EP1700036B1 - Micropump and method for the production thereof - Google Patents

Abstract

The invention relates to a device provided with channel-type structures for transporting and/or storing a liquid and/or gaseous medium. The device comprises a first (1) substrate layer and a second substrate layer (2), and a functional element (3) that is sandwiched between the first and second substrate layers, the channel-type structures being embodied in the first and/or second substrate layer. The first and second substrate layers are solidly and permanently interconnected, and the functional element is clamped between the first and second substrate layers. The functional element is elastic, the first and second layers are rigid, and the channel-type structures in the first and/or second substrate layers are at least partially sealed in a gas-tight and/or liquid-tight manner due to the functional element.

Description

The present invention relates to a micropump, and to a method for its production.

From the prior art, a variety of methods are known, a first, second and third substantially two-dimensionally formed layer of particular plastic and / or glass and / or substrate and / or metal with each other. For example, the first, second and third layers can be bonded to one another by means of adhesives, the methods known from the prior art each using three layers of essentially the same size in terms of their areal extent. In addition, micropumps are known from the prior art, which consist essentially of a lower housing part and a housing upper part, between which a valve membrane is arranged, for example from the DE-19720482 C2 and the US 2002/155010 A1 (closest prior art).

The known from the prior art method for connecting three layers are usually quite complicated and costly, which applies in the same way for the micropumps known from the prior art, which are produced by the said method.

The object of the present invention is therefore to provide an optimized micropump of compact design with high pumping power, which can be produced using simple and cost-effective production and connection techniques even in large To produce quantities. Another object of the present invention is to provide a low cost manufacturing method for a micropump consisting essentially of a two-layer construction with a functional element between the two layers

The objects are achieved with the features of the independent claims. Advantageous embodiments of the present invention are mentioned in the subclaims and / or the following description, which is accompanied by schematic drawings.

• Fig. 1a, b, c und d eine schematische Darstellung der grundlegenden Elemente einer erfindungsgemäßen Vorrichtung;
• Fig. 2a, b und c jeweils Abwandlungen der grundlegenden Elemente einer erfindungsgemäßen Vorrichtung von Fig. 1;
• Fig. 3a eine schematische Draufsicht auf die wesentlichen Bauelemente einer erfindungsgemäßen Vorrichtung, und Fig. 3b einen Schnitt durch übereinander angeordnete Bauelemente von Fig. 3a;
• Fig. 4a einen Schematischen Teilschnitt durch übereinander angeordnete Bauelemente einer erfindungsgemäßen Vorrichtung gemäß einer Ausführung der vorliegenden Erfindung, und Fig. 4b und c eine schematische Draufsicht auf ein funktionales Element der zweiten Ausführung der vorliegenden Erfindung von Fig. 4a;
• Fig. 5a einen schematischen Teilschnitt durch übereinander angeordnete Bauelemente einer erfindungsgemäßen Vorrichtung gemäß einer weiteren Ausführung der vorliegenden Erfindung, und Fig. 5b und c eine schematische Draufsicht auf ein funktionales Element der Ausführung der vorliegenden Erfindung von Fig. 5a;
• Fig. 6a eine schematische Darstellung der Anordnung einer erfindungsgemäßen Vorrichtung gemäß einer weiteren Ausführung der vorliegenden Erfindung, und
• Fig. 6b eine schematische Darstellung eines funktionalen Elements der Ausführung der vorliegenden Erfindung von Fig. 6a, und
• Fig. 6c eine schematische Darstellung der Anordnung einer erfindungsgemäßen Vorrichtung gemäß einer weiteren Ausführung der vorliegenden Erfindung, und
• Fig. 6d eine schematische Darstellung eines funktionalen Elements der Ausführung der vorliegenden Erfindung von Fig. 6c.
• Fig. 7 a und 7b weitere schematische Darstellungen in Explosionsdarstellung bzw. im Schnitt der wesentlichen Bauelemente einer erfindungsgemäßen Vorrichtung gemäß Fig. 3.
• Fig. 8 eine vorteilhafte Abwandlung des funktionalen Elements von Fig. 6d.
• Fig. 9 einen schematischen Schnitt durch eine erfindungsgemaße Vorrichtung in der Anordnung von Fig. 6c.
• Fig. 10 eine exaktere schematische Darstellung der erfindungsgemäßen Vorrichtung von Fig. 9.

