EP1229137A1 - Installation et procédé pour transporter des pièces métalliques ainsi qu'une installation pour le traitement thermique de ces pièces - Google Patents

Installation et procédé pour transporter des pièces métalliques ainsi qu'une installation pour le traitement thermique de ces pièces Download PDF

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Publication number
EP1229137A1
EP1229137A1 EP01101852A EP01101852A EP1229137A1 EP 1229137 A1 EP1229137 A1 EP 1229137A1 EP 01101852 A EP01101852 A EP 01101852A EP 01101852 A EP01101852 A EP 01101852A EP 1229137 A1 EP1229137 A1 EP 1229137A1
Authority
EP
European Patent Office
Prior art keywords
workpieces
transport chamber
chamber
treatment
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01101852A
Other languages
German (de)
English (en)
Other versions
EP1229137B1 (fr
Inventor
Jörg Müller-Ziller
Franz Bless
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ipsen International GmbH
Original Assignee
Ipsen International GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to DE50112495T priority Critical patent/DE50112495D1/de
Priority to DE50110689T priority patent/DE50110689D1/de
Priority to AT05008611T priority patent/ATE362000T1/de
Priority to EP05008611A priority patent/EP1555330B1/fr
Priority to AT01101852T priority patent/ATE335859T1/de
Priority to ES05008611T priority patent/ES2285597T3/es
Priority to EP01101852A priority patent/EP1229137B1/fr
Application filed by Ipsen International GmbH filed Critical Ipsen International GmbH
Priority to ES01101852T priority patent/ES2270907T3/es
Priority to CN02100915A priority patent/CN1374408A/zh
Priority to US10/056,578 priority patent/US6749800B2/en
Publication of EP1229137A1 publication Critical patent/EP1229137A1/fr
Publication of EP1229137B1 publication Critical patent/EP1229137B1/fr
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0006—Details, accessories not peculiar to any of the following furnaces
    • C21D9/0018—Details, accessories not peculiar to any of the following furnaces for charging, discharging or manipulation of charge
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0006—Details, accessories not peculiar to any of the following furnaces
    • C21D9/0025—Supports; Baskets; Containers; Covers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/0024—Charging; Discharging; Manipulation of charge of metallic workpieces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/12—Travelling or movable supports or containers for the charge
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0056—Furnaces through which the charge is moved in a horizontal straight path

