EP2207963B1 - Pompe et ensemble pompe - Google Patents

Pompe et ensemble pompe Download PDF

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Publication number
EP2207963B1
EP2207963B1 EP08842526.9A EP08842526A EP2207963B1 EP 2207963 B1 EP2207963 B1 EP 2207963B1 EP 08842526 A EP08842526 A EP 08842526A EP 2207963 B1 EP2207963 B1 EP 2207963B1
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EP
European Patent Office
Prior art keywords
pump
diaphragm
check valve
pumping
diaphragms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
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EP08842526.9A
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German (de)
English (en)
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EP2207963A2 (fr
Inventor
Martin Wackerle
Jürgen KRUCKOW
Martin Richter
Klaus Heinrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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Publication of EP2207963A2 publication Critical patent/EP2207963A2/fr
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Publication of EP2207963B1 publication Critical patent/EP2207963B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F04B23/06—Combinations of two or more pumps the pumps being all of reciprocating positive-displacement type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements

Definitions

  • Embodiments of the present invention are concerned with a pump and a pump assembly, and more particularly with a pump and pump assembly which operate using a pumping membrane and which are suitable for a microstructure.
  • Known compressors for pressure ranges above 10 bar are typically 1- or 2-stage piston-cylinder systems with a powerful electric motor and a construction volume that is too large for microsystems.
  • Small compressors with a volume of less than 1 dm 3 are usually diaphragm pumps with electric drive.
  • maximum pressure ranges up to 2 bar are specified.
  • micromembrane pumps with passive check valves, which have a construction space of only a few cm 3 .
  • An exemplary micromembrane pump is from the DE 19719862 A1 known.
  • This micromembrane pump comprises a pumping membrane, which is movable by means of a drive device into a first and a second position.
  • a pump body is connected to the pumping membrane to define a pumping chamber therebetween.
  • An inlet opening and an outlet opening are each provided with passive check valves.
  • micromembrane pumps achieve only delivery rates of 0.02 1 / min for water and 0.05 1 / min with air and the achievable pressures of micromembrane pumps are relatively small, with a maximum backpressure (with compressible gas as the delivery volume) of about 400 hPa.
  • the WO 2006/111775 A discloses a fluid pump having one or more actuators, two end walls, a sidewall and a cavity containing fluid during use.
  • the cavity has a substantially cylindrical shape defined by the end walls and the side walls. At least two openings are formed through the cavity walls, wherein at least one of the openings is a valved opening. A radius and a height of the cavity satisfy predetermined conditions.
  • the actuator causes swinging movement of one or both end walls in a direction perpendicular to the plane of the end walls such that axial vibrations of the end walls cause radial oscillations of fluid pressure in the cavity.
  • the GB-A-2248891 discloses a micropump having a liquid inlet, a pumping chamber whose volume is variable through a membrane, and a liquid outlet.
  • the liquid inlet communicates constantly with the pumping chamber, whereas a valve is provided between the pumping chamber and the liquid outlet.
  • the flow resistance of the liquid inlet is sufficiently high to ensure that the amount of liquid flowing back through the inlet is sufficiently low during a pressure phase of the pumping cycle as compared to an amount of liquid flowing through the outlet valve in a forward direction.
  • a piezoelectric element actuates the membrane.
  • the EP-A-0546427 teaches a microvalve and method of making the same.
  • the microvalve is to be fabricated in thin membranes, with a valve seat being part of a thin membrane, and a valve body connected in a leak-tight manner at its edge to the valve body.
  • the JP 03103680 A discloses a microvalve having a diaphragm which, in a curved state, is opposite and substantially normally closed to an inlet port.
  • An excitation coil is attached to a first silicon base plate.
  • a magnetic film is attached to a silicon diaphragm and is repelled when the excitation coil is energized. By applying an electrical signal to the excitation coil, the silicon diaphragm is deflected by the generation of a magnetic field to open the input port.
  • Embodiments of the present invention are based on the finding that by using a pumping membrane having a passageway therethrough provided with a passive check valve, small diameter pumps with high flow rates can be implemented at both high and low pressures.
  • Embodiments of the present invention may be directed to micropumps or micromembrane pumps, which are understood here to mean diaphragm pumps whose displacement is in the microliter range or below.
  • the stroke volume may be in a range from 200 nl to 200 ul.
  • Embodiments of the invention provide micropumps whose delivery rate may be several liters per minute, both at high pressures and at small pressures that can be delivered by the pump.