This shows:

• Fig. 1a, b, c and d a schematic representation of the basic elements of a device according to the invention;
• Fig. 2a, b and c in each case modifications of the basic elements of a device according to the invention of Fig. 1 ;
• Fig. 3a a schematic plan view of the essential components of a device according to the invention, and Fig. 3b a section through superimposed components of Fig. 3a ;
• Fig. 4a a schematic partial section through superimposed components of a device according to the invention according to an embodiment of the present invention, and Fig. 4b and c a schematic plan view of a functional element of the second embodiment of the present invention of Fig. 4a ;
• Fig. 5a a schematic partial section through superimposed components of a device according to the invention according to a further embodiment of the present invention, and Fig. 5b and c a schematic plan view of a functional element of the embodiment of the present invention of Fig. 5a ;
• Fig. 6a a schematic representation of the arrangement of a device according to the invention according to a further embodiment of the present invention, and
• Fig. 6b a schematic representation of a functional element of the embodiment of the present invention of Fig. 6a , and
• Fig. 6c a schematic representation of the arrangement of a device according to the invention according to a further embodiment of the present invention, and
• Fig. 6d a schematic representation of a functional element of the embodiment of the present invention of Fig. 6c ,
• Fig. 7 a and 7b are further schematic illustrations in exploded view and in section of the essential components of a device according to the invention according to FIG Fig. 3 ,
• Fig. 8 an advantageous modification of the functional element of Fig. 6d ,
• Fig. 9 a schematic section through an inventive device in the arrangement of Fig. 6c ,
• Fig. 10 a more precise schematic representation of the device according to the invention of Fig. 9 ,

The present invention is based on the idea of specifying a method for connecting a first substrate layer 1, a second substrate layer 2 and a functional element 3, wherein the functional element 3 is elastic and / or much thinner than the first 1 and second 2 substrate layers is formed, and the functional element is sandwiched between the first 1 and second 2 substrate layers, and wherein the first 1 and second 2 layers are joined together by pressure, so that the functional element 3 is clamped between the two layers, that the first 1 and 2 layer are permanently connected to each other, and the functional element 3 is arranged permanently between the first 1 and second 2 layer. Here, the first 1 and second 2 layer and the functional element 3 is formed substantially two-dimensional, wherein the functional Element 3 advantageously has a smaller area than the first 1 and second 2 layers.

In this case, the pressure and the material of layer 1 and layer 2 are advantageously selected such that, after the pressure has been set, layers 1 and 2 are permanently connected to one another.

The method further comprises, in particular, the following steps, wherein first the functional element 3 is placed at a predetermined position on one of the layers 1 or 2, for example on the layer 1, followed by a suitable solvent on the surface not covered by the functional element 3 is applied to the layer 1 or 2, and then the second layer 2 is placed over the first layer 1 and the functional element 3, and then pressure is applied to the second, layer 2, so that the first 1 and second 2 Have layer with each other and the functional element 3 is clamped between the layers 1 and 2.

In this case, the material of layer 1 and 2 and the solvent and height and duration of the pressure is advantageously selected such that after the pressure has been set, layers 1 and 2 are permanently connected to one another.

Suitably, the functional element comprises a thin plastic film and / or a metal foil.

The first 1 and second 2 layers suitably comprise a plastic substrate layer and preferably polycarbonate and / or PPSU and / or PEI and / or melamine.

The basic idea of the present invention is to provide a device with channel-like structures for the transport and / or storage of a liquid and / or gaseous medium, which comprises a first 1 and second 2 substrate layer, between which a functional element 3 is arranged, which is elastic and / or much thinner than the first 1 and second 2 Layer is formed, wherein the channel-like structures are formed in the first 1 and / or second 2 layer, and the first 1 and the second 2 layer are firmly and permanently connected to each other, and the functional element 3 between the first 1 and the second second Layer is clamped, so that by means of the functional element 3, the channel-like structures in the first 1 and / or second 2 layer are at least partially closed gas and / or liquid-tight.

A device according to the invention comprises, in particular, a functional element 3, which is designed as a movable element such that a channel-like structure in the first 1 and / or second 2 layer can be opened and / or closed by means of the functional element 3, the functional element 3 may in particular have a valve function.

In particular, a micropump is provided by means of a device according to the invention, the functional element 3 having at least one valve flap 31 and the device also comprising a dynamic drive element 4 adapted to change a volume of a cavity formed in the device.

According to the invention, a device according to the invention comprises a first layer 1; in which a first channel 10 is formed, and a second layer 2, in which a second channel 20 is formed, so that a connection between the first 10 and the second 20 channel is provided in addition, a valve flap 31 of the functional element 3 is arranged in that the connection between the first 10 and second 20 channels is opened or closed. In a device according to the invention, in particular and suitably, the first 10 and second 20 channels are arranged substantially parallel, wherein the connection between the first 10 and second 20 channel with the first 10 and second 20 channel an angle α of 5 ° to 80 ° and preferably from 15 ° to 50 °, so that a tangential transition between the first 10 and second 20 channels is provided by means of the connection between the first 10 and second 20 channels. In addition, the valve flap 31 of the functional element 3 is suitably arranged at the connection point between the first 10 and second 20 channel.