Definitions

  • the invention relates to a device for transporting metallic Workpieces, especially during a heat treatment, with a thermally insulated transport chamber for receiving workpieces, agents for loading and unloading the workpieces and the transport chamber moving chassis is provided.
  • the invention further relates to a system for the heat treatment of metallic workpieces, at least two treatment chambers in which the workpieces can be heat treated are.
  • the invention has a method for Transporting metallic workpieces during a heat treatment to do with the workpieces in a heat insulated transport chamber between at least two treatment chambers in which the workpieces are heat-treatable, are transported.
  • a heat treatment plant which has a vacuum oven, a lock and a mobile transport chamber having.
  • the transport chamber is via the lock to the vacuum oven coupled.
  • the heat-insulated from the outside and with a hermetic closing door provided transport chamber also has a Heating device for heating the workpieces and a conveyor for loading and unloading the workpieces.
  • the Transport chamber coupled to the lock and preheated. Subsequently both the lock and the transport chamber are filled with an inert gas flooded to a pressure greater than ambient pressure to prevent outside air from entering the lock or the transport chamber arrives.
  • the workpieces in the vacuum furnace are then placed on the cooled in the transport chamber temperature, and the Vacuum furnace is also flooded with inert gas. After in the vacuum oven and the same in the lock or transport chamber Pressure level is reached, the door of the vacuum furnace is opened and the Workpieces by means of the conveyor of the transport chamber in this loaded into it.
  • the invention has for its object a device and a Process for transporting metallic workpieces and a system to provide for the heat treatment of these workpieces comparatively flexible and efficient way of transporting the Workpieces between several treatment chambers during one Allow heat treatment.
  • Such a device offers compared to the im State-of-the-art stationary transfer locks have a flexible Transport of the workpieces during a heat treatment. So you can such as individual treatment chambers of a heat treatment plant for Maintenance or repair work from the process cycle exclude without the other treatment chambers To be affected. Even the expansion of an existing one Heat treatment plant around additional treatment chambers is with the Device according to the invention possible without major effort.
  • such a device adopts the knowledge that a much more efficient procedure can then be achieved if instead of flooding with inert gas, a vacuum in the Transport chamber is created to protect the workpieces from unwanted Environmental influences, such as the addition of oxygen conditional oxidation to protect.
  • a vacuum in the Transport chamber is created to protect the workpieces from unwanted Environmental influences, such as the addition of oxygen conditional oxidation to protect.
  • the device according to the invention is thus possible, the heat treatment during the transport of the workpieces to the next one Continue treatment chamber in the transport chamber, and without that a noticeable change in temperature occurs.
  • the device according to the invention is accordingly also characterized in that it is particularly suitable for heat treatment processes that in High temperature range take place.
  • the device with a vacuum pump is particularly advantageous for evacuating the transport chamber.
  • This has the advantage that the device in terms of evacuating the transport chamber self-sufficient and therefore independent of the respective design of the Treatment chambers is. You can therefore, for example, both Dock vacuum or atmosphere furnaces as well as cooling chambers.
  • the provision of a vacuum pump enables the Transport chamber can also be evacuated during transport can. This comes into play, for example, when loading the Workpieces from a treatment chamber into the transport chamber atmosphere in the treatment chamber into the transport chamber is allowed to expand to heat treatment in this atmosphere during transport until shortly before reaching the next one Continue treatment chamber.
  • the Transport chamber because of their thermal insulation Counteracts drop in temperature of the workpieces, which in the case of short Transport routes are usually sufficient, but in some cases it can High temperature heat treatment may be required Workpieces by adding additional heat to the desired one Maintain temperature.
  • an interchangeable thermal insulation which is preferably made of steel, too Mistake.
  • One such, for example made of a chrome-nickel steel Manufactured insulation can be used for repair and maintenance purposes exchange freely. It also has the advantage that due to its low storage heat the temperature of the transport chamber inside changed less minutes, that is to the different temperatures several treatment chambers can be adapted.
  • the device is the transport chamber with a hermetically closing Loading door, which is actuated by a drive to a automatic docking of the transport chamber to a treatment chamber sure.
  • Transport chamber additionally with a hermetically closing assembly door to provide.
  • Transport chamber therefore independent of the may not be free accessible loading door can be unloaded through the assembly door.
  • the Transport chamber in an economically advantageous way only with a loading door Mistake.
  • the chassis is advantageously dependent on the operational Need rail bound or by embedded in the floor Induction loops can be freely steered. For easy loading of the workpieces from a treatment chamber into the transport chamber or To achieve the other way round, it has also proven useful if the means of discovery Unload the workpieces have a loading fork that is horizontal and is vertically movable.
  • Such a heat treatment plant is related with the previously described device for transporting metallic Benefit from workpieces. By providing the lock it is ensured that the workpieces are protected from environmental influences protected between a treatment chamber and the transport chamber can be shipped.
