EP1080036A1 - Solutions de peroxyde d'hydrogene aqueuses de grande purete, leur procede de production et leur utilisation - Google Patents

Solutions de peroxyde d'hydrogene aqueuses de grande purete, leur procede de production et leur utilisation

Info

Publication number
EP1080036A1
EP1080036A1 EP99920708A EP99920708A EP1080036A1 EP 1080036 A1 EP1080036 A1 EP 1080036A1 EP 99920708 A EP99920708 A EP 99920708A EP 99920708 A EP99920708 A EP 99920708A EP 1080036 A1 EP1080036 A1 EP 1080036A1
Authority
EP
European Patent Office
Prior art keywords
hydrogen peroxide
ppb
purity
solutions
organic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99920708A
Other languages
German (de)
English (en)
Inventor
Martin Fischer
Achim Stammer
Stefan Quaiser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BASF SE
Original Assignee
BASF SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BASF SE filed Critical BASF SE
Publication of EP1080036A1 publication Critical patent/EP1080036A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
    • C01B15/01—Hydrogen peroxide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
    • C01B15/01—Hydrogen peroxide
    • C01B15/013—Separation; Purification; Concentration
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
    • C01B15/01—Hydrogen peroxide
    • C01B15/013—Separation; Purification; Concentration
    • C01B15/0135—Purification by solid ion-exchangers or solid chelating agents
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
    • C01B15/01—Hydrogen peroxide
    • C01B15/029—Preparation from hydrogen and oxygen

Definitions

  • aqueous hydrogen peroxide solutions that contain a maximum of 100 ppb toc (total organic carbon), as well as by a process in which hydrogen and oxygen are converted catalytically in an aqueous medium or electrochemically reduced oxygen or electrolysed acidic ammonium sulfate solutions , the reaction being carried out with the exclusion of organic compounds and materials which release them.
  • aqueous hydrogen peroxide solutions with a total organic compound content of at most 100 ppb, preferably at most 10 ppb, in particular at most 1 ppb, are obtained.
  • the hydrogen peroxide concentration of the solutions is generally in a range from about 2 to 80% by weight, preferably 3 to 75% by weight.
  • the reaction can be carried out both at normal pressure and at pressures up to 300 bar.
  • the pressure is at least 2 bar, e.g. B. 10 to 100 bar, in particular 10 to 45 80 bar.
  • the reaction temperature can be in the range from 0 to 60 ° C, preferably in the range from 0 to 50 ° C. 7
  • catalysts containing precious metals which essentially do not release any organic impurities into the aqueous reaction medium during the production of the hydrogen peroxide. If organic compounds were used in the preparation of the catalysts, e.g. B. as a reducing agent or for degreasing the carrier surface, these are removed before use in the process according to the invention to the extent that essentially no organic compounds are released into the reaction medium.
  • the catalytically active component can contain further metals, preferably noble metals and in particular platinum, rhodium, iridium, copper, silver and / or gold as promoters.
  • the ratio of palladium / promoter metal is preferably in the range from 100: 1 to 1:10 and in particular in the range from 10: 1 to 1: 1.
  • the palladium and any promoter metals which are present generally make up 5 ⁇ 10 -4 to 1% by weight and in particular 10 -3 to 0.15% by weight, based on the total catalyst mass (support + active component) .
  • this rectification column has a number of plates of at most 30 plates, preferably at most 10 plates.
  • the bottom product 5 corresponds holds the concentrated hydrogen peroxide solution, while the separated water is preferably withdrawn at a hydrogen peroxide concentration of less than 1 wt .-% at the column head.
  • the rectification is generally carried out at pressures in the range from about 20 to 100 mbar.
  • the concentration of the produced hydrogen peroxide solution was 8.9 wt .-%
  • the space-time yield, based on the cylinder-shaped, enclosed by the catalyst monolith volume was 60 g hydrogen peroxide l _1 _1 h.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Catalysts (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)

