EP1700036B1 - Micropompe et son procédé de fabrication - Google Patents

Micropompe et son procédé de fabrication Download PDF

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Publication number
EP1700036B1
EP1700036B1 EP20040804104 EP04804104A EP1700036B1 EP 1700036 B1 EP1700036 B1 EP 1700036B1 EP 20040804104 EP20040804104 EP 20040804104 EP 04804104 A EP04804104 A EP 04804104A EP 1700036 B1 EP1700036 B1 EP 1700036B1
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EP
European Patent Office
Prior art keywords
substrate layer
channel
functional element
layer
valve flap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP20040804104
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German (de)
English (en)
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EP1700036A1 (fr
Inventor
Ron Meyknecht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bartels Mikrotechnik GmbH
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Bartels Mikrotechnik GmbH
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Publication date
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Publication of EP1700036A1 publication Critical patent/EP1700036A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7879—Resilient material valve
    • Y10T137/7888—With valve member flexing about securement
    • Y10T137/7891—Flap or reed

Definitions

  • the present invention relates to a micropump, and to a method for its production.
  • a first, second and third substantially two-dimensionally formed layer of particular plastic and / or glass and / or substrate and / or metal with each other can be bonded to one another by means of adhesives, the methods known from the prior art each using three layers of essentially the same size in terms of their areal extent.
  • micropumps are known from the prior art, which consist essentially of a lower housing part and a housing upper part, between which a valve membrane is arranged, for example from the DE-19720482 C2 and the US 2002/155010 A1 (closest prior art).
  • the object of the present invention is therefore to provide an optimized micropump of compact design with high pumping power, which can be produced using simple and cost-effective production and connection techniques even in large To produce quantities.
  • Another object of the present invention is to provide a low cost manufacturing method for a micropump consisting essentially of a two-layer construction with a functional element between the two layers
  • the present invention is based on the idea of specifying a method for connecting a first substrate layer 1, a second substrate layer 2 and a functional element 3, wherein the functional element 3 is elastic and / or much thinner than the first 1 and second 2 substrate layers is formed, and the functional element is sandwiched between the first 1 and second 2 substrate layers, and wherein the first 1 and second 2 layers are joined together by pressure, so that the functional element 3 is clamped between the two layers, that the first 1 and 2 layer are permanently connected to each other, and the functional element 3 is arranged permanently between the first 1 and second 2 layer.
  • the first 1 and second 2 layer and the functional element 3 is formed substantially two-dimensional, wherein the functional Element 3 advantageously has a smaller area than the first 1 and second 2 layers.
  • the pressure and the material of layer 1 and layer 2 are advantageously selected such that, after the pressure has been set, layers 1 and 2 are permanently connected to one another.
  • the method further comprises, in particular, the following steps, wherein first the functional element 3 is placed at a predetermined position on one of the layers 1 or 2, for example on the layer 1, followed by a suitable solvent on the surface not covered by the functional element 3 is applied to the layer 1 or 2, and then the second layer 2 is placed over the first layer 1 and the functional element 3, and then pressure is applied to the second, layer 2, so that the first 1 and second 2 Have layer with each other and the functional element 3 is clamped between the layers 1 and 2.
  • the material of layer 1 and 2 and the solvent and height and duration of the pressure is advantageously selected such that after the pressure has been set, layers 1 and 2 are permanently connected to one another.
  • the functional element comprises a thin plastic film and / or a metal foil.
  • the first 1 and second 2 layers suitably comprise a plastic substrate layer and preferably polycarbonate and / or PPSU and / or PEI and / or melamine.
  • the basic idea of the present invention is to provide a device with channel-like structures for the transport and / or storage of a liquid and / or gaseous medium, which comprises a first 1 and second 2 substrate layer, between which a functional element 3 is arranged, which is elastic and / or much thinner than the first 1 and second 2 Layer is formed, wherein the channel-like structures are formed in the first 1 and / or second 2 layer, and the first 1 and the second 2 layer are firmly and permanently connected to each other, and the functional element 3 between the first 1 and the second second Layer is clamped, so that by means of the functional element 3, the channel-like structures in the first 1 and / or second 2 layer are at least partially closed gas and / or liquid-tight.
  • a device comprises, in particular, a functional element 3, which is designed as a movable element such that a channel-like structure in the first 1 and / or second 2 layer can be opened and / or closed by means of the functional element 3, the functional element 3 may in particular have a valve function.
  • a micropump is provided by means of a device according to the invention, the functional element 3 having at least one valve flap 31 and the device also comprising a dynamic drive element 4 adapted to change a volume of a cavity formed in the device.
  • a device comprises a first layer 1; in which a first channel 10 is formed, and a second layer 2, in which a second channel 20 is formed, so that a connection between the first 10 and the second 20 channel is provided in addition, a valve flap 31 of the functional element 3 is arranged in that the connection between the first 10 and second 20 channels is opened or closed.
