EP2205869B1 - Pompe à membrane - Google Patents
Pompe à membrane Download PDFInfo
- Publication number
- EP2205869B1 EP2205869B1 EP07819208.5A EP07819208A EP2205869B1 EP 2205869 B1 EP2205869 B1 EP 2205869B1 EP 07819208 A EP07819208 A EP 07819208A EP 2205869 B1 EP2205869 B1 EP 2205869B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- diaphragm
- pump chamber
- membrane
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000012528 membrane Substances 0.000 title description 93
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 31
- 229910052710 silicon Inorganic materials 0.000 claims description 31
- 239000010703 silicon Substances 0.000 claims description 31
- 239000007788 liquid Substances 0.000 claims description 11
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims 1
- 238000005086 pumping Methods 0.000 description 108
- 239000007789 gas Substances 0.000 description 21
- 239000012530 fluid Substances 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 238000005452 bending Methods 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 5
- 238000001746 injection moulding Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002572 peristaltic effect Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000000241 respiratory effect Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
Definitions
- the diaphragm pump is designed such that deflected by applying an operating voltage, the pumping diaphragm in the position becomes, in which the pumping chamber volume is reduced.
- the diaphragm pump may be configured such that by applying an actuation voltage, the pumping membrane is deflected to increase the pumping chamber volume. In such embodiments, the pumping membrane may be biased to a position in which the pumping chamber volume is reduced.
- the piezo membrane transducer can be scaled in terms of large volumes and high pressures.
- the corresponding geometry parameters of the piezo membrane transducer are the radius R 1 and the thickness h p1 of the piezo membrane.
- spring-moderated membranes are used in preferred embodiments of the present invention.
- the limit frequency fg then corresponds at least to the inverse sum of the typical stroke time of the pressure and suction strokes: f G ⁇ 1 2 ⁇ p
- ⁇ fl denotes the density of the gas, V tot the dead volume of the pumping chamber and p AT the atmospheric pressure (which can typically be assumed to be an atmospheric pressure between 1000 and 1030 hPa).
- the requirement to reduce the fluidic capacity of potential gas bubbles is therefore equally important with the requirement to reduce the dead volume of the pumping chamber. However, it should be noted here that if the pumping chamber is too narrow, the flow resistance in the pumping chamber will dominate.
- the natural frequency is independent of the flap width.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Claims (10)
- Pompe à membrane (10) aux caractéristiques suivantes:une chambre de pompage (26; 56) avec une ouverture d'entrée (28) et une ouverture de sortie (30);un clapet anti-retour en silicium passif (32) à l'ouverture d'entrée (28);un clapet anti-retour en silicium passif (34) à l'ouverture de sortie (30);une pompe à membrane métallique (14; 54) qui est adjacente à la chambre de pompage (26; 56); etun moyen d'actionnement (16, 24) destiné à déplacer la membrane de pompe (14; 54) d'une première position finale qui définit un premier volume de chambre de pompage vers une deuxième position finale qui définit un deuxième volume de chambre de pompage, où une différence entre le premier volume de chambre de pompage et le deuxième volume de chambre de pompage établit un volume de course,dans laquelle la chambre de pompage (26; 56) présente un fond de chambre de pompage qui est opposé à la membrane de pompe métallique (14; 54), ledit fond de chambre de pompage étant adapté à la déviation maximale de la membrane de pompe (14; 54), un espace restant entre le fond de chambre de pompage et la membrane de pompe (14; 54) lorsque la membrane de pompe se trouve dans la position finale qui définit un volume de chambre de pompage plus petit que l'autre position finale qui offre, pour une circulation à travers cette dernière, une résistance à la circulation qui n'est pas supérieure à une résistance à la circulation du clapet anti-retour passif (34) à l'ouverture de sortie (30) ou à une résistance à la circulation du clapet anti-retour passif (32) à l'ouverture d'entrée (28), etdans laquelle les clapets anti-retour (32, 34) présentent un clapet de soupape (32a, 34a) et une bretelle d'appui (32b, 34b) sur laquelle se trouve le clapet de soupape (32a, 34a) lorsque le clapet anti-retour (32, 34) est fermé, dans laquelle la bretelle d'appui présente une largeur ≤ 50 µm, ≤ 20 µm, ≤ 10 µm ou ≤ 5 µm,caractérisée par le fait quel'espace restant entre le fond de chambre de pompage et la membrane de pompe, lorsque la membrane de pompe se trouve dans la position finale qui définit un volume de chambre de pompage plus petit que l'autre position finale, est plus grand dans la zone centrale de la chambre de pompage que dans une zone de bord de cette dernière.