  • Embodiments of the present invention allow the implementation of high delivery rate micropumps at different pressures.
  • Embodiments of the invention may enable the implementation of micropumps having a pressure of 16 to 25 bar (16 x 10 3 to 25 x 10 3 hPa) delivered by them at a delivery rate of at least 0.5 liters per minute.
  • Such micropumps can, for example, enable the realization of an oil-free microcompressor, for example for use in a Bernoullie / Joule-Thompson cooler.
  • micropumps having a large flow rate of one to several liters per minute at a moderate pressure of 50 hPa to 400 hPa.
  • the pump may be a piezoelectric micromembrane pump in which the actuator is a piezoceramic formed on the pumping membrane.
  • the micromembrane can have a circular circumference, wherein the piezoceramic can be arranged in a ring around a centrally formed, provided with a passive check valve passage opening.
  • the pressure achievable with piezoelectric micromembrane pumps depends on the compression ratio, the valve tightness and the pressure ratio between the top and bottom of the pumping membrane.
  • Embodiments of the invention enable the achievement of high pressures with the aid of piezoelectric micromembrane pumps, without requiring a series connection of several pumps with separate fluid connections.
  • a series connection of several pumps is basically possible if the pump diaphragm ensures pressure equalization between the pump inlet and the upper side of the diaphragm, ie pump outlet. In this way, the maximum possible pressure of the entire system can be determined by the sum of the maximum pressures of the individual pump modules.
  • a series connection of micropumps can be disadvantageous because, first, the fluid flow between the pumps through hose connector or the like is expensive. On the other hand, such encounters also technological limits, since when reaching a higher pressure, the pumping membrane on the drive side sees the ambient pressure, that is exposed to the same, whereby the Aktorikiki must be oversized.
  • a pump module is in Fig. 1 shown.
  • the pump module comprises a pumping membrane 10, a passage opening 12 provided with a passive check valve 14, and a piezoceramic 16 mounted on the pumping membrane 10 is.
  • the pumping membrane 10 may, for example, have a circular circumference in plan view, wherein the passage opening 12 may be centrally arranged with the passive check valve 14.
  • the piezoceramic 16 can then surround the passage opening 12 in an annular manner.
  • a control device 20 is shown, which may be formed to apply via corresponding electrical connections 22a and 22b a voltage difference to the piezoceramic 16 to cause actuation of the pumping membrane.
  • the control device 20 may, for example, have a controlled voltage source.
  • the control device 20 may be designed to apply a periodic voltage to the piezoceramic, for example a pulsed square-wave voltage having a suitable frequency and a suitable duty cycle (of, for example, 1: 1).
  • the pumping membrane may be a metallic pumping membrane, which may be made of spring stainless steel, for example.
  • the control device 20 may be designed to apply an electrical voltage between the metallic pumping membrane 10 and an electrode arranged on the upper side of the piezoceramic 16.
  • the pumping membrane 10 made of a non-conductive material, such as silicon, consist, in which case corresponding conductive structures for applying the voltage to the piezoceramic 16 may be provided.
  • the passive check valve 14 may be integrated, for example, of silicon, wherein a check valve chip with a corresponding passive check valve 14 may be mounted in the passage opening 12.
  • micro valves made of other suitable materials, such as e.g. Plastic or metal, to be considered.
  • FIG. 3 An exemplary embodiment of a check valve chip with a passive check valve 14 is in Fig. 3 shown.
  • a passive check valve may for example correspond to a passive check valve, wie.es in the DE 19719862 A1 is described.
  • the check valve chip has two silicon wafers 24 and 26, which are connected to one another at a connection surface 28, for example by wafer bonding or gluing.
  • the passive check valve 14 comprises a valve flap 30, which is structured in the silicon wafer 26, and a valve seat 32, which is structured in the silicon wafer 24.
  • the valve seat 32 provides a support surface or support webs for the valve flap 30. In general, the width of the support webs and the distance between the valve flap and the support webs in the open state determines the flow resistance of the check valve.
  • the check valve module or valve may be attached to the pumping membrane 10 in any suitable manner to provide a check valve for the port 12.
  • a corresponding non-return valve chip may be glued into the passage opening or glued to the pump diaphragm above or below the passage opening.
  • the pump module can be of a very simple construction and can be used to implement both pumps with high achievable pressures and low pressures achievable.
  • FIG Fig. 2 A schematic cross-sectional view of a pump is shown in FIG Fig. 2 shown.
  • Fig. 1 the example shown is in Fig. 1 arranged pump module in a pumping chamber by the pumping membrane 10 is connected at its periphery with housing parts 40 and 42.
  • the pumping membrane 10 is circumferentially clamped by the housing parts 40 and 42.