  • the first 10 and second 20 channels are arranged substantially parallel, wherein the connection between the first 10 and second 20 channel with the first 10 and second 20 channel an angle ⁇ of 5 ° to 80 ° and preferably from 15 ° to 50 °, so that a tangential transition between the first 10 and second 20 channels is provided by means of the connection between the first 10 and second 20 channels.
  • the valve flap 31 of the functional element 3 is suitably arranged at the connection point between the first 10 and second 20 channel.
  • the first channel 10 has a first width 10b
  • the second channel 20 has a second width 20b
  • the valve flap 31 has a third width 31b, wherein the first width 10b ⁇ third width 31b ⁇ second width 20b, and wherein in the flow direction 132nd a drive element 4 of the valve flap 31 is connected downstream of (4,132) and / or (132,4), whereby a pump structure (I) is provided.
  • a device is provided particularly and suitably with a first channel 10 having a first width 10b, a second channel 20 having a second width 20b, and a valve flap 31 having a third width 31b, the second width 20b ⁇ the third width 31b ⁇ the first width 10b, and wherein a drive element 4 of the valve flap 31 in the flow direction 231 is connected before (4,231) and / or after (231,4), wherein a pump structure (II) according to the invention is provided.
  • a plurality of micropump structures (I) and / or (II) may be formed in combination in a device according to the invention.
  • a device according to the invention comprises a central drive element 4, the at least one first valve flap 31 according to.
  • At least one second valve flap 31 according to pump structure (II) is downstream (231, 4) in the flow direction (231), and a device according to the invention also comprises, in particular, a third valve flap 31 according to the pump structure I downstream of the drive element 4 in the flow direction 132 (132, 4) and upstream of the second valve flap 31, and also a fourth valve flap 31 according to pump structure II, which is upstream of the drive element 4 in the flow direction 231 (231, 4), and the first valve flap 31 is connected downstream.
  • the valve flaps 31 are formed in this arrangement in the flow direction in a plastic film 3, wherein also between the third and fourth valve flap 31, a recess 30 is formed which is connected to a cavity which cooperates with the drive element 4.
  • a device comprises a series connection of pump structures (I), (II), (I) and (II) with an associated first, second, third and fourth Ventliklappe 31 in this order in the flow direction, wherein a central drive element 4 and a cavity (pumping chamber) between the central pump structures (II) and (I) is arranged.
  • the valve flaps 31 are formed in this arrangement in the flow direction in a functional element 3.
  • a recess 30 is formed between the two middle valve flaps 31, which cooperates with the pumping chamber and the drive element 4.
  • a hole structure 30 'with filter effect can be provided, wherein the functional element 3 is suitably formed in a thin plastic film.
  • Fig. 1a, b, c and d show a schematic representation of the basic elements of a device according to the invention, wherein the basic principle of the method according to the invention of their preparation is illustrated by means of said figures.
  • a second substrate layer 2 and a functional element. 3 is formed elastically and suitably much thinner than the first 1 and second 2 substrate layer is formed.
  • the functional element 3 is sandwiched between the first 1 and second 2 substrate layers, wherein the functional element 3 has a smaller area than the first 1 and second 2 layers and is suitably arranged at a predetermined position on the first substrate layer 1.
  • the second substrate layer 2 is placed over the first layer 1 and the functional element 3, and pressure is applied to the second substrate layer 2, so that the first and the second substrate layer 2 are applied to the surface of the substrate layer 1 not covered by the functional element 3 connect the second substrate layer 2 and the functional element 3 is clamped between the substrate layers 1 and 2, so that the first 1 and second 2 substrate layer permanently connected to each other, and the functional element 3 is arranged permanently between the first 1 and second 2 substrate layer.
  • the material of substrate layer 1 and 2 and the solvent and the amount and duration of the pressure is selected such that layer 1 and 2 are permanently connected to each other after discontinuation of the pressure.
  • 1 positioning recesses may be formed in the first substrate layer corresponding to positioning pins on the functional element 3, so that the functional element 3 can be arranged in a simple manner and exactly at a predetermined position on the substrate layer 1. It is clear that, conversely, positioning pins can also be formed on the surface of the first substrate layer 1 and positioning recesses or positioning holes corresponding to the positioning pins of the substrate layer 1 can be formed on the functional element 3.
  • the functional element 3 is suitably formed substantially as a two-dimensional layer which is elastic and suitably much thinner than the first 1 and second 2 substrate layers, and moreover the functional element 3 has a smaller area than the first 1 and second substrate layer; and further, the first 1 and second 2 substrate layers are formed of a material available by means of a suitable solvent and pressure, and further having a sufficient elasticity such that the functional element 3 is pressurized between the first and second substrates second 2 substrate layer can be clamped and itself touch the surfaces of the first 1 and second 2 substrate layer and connect to each other and are permanently connected to each other after the pressure is discontinued. In this case, the functional element 3 can be clamped between the two substrate layers one and two in such a way that small hollow spaces x are formed at its edges.