Abstract

L'invention concerne des solutions de péroxyde d'hydrogène de grande pureté destinées à l'industrie électronique et un procédé de production de telles solutions qui sont sensiblement dépourvues de composés organiques. Ce procédé consiste à faire réagir par voie catalytique de l'eau, de l'hydrogène et de l'oxygène; à réduire électrochimiquement l'oxygène ou à électrolyser des solutions de sulfate d'ammonium. Les réactions s'effectuent en l'absence de composés organiques et de matières libérant ces derniers.
EP99920708A 1998-04-21 1999-04-19 Solutions de peroxyde d'hydrogene aqueuses de grande purete, leur procede de production et leur utilisation Withdrawn EP1080036A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19817794 1998-04-21
DE19817794A DE19817794A1 (de) 1998-04-21 1998-04-21 Hochreine wässrige Wasserstoffperoxid-Lösungen, Verfahren zu ihrer Herstellung und ihre Verwendung
PCT/EP1999/002627 WO1999054254A1 (fr) 1998-04-21 1999-04-19 Solutions de peroxyde d'hydrogene aqueuses de grande purete, leur procede de production et leur utilisation

Publications (1)

Publication Number Publication Date
EP1080036A1 true EP1080036A1 (fr) 2001-03-07

Family

ID=7865323

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99920708A Withdrawn EP1080036A1 (fr) 1998-04-21 1999-04-19 Solutions de peroxyde d'hydrogene aqueuses de grande purete, leur procede de production et leur utilisation

Country Status (12)

Country Link
US (1) US6592840B1 (fr)
EP (1) EP1080036A1 (fr)
JP (1) JP2002512168A (fr)
KR (1) KR20010042857A (fr)
CN (1) CN1306495A (fr)
AU (1) AU763221B2 (fr)
BR (1) BR9909820A (fr)
CA (1) CA2328952A1 (fr)
DE (1) DE19817794A1 (fr)
NO (1) NO20005281L (fr)
WO (1) WO1999054254A1 (fr)
ZA (1) ZA200007009B (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10144013A1 (de) * 2001-09-07 2003-03-27 Basf Ag Verfahren zur Aufarbeitung einer wässrigen Wasserstoffperoxid-Lösung aus einer Direktsynthese
US7722847B2 (en) * 2002-09-30 2010-05-25 Evonik Degussa Gmbh Aqueous hydrogen peroxide solutions and method of making same
EP1520839A1 (fr) * 2003-10-02 2005-04-06 SOLVAY (Société Anonyme) Procédé de purification de solutions péroxygènes aqueuses, solutions ainsi obtenues, ainsi que leur utilisation
IT1395127B1 (it) * 2009-07-30 2012-09-05 Saipem Spa Procedimento per il recupero di ammoniaca da una corrente gassosa
WO2011036633A2 (fr) 2009-09-23 2011-03-31 Ecolab Usa Inc. Système de nettoyage in situ
US8937037B2 (en) 2011-03-02 2015-01-20 Ecolab Usa Inc. Electrochemical enhancement of detergent alkalinity
CN109205572B (zh) * 2017-06-30 2021-03-05 中国石油化工股份有限公司 一种纯化双氧水的方法
CN107482081B (zh) * 2017-07-20 2020-06-12 东莞南玻光伏科技有限公司 太阳能电池片及其制备方法和太阳能电池
CN113620255B (zh) * 2021-08-18 2022-09-20 华中科技大学 一种光催化系统及其应用
EP4163252A1 (fr) * 2021-10-06 2023-04-12 Solvay SA Procédé de purification d'une solution aqueuse de peroxyde d'hydrogène

Family Cites Families (26)

