EP1274938A1

EP1274938A1 - Oscillating piston pump

Info

Publication number: EP1274938A1
Application number: EP01902322A
Authority: EP
Inventors: Christian Beyer; Hermann Boy; Rudolf Bahnen; Frank SCHÖNBORN
Original assignee: Leybold Vakuum GmbH
Current assignee: Leybold GmbH
Priority date: 2000-04-18
Filing date: 2001-01-16
Publication date: 2003-01-15
Also published as: WO2001079695A1; US20040028532A1; DE10019106A1; KR20020091212A; JP2004501307A

Abstract

The invention relates to an oscillating piston pump (1), in particular to an oscillating piston vacuum pump. The invention aims to create a range of pumps of this type comprising members which exhibit a different final pressure behaviour and/or a different vacuum capability. To achieve this, the range consists of several identically constructed modules (2) of an oscillating piston pump that are connected in parallel and/or in series, according to customer requirements and each module is equipped with an oscillating piston drive.

Description

Piston pump

The invention relates to a vibrating piston pump, in particular a vibrating piston vacuum pump, a method for operating a pump of this type and a method for producing a pump family of this type.

Vibrating piston pumps are known from DE 41 02 710 AI. They have a piston that moves back and forth in a cylinder. The piston is driven by a linear or oscillating piston drive, which has electromagnetic means comprising the piston.

If pumps of this type are used as vacuum pumps, they can be dry with a suitable choice of material for the piston skirt and for the cylinder, i.e. lubricant-free, operated. This advantage is already used in piston vacuum pumps in which a crankshaft drive is provided as the drive for the pistons.

With vacuum pumps, it is generally customary to manufacture a pump that works according to a specific pump principle in several sizes - delivery volume, single, multi-stage and offer to meet customer needs for pumps with different final pressures and / or pumping speeds. The development and manufacture of such pump families is complex.

The present invention has for its object to provide a vibrating piston pump, in particular vibrating piston vacuum pump, in which the described, relatively high development and manufacturing costs for the assembly of a pump family with a wide pumping speed range and / or with different final pressures is no longer necessary.

According to the invention, this object is achieved in that this pump, in particular a vacuum pump, consists of several structurally identical modules of a vibrating piston pump which, depending on the customer's requirements, are connected in parallel and / or in series and each have a vibrating piston drive.

For a pump of this type, it is necessary to develop and manufacture only one module equipped with a piston and linear drive. If vibrating piston pumps of this type are desired with final pressures that should be lower than the achievable final pressure of the individual module, several of these modules can be connected in series. If vibrating piston pumps with a pumping speed greater than the pumping speed of the individual module are required, several of these modules can be used in parallel. If, for example, the individual module has a pumping speed of 1.5 m ³ / h, pumps can be connected by connecting 2,3 or 4 modules in parallel with a pumping speed of 3, 4.5 or 6 m ³ / h. Other advantages are:

Use of the same parts for pumps with different final pressures and for a wide pumping speed range, which results in higher production quantities and thus a reduction in costs;

Use in different variants: modules connected in parallel; modules connected in series; z. T. parallel, e.g. T. modules connected in series;

due to the large number of identical parts, the complexity of the individual parts to be stored is reduced;

this results in simplified spare parts systems and simplified maintenance work;

there is no need to extrapolate the linear drive technology into demanding geometrical areas.

In summary, with just one module, pump families can be created with members who have different final pressure behavior and / or different pumping speeds. The module itself is a member of the family. It has the highest final pressure and the lowest pumping speed. Further advantages and details of the invention will be explained on the basis of exemplary embodiments schematically illustrated in FIGS. 1 to 10. Show it

FIGS. 1 to 4 views of different embodiments of pumps according to the invention,

Figures 4 to 7 sections through a single module of the pumps according to the invention

Figures 8 to 10 are schematic representations of possible variants.

