EP1274938A1 - Pompe a piston oscillant - Google Patents

Pompe a piston oscillant

Info

Publication number
EP1274938A1
EP1274938A1 EP01902322A EP01902322A EP1274938A1 EP 1274938 A1 EP1274938 A1 EP 1274938A1 EP 01902322 A EP01902322 A EP 01902322A EP 01902322 A EP01902322 A EP 01902322A EP 1274938 A1 EP1274938 A1 EP 1274938A1
Authority
EP
European Patent Office
Prior art keywords
pump
modules
inlet
rail
oscillating piston
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01902322A
Other languages
German (de)
English (en)
Inventor
Christian Beyer
Hermann Boy
Rudolf Bahnen
Frank SCHÖNBORN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1274938A1 publication Critical patent/EP1274938A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F04B35/045Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric using solenoids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/06Mobile combinations
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06Combinations of two or more pumps

Definitions

  • the invention relates to a vibrating piston pump, in particular a vibrating piston vacuum pump, a method for operating a pump of this type and a method for producing a pump family of this type.
  • Vibrating piston pumps are known from DE 41 02 710 AI. They have a piston that moves back and forth in a cylinder. The piston is driven by a linear or oscillating piston drive, which has electromagnetic means comprising the piston.
  • pumps of this type are used as vacuum pumps, they can be dry with a suitable choice of material for the piston skirt and for the cylinder, i.e. lubricant-free, operated. This advantage is already used in piston vacuum pumps in which a crankshaft drive is provided as the drive for the pistons.
  • vacuum pumps With vacuum pumps, it is generally customary to manufacture a pump that works according to a specific pump principle in several sizes - delivery volume, single, multi-stage and offer to meet customer needs for pumps with different final pressures and / or pumping speeds.
  • the development and manufacture of such pump families is complex.
  • the present invention has for its object to provide a vibrating piston pump, in particular vibrating piston vacuum pump, in which the described, relatively high development and manufacturing costs for the assembly of a pump family with a wide pumping speed range and / or with different final pressures is no longer necessary.
  • this object is achieved in that this pump, in particular a vacuum pump, consists of several structurally identical modules of a vibrating piston pump which, depending on the customer's requirements, are connected in parallel and / or in series and each have a vibrating piston drive.
  • modules connected in parallel e.g. T. modules connected in series
  • z. T. parallel e.g. T. modules connected in series
  • pump families can be created with members who have different final pressure behavior and / or different pumping speeds.
  • the module itself is a member of the family. It has the highest final pressure and the lowest pumping speed. Further advantages and details of the invention will be explained on the basis of exemplary embodiments schematically illustrated in FIGS. 1 to 10. Show it
  • FIGS. 1 to 4 views of different embodiments of pumps according to the invention
  • Figures 8 to 10 are schematic representations of possible variants.
  • FIGS. 1 to 4 are designated by 1, their oscillating piston pump modules by 2.
  • the modules are fastened to a rail 3 (FIGS. 1, 2, 4) or to two rails 4, 5, which on the one hand have a supporting function and on the other are equipped with ducts which act as a common inlet duct, as a common outlet duct, as intermediate ducts or also can be used as channels for receiving electrical lines.
  • FIGS. 1 and 2 show views of an embodiment with three modules 2. They are fastened one above the other on a rail 3 which is arranged vertically and is equipped with a foot 6 which extends below the modules 2.
  • the inlet and outlet of the modules 2 each open into one of their two end faces. With this end face they are attached to the rail 3.
  • the rail 3 is equipped with longitudinally extending channels. One of them forms an inlet channel with which all inlets of the modules 2 are connected in a sealing manner. A second one forms an outlet channel which is connected to all the outlets of the modules.
  • the inlet duct and outlet duct are closed.
  • the connector 7 assigned to the inlet channel forms the inlet 9, the connector 8 assigned to the outlet channel forms the outlet 10 of the pump 1 according to the invention.
  • the design of the pump 1 according to FIGS. 1 and 2 is equipped with three modules 2. Their pumping speed corresponds to the sum of the pumping speeds of the identical individual modules. When producing pumps 1 of this type with a different pumping speed, the number of modules 2 can be varied accordingly.
  • Figure 3 shows an embodiment in which the modules 2 are attached to two rails 4, 5. They are supported by a common foot 6.
  • the first rail 4 can accommodate the inlet duct and the second rail 5 can accommodate the outlet duct.
  • Rail 5 contains the outlet channel with the connecting piece 8, which forms the outlet 10.
  • the two modules 2 are provided with a high-vacuum pump 12 (for example, a friction vacuum pump, such as turbomolecular, molecular, compound pump) upstream.
  • a high-vacuum pump 12 for example, a friction vacuum pump, such as turbomolecular, molecular, compound pump
  • This is attached to the rail 4.
  • Your outlet is connected to the inlet channel in the rail 4.
  • the inlet channel is closed on both end faces of the rail 4.
