EP1090431B1 - Piezoelektrischer aktor - Google Patents

Piezoelektrischer aktor Download PDF

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Publication number
EP1090431B1
EP1090431B1 EP00926674A EP00926674A EP1090431B1 EP 1090431 B1 EP1090431 B1 EP 1090431B1 EP 00926674 A EP00926674 A EP 00926674A EP 00926674 A EP00926674 A EP 00926674A EP 1090431 B1 EP1090431 B1 EP 1090431B1
Authority
EP
European Patent Office
Prior art keywords
piezoelectric actuator
prongs
electrode
electrodes
actuator according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00926674A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1090431A1 (de
Inventor
Rudolf Heinz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP1090431A1 publication Critical patent/EP1090431A1/de
Application granted granted Critical
Publication of EP1090431B1 publication Critical patent/EP1090431B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Connection electrodes of multilayer piezoelectric or electrostrictive devices, e.g. external electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M51/00—Fuel-injection apparatus characterised by being operated electrically
    • F02M51/06—Injectors peculiar thereto with means directly operating the valve needle
    • F02M51/0603—Injectors peculiar thereto with means directly operating the valve needle using piezoelectric or magnetostrictive operating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M63/00—Other fuel-injection apparatus having pertinent characteristics not provided for in groups F02M39/00 - F02M57/00 or F02M67/00; Details, component parts, or accessories of fuel-injection apparatus, not provided for in, or of interest apart from, the apparatus of groups F02M39/00 - F02M61/00 or F02M67/00; Combination of fuel pump with other devices, e.g. lubricating oil pump
    • F02M63/0012—Valves
    • F02M63/0014—Valves characterised by the valve actuating means
    • F02M63/0015—Valves characterised by the valve actuating means electrical, e.g. using solenoid
    • F02M63/0026—Valves characterised by the valve actuating means electrical, e.g. using solenoid using piezoelectric or magnetostrictive actuators