  • the first 1 and second 2 substrate layers are made of plastic and preferably of polycarbonate and / or PPSU and / or PEI and / or melamine, and the functional element 3 is suitably a thin plastic film and / or a metal foil and in particular of plastic and preferably made of polymid.
  • Fig. 2a, b and c show schematic representations of the basic elements of a device according to the invention and in each case modifications of the basic elements of a device according erfindungsmä health of Fig. 1 ,
  • two functional elements 3 are clamped between a first 1 and second 2 substrate layer, it being understood that a plurality of functional elements 3 can also be clamped between a first 1 and second 2 substrate layer by means of the method according to the invention.
  • Fig. 2b shows the basic components of a further modification of the device of Fig.1 , wherein here only one functional element 3 is clamped by way of example between a first 1 and second 2 substrate layer.
  • the first substrate layer 1 is pretreated in such a way, that is to say a suitable recess is formed in the surface of the substrate layer 1 such that the functional element 3 can be arranged with exact position in the recess.
  • the functional element 3 may be made thicker than a functional element 3 of the device of FIG Fig. 1 and Fig. 2a , Suitably, the functional element 3 of the device of Fig. 2b a thickness equal to or greater than the depth of the recess of the substrate layer 1.
  • Fig. 2c shows a schematic representation of the essential components of a further modification of the basic elements of a device according to the invention, in which case also in the second substrate layer 2, a suitable recess is formed, which corresponds to the recess in the substrate layer 1 and the functional element 3.
  • the functional element 3 may have a greater thickness than the functional element 3 in the devices of FIG Fig. 1 . 2a and 2b wherein the thickness of the functional element 3 is preferably equal to or greater than the sum of the depths of the recesses in the substrate layers 1 and 2.
  • Fig. 3a shows a plan view of the essential components of a device according to the invention and Fig. 3b shows a section through superimposed components of Fig. 3a ,
  • the device according to Fig. 3a provides a device with channel-like structures for the transport and / or storage of a liquid and / or gaseous medium, the device comprising a first 1 and second substrate layer 2 and a functional element 3 which is elastic and suitably much thinner than the first 1 and second 2 substrate layers, and which is sandwiched between the first 1 and second 2 substrate layers and / or second 2 substrate layer channel-like structures 10 and 20 are formed, and the first 1 and second 2 substrate layer firmly and permanently connected to each other, wherein the functional element 3 is clamped between the first 1 and second 2 substrate layer, that by means of the functional element the channel-like structures 10 and 20 in the first 1 and / or second 2 substrate layer are at least gas and / or liquid-tight.
  • the functional element 3 is advantageously formed as a thin film having a through opening 30 corresponding to the opening 20 of the second substrate layer 2, and also formed with a valve flap 31 whose width and length correspond to the width and depth of the channel 10.
  • the layers 1 and 2 are now advantageously arranged one above the other, and also the functional element 3 sandwiched between the substrate layers 1 and 2, which is provided by means of the opening 30 and 20, a connection of the channel 10 to a cavity which is provided with a drive element 4 cooperates, and also by means of the valve flap 31 of the channel 10 can be opened and / or closed, so that a pump structure according to the invention is provided.
  • the pump structure described above is schematically shown in FIG Fig. 3b shown.
  • the drive element 4 can be provided for example and suitably by means of a piezoelectric actuator 4.
  • the opening 30 and 20 and the drive element 4 in the flow direction (arrow) of the valve flap 31 downstream For example, the opening 30 and 20 and the drive element 4 in the flow direction (arrow) of the valve flap 31 downstream.
  • the opening 20 and 30 and the drive element 4 with a suitable design of the valve flap 31 of this in Flow direction may also be upstream, and / or in addition to the opening 20 and 30 of Fig. 3a and b each second openings 20 and 30 and a second drive element 4 in addition to the valve flap 31 downstream drive element 4 of the valve flap 31 may be connected upstream.
  • a hole structure 30 ' can be formed in the functional element 3 which has a filtering effect and effectively prevents any particles of dirt contained in a liquid to be pumped from entering the cavity or cavity. enter the pumping chamber.
  • Such an advantageous hole structure 30 ' is shown schematically in FIG Fig. 8 and is described in detail below.
  • Fig. 4a shows a schematic partial section through superimposed components of a device according to the invention according to an embodiment of the present invention
  • Fig. 4b a top view
  • Fig. 4c a partial plan view of a functional element of the second embodiment of the present invention of Fig. 4a ,
  • the embodiment of the present invention according to Fig. 4 corresponds essentially to the device of Fig. 3 with the difference that the channel 10 flattens in the first layer at a predetermined position at a predetermined angle ⁇ , and also in the second substrate layer 2, a second channel 20 is formed, which also flattens at a predetermined position at a predetermined angle ⁇ and which corresponds to the channel 10 formed in the first substrate layer 1 such that when the substrate layers 1 and 2 are arranged one above the other a tangential connection of the channels 10 and 20 is provided at a predetermined angle ⁇ .
  • the channel 20 is also designed such that it is connected at a predetermined position, not shown in the drawing with a layer disposed above the layer 2 cavity, which cooperates with a Antriebselemt 4.