  • the inlet connection 13 of the high vacuum pump 12 forms the inlet 9 of the pump system according to FIG. 3.
  • FIG. 3 shows, by way of example, that a supply, control and / or display device 14 common to several or all pumps 2, 12 can be attached to one of the rails 4, 5.
  • the necessary lines can be routed through channels in the rails 4, 5.
  • a device 14 of the type described common to all pumps can also be present in pumps 1 according to FIGS. 1, 2 or 4 with only one rail 3 and can be fastened to this rail 3.
  • a control device 14 common to the modules 2 allows pumps 1 equipped with an even number of modules 2 to be operated in a vibration-free manner. According to the invention, this is done in that the pistons of the modules 2 are operated in pairs with an identical frequency and with an opposite direction of movement.
  • FIG. 4 also shows an embodiment with two oscillating piston pump modules 2 and a high vacuum pump 12.
  • the difference from FIG. 3 is that only one rail 3 is provided, in which the common inlet duct and the common outlet duct are located. The inlet duct is closed on both sides. The inlet connection of the high-vacuum pump 12 forms the inlet 9 of the pump 1. The outlet channel opens into the gene outlet 8, which forms the outlet 10 of the pump 1.
  • the rail 3 is supported on a movable lower part 15 with a handle 16 - here a type of hand truck.
  • a device 14 is not shown in FIG. 4.
  • FIGS. 5, 6 and 7 schematically show the structure of an exemplary embodiment of a vibrating piston pump module 2.
  • FIGS. 5, 6 are longitudinal sections perpendicular to one another through a module 2, which on the one hand shows the rail 3 in a side view (FIG. 5 ) and on the other hand show in section (Fig. 6).
  • Figure 7 is a section through the module 2 of Figures 5, 6 at the line VII - VII.
  • the centrally arranged piston is designated 21.
  • the piston 21 is guided in cylinder sections 22, 23 which are spaced apart from one another in the center.
  • the piston 21 carries a permanent magnet ring 24 in the center.
  • This ring 24 is located between permanent magnet rings 25, 26, which are components of the stator 27.
  • the sum of the distances between the ring 24 and the rings 25, 26 corresponds to the amplitude of the piston movement.
  • Another component of the stator 27 is a yoke component 28, which comprises coils 29 and is assigned to the permanent magnet rings 24, 25, 26.
  • the module 2 is constructed rotationally symmetrically.
  • the compression chambers 32, 33 are each assigned an outlet valve 41 or 42 on the end face, which are also actuated to the piston 21. They are located in outlet chambers 43, 44, which are formed in a second, outer housing 45 which receives the first housing 31. Exhaust valves of this type are only known from DE 196 34 517 AI.
  • a flexible or flexibly suspended valve plate 46 is actuated by the piston 21.
  • the end faces of the piston 21 are laterally equipped with knobs 47, which raise the outer edges of the flexible valve plates 46 which are fastened centrally in the outlet chambers 43, 44.
  • FIG. 7 shows that the outer housing 45 is approximately oval in cross section. It comprises the rotationally symmetrical linear drive in the housing 31.
  • the outer housing 45 In the opposite areas with thicker housing walls there is an inlet bore 51 on one side and an outlet bore 52 on the other side. They extend parallel to the piston 21.
  • the inlet bore 51 is positioned laterally Bores 53 with the gas inlet chambers 34, 35 in connection.
  • the outlet chambers 43, 44 protrude lateral bores 54 in connection with the outlet bore 52.
  • both bores 51, 52 open into one of the two end faces of module 2 (cf. in particular FIG. 6) and form inlet 55 and outlet 56 of module 2.
  • This end face is assigned to rail 3.
  • the inlet channel 57 which is in tight connection with the inlet 55 of the modules 2.
  • the outlet channel 58 of the rail 3 which also - by means not shown in detail, e.g. mechanical means or glue, - are tightly connected.
  • Inlet duct 57 and outlet duct 58 are indicated by dashed lines in FIG.
  • FIG. 6 Further channels 59 in the rail 3 are shown in FIG. 6. They are used to hold electrical cables, e.g. serve to supply the linear drives.
  • the modules 2 and, if present, the high-vacuum pump 12 can also be connected to a common supply, display and control device (FIG. 3) via the further channels.
  • FIGS. 8 to 10 show possible variants with regard to the switching of the modules 2.
  • all modules 2 are connected in series (e.g. also the levels present in module 2, as described in DE 199 17 560.8.
  • the inlet duct 57 in the rail 3 (FIG. 9b) only extends as far as the inlet 55 of the first module 2.
  • Intermediate ducts 61 each connect the outlet 56 of one module 2 to the inlet 55 of the next module 2.
  • the outlet 56 of the last module 2 stands by an outlet channel 58 'in connection, which is provided for example separately (cf. also FIG. 5, dashed addition) in the rail 3.
  • FIGS. 10a, b show a solution in which the first two modules 2 are connected in parallel and the two further modules 2 are connected in series (FIG. 10a).
  • the associated arrangement of channels 57, 58, 58 ', 61 in the rail 3 is shown in FIG. 10b.
  • modules 2 of the pump 1 according to the invention described so far have compression chambers 32, 33 on both ends of the piston 21.
  • modules with only one or with more than two compression chambers can also be used.
  • the latter are known per se from EP 607 687 A2.
  • the piston pumps described therein are equipped with a crankshaft drive.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