The embodiments of the pump according to the invention shown in FIGS. 1 to 4 are designated by 1, their oscillating piston pump modules by 2. The modules are fastened to a rail 3 (FIGS. 1, 2, 4) or to two rails 4, 5, which on the one hand have a supporting function and on the other are equipped with ducts which act as a common inlet duct, as a common outlet duct, as intermediate ducts or also can be used as channels for receiving electrical lines.

FIGS. 1 and 2 show views of an embodiment with three modules 2. They are fastened one above the other on a rail 3 which is arranged vertically and is equipped with a foot 6 which extends below the modules 2. The inlet and outlet of the modules 2 each open into one of their two end faces. With this end face they are attached to the rail 3. The rail 3 is equipped with longitudinally extending channels. One of them forms an inlet channel with which all inlets of the modules 2 are connected in a sealing manner. A second one forms an outlet channel which is connected to all the outlets of the modules. On the bottom side, the inlet duct and outlet duct are closed. In the area of the upper end face of the rail 3, they are equipped with connecting pieces 7.8. The connector 7 assigned to the inlet channel forms the inlet 9, the connector 8 assigned to the outlet channel forms the outlet 10 of the pump 1 according to the invention.

The design of the pump 1 according to FIGS. 1 and 2 is equipped with three modules 2. Their pumping speed corresponds to the sum of the pumping speeds of the identical individual modules. When producing pumps 1 of this type with a different pumping speed, the number of modules 2 can be varied accordingly.

Figure 3 shows an embodiment in which the modules 2 are attached to two rails 4, 5. They are supported by a common foot 6. In an embodiment of this type, the first rail 4 can accommodate the inlet duct and the second rail 5 can accommodate the outlet duct. The prerequisite is that the inlet and outlet of the modules 2 are on different end faces. Rail 5 contains the outlet channel with the connecting piece 8, which forms the outlet 10.

In the exemplary embodiment according to FIG. 3, the two modules 2 are provided with a high-vacuum pump 12 (for example, a friction vacuum pump, such as turbomolecular, molecular, compound pump) upstream. This is attached to the rail 4. Your outlet is connected to the inlet channel in the rail 4. In this case, the inlet channel is closed on both end faces of the rail 4. The inlet connection 13 of the high vacuum pump 12 forms the inlet 9 of the pump system according to FIG. 3.

FIG. 3 shows, by way of example, that a supply, control and / or display device 14 common to several or all pumps 2, 12 can be attached to one of the rails 4, 5. The necessary lines can be routed through channels in the rails 4, 5. A device 14 of the type described common to all pumps can also be present in pumps 1 according to FIGS. 1, 2 or 4 with only one rail 3 and can be fastened to this rail 3. A control device 14 common to the modules 2 allows pumps 1 equipped with an even number of modules 2 to be operated in a vibration-free manner. According to the invention, this is done in that the pistons of the modules 2 are operated in pairs with an identical frequency and with an opposite direction of movement.

FIG. 4 also shows an embodiment with two oscillating piston pump modules 2 and a high vacuum pump 12. The difference from FIG. 3 is that only one rail 3 is provided, in which the common inlet duct and the common outlet duct are located. The inlet duct is closed on both sides. The inlet connection of the high-vacuum pump 12 forms the inlet 9 of the pump 1. The outlet channel opens into the gene outlet 8, which forms the outlet 10 of the pump 1. Another difference from FIG. 3 is that the rail 3 is supported on a movable lower part 15 with a handle 16 - here a type of hand truck. Finally, a device 14 is not shown in FIG. 4.

FIGS. 5, 6 and 7 schematically show the structure of an exemplary embodiment of a vibrating piston pump module 2. FIGS. 5, 6 are longitudinal sections perpendicular to one another through a module 2, which on the one hand shows the rail 3 in a side view (FIG. 5 ) and on the other hand show in section (Fig. 6). Figure 7 is a section through the module 2 of Figures 5, 6 at the line VII - VII.