  • In the housing part 40 an inlet opening 44 is formed, while in the housing part 42 an outlet opening 46 is formed.
  • the piezoceramic 16 represents an actuating device for the pumping membrane, wherein in turn a control device (in Fig. 2 not shown) is provided to apply a suitable operating voltage to the piezoceramic.
  • the pumping membrane and the piezoceramic can represent a piezoceramic bending transducer.
  • a square-wave voltage pulse can be applied to the piezoceramic 16.
  • the flow resistance through the check valve may be smaller than the flow resistance through the inlet opening.
  • the housing parts may be designed such that the compression volume, i. the dead volume in the housing is small. This can be achieved, for example, by the contour of the pumping membrane 10 opposite housing parts are adapted to the contour of the pumping membrane in the deflected state.
  • FIG. 4 Another pump is in Fig. 4 shown.
  • a check valve 60 at the pump inlet 44 In addition to the pump shown in FIG Fig. 2 a check valve 60 at the pump inlet 44.
  • the check valve 60 is designed such that a movement of the pumping membrane 10 from the in Fig. 4 shown Position in a deflected to the housing part 40 toward closed position on the check valve 60 acts. As a result, it can be effectively prevented that during this movement fluid is forced through the inlet opening 44 counter to the actual pumping direction, since the check valve 60 prevents such reflux.
  • the check valve 60 at the inlet opening thus allows an increase in the efficiency of the pump.
  • the check valve 60 may be implemented in any manner, for example, using a check valve chip as shown in FIG Fig. 3 is shown.
  • the exemplary embodiment shown has a first pump module 100 and a second pump module 102, which are connected to one another via a spacer 104.
  • the pumping modules 100 and 102 may have a structure similar to that described above Fig. 1 described structure, wherein the respective elements of the first pump module are each marked with the suffix "a", while the corresponding elements of the second pump module 102 are marked with the suffix "b".
  • the pumping membranes 10a and 10b are as in FIG Fig. 5 is shown circumferentially attached to the spacer 104 so that the two pumping membranes 10a and 10b and the spacer 104 define a pumping chamber 106.
  • a portion 104a of the spacer 104 extends inwardly between the pumping membranes 10a and 10b.
  • the contour of the inwardly extending portion 104a of the spacer 104 is adapted to the contour of the pumping membranes 10a and 10b in the deflected state, so that the dead volume can be reduced and, in the ideal case, can approach zero.
  • the pump membrane 10a When a corresponding actuation voltage is applied, the pump membrane 10a is separated from the one in FIG Fig. 5 shown deflected toward the portions 104a of the spacer 104, and the pumping diaphragm 10b is deflected upon application of a corresponding actuation voltage to the piezoceramic 16b upwards, ie to the portion 104a of the spacer 104 back.
  • the application of an actuation voltage to the piezoceramic 16a and 16b reduces the volume of the pumping chamber 106.
  • the pumping membranes 10a and 10b After switching off the voltage, the pumping membranes 10a and 10b return to the in Fig. 5 shown back position, whereby the volume of the pumping chamber is increased again.
  • the movement of the pumping membrane 10a and 10b to increase the volume of the pumping chamber may be referred to as a suction stroke, while the movement of the pumping diaphragm to reduce the pumping chamber volume may be referred to as a pressure stroke.
  • the check valve 14a is designed such that a movement during the pressure stroke opens, while a movement during the suction stroke acts to close.
  • the check valve 14b is designed such that a movement during the compression stroke is closing and a movement during the suction stroke is opening.
  • the pumping membranes may be made of spring stainless steel.
  • the pumping membranes may each have centrally in the middle thereof an opening into which a check valve unit may be integrated.
  • the pumping membranes may have a circular circumference, wherein a piezoelectric ceramic may be adhesively bonded around the passage openings in the form of a ring.
  • check valves may thus be integrated into the pump membrane or into the pump diaphragms, for example, silicon-made passive check valves made of silicon.
  • the inlet and outlet of the check valves are respectively on the top and bottom of the pumping membranes, so that a media transport through the pumping membrane from the bottom to the top of the membrane takes place.
  • the integrated in the membrane passive check valve (or the valves) is located where the largest deflection of the pumping diaphragm and thus the largest volume displacement takes place.
  • this is, for example, the center of a circular pumping membrane, which may also be referred to as actuator membrane. It can thereby be achieved that the volume of fluid flowing through the pump has the shortest path from the inlet to the outlet of the pump.
  • a spacer arranged between two pump membranes for the realization of the largest possible compression ratio is designed such that the pumping chamber volume is as large as possible as large as the displacement volume of the pumping membranes.