L'invention concerne une pompe à piston oscillant (1), en particulier une pompe à vide à piston oscillant. L'objectif de l'invention est de créer une famille de pompes de ce type dont les membres présentent différents comportements en pression finale et/ou différents pouvoirs d'absorption. A cet effet, il est proposé qu'une telle pompe soit constituée de plusieurs modules (2), de construction identique, de pompe à piston oscillant, qui, en fonction des besoins du client, sont montés en parallèle et/ou en série et qui sont chacun pourvus d'un entraînement de piston oscillant.
EP01902322A 2000-04-18 2001-01-16 Pompe a piston oscillant Withdrawn EP1274938A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10019106A DE10019106A1 (de) 2000-04-18 2000-04-18 Schwingkolbenpumpe
DE10019106 2000-04-18
PCT/EP2001/000422 WO2001079695A1 (fr) 2000-04-18 2001-01-16 Pompe a piston oscillant

Publications (1)

Publication Number Publication Date
EP1274938A1 true EP1274938A1 (fr) 2003-01-15

Family

ID=7639120

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01902322A Withdrawn EP1274938A1 (fr) 2000-04-18 2001-01-16 Pompe a piston oscillant

Country Status (6)

Country Link
US (1) US20040028532A1 (fr)
EP (1) EP1274938A1 (fr)
JP (1) JP2004501307A (fr)
KR (1) KR20020091212A (fr)
DE (1) DE10019106A1 (fr)
WO (1) WO2001079695A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10214047A1 (de) * 2002-03-28 2003-10-09 Volkswagen Ag Kompressor für eine Fahrzeugklimaanlage
DE10322604A1 (de) * 2003-05-20 2004-12-09 Robert Bosch Gmbh Satz von Kolbenpumpen, insbesondere Kraftstoffpumpen für Brennkraftmaschinen mit Kraftstoff-Direkteinspritzung
FR2883934B1 (fr) * 2005-04-05 2010-08-20 Cit Alcatel Pompage rapide d'enceinte avec limitation d'energie
US20070261888A1 (en) * 2006-04-29 2007-11-15 Richard Urquhart Mud pump systems for drilling operations
DE102006042018A1 (de) * 2006-09-07 2008-03-27 BSH Bosch und Siemens Hausgeräte GmbH Linearverdichter mit zwei Verdichtungsräumen
FR2960268B1 (fr) * 2010-05-21 2013-04-05 Sauermann Ind Sa Pompe electromagnetique a piston oscillant
FR2984423A1 (fr) * 2011-12-15 2013-06-21 Adixen Vacuum Products Dispositif de pompage et equipement de fabrication d'ecrans plats correspondant
DE102012016631A1 (de) * 2012-08-22 2014-02-27 Hydac Electronic Gmbh Einrichtung zur Bereitstellung von unter einem vorgebbaren Druck stehenden Fluiden
JP6191104B2 (ja) * 2012-09-07 2017-09-06 富士通株式会社 冷媒供給ユニット、冷却ユニット及び電子機器
US20190063389A1 (en) * 2017-08-30 2019-02-28 Jason Haines Modular Direct Injection Fuel Pump Assembly
WO2024130448A1 (fr) * 2022-12-23 2024-06-27 Dajustco Ip Holdings Inc. Système de pompe modulaire