- Pompe à membrane (10) selon la revendication 1, dans laquelle le moyen d'actionnement présente une piézocéramique (16) disposée sur la membrane de pompe (14).
- Pompe à membrane selon la revendication 1 ou 2, dans laquelle
le moyen d'actionnement (16, 24) est conçu pour actionner la membrane de pompage (14) avec une fréquence de fonctionnement qui est inférieure à une fréquence de résonance propre des clapets de soupape (32a, 34a) des clapets anti-retour passifs (32, 34),
une plus grande extension de la membrane de pompage (14) dans une direction est ≤ 50 mm; et
l'extension et une épaisseur de la membrane de pompe (14; 54), une résistance à la circulation des clapets anti-retour passifs et une forme de la chambre de pompage sont conçues en ce qui concerne un volume mort et une résistance à la circulation de sorte qu'un débit de refoulement de la pompe à membrane (10) lors de l'actionnement de la membrane de pompe à la fréquence de fonctionnement soit, pour un liquide à refouler, ≥ 40 ml/min ou, pour un gaz à refouler, ≥ 250 ml/min. - Pompe à membrane selon la revendication 1, dans laquelle le fond de chambre de pompage est formé de sorte que l'espace qui reste entre le fond de chambre de pompage et la membrane de pompe, lorsque la membrane de pompe se trouve dans la position finale qui définit un volume de chambre de pompage plus petit que l'autre position finale, soit, dans une zone opposée à l'ouverture de sortie (30) et à l'ouverture d'entrée (28), plus grand que dans une zone de la membrane de pompe (14) distante de cette zone.
- Pompe à membrane selon l'une des revendications 1 à 4, dans laquelle la chambre de pompage (26; 56) est circulaire en vue en plan, et dans laquelle l'ouverture d'entrée (28) et l'ouverture de sortie (30) sont disposées opposées à une zone centrale de la membrane de pompe (14).
- Pompe à membrane selon l'une des revendications 1 à 5, dans laquelle la membrane de pompe métallique (14; 54) présente une membrane en acier inoxydable.
- Pompe à membrane selon l'une des revendications 1 à 6, dans laquelle la chambre de pompage est formée dans un corps de pompe (12; 62).
- Pompe à membrane selon la revendication 7, dans laquelle le corps de pompe (12; 62) est réalisé en matière plastique.
- Pompe à membrane selon l'une des revendications 1 à 8, dans laquelle les clapets anti-retour passifs sont formés dans un bloc commun.
- Pompe à membrane selon l'une des revendications 1 à 8, dans laquelle les clapets anti-retour passifs sont formés dans des blocs séparées.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2007/009144 WO2009052842A1 (fr) | 2007-10-22 | 2007-10-22 | Pompe à membrane |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2205869A1 EP2205869A1 (fr) | 2010-07-14 |
EP2205869B1 true EP2205869B1 (fr) | 2017-12-27 |
Family
ID=39590980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP07819208.5A Active EP2205869B1 (fr) | 2007-10-22 | 2007-10-22 | Pompe à membrane |
Country Status (3)
Country | Link |
---|---|
US (1) | US8746130B2 (fr) |
EP (1) | EP2205869B1 (fr) |
WO (1) | WO2009052842A1 (fr) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7553295B2 (en) | 2002-06-17 | 2009-06-30 | Iradimed Corporation | Liquid infusion apparatus |
US8105282B2 (en) | 2007-07-13 | 2012-01-31 | Iradimed Corporation | System and method for communication with an infusion device |
EP2469089A1 (fr) * | 2010-12-23 | 2012-06-27 | Debiotech S.A. | Procédé de contrôle électronique et système pour pompe piézo-électrique |