  • the two piezoelectric diaphragms associated with the pump diaphragms can be supplied with the same electrical periodic control signal, whereby both pump diaphragms vibrate in phase, simultaneously reducing and increasing the pumping chamber volume at the same time.
  • a medium to be pumped for example a liquid or a gas, can be conveyed from the inlet side of the inlet-side pumping membrane via the pumping chamber to the outlet side of the outlet-side pumping membrane.
  • the pumping direction is given by the directions in which allow the check valves in the membranes flow.
  • Fig. 6 shows an embodiment of a pump assembly according to the invention, in which three pumps, as shown in Fig. 6 are stacked to be fluidly connected in series.
  • Fig. 6 There are three pumps there, each referring to the above Fig. 5 fluidically connected in series by housing parts 110a, 110b, 110c, 110d and 110e such that a pumping path exists between a pump assembly inlet 112 and a pump assembly outlet 114 as indicated by arrows 120 in FIG Fig. 6 is indicated.
  • micropump assembly can be considered as a compressor, in which a plurality of pumps are stacked.
  • the pumps can be connected to each other via any type, for example by clamping technology, adhesive technology or other suitable connection techniques. Such an arrangement automatically ensures pressure equalization of the pumping membranes.
  • An electrical contacting of the piezoelectric ceramics can also be effected via the connection points, or via corresponding housing parts, as shown schematically for the uppermost pump module Fig. 6 indicated by reference numeral 110.
  • a suitable termination is mounted on the top and bottom of the resulting pump stack by housing parts 110a and 110e. This can be provided with appropriate connections for the medium to be pumped, such as Luer connections or the like.
  • the opening direction of all check valves in the in Fig. 6 shown example is from bottom to top, so that with a simultaneous operation of the membranes, as described above with reference to Fig. 5 has been explained, a pumping action from the pump assembly inlet 112 to the pump assembly outlet 114 is achieved. By such a stacked arrangement higher end pressures can be achieved.
  • Embodiments of the present invention are based on a drive by a piezoelectric ceramic.
  • alternative drives such as electrostatic drives, may be used.
  • electrostatic drives areas of the pumping membrane can serve as electrodes, while counter-electrodes are provided to attract these membrane areas in order to effect a corresponding deflection of the membrane can.
  • Embodiments of the present invention allow through the type of fluid guide through the pumping membrane or the pumping membranes through that the fluid flow experiences the lowest possible losses due to deflections and the actuator membranes are automatically in a pressure-balanced state.
  • a control device may be provided to operate the pumping membrane or the pumping membranes (for example, a piezo-steel ring actuator) at its resonant frequency, whereby the amplitude of oscillation of the same can be maximized with only low operating voltage, which in turn allow very large flow rates can.
  • the moving parts i. the pumping membrane should be designed so that the first mechanical resonance is above the audible.
  • an audible threshold can be considered a frequency of 20 kHz, from which a normal adult human sounds can no longer perceive.
  • the pumping membrane may be designed such that the first mechanical resonance thereof is between 20 and 40 kHz.
  • the control device can be provided in order to operate the pump membrane or the pump diaphragms at the first mechanical resonance of the same, so that noise disturbances can be avoided on account of the low noise emission.
  • Micropumps or microcompressors according to the invention can achieve delivery rates which are hitherto unknown for piezo-actuated actuators.
  • pumping rates in resonant mode between 1.6 and over 2 liters per minute can be achieved with pumps according to the invention, for example at a drive voltage (peak to peak) of 100 volts or less, a diameter of the microcompressor of about 50 millimeters or less and a thickness the actuator membrane of 300 microns and the piezo membrane of 500 microns, and a thickness of the entire pumping module after Fig. 5 (without housing) of 1.8 mm or less.
  • Such delivery rates are about a factor of 50 above the delivery rates (air medium) of known piezo-driven micropumps.
  • Embodiments of inventive pumps can be used for any technical applications, such as micro-cooling systems, fuel cells or portable devices that require an air or gas flow in the range of one liter / minute and above.
  • Embodiments of the present invention allow high delivery rates at desired pressures using a piezo membrane annular actuator with an inlet and a Outlet, wherein the piezo-membrane ring actuator has a recess in which a microvalve is mounted.
  • a check valve is provided in the membrane.
  • a plurality of equally-acting check valves may be arranged side by side in the pumping membrane in parallel.
  • housing parts described above with reference to embodiments of the invention may be made of any suitable materials, such as plastic, glass, silicon, metal or the like.
  • the pumping membrane and / or the piezoceramic mounted thereon may be provided with an insulating layer to allow without the risk of short circuit and the pumping of liquid media.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Claims (13)