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US3152052A (en) 1961-08-04 1964-10-06 Fmc Corp Distillation of hydrogen peroxide
JPS514097A (en) * 1974-07-02 1976-01-13 Tokuyama Soda Kk Kasankasuisono seizohoho
CA1146148A (fr) 1981-06-30 1983-05-10 James Den Hartog Module de catalyse a lits de densites ordonnees
US4471014A (en) 1981-06-30 1984-09-11 Atomic Energy Of Canada Limited Ordered bed packing module
ATE25839T1 (de) * 1983-06-22 1987-03-15 Du Pont Verfahren zur katalytischen herstellung von wasserstoffperoxid aus sauerstoff und wasserstoff.
EP0201614B1 (fr) 1985-05-14 1989-12-27 GebràœDer Sulzer Aktiengesellschaft Réacteur pour exécuter des réactions chimiques catalytiques hétérogènes
US4999179A (en) * 1988-12-26 1991-03-12 Mitsubishi Gas Chemical Company, Inc. Method for purifying impure aqueous hydrogen peroxide solution
JPH0672740B2 (ja) 1989-01-20 1994-09-14 ル・エール・リクイツド・ソシエテ・アノニム・プール・ル・エチユド・エ・ル・エクスプルワテション・デ・プロセデ・ジエオルジエ・クロード 空気分離及び超高純度酸素製造方法並びに装置
US5112702A (en) * 1990-03-19 1992-05-12 E. I. Du Pont De Nemours And Company Electrochemical synthesis of H2 O2
ATE122908T1 (de) 1990-03-30 1995-06-15 Koch Eng Co Inc Struktur und verfahren zum katalytischen reagieren von fluidströmen in einem stoffaustauschapparat.
BE1005198A3 (fr) 1991-08-27 1993-05-25 Solvay Interox Procede pour l'obtention de solutions aqueuses epurees de peroxyde d'hydrogene.
IT1270875B (it) * 1993-04-29 1997-05-13 Getters Spa Procedimento di purificazione dell'idrogeno e purificatore relativo
AU5434294A (en) * 1992-11-20 1994-06-22 Showa Denko Kabushiki Kaisha Process for producing hydrogen peroxide
DE4240370C1 (de) * 1992-12-01 1994-05-11 Degussa Verfahren zur Verringerung des Kohlenstoffgehalts wäßriger Wasserstoffperoxidlösungen
US5395522A (en) * 1993-02-23 1995-03-07 Anatel Corporation Apparatus for removal of organic material from water
TW305821B (fr) 1993-09-13 1997-05-21 Mitsubishi Gas Chemical Co
FI97538C (fi) 1995-02-15 1997-01-10 Kemira Chemicals Oy Menetelmä vetyperoksidin oleellisesti puhtaan vesiliuoksen valmistamiseksi
US5621847A (en) * 1995-05-25 1997-04-15 Texas Instruments Incorporation Dynamic vacuum evaporation system
AU6103696A (en) * 1995-06-05 1996-12-24 Startec Ventures, Inc. On-site generation of ultra-high-purity buffered hf for semi conductor processing
US5528906A (en) * 1995-06-26 1996-06-25 The Boc Group, Inc. Method and apparatus for producing ultra-high purity oxygen
JP3835488B2 (ja) * 1995-09-20 2006-10-18 三菱瓦斯化学株式会社 過酸化水素水溶液中の有機不純物の除去方法
JPH09100106A (ja) 1995-10-02 1997-04-15 Mitsubishi Gas Chem Co Inc 過酸化水素中の有機質不純物除去方法
JP3715371B2 (ja) * 1996-04-08 2005-11-09 三菱化学株式会社 過酸化水素水の精製方法
JPH09278417A (ja) 1996-04-15 1997-10-28 Mitsubishi Gas Chem Co Inc 高純度過酸化水素水溶液の製造法
JPH09278416A (ja) 1996-04-15 1997-10-28 Mitsubishi Gas Chem Co Inc 高純度過酸化水素水溶液の製造法
US5682763A (en) 1996-10-25 1997-11-04 Air Products And Chemicals, Inc. Ultra high purity oxygen distillation unit integrated with ultra high purity nitrogen purifier

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9954254A1 *

Also Published As

Publication number Publication date
NO20005281L (no) 2000-11-13
BR9909820A (pt) 2000-12-19
JP2002512168A (ja) 2002-04-23
ZA200007009B (en) 2004-11-17
WO1999054254A1 (fr) 1999-10-28
US6592840B1 (en) 2003-07-15
NO20005281D0 (no) 2000-10-20
AU763221B2 (en) 2003-07-17
DE19817794A1 (de) 1999-10-28
CN1306495A (zh) 2001-08-01
AU3818999A (en) 1999-11-08
CA2328952A1 (fr) 1999-10-28
KR20010042857A (ko) 2001-05-25

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