Definitions

  • the invention relates to a piezoelectric actuator, in particular for actuating control valves or injection valves in motor vehicles, with an actuator body in the form of a multilayer laminate of stacked layers of piezoelectric material and intervening metallic or electrically conductive, serving as electrodes layers alternately through on the shell side in Longitudinal direction of the actuator body facing each other metallic outer electrodes are contacted at least in the form of flat electrode strips, wherein the outer electrodes are in contact with electrical connecting conductors for connecting the piezoelectric actuator to an electrical voltage.
  • Such a piezoelectric actuator is z. B. from the DE 196 50 900 A1 the Robert Bosch GmbH known.
  • Such piezoelectric multilayer actuators lead, if they are acted upon by a pulsating electrical voltage at their electrode layers, analog pulsating strokes with change of the distance between their two end faces.
  • a pulsating electrical voltage at their electrode layers analog pulsating strokes with change of the distance between their two end faces.
  • cited DE 196 50 900 A1 cover the electrical voltage transmitted to the electrode layers on both sides of the Sheath side lying in the longitudinal direction of the actuator body metallic outer electrodes of the active region of the actuator body.
  • piezoelectric multilayer actuators delaminations may occur due to the low tensile strength between the thin stacked sheets of piezoceramics (eg lead zirconate titanate) and the metallic or electrically conductive electrode layers, which propagate as cracks to the outside in the outer electrodes and can lead to power interruptions .
  • the outer electrodes have an elastic wave-shaped structure or are formed as a metal foam.
  • This object is achieved according to the claim.
  • the essence of the invention resides in the fact that the flat electrode strips resting directly on the actuator body are additionally connected to these bridging additional electrodes, which are in contact with the planar electrode strips via narrow elastic feet at several points.
  • These additional electrodes preferably have the shape of a double comb with a ridge of ridges lying parallel to the electrode strips and two parallel rows of tines laterally thereon whose tines form the elastic feet and are in contact with the flat electrode strips.
  • An advantage of such a double comb-type additional electrode is its easy and secure attachment to the electrode strip due to the thin elastic comb teeth.
  • an arbitrarily thick layer of solder can be used for contacting, which additionally serves to dissipate heat from the actuator body.
  • the many design possibilities of the double comb allow an optimal attachment, a manufacturing simplification and an optimal control of the attachment of the double comb-like additional electrode to the flat electrode strips.
  • the double comb acting as an additional electrode develops inherent stability after attachment to the flat electrode strip on the actuator body, which can still be increased by adding an elastomer.
  • the two comb rows offer over the life of the piezoelectric actuator high security against any cracks occurring.
  • a piezoelectric actuator according to the invention can advantageously be used for diesel or gasoline injection devices in motor vehicles.
  • Such a piezoelectric actuator can advantageously replace the usually used as an adjusting member in injectors electromagnetic system, since it can switch faster.
  • FIGS. 3 to 9 show in each case various embodiments of a double-comb-like additional electrode and their attachment to the electrode strips.
  • FIGS. 10A and 10B schematically show two possible manufacturing methods for a double comb additional electrode by means of wires; the Figures 11A and 11B schematically show an alternative form of auxiliary electrodes designed as brushes according to the invention.
  • FIG. 1 is a perspective view of a first embodiment of a provided with a double comb-shaped auxiliary electrode 5 piezoelectric actuator shown.
  • the exemplary rectangular actuator body 1 is in the form of a multilayer laminate of stacked layers of piezoelectric material and intervening metallic or electrically conductive, serving as electrodes layers 2a and 2b.
  • the electrode layers 2 a and 2 b are alternately contacted by metallic outer electrodes 3 and 5 lying opposite one another on the shell side in the longitudinal direction of the actuator body 1 and connected to electrical connecting conductors 7 which are connected to the double-comb-shaped additional electrode 5.
  • a crack 4 is in FIG. 1 indicated by way of example.
  • additional electrode 5 which consists of a parallel to the flat electrode strip 3 comb back 10 and two lateral, approximately at right angles from the comb back 10 to the associated planar electrode strip 3 bent towards gezinkten edges, wherein the narrow teeth 6 of the edges electrically the flat electrode strip 3 are in contact, a current interruption, as threatened by the crack 4, be bridged.
  • the thin prongs 6 of the double comb form a plurality of elastic feet, which can absorb the movement of the actuator body 1 caused by the actuator stroke elastically and thereby ensure a durable contacting of the additional electrode 5 with the planar electrode strip 3.
  • the elastic prongs 6 can lead into the flat electrode strips 3 or attached to the surface, for. B. soldered, welded, bonded, etc. be.
  • FIG. 1 shows only one side of the rectangular piezoelectric actuator.
  • FIG. 2 shown schematic plan view of such a piezoelectric actuator shows that two double-comb-shaped additional electrodes 5 are opposite to each other on the shell sides of an actuator body 1 and each with a flat electrode strip 3 in electrical contact.
  • FIG. 3 shows a flat double comb electrode 5 with a flat comb back 10 and from this bent by 90 ° prongs 6 and holes or holes 8 on the spine 10th