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1101960B (de) * 1960-01-26 1961-03-09 Otto Muehlschlegel Dipl Ing Elektromagnetisch angetriebene Freischwingerpumpe
CH597596A5 (fr) * 1975-06-27 1978-04-14 Hoffmann La Roche
JPH0633768B2 (ja) * 1985-03-11 1994-05-02 日東工器株式会社 電磁往復動式ポンプ
US4778349A (en) * 1985-11-15 1988-10-18 Browning Henry A Multiple machine drive shaft and coupling adapter assembly
DE3710782A1 (de) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Verfahren und vorrichtung zum abpumpen von daempfen und/oder dampfhaltigen gemischen und/oder gas-dampf-gemischen oder dgl. medien
JPH076496B2 (ja) * 1990-01-19 1995-01-30 日東工器株式会社 真空ポンプにおける吸引系切換装置
JPH0442536Y2 (fr) 1990-02-09 1992-10-07
US5343761A (en) * 1991-06-17 1994-09-06 Allen Myers Method and apparatus for measuring grain mass flow rate in harvesters
US5482443A (en) * 1992-12-21 1996-01-09 Commonwealth Scientific And Industrial Research Organization Multistage vacuum pump
DE29814555U1 (de) * 1998-08-13 1999-12-30 BAVARIA Pumpen GmbH, 82275 Emmering Schwingkolbenpumpenstation

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0179695A1 *

Also Published As

Publication number Publication date
JP2004501307A (ja) 2004-01-15
KR20020091212A (ko) 2002-12-05
DE10019106A1 (de) 2001-10-25
WO2001079695A1 (fr) 2001-10-25
US20040028532A1 (en) 2004-02-12

Similar Documents

Publication Publication Date Title
EP0002187B1 (fr) Arrangement de soupapes de commande pour instruments dentaires
EP0715689B1 (fr) Compresseur a gaz hydraulique
EP0854982B1 (fr) Systeme de soupapes
DE69617609T2 (de) Kühlmittelzufuhrgerät für linearen kompressor
DE4425515A1 (de) Doppelmembranpumpe mit einer zweistufigen Luftventilbetätigungseinrichtung
EP1274938A1 (fr) Pompe a piston oscillant
EP0968372B1 (fr) Arrangement de valves
DE3414039C2 (fr)
DE3637404C2 (fr)
DE10143878B4 (de) Linearstellglied
DE10232505A1 (de) Kolbenverdichter
EP0532720A1 (fr) Unite de deplacement lineaire a commande hydraulique.
DE3740114A1 (de) Elektromagnetische luftpumpe
DE60217851T3 (de) Fadenklemme für eine webmaschine und webmaschine mit einer solchen fadenklemme
WO2002090729A1 (fr) Organe de pompe de lubrification
DE69728923T2 (de) Verdichter
DE102016106909A1 (de) Elektropneumatische Ventilgruppe
DE3633644A1 (de) Kompressor mit variabler foerderleistung
DE3204112C2 (de) Servo-Schieberventil
DE60202445T2 (de) Vorrichtung zur Erzeugung einer Hin- und Herbewegung und pneumatisches Werkzeug
DE3147030C2 (de) Magnetventileinheit
DE3041339A1 (de) Elektropneumatisches servoventil
EP0637708B1 (fr) Distributeur à plusieurs voies particulièrement pour commande des moteurs pneumatiques
EP0311792A2 (fr) Dispositif de pompage pour l'alimentation simultanée de deux liquides à un dispositif atomiseur
DE20108382U1 (de) Linearantrieb

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20020912

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

RBV Designated contracting states (corrected)

Designated state(s): AT BE CH CY DE FR GB IT LI

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: LEYBOLD VACUUM GMBH

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20060801