ATE470073T1 - Mikropumpe und verfahren zu ihrer herstellung - Google Patents

Mikropumpe und verfahren zu ihrer herstellung

Info

Publication number
ATE470073T1
ATE470073T1 AT04804104T AT04804104T ATE470073T1 AT E470073 T1 ATE470073 T1 AT E470073T1 AT 04804104 T AT04804104 T AT 04804104T AT 04804104 T AT04804104 T AT 04804104T AT E470073 T1 ATE470073 T1 AT E470073T1
Authority
AT
Austria
Prior art keywords
functional element
substrate
layers
channel
type structures
Prior art date
Application number
AT04804104T
Other languages
English (en)
Inventor
Ron Meyknecht
Original Assignee
Bartels Mikrotechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bartels Mikrotechnik Gmbh filed Critical Bartels Mikrotechnik Gmbh
Application granted granted Critical
Publication of ATE470073T1 publication Critical patent/ATE470073T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7879—Resilient material valve
    • Y10T137/7888—With valve member flexing about securement
    • Y10T137/7891—Flap or reed

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Saccharide Compounds (AREA)
AT04804104T 2003-12-19 2004-12-20 Mikropumpe und verfahren zu ihrer herstellung ATE470073T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2003160709 DE10360709A1 (de) 2003-12-19 2003-12-19 Mikropumpe und klebstoffreies Verfahren zur Verbindung zweier Substrate
PCT/EP2004/014505 WO2005061894A1 (de) 2003-12-19 2004-12-20 Mikropumpe und klebstoffreies verfahren zur verbindung zweier substrate

Publications (1)

Publication Number Publication Date
ATE470073T1 true ATE470073T1 (de) 2010-06-15

Family

ID=34706454

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04804104T ATE470073T1 (de) 2003-12-19 2004-12-20 Mikropumpe und verfahren zu ihrer herstellung

Country Status (7)

Country Link
US (1) US8043073B2 (de)
EP (1) EP1700036B1 (de)
JP (1) JP4664309B2 (de)
CN (1) CN1759247B (de)
AT (1) ATE470073T1 (de)
DE (2) DE10360709A1 (de)
WO (1) WO2005061894A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2191135A1 (de) 2007-09-12 2010-06-02 Gernot Heuser Mikrodosiersystem
EP2735834A4 (de) * 2011-07-21 2014-12-10 Panasonic Corp Kühlvorrichtung, elektronische vorrichtung damit und elektrofahrzeug

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57136883U (de) * 1981-02-18 1982-08-26
DE3926066A1 (de) * 1989-08-07 1991-02-14 Ibm Deutschland Mikromechanische kompressorkaskade und verfahren zur druckerhoehung bei extrem niedrigem arbeitsdruck
JPH03122282U (de) * 1990-03-27 1991-12-13
US5496009A (en) * 1994-10-07 1996-03-05 Bayer Corporation Valve
FR2757906A1 (fr) * 1996-12-31 1998-07-03 Westonbridge Int Ltd Micropompe avec piece intermediaire integree
AU9739898A (en) * 1997-08-20 1999-03-08 Westonbridge International Limited Micro pump comprising an inlet control member for its self-priming
US6042351A (en) * 1997-12-08 2000-03-28 Carrier Corporation Enhanced flow compressor discharge port entrance
JPH11241683A (ja) * 1997-12-26 1999-09-07 Sanden Corp 圧縮機のバルブ装置
US6431212B1 (en) * 2000-05-24 2002-08-13 Jon W. Hayenga Valve for use in microfluidic structures
DE10104957A1 (de) * 2000-09-07 2002-03-21 Gesim Ges Fuer Silizium Mikros Verfahren zum Herstellen einer 3-D-Mikrodurchflusszelle und 3-D-Mikrodurchflusszelle
US6644944B2 (en) * 2000-11-06 2003-11-11 Nanostream, Inc. Uni-directional flow microfluidic components
WO2002053290A2 (en) * 2001-01-08 2002-07-11 President And Fellows Of Harvard College Valves and pumps for microfluidic systems and method for making microfluidic systems
US20020155010A1 (en) * 2001-04-24 2002-10-24 Karp Christoph D. Microfluidic valve with partially restrained element
CN1232728C (zh) * 2003-04-11 2005-12-21 华中科技大学 无阀薄膜驱动型微泵

Also Published As

Publication number Publication date
US20070003420A1 (en) 2007-01-04
JP4664309B2 (ja) 2011-04-06
WO2005061894A1 (de) 2005-07-07
US8043073B2 (en) 2011-10-25
DE502004011253D1 (de) 2010-07-15
DE10360709A1 (de) 2005-10-06
JP2007514891A (ja) 2007-06-07
CN1759247B (zh) 2012-06-20
EP1700036B1 (de) 2010-06-02
CN1759247A (zh) 2006-04-12
EP1700036A1 (de) 2006-09-13

Similar Documents

Publication Publication Date Title
ATE472182T1 (de) Substrat mit integrierter dichtung
MY135247A (en) Film optical anti-counterfeiting element
DE602005000586D1 (de) Laschenverbandvorrichtung zwischen komposite und metallischen Strukturelementen
ATE355347T1 (de) Indikator für wasserkontakt
WO2004042464A3 (en) Electrophoretic or electromagnetophoretic display device with several layers of display cells, and manufacturing method
EP1462062A3 (de) Laminierter chirurgischer Klip
DE602004017875D1 (de) Schichtstruktur und Herstellungsverfahren dafür
ATE441934T1 (de) Drucksensor in folienbauweise
TW200636285A (en) Method of fabricating interferometric devices using lift-off processing techniques
PL1758733T3 (pl) Element wielowarstwowy
ATE523881T1 (de) Verfahren bei der herstellung eines ferroelektrischen speicherbausteins
TW200702750A (en) Polarizing beam splitter assembly having reduced stress
EP1734070A4 (de) Poröse verstreckte polytetrafluorethylenfolie mit elastischer rückstellung in dickenrichtung, herstellungsverfahren dafür und verwendung der porösen folie
WO2001093280A8 (de) Halogenfreier folienverbund, verfahren zu seiner herstellung und seine verwendung
ATE336366T1 (de) Elastisches laminat mit versteifter bahn, und verfahren zu dessen herstellung
ATE551594T1 (de) Drucksensor
DE602004015951D1 (de) Mit klebstoff gebundener mehrschichtvliesstoff und verfahren zu dessen herstellung
TWI368052B (en) Polarizing film, method for producing the polarizing film, polarizer, and optical laminate
BRPI0414614A (pt) estrutura compósita, processo de preparação de uma estrutura compósita e uso de uma estrutura compósita
ATE470073T1 (de) Mikropumpe und verfahren zu ihrer herstellung
ATE461880T1 (de) Paneelverpackung mit indikator
DE602004006504D1 (de) Konstruktionseinheit und verfahren zu ihrer herstellung
DK0946362T3 (da) Flerlagsstruktur på basis af kunststof og rør med flerlagsstruktur
ATE473387T1 (de) Dichtanordnung
DK1552203T3 (da) Sandwichrörledninger for særdeles dybe farvande