  • plastic, adhesive or an elastomer 9 are poured to stabilize the double comb 5 and / or dissipate the heat to the outside.
  • FIG. 5 shows a further embodiment of a serving as an additional electrode 5 double comb electrode in which the comb teeth 6 are only slightly bent from the flat comb back 10 to the electrode strip 3 and are in contact with their respective end portion with the respective electrode strip 3.
  • the attachment can be done by soldering (hard or soft), laser welding, spot welding, friction welding or bonding.
  • the quality of attachment of the outwardly projecting comb teeth 6 is easy to control.
  • FIG. 6 A further exemplary embodiment of a double comb electrode suitable as additional electrode 5 is shown in FIG FIG. 6 shown.
  • the tines 6 which are seated on both sides of a flat comb back 10 are first bent away from the comb back 10 by 90 ° towards the electrode strip 3 and then inwardly parallel to the electrode strip 3.
  • FIG. 7 a further embodiment of a suitable as additional electrode 5 invention double comb electrode is shown, in which the comb back 10 and the tines 6 lie approximately in a plane ..
  • a Lötstopplack 13 applied to protect against complete soldering (if soldering is used) is in the middle below the spine 10 . If no soldering operation is used, a spacer 13 designed as an elastomer layer can hold the necessary distance between the flat electrode strip 3 and the comb back 10.
  • a PTFE layer 13 or a layer of similar material may further serve as a wear protection or damping layer.
  • FIG. 8 shows a further possible embodiment of a suitable as an additional electrode 5 invention double comb electrode, which has a semicircular or oval cross-sectional shape with rounded comb back 11.
  • FIG. 9A, 9B and 9C show a further embodiment of a suitable as additional electrode 5 for a piezoelectric actuator according to the invention according to the invention double comb electrode, which is similarly shaped as in FIG. 6 and on both sides of the flat ridge back 10 tines 6, which are bent over the comb back 10 by about 90 °.
  • Figure 9A shows the spacer or solder resist 13.
  • FIG. 9B shows that instead of a spacer or a Lötstopplackes 13 also around the corner to near the end of the comb teeth 6 going elastomeric or plastic plate 13a can be used.
  • FIG. 9C shown plan view of an additional electrode 5 suitable double comb electrode of any cross-sectional shape (right-angled or round or oval shape as in FIG. 8 ) shows that the comb teeth 6 serving as elastic feet are offset on both sides of the comb back 10 or 11 from each other by a half distance interval d of the prongs 6 in the longitudinal direction of the double comb.
  • a crack 14 occurring in the actuator body 1 usually goes straight (ie at an angle of 90 ° to the outer edge of the actuator body 1) through the flat electrode strips 3 of the outer electrodes.
  • the distance interval 2d and the tine gaps b can be adapted to the smallest possible crack following distances so that no crack runs in two opposite feet 6.
  • the preparation of one of the previously described as additional electrode 5 double comb can, for. B. by punching a matching Doppelkammform of a metal sheet suitable material and optionally simultaneous bending of the two rows of tines are performed.
  • a very fine double comb structure can also be produced by laser cutting from a sheet of suitable material.
  • FIGS 10A and 10B show further examples of simple production process for a suitable as additional electrode 5 double comb. This is done according to Figure 10A a wire 15 is bonded, welded or soldered to a sheet metal strip 16 and the ends 17 of the wire are cut off. In this way, a double comb with very narrow prongs 6, which is suitable as an additional electrode for a piezoelectric actuator according to the invention, is produced.
  • FIG. 10B is alternatively as an additional electrode. 5 for a piezoelectric actuator according to the invention suitable double comb made of a metallic screen.
  • its metallic transverse threads 18 must protrude on the side by a sufficiently large distance c, so that a double comb structure is formed.
  • a brush-like structure 19 can also serve as an alternative additional electrode 5, which has elastic metal bristles 20 projecting approximately perpendicularly from a flat metallic brush back 12, the ends of which are in accordance with FIG FIG. 11B are contacted with the electrode strips 3.
  • the comb teeth or bristles of serving as an additional electrode 5 double comb or a brush-like structure according to FIG. 11 soldered hard or soft to the electrode strip 3 or connected by laser welding or spot welding, friction welding or bonding. Furthermore, sticking with electrically conductive adhesive is possible. During the soldering, welding or bonding process, the quality of the connection to the electrode 3 of the tines or bristles projecting from the comb back or brush back can be easily controlled.
  • the additional electrode gets by its shape, after it is attached to the flat electrode strip, or by an additionally introduced elastomer layer sufficient inherent stability.
  • a double comb can be produced inexpensively in many ways. Since, according to the proposal, a comb electrode suitable as an additional electrode has two rows of tines, there is a high degree of certainty that as many prongs of the comb electrode as possible are electrically conductively connected to the associated electrode strip. By the, apart from the openings 8, almost closed metallic comb back of the double comb and optionally introduced heat-conducting elastomer is a good way of heat dissipation of the actuator body reached.
EP00926674A 1999-04-20 2000-03-08 Piezoelektrischer aktor Expired - Lifetime EP1090431B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19917728 1999-04-20
DE19917728A DE19917728A1 (de) 1999-04-20 1999-04-20 Piezoelektrischer Aktor
PCT/DE2000/000732 WO2000063980A1 (de) 1999-04-20 2000-03-08 Piezoelektrischer aktor