  1. Pompe aux caractéristiques suivantes:
    un orifice d'entrée;
    un orifice de sortie;
    une membrane de pompe (10a) présentant une ouverture à travers la membrane de pompe (10a) munie d'un clapet de retenue passif (14a);
    un moyen d'actionnement (16a) qui est conçu pour déplacer la membrane de pompe (10a) entre une première position et une deuxième position,
    dans laquelle le clapet de retenue passif (14a) est conçu de sorte qu'un mouvement de la première position en direction de la deuxième position agisse en fermeture et qu'un mouvement de la deuxième position en direction de la première position agisse en ouverture, de sorte qu'un cycle de pompage au cours duquel la membrane de pompe (10a) est déplacée de la première à la deuxième position et inversement provoque un écoulement net de l'orifice d'entrée à l'orifice de sortie;
    une autre membrane de pompe (10b) qui présente une ouverture à travers l'autre membrane de pompe munie d'un autre clapet de retenue (14b);
    un autre moyen d'actionnement (16b) conçu pour déplacer l'autre membrane de pompe (10b) entre une troisième position et une quatrième position; et
    un écarteur (104) disposé entre la membrane de pompe (10a) et l'autre membrane de pompe (10b), qui définit, ensemble avec les membranes de pompe (10a, 10b), une chambre de pompage (106),
    dans laquelle l'orifice de sortie est formé par l'ouverture dans la membrane de la pompe (10a) et est muni du clapet de retenue passif (14a), et dans laquelle l'orifice d'entrée est formé par travers l'ouverture dans l'autre membrane de pompe (10b) et est muni de l'autre clapet de retenue passif (14b),
    dans laquelle le moyen d'actionnement (16a) et l'autre moyen d'actionnement (16b) sont conçus pour déplacer la membrane de pompe (10a) et l'autre membrane de pompe (10b) de sorte que, dans une phase d'aspiration, le volume de la chambre de pompage (106) soit augmenté et, dans une phase de pompage, le volume de la chambre de pompage (106) soit réduit,
    dans laquelle le clapet de retenue (14a) est conçu de sorte qu'un déplacement des membranes de pompe (10a, 10b) agisse, dans la phase d'aspiration, en fermeture et qu'un mouvement des membranes de pompe (10a, 10b) agisse, dans la phase de pompage, en ouverture, et
    dans laquelle l'autre clapet de retenue (14b) est conçu de sorte qu'un déplacement des membranes de pompe (10a, 10b) agisse, dans la phase d'aspiration, en ouverture et qu'un déplacement des membranes de pompe (10a, 10b) agisse, dans la phase de pompage, en fermeture.
  2. Pompe selon la revendication 1, dans laquelle les surfaces principales de la membrane de pompe (10a) et de l'autre membrane de pompe (10b) sont disposées opposées l'une à l'autre.
  3. Pompe selon la revendication 2, dans laquelle l'orifice d'entrée et l'orifice de sortie sont disposées opposées l'un à l'autre dans la membrane de pompe (10a) et l'autre membrane de pompe (10b).
  4. Pompe selon la revendication 2 ou 3, dans laquelle l'écarteur (104) présente des zones (104a) s'étendant entre la membrane de pompe (10a) et l'autre membrane de pompe (10b) dont le contour est adapté au contour des membranes de pompe (10a, 10b) dans un état dévié.
  5. Pompe selon l'une des revendications 1 à 4, présentant par ailleurs un moyen de commande (20) destiné à amener la membrane de pompe (10a) et l'autre membrane de pompe (10b) en oscillation en phase l'une avec l'autre, de sorte que, dans la phase d'aspiration, les deux membranes de pompe augmentent le volume de la chambre de pompage et, dans la phase de pompage, les deux membranes de pompe réduisent le volume de la chambre de pompage.
  6. Pompe selon l'une des revendications 1 à 5, dans laquelle les membranes de pompe (10a, 10b) sont sensiblement circulaires et les ouvertures munies du clapet de retenue passif (14a, 14b) dans ces dernières sont disposées centralement dans les membranes de pompe.
  7. Pompe selon l'une des revendications 1 à 6, dans laquelle le moyen d'actionnement (16a, 16b) est chaque fois une piézo-céramique disposée sur la membrane de pompe (10a, 10b).
  8. Pompe selon l'une des revendications 1 à 7, dans laquelle les membranes de pompe (10a, 10b) sont réalisées en métal.
  9. Pompe selon l'une des revendications 1 à 8, dans laquelle le clapet de retenue passif (14a, 14b) est chaque fois un clapet en silicium dans une puce de silicium qui est placée sur la membrane de pompe.
  10. Pompe selon l'une des revendications 1 à 9, présentant par ailleurs un revêtement isolant qui est chaque fois disposé sur le moyen d'actionnement (16a, 16b) et la membrane de pompe (10a, 10b).
  11. Pompe selon l'une des revendications 1 à 10, dans laquelle la membrane de pompe et l'autre membrane de pompe (10a, 10b) sont conçues de sorte que la première résonance mécanique de ces dernières soit supérieure à 20 kHz.
  12. Pompe selon l'une des revendications 1 à 11, dans laquelle les moyens d'actionnement sont conçus pour actionner les membranes de pompe (10a, 10b) à leur première résonance mécanique.
  13. Ensemble de pompe avec une pluralité de pompes selon l'une des revendications 1 à 12 connectées en série en communication fluidique.
EP08842526.9A 2007-10-22 2008-10-21 Pompe et ensemble pompe Not-in-force EP2207963B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007050407A DE102007050407A1 (de) 2007-10-22 2007-10-22 Pumpe, Pumpenanordnung und Pumpenmodul
PCT/EP2008/008895 WO2009053027A2 (fr) 2007-10-22 2008-10-21 Pompe, ensemble pompe et module de pompe