DE102011086591A1 (de) * | 2010-12-29 | 2012-07-19 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | Elektrochemische Halbzelle, elektrochemischer Sensor und Verfahren zur Messung mindestens einer Eigenschaft einer Messgröße mit einem elektrochemischen Sensor |
CN102734139A (zh) * | 2011-04-12 | 2012-10-17 | 林淑媛 | 压电泵和压电陶瓷片保护工艺 |
DE102011086042A1 (de) * | 2011-11-09 | 2013-05-16 | Johnson Matthey Catalysts (Germany) Gmbh | Biegewandler sowie Mikropumpe mit einem Biegewandler |
CN102926979A (zh) * | 2012-07-30 | 2013-02-13 | 赛龙通信技术(深圳)有限公司 | 振膜风扇、应用该振膜风扇的手机及膜片振动通风方法 |
GB201220471D0 (en) * | 2012-11-14 | 2012-12-26 | Technology Partnership The | Pump |
DE102015224624B3 (de) * | 2015-12-08 | 2017-04-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Freistrahldosiersystem zur Verabreichung eines Fluids in oder unter die Haut |
USD860675S1 (en) | 2016-12-29 | 2019-09-24 | Conopco, Inc. | Cartridge |
DE102017011530A1 (de) * | 2017-12-13 | 2019-06-13 | Dräger Safety AG & Co. KGaA | Wärmetönungssensor sowie Messelement für Wärmetönungssensor |
US11268506B2 (en) * | 2017-12-22 | 2022-03-08 | Iradimed Corporation | Fluid pumps for use in MRI environment |
US10865097B2 (en) * | 2018-06-29 | 2020-12-15 | Ecolab Usa Inc. | Chemical product dispensing using a fluid drive and return home interface |
DE102019208023B4 (de) * | 2019-05-31 | 2024-01-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum herstellen einer mikromechanischen vorrichtung, mikromechanisches ventil und mikropumpe |
WO2021014444A1 (fr) * | 2019-07-23 | 2021-01-28 | Innotech Ltd | Pompes et micro-clapets de non-retour accordés |
EP4244512A4 (fr) * | 2020-11-16 | 2024-01-17 | Siemens Healthcare Diagnostics Inc | Soupape pour dispositif microfluidique |
WO2022162651A1 (fr) * | 2021-01-27 | 2022-08-04 | Q T Flow Ltd | Agencement de pompage de fluide |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0424087A1 (fr) | 1989-10-17 | 1991-04-24 | Seiko Epson Corporation | Micro-pompe ou dispositif à microdébit |
JPH051669A (ja) | 1991-06-21 | 1993-01-08 | Seiko Epson Corp | マイクロポンプ及びマイクロバルブの製造方法 |
DE4143343C2 (de) * | 1991-09-11 | 1994-09-22 | Fraunhofer Ges Forschung | Mikrominiaturisierte, elektrostatisch betriebene Mikromembranpumpe |
CH689836A5 (fr) * | 1994-01-14 | 1999-12-15 | Westonbridge Int Ltd | Micropompe. |
DE19546570C1 (de) | 1995-12-13 | 1997-03-27 | Inst Mikro Und Informationstec | Fluidpumpe |
DE19719862A1 (de) * | 1997-05-12 | 1998-11-19 | Fraunhofer Ges Forschung | Mikromembranpumpe |
DE19918694C2 (de) | 1998-04-27 | 2002-03-14 | Matsushita Electric Works Ltd | Verfahren zum Messen des Drucks eines Fluids und Miniaturpumpe zur Durchführung dieses Verfahrens |
DE10238600A1 (de) | 2002-08-22 | 2004-03-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Peristaltische Mikropumpe |
DE10242110A1 (de) | 2002-09-11 | 2004-03-25 | Thinxxs Gmbh | Mikropumpe und Verfahren zu ihrer Herstellung |
JP4279662B2 (ja) | 2003-12-26 | 2009-06-17 | アルプス電気株式会社 | 小型ポンプ |
-
2007
- 2007-10-22 WO PCT/EP2007/009144 patent/WO2009052842A1/fr active Application Filing
- 2007-10-22 EP EP07819208.5A patent/EP2205869B1/fr active Active
- 2007-10-22 US US12/739,366 patent/US8746130B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP2205869A1 (fr) | 2010-07-14 |
US8746130B2 (en) | 2014-06-10 |
US20110061526A1 (en) | 2011-03-17 |
WO2009052842A1 (fr) | 2009-04-30 |
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