  • the invention Heat treatment plant is characterized by great flexibility Regarding the transport of the workpieces between the individual Treatment chambers from, which also results in a relatively high Throughput performance and therefore an economically efficient one Procedure can be achieved.
  • the lock can be evacuated separately, so that it regardless of the type of treatment chamber, for example Vacuum furnace or atmospheric furnace is to be operated. It is also on this Possible, the lock already during the transport of the Transport chamber to the corresponding treatment chamber evacuate to ensure that the process runs as quickly as possible. ever depending on the application, it is also conceivable that the lock through a vacuum pump arranged on the transport chamber is evacuated.
  • the lock has a drive through which the loading door of the Transport chamber is actuated. This contributes to a particular lightweight design of the transport chamber and thus too relatively low cost of conveying the workpieces between the individual treatment chambers at. In terms of one The greatest possible variability in the design of the heat treatment is Treatment chamber expediently a vacuum oven Atmospheric furnace or a cooling chamber.
  • the solution to the above problem is at a method with the features mentioned above characterized in that the vacuum-tight transport chamber a vacuum protecting the workpieces from environmental influences is evacuated and the workpieces in this vacuum from one Treatment chamber to be transported to the next.
  • the transport of the workpieces in a given vacuum evacuated transport chamber has mainly been used for the transportation of heated a relatively high temperature of, for example, 1000 ° C Workpieces turned out to be extremely advantageous.
  • Inert gas can in this way be an often undesirable one Avoid temperature drop.
  • the method is further proposed to use a transport chamber Coupling the lock to the respective treatment chamber to continue to use the advantages described above. Finally, it is proposed that Evacuate the lock separately in order to connect the Ensure transport chamber.
  • the device shown in Fig. 1a for transporting metallic Workpieces 20 have an externally heat-insulated and vacuum-tight trained, cylindrical transport chamber 10 for receiving the a batch of assembled workpieces 20 and one Transport chamber 10 moving undercarriage 30.
  • the device is also with means 40 for loading and unloading the workpieces 20 provided that have a horizontally movable pawl 41.
  • the pawl 41 can be electromechanically driven by means of a forward and move reversible pressure chain 43 in the horizontal direction, the Guiding the empty run in a vertically arranged receptacle 42 is made. This ensures that all starting or Braking operations in terms of a reliable Moving the workpieces 20 from the transport chamber 10 into a Treatment chamber 50 or vice versa run smoothly.
  • the transport chamber 10 has a flange 11 for a vacuum pump, not shown.
  • the Transport chamber 10 with replaceable thermal insulation 12 made of, for example, chrome-nickel steel and additionally instructs a current lead-through 13 connected to heating elements 14.
  • the Heating elements 14 allow the empty transport chamber 10 to be heated to approx. 1000 ° C in the shortest possible time at a control temperature of approx. ⁇ 5 ° C.
  • the transport chamber 10 is hermetically sealed closing loading door 15 provided by a in the present case hydraulic, depending on the application, but also electrical or pneumatic actuatable drive 16 can be raised in the vertical direction.
  • the loading door 15 moves in one double-walled portal 17, on which the transport chamber 10 opposite side coupling means 18 are arranged.
  • Coupling means 18 With the help of Coupling means 18, the transport chamber 10 can only be vacuum-tight Dock lock 60 indicated as indicated.
  • the chassis 30 provided with wheels 31 of the device is by a controlled by a converter and thus starting smoothly or braking gear motor.
  • the one Positioning accuracy of approx. ⁇ 1 mm allowable travel speed the one moving freely in all directions and rotating on the spot Undercarriage 30 is only between 0.01 m / s and 0.03 m / s, so that additional protective measures, such as a grid arrangement, are unnecessary are.
  • safety devices are provided to be used when hitting a Obstacle to trigger an emergency stop.
  • On the chassis 30 are also Arranged rails 32 through which the transport chamber 10 relative to the undercarriage 30 is movable over a distance of approximately 200 mm.
  • the Transport chamber 10 is by a not shown Hydraulic cylinder moves.
  • the one on both sides the device described above with slight modifications corresponding transport device 70 set up vis-à-vis Treatment chambers 50 are vacuum preheating chamber 50a, Vacuum carburizing chambers 50b, diffusion chambers 50c and Gas quenching chamber 50d - or oil or Salt bath quenching chamber - trained.
  • the transport chamber 10 Around the via a conveyor belt or a roller conveyor 51 in the vacuum preheating chamber 50a untreated workpieces introduced at the beginning 20 in the corresponding to the respective heat treatment
  • the transport chamber 10 the transport device 70 over the stationary in front of everyone Treatment chamber 50 arranged lock 60 to the vacuum preheating chamber 50a coupled.
  • the lock 60 and the transport chamber 10 evacuated.
  • the doors of the vacuum preheating chamber 50a and the lock 60 and the loading door 15 of the transport chamber 10 are opened and the workpieces 20 into the transport chamber 10 by means of the loading fork 41 shipped.
  • the Transport chamber 10 to one of the vacuum carburizing chambers 50b transported.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Tunnel Furnaces (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Furnace Details (AREA)
EP01101852A 2001-01-26 2001-01-26 Installation et procédé pour transporter des pièces métalliques ainsi qu'une installation pour le traitement thermique de ces pièces Expired - Lifetime EP1229137B1 (fr)