In particular, and suitably, the first channel 10 has a first width 10b, the second channel 20 has a second width 20b and the valve flap 31 has a third width 31b, wherein the first width 10b ≦ third width 31b ≦ second width 20b, and wherein in the flow direction 132nd a drive element 4 of the valve flap 31 is connected downstream of (4,132) and / or (132,4), whereby a pump structure (I) is provided.

According to a modified embodiment of the present invention, a device is provided particularly and suitably with a first channel 10 having a first width 10b, a second channel 20 having a second width 20b, and a valve flap 31 having a third width 31b, the second width 20b ≦ the third width 31b ≦ the first width 10b, and wherein a drive element 4 of the valve flap 31 in the flow direction 231 is connected before (4,231) and / or after (231,4), wherein a pump structure (II) according to the invention is provided.

According to an advantageous embodiment of the invention, a plurality of micropump structures (I) and / or (II) may be formed in combination in a device according to the invention. In particular and suitably, a device according to the invention comprises a central drive element 4, the at least one first valve flap 31 according to. In addition, at least one second valve flap 31 according to pump structure (II) is downstream (231, 4) in the flow direction (231), and a device according to the invention also comprises, in particular, a third valve flap 31 according to the pump structure I downstream of the drive element 4 in the flow direction 132 (132, 4) and upstream of the second valve flap 31, and also a fourth valve flap 31 according to pump structure II, which is upstream of the drive element 4 in the flow direction 231 (231, 4), and the first valve flap 31 is connected downstream. In this case, in particular and suitably, the valve flaps 31 are formed in this arrangement in the flow direction in a plastic film 3, wherein also between the third and fourth valve flap 31, a recess 30 is formed which is connected to a cavity which cooperates with the drive element 4.

According to a particularly advantageous embodiment of the present invention, a device according to the invention comprises a series connection of pump structures (I), (II), (I) and (II) with an associated first, second, third and fourth Ventliklappe 31 in this order in the flow direction, wherein a central drive element 4 and a cavity (pumping chamber) between the central pump structures (II) and (I) is arranged. In this case, in particular and suitably, the valve flaps 31 are formed in this arrangement in the flow direction in a functional element 3. In addition, a recess 30 is formed between the two middle valve flaps 31, which cooperates with the pumping chamber and the drive element 4.

According to an advantageous embodiment of the functional element 3 according to the invention, instead of the recess 30, a hole structure 30 'with filter effect can be provided, wherein the functional element 3 is suitably formed in a thin plastic film.

Hereinafter, advantageous embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Fig. 1a, b, c and d show a schematic representation of the basic elements of a device according to the invention, wherein the basic principle of the method according to the invention of their preparation is illustrated by means of said figures. In the method used for bonding a first substrate layer 1, a second substrate layer 2 and a functional element. 3 is formed elastically and suitably much thinner than the first 1 and second 2 substrate layer is formed. In addition, the functional element 3 is sandwiched between the first 1 and second 2 substrate layers, wherein the functional element 3 has a smaller area than the first 1 and second 2 layers and is suitably arranged at a predetermined position on the first substrate layer 1. After that, a Next, the second substrate layer 2 is placed over the first layer 1 and the functional element 3, and pressure is applied to the second substrate layer 2, so that the first and the second substrate layer 2 are applied to the surface of the substrate layer 1 not covered by the functional element 3 connect the second substrate layer 2 and the functional element 3 is clamped between the substrate layers 1 and 2, so that the first 1 and second 2 substrate layer permanently connected to each other, and the functional element 3 is arranged permanently between the first 1 and second 2 substrate layer.

Here, the material of substrate layer 1 and 2 and the solvent and the amount and duration of the pressure is selected such that layer 1 and 2 are permanently connected to each other after discontinuation of the pressure.

As in Fig. 1c and d is shown schematically, 1 positioning recesses may be formed in the first substrate layer corresponding to positioning pins on the functional element 3, so that the functional element 3 can be arranged in a simple manner and exactly at a predetermined position on the substrate layer 1. It is clear that, conversely, positioning pins can also be formed on the surface of the first substrate layer 1 and positioning recesses or positioning holes corresponding to the positioning pins of the substrate layer 1 can be formed on the functional element 3.

The functional element 3 is suitably formed substantially as a two-dimensional layer which is elastic and suitably much thinner than the first 1 and second 2 substrate layers, and moreover the functional element 3 has a smaller area than the first 1 and second substrate layer; and further, the first 1 and second 2 substrate layers are formed of a material available by means of a suitable solvent and pressure, and further having a sufficient elasticity such that the functional element 3 is pressurized between the first and second substrates second 2 substrate layer can be clamped and itself touch the surfaces of the first 1 and second 2 substrate layer and connect to each other and are permanently connected to each other after the pressure is discontinued. In this case, the functional element 3 can be clamped between the two substrate layers one and two in such a way that small hollow spaces x are formed at its edges.