  • the functional element 3 of the embodiment of Fig. 4 corresponds substantially to the functional element 3 of the device of Fig. 3 with the difference, that the functional element 3 of the embodiment of Fig. 4 no opening 30 comprises.
  • the first channel 10 and the second channel 20 and the functional element 3 with the valve flap. 31 are now inventively designed such that the valve flap 31 is arranged at the junction between the first channel 10 and the second channel 20 such that, in cooperation with a drive element 4, which may be before and / or downstream of the valve flap, the connection between the first channel 10 and the second channel 20 is open or closed
  • the first channel 10, the second channel 20 and the valve flap 31 are formed such that the first channel 10 has a first width 10b
  • the second channel 20 has a second width 20b
  • the butterfly valve 31 has a third width 31b such that the first width 10b is ⁇ the third width 31b, and the third width 31b is ⁇ the second width 20b.
  • valve flap 31 is also arranged and formed such that a pump structure is provided with a flow direction (arrow direction) from the first channel 10 to the second channel 20, wherein the drive element 4 of the valve flap 31 in the flow direction 132 before (4,132) and / or (132,4) can be connected downstream.
  • a pump structure (I) according to the invention is provided.
  • Fig. 5a shows a schematic partial section through superimposed components of a device according to the invention according to a further embodiment of the present invention
  • Fig. 5b and c a plan view and a partial plan view of a functional element 3 of the third embodiment of the present invention of Fig. 5a ,
  • the embodiment of the present invention of Fig. 5 In its principle corresponds substantially to the embodiment of the present invention according to Fig. 4 with the difference that the channels 10 and 20 and the functional element 3 are designed and arranged with the valve flap 31 such that a pump is provided with the flow direction (arrow direction) from channel 20 to channel 10.
  • the channels 10 and 20 suitably have a first width 10b or a first second width 20b and the butterfly valve 31 have a third width 31b such that the second width 20b is ⁇ the third width 31b and the third width 31b is ⁇ the first width 10b.
  • a drive element 4 of the valve flap 31 can also be connected in the flow direction 231 before (4,231) and / or after (231,4).
  • a pump structure (II) according to the invention is provided.
  • the angle ⁇ suitably includes an angle of 5 ° to 80 ° and preferably of 15 to 50 °, and more preferably an angle, so that a tangential transition between the two channels 10 and 20 is provided.
  • Fig. 6a shows a schematic representation of the arrangement of a erfindungewashen device according to another embodiment of the present invention.
  • a central drive element 4 at least a first valve flap 31 according to the pump structure (I) of Fig. 4 upstream in the flow direction (arrow) and also at least one second valve flap 31 according to the pump structure (II) of Fig. 5 downstream in the flow direction.
  • the pump structure (I) and the pump structure (II) may each be provided by means of independent functional elements 3 and their valve flaps 31.
  • the pump structure (I) and (II) can also be provided by means of a suitably formed one-piece functional element 3 with a central through-hole 30 which comprises a valve flap 31 according to the embodiment of FIG Fig.
  • FIG. 6b 1 shows a suitable one-piece functional element 3 with a central through-recess 30, to which a valve flap element 31 according to the embodiment of FIG Fig. 4 (I) upstream in the flow direction (arrow) is, and a valve flap 31 according to the execution of Fig. 5 (II) is downstream in the flow direction.
  • a hole structure 30 ' accordinging to the functional element 3 of FIG Fig. 8 be formed, which will be described below.
  • Fig. 6c shows a schematic representation of the arrangement of a device according to the invention according to a further embodiment of the present invention, in which also, as in the embodiment of the present invention of Fig. 6a First, a pump structure (I) according to the embodiment of Fig. 4 a central drive element 4 upstream in the flow direction (arrow), and a second pump structure (II) according to the embodiment of Fig. 5 the drive element 4 downstream in the flow direction, and in which also a third pump structure (II) according to the embodiment of Fig. 5 upstream of the central drive element 4 and downstream of the first pump structure (I), and in which also a fourth pump structure (I) according to the embodiment of Fig. 4 the central drive element 4 is connected downstream, and the first pump structure (II) according to Fig. 5 upstream.
  • a pump structure (I) according to the embodiment of Fig. 4 a central drive element 4 upstream in the flow direction (arrow)
  • a second pump structure (II) according to the embodiment of Fig. 5 the
  • a liquid flows through a channel 10 in the first substrate layer 1, through a pump structure (I) and a channel 20 in the second substrate layer 2, a pump structure (II) and a channel 10 in the first substrate layer 1, a further pump structure (I) , and a channel 20 in the second substrate layer 2, and finally by another pump structure (II) and a channel 10 in the first substrate layer 1.
  • the four pump structures (I) and (II) may be provided by individual functional elements 3 that interact with the central drive element 4.
  • the respective valve flaps 31 are provided by a one-piece functional element 3 which has a continuous recess 30 in its central area, two each Valve flaps 31 according to the embodiments of the pump structures (II) and (I) of the recess 30 in the flow direction upstream and downstream.
  • Fig. 9 shows a schematic section through the embodiment of the present invention of Fig. 6c ,