Priority Applications (10)

Application Number Priority Date Filing Date Title
EP01101852A EP1229137B1 (fr) 2001-01-26 2001-01-26 Installation et procédé pour transporter des pièces métalliques ainsi qu'une installation pour le traitement thermique de ces pièces
AT05008611T ATE362000T1 (de) 2001-01-26 2001-01-26 Vorrichtung und verfahren zum transportieren metallischer werkstücke sowie anlage zur wärmebehandlung dieser werkstücke
EP05008611A EP1555330B1 (fr) 2001-01-26 2001-01-26 Installation et procédé pour transporter des pièces métalliques ainsi qu'une installation pour le traitement thermique de ces pièces
ES01101852T ES2270907T3 (es) 2001-01-26 2001-01-26 Dispositivo y procedimiento para transportar piezas de trabajo metalicas e instalacion para el tratamiento termico de estas piezas.
ES05008611T ES2285597T3 (es) 2001-01-26 2001-01-26 Dispositivo y procedimiento para transportar piezas metalicas e instalacion para el tratamiento con calor de piezas metalicas.
DE50110689T DE50110689D1 (de) 2001-01-26 2001-01-26 Vorrichtung und Verfahren zum Transportieren metallischer Werkstücke sowie Anlage zur Wärmebehandlung dieser Werkstücke
DE50112495T DE50112495D1 (de) 2001-01-26 2001-01-26 Vorrichtung und Verfahren zum Transportieren metallischer Werkstücke sowie Anlage zur Wärmebehandlung dieser Werkstücke
AT01101852T ATE335859T1 (de) 2001-01-26 2001-01-26 Vorrichtung und verfahren zum transportieren metallischer werkstücke sowie anlage zur wärmebehandlung dieser werkstücke
CN02100915A CN1374408A (zh) 2001-01-26 2002-01-07 输送金属工件的装置和方法以及热处理此工件的设备
US10/056,578 US6749800B2 (en) 2001-01-26 2002-01-25 Arrangement and method for transporting metallic work pieces, and system for heat treatment of said work pieces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01101852A EP1229137B1 (fr) 2001-01-26 2001-01-26 Installation et procédé pour transporter des pièces métalliques ainsi qu'une installation pour le traitement thermique de ces pièces

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP05008611A Division EP1555330B1 (fr) 2001-01-26 2001-01-26 Installation et procédé pour transporter des pièces métalliques ainsi qu'une installation pour le traitement thermique de ces pièces

Publications (2)

Publication Number Publication Date
EP1229137A1 true EP1229137A1 (fr) 2002-08-07
EP1229137B1 EP1229137B1 (fr) 2006-08-09

Family

ID=8176310

Family Applications (2)

Application Number Title Priority Date Filing Date
EP05008611A Revoked EP1555330B1 (fr) 2001-01-26 2001-01-26 Installation et procédé pour transporter des pièces métalliques ainsi qu'une installation pour le traitement thermique de ces pièces
EP01101852A Expired - Lifetime EP1229137B1 (fr) 2001-01-26 2001-01-26 Installation et procédé pour transporter des pièces métalliques ainsi qu'une installation pour le traitement thermique de ces pièces

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP05008611A Revoked EP1555330B1 (fr) 2001-01-26 2001-01-26 Installation et procédé pour transporter des pièces métalliques ainsi qu'une installation pour le traitement thermique de ces pièces

Country Status (6)