Suitably, the first 1 and second 2 substrate layers are made of plastic and preferably of polycarbonate and / or PPSU and / or PEI and / or melamine, and the functional element 3 is suitably a thin plastic film and / or a metal foil and in particular of plastic and preferably made of polymid.

Fig. 2a, b and c show schematic representations of the basic elements of a device according to the invention and in each case modifications of the basic elements of a device according erfindungsmäßen of Fig. 1 , In the device of Fig. 2a For example, two functional elements 3 are clamped between a first 1 and second 2 substrate layer, it being understood that a plurality of functional elements 3 can also be clamped between a first 1 and second 2 substrate layer by means of the method according to the invention.

Fig. 2b shows the basic components of a further modification of the device of Fig.1 , wherein here only one functional element 3 is clamped by way of example between a first 1 and second 2 substrate layer. Also, in the execution of Fig. 2b the first substrate layer 1 is pretreated in such a way, that is to say a suitable recess is formed in the surface of the substrate layer 1 such that the functional element 3 can be arranged with exact position in the recess. In the device of Fig. 2b In addition, the functional element 3 may be made thicker than a functional element 3 of the device of FIG Fig. 1 and Fig. 2a , Suitably, the functional element 3 of the device of Fig. 2b a thickness equal to or greater than the depth of the recess of the substrate layer 1.

Fig. 2c shows a schematic representation of the essential components of a further modification of the basic elements of a device according to the invention, in which case also in the second substrate layer 2, a suitable recess is formed, which corresponds to the recess in the substrate layer 1 and the functional element 3. In the device of Fig. 2c For example, the functional element 3 may have a greater thickness than the functional element 3 in the devices of FIG Fig. 1 . 2a and 2b wherein the thickness of the functional element 3 is preferably equal to or greater than the sum of the depths of the recesses in the substrate layers 1 and 2.

It is clear that further modifications of the basic elements of a device according to the invention and of the method according to the invention also from combinations of the embodiments of Fig. 1 . 2a, 2b and 2c can be provided.

The following figures show schematic representations of the essential components of a device according to the invention according to further embodiments of the present invention, wherein a basic arrangement of the embodiment of Fig. 1 was selected, both in the two opposite substrate layers 1 and 2, no recesses for positioning of the functional element 3 are formed. It is clear that the embodiments described below also according to the above-described embodiments of Fig. 2b or 2c can be provided, and that the respective functional elements 3 and / or substrate layers 1 and / or 2 also based Fig. 1 and 2 may have described positioning configurations.

Fig. 3a shows a plan view of the essential components of a device according to the invention and Fig. 3b shows a section through superimposed components of Fig. 3a ,

The device according to Fig. 3a provides a device with channel-like structures for the transport and / or storage of a liquid and / or gaseous medium, the device comprising a first 1 and second substrate layer 2 and a functional element 3 which is elastic and suitably much thinner than the first 1 and second 2 substrate layers, and which is sandwiched between the first 1 and second 2 substrate layers and / or second 2 substrate layer channel-like structures 10 and 20 are formed, and the first 1 and second 2 substrate layer firmly and permanently connected to each other, wherein the functional element 3 is clamped between the first 1 and second 2 substrate layer, that by means of the functional element the channel-like structures 10 and 20 in the first 1 and / or second 2 substrate layer are at least gas and / or liquid-tight. In the device of Fig. 3 is formed in the first layer 1, an upwardly open channel 10 and formed in the second layer 2 a corresponding to the channel 10 through the layer 2 through opening 20. In addition, the functional element 3 is advantageously formed as a thin film having a through opening 30 corresponding to the opening 20 of the second substrate layer 2, and also formed with a valve flap 31 whose width and length correspond to the width and depth of the channel 10.

The layers 1 and 2 are now advantageously arranged one above the other, and also the functional element 3 sandwiched between the substrate layers 1 and 2, which is provided by means of the opening 30 and 20, a connection of the channel 10 to a cavity which is provided with a drive element 4 cooperates, and also by means of the valve flap 31 of the channel 10 can be opened and / or closed, so that a pump structure according to the invention is provided.

The pump structure described above is schematically shown in FIG Fig. 3b shown. The drive element 4 can be provided for example and suitably by means of a piezoelectric actuator 4. In the device of Fig. 3b For example, the opening 30 and 20 and the drive element 4 in the flow direction (arrow) of the valve flap 31 downstream. It is clear that the opening 20 and 30 and the drive element 4 with a suitable design of the valve flap 31 of this in Flow direction may also be upstream, and / or in addition to the opening 20 and 30 of Fig. 3a and b each second openings 20 and 30 and a second drive element 4 in addition to the valve flap 31 downstream drive element 4 of the valve flap 31 may be connected upstream.