In the figures 5 to 7, the centrally arranged piston is designated 21. The piston 21 is guided in cylinder sections 22, 23 which are spaced apart from one another in the center. The piston 21 carries a permanent magnet ring 24 in the center. This ring 24 is located between permanent magnet rings 25, 26, which are components of the stator 27. The sum of the distances between the ring 24 and the rings 25, 26 corresponds to the amplitude of the piston movement. Another component of the stator 27 is a yoke component 28, which comprises coils 29 and is assigned to the permanent magnet rings 24, 25, 26.

Together with a first housing 31 surrounding the stator 27, the module 2 is constructed rotationally symmetrically. Forms in the area of the end faces of the piston 21 the housing 31, the compression chambers 32 and 33. To the side of the compression chambers 32, 33 there is a gas inlet chamber 34 and 35, respectively. Via inlet slots 36 and 37 in the cylinder sections 22, 23, they open into the respective compression chamber 32 and 33, respectively Piston movement causes the opening and closing of the inlet slots 36, 37.

The compression chambers 32, 33 are each assigned an outlet valve 41 or 42 on the end face, which are also actuated to the piston 21. They are located in outlet chambers 43, 44, which are formed in a second, outer housing 45 which receives the first housing 31. Exhaust valves of this type are only known from DE 196 34 517 AI. A flexible or flexibly suspended valve plate 46 is actuated by the piston 21. In the illustrated embodiment, the end faces of the piston 21 are laterally equipped with knobs 47, which raise the outer edges of the flexible valve plates 46 which are fastened centrally in the outlet chambers 43, 44.

In particular, FIG. 7 shows that the outer housing 45 is approximately oval in cross section. It comprises the rotationally symmetrical linear drive in the housing 31. In the opposite areas with thicker housing walls there is an inlet bore 51 on one side and an outlet bore 52 on the other side. They extend parallel to the piston 21. The inlet bore 51 is positioned laterally Bores 53 with the gas inlet chambers 34, 35 in connection. The outlet chambers 43, 44 protrude lateral bores 54 in connection with the outlet bore 52.

In the embodiment shown, both bores 51, 52 open into one of the two end faces of module 2 (cf. in particular FIG. 6) and form inlet 55 and outlet 56 of module 2. This end face is assigned to rail 3. In the rail 3 there are the inlet channel 57, which is in tight connection with the inlet 55 of the modules 2. At the level of the outlets 56 of the modules 2 is the outlet channel 58 of the rail 3, which also - by means not shown in detail, e.g. mechanical means or glue, - are tightly connected. Inlet duct 57 and outlet duct 58 are indicated by dashed lines in FIG.

Further channels 59 in the rail 3 are shown in FIG. 6. They are used to hold electrical cables, e.g. serve to supply the linear drives. The modules 2 and, if present, the high-vacuum pump 12 can also be connected to a common supply, display and control device (FIG. 3) via the further channels.

FIGS. 8 to 10 show possible variants with regard to the switching of the modules 2.

In the solution according to FIGS. 8a, b, all modules 2 are connected in parallel. This expediently also applies to the stages present in a module 2 if it is designed in two stages (FIGS. 5, 6). face side The inlets 55 of the modules 2 open into the common inlet channel 57 in the rail 3 (FIG. 8b). The outlets 56 open into the common outlet channel 58.

In the embodiment according to FIGS. 9a, 9b, all modules 2 are connected in series (e.g. also the levels present in module 2, as described in DE 199 17 560.8. The inlet duct 57 in the rail 3 (FIG. 9b) only extends as far as the inlet 55 of the first module 2. Intermediate ducts 61 each connect the outlet 56 of one module 2 to the inlet 55 of the next module 2. The outlet 56 of the last module 2 stands by an outlet channel 58 'in connection, which is provided for example separately (cf. also FIG. 5, dashed addition) in the rail 3.

FIGS. 10a, b show a solution in which the first two modules 2 are connected in parallel and the two further modules 2 are connected in series (FIG. 10a). The associated arrangement of channels 57, 58, 58 ', 61 in the rail 3 is shown in FIG. 10b.

The modules 2 of the pump 1 according to the invention described so far have compression chambers 32, 33 on both ends of the piston 21. Within the scope of the invention, modules with only one or with more than two compression chambers can also be used. The latter are known per se from EP 607 687 A2. However, the piston pumps described therein are equipped with a crankshaft drive.