Country Link
US (1) US6749800B2 (fr)
EP (2) EP1555330B1 (fr)
CN (1) CN1374408A (fr)
AT (2) ATE335859T1 (fr)
DE (2) DE50112495D1 (fr)
ES (2) ES2285597T3 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1323995A2 (fr) * 2001-12-26 2003-07-02 Nitrex Metal Inc Unité de traitement thermique multichambre
WO2004009855A1 (fr) * 2002-07-18 2004-01-29 Consolidated Engineering Company, Inc. Procede et systeme servant a traiter des pieces de fonderie
DE20305423U1 (de) * 2003-04-04 2004-08-12 Ipsen International Gmbh Vorrichtung zum Transportieren metallischer Werkstücke
EP1473372A1 (fr) * 2003-04-11 2004-11-03 Ipsen International GmbH Dispositif pour le transport de pièces métalliques
DE10359458A1 (de) * 2003-12-17 2005-07-28 Ald Vacuum Technologies Ag Vorrichtung zur verketteten Wärmebehandlung von Werkstücken unter Unterdruck
WO2006024780A1 (fr) * 2004-08-06 2006-03-09 Etudes Et Constructions Mecaniques Machine de traitement thermochimique basse pression

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1531186B1 (fr) * 2003-11-14 2008-12-31 Ipsen International GmbH Dispositif et méthode pour un traitement thermique des pièces métalliques
US8016592B2 (en) * 2008-01-01 2011-09-13 Dongguan Anwell Digital Machinery Ltd. Method and system for thermal processing of objects in chambers
US8662888B2 (en) * 2008-11-19 2014-03-04 Ipsen, Inc. Loading system for a heat treating furnace
DE102009041927B4 (de) 2009-09-17 2015-08-06 Hanomag Härtecenter GmbH Verfahren zur Niederdruckaufkohlung metallischer Werkstücke
CN102445083B (zh) * 2011-12-19 2014-11-26 青岛科技大学 一种用于连续生产式真空气氛炉的成批进出料系统及其成批进出料方法
EP2607504B1 (fr) * 2011-12-23 2018-02-28 Ipsen International GmbH Mécanisme de transport de charge pour système de traitement thermique multi station
PL228603B1 (pl) * 2015-02-04 2018-04-30 Seco/Warwick Spolka Akcyjna Piec wielokomorowy do nawęglania próżniowego i hartowania kół zębatych, wałków, pierścieni i tym podobnych detali
US20170074589A1 (en) 2015-09-11 2017-03-16 Ipsen Inc. System and Method for Facilitating the Maintenance of an Industrial Furnace
CN110453058B (zh) * 2019-08-09 2021-05-25 江苏良川科技发展有限公司 一种氨基气氛辊棒炉生产系统
DE102020104381A1 (de) * 2020-02-19 2021-08-19 Pro-Beam Gmbh & Co. Kgaa Elektronenstrahlanlage und Verfahren zur additiven Herstellung eines Werkstücks

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US2446403A (en) * 1944-05-05 1948-08-03 Etude Pour L Ind Du Magnesium Process and apparatus for the vacuum production of magnesium
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US5052923A (en) * 1989-10-12 1991-10-01 Ipsen Industries International Gesellschaft Mit Beschrankter Haftung Oven for partial heat treatment of tools
US5402994A (en) * 1992-01-15 1995-04-04 Aichelin Gmbh Device for heat-treating metal workpieces
US5567381A (en) * 1995-03-20 1996-10-22 Abar Ipsen Industries, Inc. Hybrid heat treating furnace
EP0893510A1 (fr) * 1997-07-21 1999-01-27 Refrattari Brebbia S.r.l. Installation automatique de traitement thermique de métaux, notamment d'aciers
FR2771574A1 (fr) * 1997-11-21 1999-05-28 Telecommunications Sa Protocole de transmission de donnees numeriques sous forme d'elements mpeg-ts
FR2782156A1 (fr) * 1998-08-05 2000-02-11 Fours Ind B M I Baudasse Marti Dispositif de convoyage d'une charge entre plusieurs enceintes sous vide et unite de traitement sous vide equipee d'un tel dispositif
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JPH06174377A (ja) * 1992-12-04 1994-06-24 Komatsu Ltd 多目的雰囲気熱処理装置
DE4316841A1 (de) 1993-05-19 1994-11-24 Aichelin Gmbh Vorrichtung zur Wärmebehandlung metallischer Werkstücke
DE29505496U1 (de) * 1995-03-31 1995-06-01 Ipsen Industries International GmbH, 47533 Kleve Vorrichtung zur Wärmebehandlung metallischer Werkstücke unter Vakuum
TW504941B (en) * 1999-07-23 2002-10-01 Semiconductor Energy Lab Method of fabricating an EL display device, and apparatus for forming a thin film