Suitably and advantageously, instead of the opening 30, a hole structure 30 'can be formed in the functional element 3 which has a filtering effect and effectively prevents any particles of dirt contained in a liquid to be pumped from entering the cavity or cavity. enter the pumping chamber. Such an advantageous hole structure 30 'is shown schematically in FIG Fig. 8 and is described in detail below.

Fig. 4a shows a schematic partial section through superimposed components of a device according to the invention according to an embodiment of the present invention, and Fig. 4b a top view and Fig. 4c a partial plan view of a functional element of the second embodiment of the present invention of Fig. 4a ,

The embodiment of the present invention according to Fig. 4 corresponds essentially to the device of Fig. 3 with the difference that the channel 10 flattens in the first layer at a predetermined position at a predetermined angle α, and also in the second substrate layer 2, a second channel 20 is formed, which also flattens at a predetermined position at a predetermined angle α and which corresponds to the channel 10 formed in the first substrate layer 1 such that when the substrate layers 1 and 2 are arranged one above the other a tangential connection of the channels 10 and 20 is provided at a predetermined angle α. The channel 20 is also designed such that it is connected at a predetermined position, not shown in the drawing with a layer disposed above the layer 2 cavity, which cooperates with a Antriebselemt 4.

The functional element 3 of the embodiment of Fig. 4 corresponds substantially to the functional element 3 of the device of Fig. 3 with the difference, that the functional element 3 of the embodiment of Fig. 4 no opening 30 comprises.

The first channel 10 and the second channel 20 and the functional element 3 with the valve flap. 31 are now inventively designed such that the valve flap 31 is arranged at the junction between the first channel 10 and the second channel 20 such that, in cooperation with a drive element 4, which may be before and / or downstream of the valve flap, the connection between the first channel 10 and the second channel 20 is open or closed According to the invention, the first channel 10, the second channel 20 and the valve flap 31 are formed such that the first channel 10 has a first width 10b, the second channel 20 has a second width 20b and the butterfly valve 31 has a third width 31b such that the first width 10b is ≦ the third width 31b, and the third width 31b is ≦ the second width 20b. Suitably, the valve flap 31 is also arranged and formed such that a pump structure is provided with a flow direction (arrow direction) from the first channel 10 to the second channel 20, wherein the drive element 4 of the valve flap 31 in the flow direction 132 before (4,132) and / or (132,4) can be connected downstream. By means of the above-described embodiment according to Fig. 4a a pump structure (I) according to the invention is provided.

Fig. 5a shows a schematic partial section through superimposed components of a device according to the invention according to a further embodiment of the present invention, and Fig. 5b and c a plan view and a partial plan view of a functional element 3 of the third embodiment of the present invention of Fig. 5a ,

The embodiment of the present invention of Fig. 5 In its principle corresponds substantially to the embodiment of the present invention according to Fig. 4 with the difference that the channels 10 and 20 and the functional element 3 are designed and arranged with the valve flap 31 such that a pump is provided with the flow direction (arrow direction) from channel 20 to channel 10. The channels 10 and 20 suitably have a first width 10b or a first second width 20b and the butterfly valve 31 have a third width 31b such that the second width 20b is ≦ the third width 31b and the third width 31b is ≦ the first width 10b. It is clear that in the third execution of Fig. 5 a drive element 4 of the valve flap 31 can also be connected in the flow direction 231 before (4,231) and / or after (231,4). With the embodiment of the present invention of Fig. 5 a pump structure (II) according to the invention is provided.

For both embodiments of the present invention, namely the execution of Fig. 4 and 5 The angle α suitably includes an angle of 5 ° to 80 ° and preferably of 15 to 50 °, and more preferably an angle, so that a tangential transition between the two channels 10 and 20 is provided.

Fig. 6a shows a schematic representation of the arrangement of a erfindungegemäßen device according to another embodiment of the present invention.

In the practice of the present invention of Fig. 6a is according to the invention a central drive element 4 at least a first valve flap 31 according to the pump structure (I) of Fig. 4 upstream in the flow direction (arrow) and also at least one second valve flap 31 according to the pump structure (II) of Fig. 5 downstream in the flow direction. In this embodiment of the present invention, the pump structure (I) and the pump structure (II) may each be provided by means of independent functional elements 3 and their valve flaps 31. Suitably, the pump structure (I) and (II) can also be provided by means of a suitably formed one-piece functional element 3 with a central through-hole 30 which comprises a valve flap 31 according to the embodiment of FIG Fig. 4 upstream in the flow direction, and with a valve flap 31 according to the embodiment of Fig. 5 , which is the downstream opening 30 downstream in the flow direction. Such a functional element 3 according to the invention is shown schematically in FIG Fig. 6b 1, which shows a suitable one-piece functional element 3 with a central through-recess 30, to which a valve flap element 31 according to the embodiment of FIG Fig. 4 (I) upstream in the flow direction (arrow) is, and a valve flap 31 according to the execution of Fig. 5 (II) is downstream in the flow direction. Suitably and advantageously, in the functional element 3, instead of the opening 30, a hole structure 30 'according to the functional element 3 of FIG Fig. 8 be formed, which will be described below.