  • FIG Fig. 6d Such an advantageous functional element 3 is shown schematically in FIG Fig. 6d and each comprising valve flaps 31 according to the pump structures (I), (II), (I) and (II), which are connected in series in this direction in the flow direction F and wherein the central recess 30 between the valve flaps 31 of the central pump structures (II) and (I) is arranged.
  • a hole structure 30 ' instead of the opening 30, a hole structure 30 'according to the functional element 3 of FIG Fig. 8 be formed, which will be described below.
  • Fig. 7a shows by way of example a schematic representation of an apparatus with the basic elements of the present invention with a channel 10 formed in the first substrate layer 1, and a functional element 3 with a through recess 30 or a hole structure 30 ', which is a valve flap 31 upstream , and a second substrate layer 2 having a through-hole 20 corresponding to a cavity 410 formed in a third substrate layer 41.
  • the device of Fig. 7a corresponds in its structure and its operation of the device of Fig. 3 , which is why reference is made here to the description.
  • the layers 1 and 2 are stacked and the functional element 3 is sandwiched between the layers 1 and 2.
  • the fourth layer 41 with the cavity 410 which includes a pumping chamber, is disposed above the second layer 2 and is covered with a thin glass layer 42 over which is disposed a drive element 43 which is suitably provided by means of a piezoactuator 4.
  • the opening is 20 of the second layer and the cavity 410 in the layer 41 are formed and arranged such that the opening 20 of the second layer is disposed at a vertex of the cavity 410 of the substrate layer 41. This is when using the present Invention as a liquid pump, the penetration of air bubbles in the cavity 410 minimized.
  • the drive element 4 may suitably be a thin piezomembrane.
  • the present invention can be miniaturized by means of microstructure techniques, which can also be produced inexpensively in industrial mass production.
  • Fig. 8 shows a schematic representation of an advantageous modification of the one-piece functional element 3 of the invention Fig. 6d suitably comprising a thin plastic film.
  • the functional element 3 further comprises valve flaps 31 according to the pump structures (I), (II), (I) and (II), which are formed in a plastic foil in this order and arranged in the flow direction F.
  • a hole structure 30 ' is formed which cooperates with the cavity 410 of a pumping chamber.
  • the hole structure has the effect of a filter, the penetration of contained in a liquid to be pumped dirt or. Noise particles in the pumping chamber 410 and associated malfunction of the drive element 4 effectively prevented.
  • any particles contained in the liquid to be pumped are therefore completely passed through the fluid channel and do not reach the pumping chamber, so that a piezoelectric membrane 4 can move freely.
  • the requirements for the purity of a liquid to be pumped are advantageously determined solely by the channel cross-section of the channel structures 10 and 20, which may be approximately 1 mm 2 by way of example.
  • the above-described advantageous hole structure 30 'of the functional element 3 acts particularly advantageous with a multiple valve arrangement according to Fig. 6c .
  • Fig. 9 and 10 together, even elongated fibrous particles pass through a pump according to the invention without interference.
  • Fig. 9 shows a schematic section through an inventive device according to the embodiment of the present invention, the above with reference to Fig. 6c has been described in detail.
  • This embodiment of the invention is particularly suitable for a one-piece functional element 3 according to Fig. 6d , which is shown by way of example in the drawing 9, and is particularly suitable for a functional element 4 according to Fig. 8 ,
  • the advantageous series connection of the pump structures (I), (II), (I) and (II) in this order in the flow direction F with the respective valve flaps 31 and the associated channel structures 10 and 20 in the upper 1 and lower 2 substrate layer and the central between the central pump structure (II) and (I) arranged drive element 4 with the central pumping chamber favors, in particular due to the at an angle a with particular tangential transition of the channel structures 10 and 20, a particularly efficient pump performance.
  • Fig. 10 shows a more detailed representation of the fifth embodiment of the present invention of Fig. 6c and Fig. 9 , in which the transition of the channel structures 10 and 20 is advantageously formed steplessly and without edges and corners, which increases the efficiency of the pumping power further increased significantly and the susceptibility to interference by dirt or interfering particles significantly further reduced, in particular in combination with the example here and advantageously used functional layer 3 of Fig. 8 with the hole structure 30.
  • the single-level design of the functional element 3 and its multifunctionality as a filter and with a plurality of differently shaped and similar valve flaps 31 is particularly advantageous since particularly efficient in performance and effect, especially with suitable channel structures 10 and 20 and also there also miniaturized easily and inexpensively in manufacture and assemble large quantities.
  • One of the above-described embodiments of a micropump according to the invention is particularly suitable for the conveyance of liquids and gases even in the smallest metered quantities and may have a particle tolerance up to a particle diameter of about 40 microns with a correspondingly miniaturized design.
  • a particle tolerance up to a particle diameter of about 40 microns with a correspondingly miniaturized design.
  • a micropump according to the invention can be used in many fields, for example in the metering of fluids in chemical, biological and medical analysis, for example in the sampling, for example in environmental analysis, and also, for example, in the food industry Cooling systems, for transport purposes such as lubrication systems or dispensing purposes, etc.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Saccharide Compounds (AREA)