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1876960A (en) * 1929-01-14 1932-09-13 Charles F Kenworthy Inc Annealing furnace
US2446403A (en) * 1944-05-05 1948-08-03 Etude Pour L Ind Du Magnesium Process and apparatus for the vacuum production of magnesium
US3014708A (en) * 1957-11-18 1961-12-26 Elek Ska Svetsningsaktiebolage Process and apparatus for subjecting materials in the solid state to high temperatures at sub-atmospheric pressures
DE3242418C2 (fr) * 1981-11-17 1989-03-23 Zavody Silnoproude Elektrotechniky Koncern, Prag/Praha, Cs
US5052923A (en) * 1989-10-12 1991-10-01 Ipsen Industries International Gesellschaft Mit Beschrankter Haftung Oven for partial heat treatment of tools
US5402994A (en) * 1992-01-15 1995-04-04 Aichelin Gmbh Device for heat-treating metal workpieces
US5567381A (en) * 1995-03-20 1996-10-22 Abar Ipsen Industries, Inc. Hybrid heat treating furnace
EP0893510A1 (fr) * 1997-07-21 1999-01-27 Refrattari Brebbia S.r.l. Installation automatique de traitement thermique de métaux, notamment d'aciers
FR2771574A1 (fr) * 1997-11-21 1999-05-28 Telecommunications Sa Protocole de transmission de donnees numeriques sous forme d'elements mpeg-ts
US6065964A (en) * 1997-12-02 2000-05-23 Etudes Et Constructions Mecaniques Modular vacuum thermal processing installation
FR2782156A1 (fr) * 1998-08-05 2000-02-11 Fours Ind B M I Baudasse Marti Dispositif de convoyage d'une charge entre plusieurs enceintes sous vide et unite de traitement sous vide equipee d'un tel dispositif

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1323995A2 (fr) * 2001-12-26 2003-07-02 Nitrex Metal Inc Unité de traitement thermique multichambre
EP1323995A3 (fr) * 2001-12-26 2003-11-05 Nitrex Metal Inc Unité de traitement thermique multichambre
US6902635B2 (en) 2001-12-26 2005-06-07 Nitrex Metal Inc. Multi-cell thermal processing unit
WO2004009855A1 (fr) * 2002-07-18 2004-01-29 Consolidated Engineering Company, Inc. Procede et systeme servant a traiter des pieces de fonderie
DE20305423U1 (de) * 2003-04-04 2004-08-12 Ipsen International Gmbh Vorrichtung zum Transportieren metallischer Werkstücke
EP1464905A1 (fr) * 2003-04-04 2004-10-06 Ipsen International GmbH Dispositif de transport des pièces métalliques
EP1473372A1 (fr) * 2003-04-11 2004-11-03 Ipsen International GmbH Dispositif pour le transport de pièces métalliques
DE10359458A1 (de) * 2003-12-17 2005-07-28 Ald Vacuum Technologies Ag Vorrichtung zur verketteten Wärmebehandlung von Werkstücken unter Unterdruck
DE10359458B4 (de) * 2003-12-17 2009-09-24 Ald Vacuum Technologies Gmbh Vorrichtung zur verketteten Wärmebehandlung von Werkstücken unter Unterdruck
WO2006024780A1 (fr) * 2004-08-06 2006-03-09 Etudes Et Constructions Mecaniques Machine de traitement thermochimique basse pression

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Publication number Publication date
ATE362000T1 (de) 2007-06-15
EP1229137B1 (fr) 2006-08-09
DE50112495D1 (de) 2007-06-21
ES2285597T3 (es) 2007-11-16
US20020146659A1 (en) 2002-10-10
US6749800B2 (en) 2004-06-15
ATE335859T1 (de) 2006-09-15
CN1374408A (zh) 2002-10-16
EP1555330A3 (fr) 2006-04-12
DE50110689D1 (de) 2006-09-21
EP1555330B1 (fr) 2007-05-09
EP1555330A2 (fr) 2005-07-20
ES2270907T3 (es) 2007-04-16

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