Fig. 6c shows a schematic representation of the arrangement of a device according to the invention according to a further embodiment of the present invention, in which also, as in the embodiment of the present invention of Fig. 6a First, a pump structure (I) according to the embodiment of Fig. 4 a central drive element 4 upstream in the flow direction (arrow), and a second pump structure (II) according to the embodiment of Fig. 5 the drive element 4 downstream in the flow direction, and in which also a third pump structure (II) according to the embodiment of Fig. 5 upstream of the central drive element 4 and downstream of the first pump structure (I), and in which also a fourth pump structure (I) according to the embodiment of Fig. 4 the central drive element 4 is connected downstream, and the first pump structure (II) according to Fig. 5 upstream.

In operation of the embodiment of the present invention of Fig. 6c a liquid flows through a channel 10 in the first substrate layer 1, through a pump structure (I) and a channel 20 in the second substrate layer 2, a pump structure (II) and a channel 10 in the first substrate layer 1, a further pump structure (I) , and a channel 20 in the second substrate layer 2, and finally by another pump structure (II) and a channel 10 in the first substrate layer 1.

In the practice of the present invention of Fig. 6c For example, the four pump structures (I) and (II) may be provided by individual functional elements 3 that interact with the central drive element 4. Suitably and according to the invention, the respective valve flaps 31 are provided by a one-piece functional element 3 which has a continuous recess 30 in its central area, two each Valve flaps 31 according to the embodiments of the pump structures (II) and (I) of the recess 30 in the flow direction upstream and downstream. Fig. 9 shows a schematic section through the embodiment of the present invention of Fig. 6c ,

Such an advantageous functional element 3 is shown schematically in FIG Fig. 6d and each comprising valve flaps 31 according to the pump structures (I), (II), (I) and (II), which are connected in series in this direction in the flow direction F and wherein the central recess 30 between the valve flaps 31 of the central pump structures (II) and (I) is arranged. Suitably and advantageously, in the functional element 3, instead of the opening 30, a hole structure 30 'according to the functional element 3 of FIG Fig. 8 be formed, which will be described below.

Fig. 7a shows by way of example a schematic representation of an apparatus with the basic elements of the present invention with a channel 10 formed in the first substrate layer 1, and a functional element 3 with a through recess 30 or a hole structure 30 ', which is a valve flap 31 upstream , and a second substrate layer 2 having a through-hole 20 corresponding to a cavity 410 formed in a third substrate layer 41. The device of Fig. 7a corresponds in its structure and its operation of the device of Fig. 3 , which is why reference is made here to the description. The layers 1 and 2 are stacked and the functional element 3 is sandwiched between the layers 1 and 2. The fourth layer 41 with the cavity 410, which includes a pumping chamber, is disposed above the second layer 2 and is covered with a thin glass layer 42 over which is disposed a drive element 43 which is suitably provided by means of a piezoactuator 4. Suitably, the opening is 20 of the second layer and the cavity 410 in the layer 41 are formed and arranged such that the opening 20 of the second layer is disposed at a vertex of the cavity 410 of the substrate layer 41. This is when using the present Invention as a liquid pump, the penetration of air bubbles in the cavity 410 minimized.

The formation of the cavity 410 in a substrate layer 41, which is disposed above the second substrate layer 20, and the advantageous arrangement thereof has been based on the execution of Fig. 7a and Fig. 3 described by way of example and is also advantageous for the other embodiments of the present invention. It is clear that the inlet and outlet of channels 10 in the first substrate layer can be arranged arbitrarily, for example opposing, parallel or at an angle.

It is also clear that also the other embodiments of the present invention described above are advantageously provided with a drive element 43 and the further elements or layers 4, 41, 410, 42 and 43 according to FIG Fig. 7 can be combined.

The drive element 4 may suitably be a thin piezomembrane.

In particular, the present invention can be miniaturized by means of microstructure techniques, which can also be produced inexpensively in industrial mass production.

Fig. 8 shows a schematic representation of an advantageous modification of the one-piece functional element 3 of the invention Fig. 6d suitably comprising a thin plastic film. The functional element 3 further comprises valve flaps 31 according to the pump structures (I), (II), (I) and (II), which are formed in a plastic foil in this order and arranged in the flow direction F. Between the middle pump structures (II) and (I) is suitably and advantageously a hole structure 30 'is formed which cooperates with the cavity 410 of a pumping chamber. The hole structure has the effect of a filter, the penetration of contained in a liquid to be pumped dirt or. Noise particles in the pumping chamber 410 and associated malfunction of the drive element 4 effectively prevented. Any particles contained in the liquid to be pumped are therefore completely passed through the fluid channel and do not reach the pumping chamber, so that a piezoelectric membrane 4 can move freely. As a result, the requirements for the purity of a liquid to be pumped are advantageously determined solely by the channel cross-section of the channel structures 10 and 20, which may be approximately 1 mm ² by way of example.