Publications (2)

Publication Number Publication Date
EP1090431A1 EP1090431A1 (de) 2001-04-11
EP1090431B1 true EP1090431B1 (de) 2009-07-15

Family

ID=7905145

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00926674A Expired - Lifetime EP1090431B1 (de) 1999-04-20 2000-03-08 Piezoelektrischer aktor

Country Status (7)

Country Link
US (1) US6794800B1 (zh)
EP (1) EP1090431B1 (zh)
JP (1) JP4843143B2 (zh)
KR (1) KR100728511B1 (zh)
CN (1) CN1238910C (zh)
DE (2) DE19917728A1 (zh)
WO (1) WO2000063980A1 (zh)

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US6700306B2 (en) * 2001-02-27 2004-03-02 Kyocera Corporation Laminated piezo-electric device
DE50203457D1 (de) 2001-04-30 2005-07-28 Siemens Ag Weiterkontaktierung für ein elektrisches bauteil sowie piezoelektrisches bauteil in vielschichtbauweise
DE10131621A1 (de) * 2001-06-29 2003-01-23 Epcos Ag Weiterkontaktierung für ein elektrisches Bauteil sowie piezoelektrisches Bauteil in Vielschichtbauweise
DE10327902A1 (de) * 2002-07-19 2004-06-24 Ceramtec Ag Innovative Ceramic Engineering Außenelektrode an einem piezokeramischen Vielschichtaktor
DE10241992B4 (de) * 2002-09-11 2005-05-04 Siemens Ag Piezoelektrischer Aktor
DE10341333B4 (de) * 2003-09-08 2006-06-08 Siemens Ag Piezoaktor und Verfahren zum Herstellen eines Piezoaktors
DE10352773A1 (de) * 2003-11-12 2005-06-30 Siemens Ag Kontaktierung für einen Aktor und zugehöriges Herstellungsverfahren
DE102004004737A1 (de) * 2004-01-30 2005-08-18 Robert Bosch Gmbh Piezoaktor und ein Verfahren zu dessen Herstellung
DE102004020329A1 (de) 2004-04-26 2005-11-10 Epcos Ag Elektrische Funktionseinheit und Verfahren zu deren Herstellung
US7385337B2 (en) 2004-06-18 2008-06-10 Tdk Corporation Multilayer piezoelectric element
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EP2259352B1 (en) * 2008-04-11 2012-08-29 Murata Manufacturing Co. Ltd. Laminated piezoelectric actuator
JPWO2009130863A1 (ja) * 2008-04-21 2011-08-11 株式会社村田製作所 積層型圧電アクチュエータ
DE102008058011A1 (de) * 2008-11-19 2010-02-25 Continental Automotive Gmbh Als Stapel ausgebildetes elektronisches Bauelement
JP5421390B2 (ja) * 2009-11-26 2014-02-19 京セラ株式会社 積層型圧電素子およびこれを用いた噴射装置ならびに燃料噴射システム
JP5115591B2 (ja) * 2010-06-10 2013-01-09 株式会社デンソー 電池の電極積層体
DE102011014446A1 (de) * 2011-03-18 2012-09-20 Epcos Ag Piezoaktor und Verfahren zur Kontaktierung eines Piezoaktors
DE102011114194A1 (de) * 2011-09-22 2013-03-28 Epcos Ag Piezoelektrisches Aktorbauelement
WO2014025050A1 (ja) * 2012-08-10 2014-02-13 京セラ株式会社 積層型圧電素子およびこれを備えた圧電アクチュエータ、噴射装置ならびに燃料噴射システム
DE102012109250B4 (de) * 2012-09-28 2020-07-16 Tdk Electronics Ag Elektrisches Bauelement und Verfahren zur Herstellung einer Kontaktierung eines Elektrischen Bauelements
CN103256473A (zh) * 2013-05-28 2013-08-21 常熟市平冶机械有限公司 矩形齿板
DE102014101512A1 (de) 2014-02-06 2015-08-06 Marco Systemanalyse Und Entwicklung Gmbh Piezoelektrische Stellvorrichtung
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Also Published As

Publication number Publication date
KR20010053026A (ko) 2001-06-25
US6794800B1 (en) 2004-09-21
JP2002542630A (ja) 2002-12-10
WO2000063980A1 (de) 2000-10-26
DE19917728A1 (de) 2000-10-26
CN1302458A (zh) 2001-07-04
CN1238910C (zh) 2006-01-25
JP4843143B2 (ja) 2011-12-21
DE50015686D1 (de) 2009-08-27
KR100728511B1 (ko) 2007-06-15
EP1090431A1 (de) 2001-04-11

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