Claims

Piston pump patent claims

1. oscillating piston pump (1), in particular oscillating piston vacuum pump, characterized in that it consists of several structurally identical modules (2) of an oscillating piston pump, which are connected in parallel and / or in series, depending on customer requirements, and which are each equipped with an oscillating piston drive.

2. Pump according to claim 1, characterized in that the oscillating piston pump modules (2) are fastened together on a rail (3).

3. Pump according to claim 2, characterized in that there are inlet and outlet (55, 56) of the oscillating piston pump modules (2) in the region of one of the two end faces, that the modules (2) with this end face on the rail (3rd ) are attached so that a parallel inlet channel (57) and a common outlet channel (58) are located in the rail in parallel modules (2) and that a mouth of the inlet channel, the inlet (9) of the pump (1) and a mouth the outlet channel form the outlet (10) of the pump (2).

4. Pump according to claim 2, characterized in that in the rail (3) intermediate channels (61) pre- are present that connect the outlet (56) of one module (2) to the inlet (55) of the following module (2) in the case of modules (2) connected in series.

5. Pump according to claim 2, characterized in that one of the end faces of the oscillating piston pump modules (2) are each equipped with the inlet (55) and the further end faces are each equipped with the outlet (56) and that two rails (4, 5) are present, one of which is equipped with a common inlet duct (57) and the other with a common outlet duct (58).

6. Pump according to claim 2, 3, 4 or 5, characterized in that the rail (s) (3, 4, 5) has (have) carrying functions.

7. Pump according to one of claims 2 to 6, characterized in that the rail (s) (3, 4, 5) is (are) part of a frame, a carriage (15, 16) or the like.

8. Pump according to one of claims 2 to 7, characterized in that the rail (s) (3, 4, 5) is (are) equipped with further channels (59) which serve to accommodate electrical lines.

9. Pump according to one of claims 2 to 8, characterized in that the rail (s) (3, 4, 5) is (are) formed by an extruded profile part.

10. Pump according to one of claims 1 to 9, characterized in that there are two or more pump stages in the module (2) and that these are connected in parallel or in series, depending on customer requirements.

11. Pump according to one of the preceding claims, characterized in that the oscillating piston pump (1) is connected upstream of a high vacuum pump (12) and that the inlet of the high vacuum pump (12) forms the inlet (9) of the pump system.

12. Pump according to claim 10 and according to one of the claims

2 to 8, characterized in that the high vacuum pump (12) is also attached to the rail (3) or to one of the rails (4, 5).

13. Pump according to one of the preceding claims, characterized in that all modules (2) of the oscillating piston pump (1) and any high vacuum pump (12) with a common supply, display and / or control unit

(14) are equipped.

14. Pump according to one of the preceding claims, characterized in that the modules (2) are equipped with an outer housing (45), in which bores (51, 52) extending parallel to the piston (21) are located, one of which Inlet bore and the other form an outlet bore.

15. Pump according to claim 12, characterized in that the outer housing (45) is oval and that in each case one of the bores (51, 52) is located in the regions with thicker walls.

16. A method of operating a pump (1) according to one of claims 1 to 13, characterized in that the linear drives of the individual modules (2) are controlled so that the oscillating pistons (21) of the pump modules (2) perform an opposite movement in pairs.

17. A method for producing oscillating piston pumps (1), in particular oscillating piston vacuum pumps, with different pumping speeds, characterized in that several identical oscillating piston pump modules (2) are connected in parallel and / or in series and in that the number of modules connected in parallel and / or in series is such is chosen so that the sum of their pumping speeds corresponds to the desired pumping speed or the final pressure corresponds to the desired final pressure.

18. The method according to claim 17, characterized in that they are mounted side by side or one above the other on a common (3) or on two rails (4, 5) and that the inlet openings (55) of the modules (2) with a common inlet channel ( 57) and the outlet openings (56) of the modules (2) are tightly connected to a common outlet channel (58).