The above-described advantageous hole structure 30 'of the functional element 3 acts particularly advantageous with a multiple valve arrangement according to Fig. 6c . Fig. 9 and 10 together, even elongated fibrous particles pass through a pump according to the invention without interference.

Fig. 9 shows a schematic section through an inventive device according to the embodiment of the present invention, the above with reference to Fig. 6c has been described in detail. This embodiment of the invention is particularly suitable for a one-piece functional element 3 according to Fig. 6d , which is shown by way of example in the drawing 9, and is particularly suitable for a functional element 4 according to Fig. 8 ,

The advantageous series connection of the pump structures (I), (II), (I) and (II) in this order in the flow direction F with the respective valve flaps 31 and the associated channel structures 10 and 20 in the upper 1 and lower 2 substrate layer and the central between the central pump structure (II) and (I) arranged drive element 4 with the central pumping chamber favors, in particular due to the at an angle a with particular tangential transition of the channel structures 10 and 20, a particularly efficient pump performance.

Fig. 10 shows a more detailed representation of the fifth embodiment of the present invention of Fig. 6c and Fig. 9 , in which the transition of the channel structures 10 and 20 is advantageously formed steplessly and without edges and corners, which increases the efficiency of the pumping power further increased significantly and the susceptibility to interference by dirt or interfering particles significantly further reduced, in particular in combination with the example here and advantageously used functional layer 3 of Fig. 8 with the hole structure 30.

In particular, the single-level design of the functional element 3 and its multifunctionality as a filter and with a plurality of differently shaped and similar valve flaps 31 is particularly advantageous since particularly efficient in performance and effect, especially with suitable channel structures 10 and 20 and also there also miniaturized easily and inexpensively in manufacture and assemble large quantities.

One of the above-described embodiments of a micropump according to the invention is particularly suitable for the conveyance of liquids and gases even in the smallest metered quantities and may have a particle tolerance up to a particle diameter of about 40 microns with a correspondingly miniaturized design. In addition, due to the structure of the fluid channel according to the invention with shallow angles and the integrated valve flaps, only an extremely low pressure loss during working operation can occur

It is also clear that a micropump according to the invention can be used in many fields, for example in the metering of fluids in chemical, biological and medical analysis, for example in the sampling, for example in environmental analysis, and also, for example, in the food industry Cooling systems, for transport purposes such as lubrication systems or dispensing purposes, etc.

Claims (13)

1. An apparatus with channel-like structures for transporting and/or storing a liquid and/or gaseous medium, in which:

   the apparatus comprises:

   a first substrate layer (1) and a second substrate layer (2) and a functional element (3) which is arranged in sandwich fashion between the first substrate layer (1) and the second substrate layer (2); and

   the channel-like structures are formed in the first substrate layer (1) and/or the second substrate layer (2); and

   the first substrate layer (1) and second substrate layer (2) are fixedly and permanently joined to one another, and the functional element (3) is clamped between the first substrate layer (1) and second substrate layer (2); in which apparatus

   the functional element (3) is elastic in form, and

   the first layer (1) and second layer (2) are rigid in form; and

   the channel-like structures in the first substrate layer (1) and/or second substrate layer (2) are at least partially closed off in a gastight and/or liquid-tight manner by means of the functional element (3), and

   the functional element (3) is designed to be very much thinner than the first layer (1) and second layer (2), and

   the functional element (3) is designed as at least one functional movable element, in such a manner that a channel-like structure (10, 20) is opened and/or closed by means of the functional element (3),

   the functional element (3) comprises at least one valve flap (31);

   the apparatus comprises a dynamic drive element (4) which is suitable for altering the volume of a cavity (410) formed in the apparatus, and

   a first channel (10) is formed in the first layer (1); and

   a second channel (20) is formed in the second layer (2), so that

   a connection is produced between the first channel (10) and the second channel (20);

   at least one valve flap (31) of the functional element (3) is arranged in such a manner that

   the connection between the first channel (10) and the second channel (20) is opened or closed, and

   the first channel (10) and second channel (20) are arranged substantially parallel;
   characterized in that

   the connection between the first channel (10) and the second channel (20) includes an angle (α) of from 15 ° to 50°, with the first channel (10) and second channel (20), whereby

   a tangential transition without steps, sharp edges or corners between the first channel (10) and second channel (20) is provided by means of the connection between the first channel (10) and second channel (20).
2. The apparatus as claimed in claim 1, in which:

   the first channel (10) has a first width (10b), the second channel (20) has a second width (20b); and

   the valve flap (31) has a third width (31 b);

   and the following relationship applies:

   first width (10b) ≤ third width (31b) ≤ second width (20b);

   in which apparatus, as seen in the direction of flow (132), a drive element (4) is connected upstream (4, 132) and/or downstream (132,4) of the valve flap (31).
3. The apparatus as claimed in claim 1, in which:

   the first channel (10) has a first width (10b);

   the second channel (20) has a second width (20b); and

   the valve flap (31) has a third width (31 b);

   and the following relationship applies:

   second width (20b) ≤ third width (31 b) ≤ first width (10b);

   a drive element (4) being connected upstream (4, 231) and/or downstream (231, 4) of the valve flap (31), as seen in the direction of flow (231).
4. The apparatus as claimed in claim 2 or 3, having:

   a central drive element (4) with at least one first valve flap (31) connected upstream (4, 132) of it as seen in the direction of flow (132); and

   moreover with at least one second valve flap (31) connected downstream (231, 4) of it as seen in the direction of flow (231).
5. The apparatus as claimed in claim 4, having:

   a third valve flap (31) which is connected downstream (132, 4) of the drive element (4) and upstream of the second valve flap (31), as seen in the direction of flow (123), and

   a fourth valve flap (31), which is connected upstream (231, 4) of the drive element (4) and downstream of the first valve flap (31), as seen in the direction of flow (231).
6. The apparatus as claimed in claims 2, 3 and 4, having:

   a multiplicity of valve flaps (31) and at least one drive element (4).
7. The apparatus as claimed in claim 5, in which:

   a first, second, third and fourth valve flap (31), in accordance with pump structure (I), (II), (I) and (II), are formed in this arrangement in the direction of flow in a plastic film (3), and moreover a recess (30), which is connected to a cavity (410) interacting with the drive element (4), is formed between the second (II) and third (I) valve flap (31).
8. The apparatus as claimed in one of claims 1 to 7, in which:

   the drive element (4) comprises:

   a cavity (410) which is provided by means of a substrate layer (41) having a central recess (410) above which a layer (42) with a predetermined rigidity and a piezo element (43) are arranged.
9. The apparatus as claimed in claim 8, in which:

   an opening (20) in the second layer (2) is arranged at a vertex of the cavity (410) in the substrate layer (41).
10. The apparatus as claimed in one of claims 1 to 9, in which:

    the apparatus comprises a single-piece functional element (3) which is formed in a thin plastic film and has valve flaps (31) and a central hole structure (30') as well as a filter action, which interacts with the cavity of a pump chamber.
11. Method for manufacturing the apparatus as claimed in one of claims 1 to 10, in which:

    the apparatus is produced by a method for joining said first substrate layer (1), said second substrate layer (2) and said functional element (3), in which:

    the functional element (3) is selected from a material with a predetermined elasticity; and

    the first layer (1) and second layer (2) are selected from a material with a predetermined rigidity;

    the functional element (3) is arranged in sandwich fashion between the first substrate layer (1) and the second substrate layer (2);

    the first substrate layer (1) and second substrate layer (2) are joined together by means of pressure, with the functional element (3) being clamped in such a manner that

    after the pressure has been removed, the first substrate layer (1) and second substrate layer (2) are permanently joined to one another and the functional element (3) is arranged permanently between the first substrate layer (1) and second substrate layer (2).
12. The method as claimed in claim 11, whereby
    the apparatus is further produced by a method, in which:

    the functional element (3) is designed to be very much thinner than the first substrate layer (1) and second substrate layer (2); and

    the first substrate layer (1) and second substrate layer (2) and the functional element (3) are substantially two-dimensional in form; and
    the functional element (3) has a smaller surface area than the first substrate layer (1) and the second substrate layer (2); and

    the method comprises the following steps:

    - arranging the functional element (3) at a predetermined position on layer (1);

    - applying a suitable solvent to the surface of layer (1) which is not covered by the functional element (3);

    - arranging the second layer (2) above the first layer (1) and the functional element (3);

    - pressing on the second layer (2), so that the first substrate layer (1) and

    second substrate layer (2) are joined and the functional element (3) is clamped between the layers (1) and (2), the first layer (1) and second layer (2) being permanently joined to one another after the pressure has been removed.
13. The method as claimed in claim 11 or 12, whereby:

    the apparatus is further produced by a method, in which:

    the functional element (3) is formed by means of a thin plastic film and/or a metal foil, and

    the first substrate layer (1) and second substrate layer (2) are formed from plastic, preferably from polycarbonate and/or PPSU and/or PEI and/or melamine; and

    the functional element (3) is formed from plastic, preferably from polyimide.

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