Claims (13)

  1. Dispositif avec structures à canaux pour le transport et/ou le stockage d'un agent liquide et/ou gazeux, sachant que :
    Le dispositif comporte :
    une première (1) et une deuxième (2) couche de substrat et un élément fonctionnel (3), lequel est disposé en sandwich entre la première (1) et la deuxième (2) couche de substrat ; et
    les structures en canaux sont formées dans la première (1) et/ou dans la deuxième (2) couche de substrat ; et
    la première (1) et la deuxième (2) couche de substrat sont fixées l'une à l'autre de façon définitive, et l'élément fonctionnel (3) est coincé entre la première (1) et la deuxième (2) couche de substrat ; sachant que
    l'élément fonctionnel (3) est élastique, et la première (1) et la deuxième (2) couche de substrat sont rigides ; et les structures en canaux situées dans la première (1) et/ou la deuxième (2) couche de substrat sont étanches au gaz et/ou aux liquides grâce à l'élément fonctionnel (23), et
    l'élément fonctionnel (3) est beaucoup plus mince que la première (1) et la deuxième (2) couche, et
    l'élément fonctionnel (3) est au moins un élément fonctionnel mobile tel qu'à l'aide de l'élément fonctionnel 3, une structure en canaux (10, 20) puisse être ouverte et/ou fermée,
    l'élément fonctionnel (3) comporte au moins un clapet de soupape (31) ;
    le dispositif comporte un élément d'actionnement dynamique (4) qui est en mesure de modifier le volume d'une cavité (410) formée dans le dispositif et
    un premier canal (10) est formé dans la première couche (1) ; un deuxième canal (20) est formé dans la deuxième couche (2), de telle sorte qu'une liaison entre le premier canal (10) et le deuxième canal (20) peut être effectuée ;
    au moins un clapet de soupape (31) de l'élément fonctionnel (3) est disposé de telle sorte que
    la liaison entre le premier (10) et le deuxième (20) canal puisse être ouverte ou fermée, et
    le premier (10) et deuxième (20) canal sont globalement parallèles ;
    caractérisé en ce que
    la liaison entre le premier (10) et le deuxième (20) canal forme un angle (α) de 15 à 50° avec le premier (10) et le deuxième (20) canal, sachant qu'à l'aide de la liaison entre le premier (10) et le deuxième (20) canal, une transition tangentielle continue, sans arête et sans coin est obtenue entre le premier (10) et le deuxième (20) canal.
  2. Dispositif selon la revendication, sachant que :
    le premier canal (10) a une première largeur (10b), le deuxième canal (20) a une deuxième largeur (20b), et
    le clapet de soupape (31) a une largeur (31 b),
    et que l'on a :
    première largeur (10b) ≤ troisième largeur (31b) ≤ deuxième largeur (20b) ;
    sachant que dans le sens du flux (132), un élément d'actionnement (4) est placé avant (4, 132) et/ou après (132, 4) le clapet de soupape (31).
  3. Dispositif selon la revendication 1
    sachant que
    le premier canal (10) a une première largeur (10b)
    le deuxième canal (20) a une deuxième largeur (20b) et
    le clapet de soupape (31) a une troisième largeur (31 b)
    et que l'on a :
    deuxième largeur (20b) ≤ troisième largeur (31b) ≤ première largeur (10b) ;
    sachant que dans le sens du flux (231), un élément d'actionnement (4) est placé avant (4, 231) et/ou après (231, 4) le clapet de soupape (31).
  4. Dispositif selon la revendication 2 ou 3, avec :
    un élément d'actionnement central (4) qui est placé avant (4, 132) le clapet de soupape (31), au moins au nombre de un, dans le sens du flux (132) et
    qui par ailleurs est placé après (231, 4) un deuxième clapet de soupape (31) au moins au nombre de un, dans le sens du flux (231).
  5. Dispositif selon la revendication 4 avec :
    un troisième clapet de soupape (31) qui est placé après (132, 4) l'élément d'actionnement (4) dans le sens du flux (132) et avant le deuxième clapet de soupape (31), et un quatrième clapet de soupape (31) qui est placé avant (231, 4) l'élément d'actionnement (4) dans le sens du flux et après le premier clapet de soupape (31).
  6. Dispositif selon les revendications 2, 3 et 4, avec :
    Un grand nombre de clapets de soupape (31) et au moins un élément d'actionnement (4).
  7. Dispositif selon la revendication 5, sachant que :