Publications (2)

Publication Number Publication Date
EP2207963A2 EP2207963A2 (fr) 2010-07-21
EP2207963B1 true EP2207963B1 (fr) 2015-07-29

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Application Number Title Priority Date Filing Date
EP08842526.9A Not-in-force EP2207963B1 (fr) 2007-10-22 2008-10-21 Pompe et ensemble pompe

Country Status (4)

Country Link
US (1) US9217426B2 (fr)
EP (1) EP2207963B1 (fr)
DE (1) DE102007050407A1 (fr)
WO (1) WO2009053027A2 (fr)

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CN107614875B (zh) * 2015-06-11 2019-08-20 株式会社村田制作所 泵
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FR3054861B1 (fr) * 2016-08-02 2019-08-23 Zodiac Aerotechnics Procede de pilotage d'une pompe a membrane ondulante, et systeme pilote de pompe a membrane ondulante
EP3494376B1 (fr) * 2016-08-05 2021-06-09 Marsh, Stephen Alan Micro-capteur de pression
TWI625468B (zh) 2016-09-05 2018-06-01 研能科技股份有限公司 流體控制裝置
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TWI613367B (zh) 2016-09-05 2018-02-01 研能科技股份有限公司 流體控制裝置
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Also Published As

Publication number Publication date
EP2207963A2 (fr) 2010-07-21
US9217426B2 (en) 2015-12-22
WO2009053027A2 (fr) 2009-04-30
WO2009053027A3 (fr) 2009-11-05
DE102007050407A1 (de) 2009-04-23
US20110280755A1 (en) 2011-11-17

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