, plus grande que la première ou la troisième zone de membrane (12, 16) et les chambres de soupape associées.
  6. Micropompe péristaltique selon l'une des revendications 2 à 5, dans laquelle les zones de membrane {12, 14, 16) sont formées dans un élément de membrane (10 ; 300 ; 380 ; 456), la chambre de soupape (308, 310 ; 360, 362 ; 442, 444), la chambre de pompage (42 ; 304 ; 330 ; 342 ; 452) et les canaux à fluide (306 ; 344) sont formés entre les chambres de soupape et la chambre de pompage par des structurations dans le corps de pompe et/ ou dans l'élément de membrane.
  7. Micropompe péristaltique selon l'une des revendications 1 à 6, dans laquelle la chambre de pompage (330 ; 342) présente une structuration dans le corps de pompe (340), le contour de la structuration étant adapté au contour courbe du deuxième segment de membrane (14) à l'état actionné.
  8. Micropompe péristaltique selon l'une des revendications 2 à 6, dans laquelle la chambre de pompage (342) et les chambres de soupape (360, 362) présentent des structurations dans le corps de pompe (340), les contours des structurations étant adaptés au contour courbe respectif du segment de membrane correspondant (12, 14, 16) à l'état actionné.
  9. Micropompe péristaltique selon l'une des revendications 1 à 8, dans laquelle la première et la troisième zone de membrane (12, 16) et les actionneurs piézoélectriques (22, 26 ; 460, 464) de ces dernières sont disposées de sorte que, à l'état actionné, ils poussent avec une force prédéterminée sur un élément antagoniste (390 ; 390a), pour fermer la soupape respective.
  10. Micropompe péristaltique selon la revendication 8, qui présente des conduits d'amenée de fluide latéraux (344a, 344d) vers les chambres de soupape (360, 362) qui sont formées dans le corps de pompage (340) et qui sont obturées en actionnant le segment de membrane correspondant.
  11. Micropompe péristaltique selon la revendication 10, dans laquelle est prévue, à l'endroit d'une chambre de soupape (360, 362), une bretelle (390 ; 390a) sur laquelle s'appuie le segment de membrane actionné correspondant, pour obturer le conduit à fluide latéral correspondant.
  12. Micropompe péristaltique selon la revendication 10, dans laquelle les chambres de soupape présentent un matériau déformable plastiquement situé face au segment de membrane respectif, contre lequel s'appuie, à l'état actionné, le segment de membrane respectif.
  13. Micropompe péristaltique selon l'une des revendications 1 à 12, présentant, par ailleurs, au moins une autre zone de membrane avec un autre actionneur piézoélectrique destiné à actionner l'autre zone de membrane, l'autre zone de membrane formant, ensemble avec le corps de pompe, une autre soupape dont l'ouverture de passage est, à l'état non actionné de l'autre zone de membrane, ouverte et dont l'ouverture de passage peut être obturée en actionnant l'autre zone de membrane, l'autre soupape étant reliée en fluide à la chambre de pompage.
  14. Micropompe péristaltique selon l'une des revendications 1 à 13, dans laquelle les actionneurs piézoélectriques sont des transformateurs de membrane piézoélectriques qui sont formés par des éléments piézoélectriques respectifs placés sur une zone de membrane.
  15. Micropompe péristaltique selon la revendication 14, dans laquelle les éléments piézoélectriques sont collés sur la zone de membrane respective ou formés selon la technique de couche épaisse sur la zone de membrane respective.
  16. Micropompe péristaltique selon l'une des revendications 1 à 13, dans laquelle les actionneurs piézoélectriques sont formés par des piles piézoélectriques respectives.
  17. Système à fluide avec une pluralité de micropompes péristaltiques selon l'une des revendications 1 à 16 et une pluralité de réservoirs qui sont reliés en fluide aux micropompes péristaltiques.
EP03792417A 2002-08-22 2003-08-22 Micropompe peristaltique Expired - Fee Related EP1458977B2 (fr)

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DE10238600 2002-08-22
DE10238600A DE10238600A1 (de) 2002-08-22 2002-08-22 Peristaltische Mikropumpe
PCT/EP2003/009352 WO2004018875A1 (fr) 2002-08-22 2003-08-22 Micropompe péristaltique

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AU2003255478A1 (en) 2004-03-11
EP1458977A1 (fr) 2004-09-22
US20050123420A1 (en) 2005-06-09
CN100389263C (zh) 2008-05-21
JP4531563B2 (ja) 2010-08-25
WO2004018875A1 (fr) 2004-03-04
JP2005536675A (ja) 2005-12-02
CN1675468A (zh) 2005-09-28
DE50300465D1 (de) 2005-05-25
US7104768B2 (en) 2006-09-12
EP1458977B1 (fr) 2005-04-20
DE10238600A1 (de) 2004-03-04

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