    un premier, un deuxième, un troisième et un quatrième clapet de soupape (31) sont formés dans un film plastique (3), conformément à la structure de la la pompe (I), (II), (I) et (II), dans cet ordre dans le sens du flux, et que par ailleurs, entre le deuxième (II) et le troisième (I) clapet de soupape (31) est formée une fente (30) qui est reliée à une cavité (410) agissant de concours avec l'élément d'actionnement (4).
  8. Dispositif selon l'une des revendications 1 à 7, sachant que :
    l'élément d'actionnement (4) comporte :
    une cavité (410) qui est constituée à l'aide d'une couche de substrat (41) avec une fente centrale (410), disposée au-dessus de la couche (42) avec une rigidité prédéfinie et un élément piézoélectrique (43).
  9. Dispositif selon la revendication 8, sachant que :
    une ouverture (20) de la deuxième couche (2) est disposée sur une crête de la cavité (410) de la couche de substrat (41).
  10. Dispositif selon l'une des revendications 1 à 9, sachant que :
    le dispositif comporte un élément fonctionnel (3) formé dans un film plastique fin monobloc, avec des clapets de soupape (31) et
    avec une structure à trous centrale (30') et un effet de filtrage agissant de concours avec la cavité de la chambre de pompage.
  11. Procédé de fabrication du dispositif selon l'une des revendications 1 à 10, sachant que :
    Le dispositif est fabriqué à l'aide d'un procédé servant à relier la première couche de substrat (1), la deuxième couche de substrat (2) et un élément fonctionnel (3), sachant que :
    L'élément fonctionnel (3) est choisi dans un matériau ayant une élasticité prédéfinie, et
    La première (1) et la deuxième (2) couche sont choisies dans un matériau ayant une rigidité prédéfinie ;
    L'élément fonctionnel (3) est placé en sandwich entre la première (1) et la deuxième (2) couche de substrat ;
    la première (1) et la deuxième (2) couche de substrat sont assemblées par pression, sachant que l'élément fonctionnel (3) est coincé de telle sorte que
    la première (1) et la deuxième (2) couche de substrat sont liées de façon définitive après que la pression est retombée, et l'élément fonctionnel (3) est disposé de façon définitive entre la première (1) et la deuxième (2) couche de substrat.
  12. Procédé selon la revendication 11, sachant que :
    Le dispositif est de plus fabriqué à l'aide d'un procédé, sachant que l'élément fonctionnel (3) est beaucoup plus mince que la première (1) et la deuxième (2) couche de substrat, et
    la première (1) et la deuxième (2) couche de substrat et l'élément fonctionnel (3) sont globalement en deux dimensions, et
    l'élément fonctionnel (3) a une plus petite surface que la première (1) et la deuxième (2) couche de substrat, et
    le procédé englobe les phases suivantes :
    - Positionnement de l'élément fonctionnel (3) selon une position prédéfinie sur la couche (1) ;
    - Application d'un solvant approprié sur la surface de la couche (1) non recouverte par l'élément fonctionnel (3)
    - Positionnement de la deuxième couche (2) par-dessus la première couche (1) et l'élément fonctionnel (3) ;
    - Exercice d'une pression sur la deuxième couche (2), de telle sorte que la première (1) et la deuxième (2) couche de substrat soient reliées et que l'élément fonctionnel (3) soit coincé entre les couches (1) et (2), sachant que la première (1) et la deuxième (2) couche sont définitivement reliées une fois que la pression est retombée.
  13. Procédé selon la revendication 11 ou 12, sachant que le dispositif est par ailleurs fabriqué à l'aide d'un procédé, sachant que l'élément fonctionnel (3) est formé à l'aide d'un fil plastique fin et/ou un film métallique, et la première (1) et la deuxième (2) couche de substrat est en plastique et de préférence en polycarbonate et/ou PPSU et/ou PEI et/ou mélamine, et l'élément fonctionnel (3) est en plastique et de préférence en polyamide.
EP20040804104 2003-12-19 2004-12-20 Micropompe et son procédé de fabrication Active EP1700036B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2003160709 DE10360709A1 (de) 2003-12-19 2003-12-19 Mikropumpe und klebstoffreies Verfahren zur Verbindung zweier Substrate
PCT/EP2004/014505 WO2005061894A1 (fr) 2003-12-19 2004-12-20 Micropompe et procede sans adhesif pour l'assemblage de deux substrats

Publications (2)

Publication Number Publication Date
EP1700036A1 EP1700036A1 (fr) 2006-09-13
EP1700036B1 true EP1700036B1 (fr) 2010-06-02

Family

ID=34706454

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20040804104 Active EP1700036B1 (fr) 2003-12-19 2004-12-20 Micropompe et son procédé de fabrication

Country Status (7)

Country Link
US (1) US8043073B2 (fr)
EP (1) EP1700036B1 (fr)
JP (1) JP4664309B2 (fr)
CN (1) CN1759247B (fr)
AT (1) ATE470073T1 (fr)
DE (2) DE10360709A1 (fr)
WO (1) WO2005061894A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2191135A1 (fr) 2007-09-12 2010-06-02 Gernot Heuser Système de microdosage
EP2735834A4 (fr) * 2011-07-21 2014-12-10 Panasonic Corp Appareil de refroidissement, appareil électronique qui en est équipé et véhicule électrique

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57136883U (fr) * 1981-02-18 1982-08-26
DE3926066A1 (de) * 1989-08-07 1991-02-14 Ibm Deutschland Mikromechanische kompressorkaskade und verfahren zur druckerhoehung bei extrem niedrigem arbeitsdruck
JPH03122282U (fr) * 1990-03-27 1991-12-13
US5496009A (en) * 1994-10-07 1996-03-05 Bayer Corporation Valve
FR2757906A1 (fr) * 1996-12-31 1998-07-03 Westonbridge Int Ltd Micropompe avec piece intermediaire integree
AU9739898A (en) * 1997-08-20 1999-03-08 Westonbridge International Limited Micro pump comprising an inlet control member for its self-priming
US6042351A (en) * 1997-12-08 2000-03-28 Carrier Corporation Enhanced flow compressor discharge port entrance
JPH11241683A (ja) * 1997-12-26 1999-09-07 Sanden Corp 圧縮機のバルブ装置
US6431212B1 (en) * 2000-05-24 2002-08-13 Jon W. Hayenga Valve for use in microfluidic structures
DE10104957A1 (de) * 2000-09-07 2002-03-21 Gesim Ges Fuer Silizium Mikros Verfahren zum Herstellen einer 3-D-Mikrodurchflusszelle und 3-D-Mikrodurchflusszelle
US6644944B2 (en) * 2000-11-06 2003-11-11 Nanostream, Inc. Uni-directional flow microfluidic components
JP4248238B2 (ja) * 2001-01-08 2009-04-02 プレジデント・アンド・フェローズ・オブ・ハーバード・カレッジ マイクロ流体システム用の弁およびポンプならびにマイクロ流体システムを作製するための方法
US20020155010A1 (en) * 2001-04-24 2002-10-24 Karp Christoph D. Microfluidic valve with partially restrained element
CN1232728C (zh) * 2003-04-11 2005-12-21 华中科技大学 无阀薄膜驱动型微泵

Also Published As

Publication number Publication date
JP2007514891A (ja) 2007-06-07
WO2005061894A1 (fr) 2005-07-07
EP1700036A1 (fr) 2006-09-13
DE10360709A1 (de) 2005-10-06
US20070003420A1 (en) 2007-01-04
CN1759247B (zh) 2012-06-20
DE502004011253D1 (de) 2010-07-15
US8043073B2 (en) 2011-10-25
JP4664309B2 (ja) 2011-04-06
CN1759247A (zh) 2006-04-12
ATE470073T1 (de) 2010-06-15

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