EP0695438A1 - Method and apparatus for process control - Google Patents
Method and apparatus for process controlInfo
- Publication number
- EP0695438A1 EP0695438A1 EP94911284A EP94911284A EP0695438A1 EP 0695438 A1 EP0695438 A1 EP 0695438A1 EP 94911284 A EP94911284 A EP 94911284A EP 94911284 A EP94911284 A EP 94911284A EP 0695438 A1 EP0695438 A1 EP 0695438A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- master disk
- light beam
- optical master
- optical
- developing fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims description 41
- 238000004886 process control Methods 0.000 title description 4
- 230000003287 optical effect Effects 0.000 claims abstract description 100
- 239000012530 fluid Substances 0.000 claims abstract description 59
- 238000011161 development Methods 0.000 claims abstract description 21
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 15
- 230000005540 biological transmission Effects 0.000 claims description 7
- 229910052594 sapphire Inorganic materials 0.000 claims description 5
- 239000010980 sapphire Substances 0.000 claims description 5
- 238000012544 monitoring process Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 23
- 239000011521 glass Substances 0.000 description 16
- 239000011247 coating layer Substances 0.000 description 14
- 239000011295 pitch Substances 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 239000006096 absorbing agent Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000011835 investigation Methods 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 239000008237 rinsing water Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229920002972 Acrylic fiber Polymers 0.000 description 1
- 241000239290 Araneae Species 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000010076 replication Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
- G03F7/3028—Imagewise removal using liquid means from a wafer supported on a rotating chuck characterised by means for on-wafer monitoring of the processing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
Definitions
- a reflected rather than a transmitted beam bring certain practical advantages. All optical parts can be located above the disk, the measurement can be made insensitive to the condition of, for example, the under surface of the glass, and the disk master can be mounted on an opaque turntable or spider structure without interfering with the optical measurement. There is also a more fundamental advantage. It is found that the strength of, for example, the first- order diffracted beam is not greatly different whether it is measured in transmission through the pitted master surface on in reflection from it. The zero- order or direct beam, however, is greatly attenuated in reflection compared with transmission. This means that the strength of the first-order beam, measured as a fraction of the zero-order beam, is greater in reflection than it is in transmission. Therefore, the consequences of stray light from the zero-order beam entering the first-order beam detector are less serious if the reflected beam is used.
- FIG. 3 shows an optical sensing arrangement in accordance with an embodiment of the present invention
- Fig. 4 shows a general view of a developing arrangement incorporating the optical sensor of Fig. 3;
- the first-order diffracted beam 8 lies within the plane of the drawing and reaches the photodiode sensor 9.
- the sensor 9 is large enough to intercept the beam 8 for any allowable value of the track pitch recorded on the disk 3. (A track pitch range of 1.5 -
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB939307239A GB9307239D0 (en) | 1993-04-07 | 1993-04-07 | Method and apparatus for process control |
| GB9307239 | 1993-04-07 | ||
| PCT/GB1994/000720 WO1994023343A1 (en) | 1993-04-07 | 1994-04-05 | Method and apparatus for process control |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP0695438A1 true EP0695438A1 (en) | 1996-02-07 |
Family
ID=10733474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP94911284A Withdrawn EP0695438A1 (en) | 1993-04-07 | 1994-04-05 | Method and apparatus for process control |
Country Status (17)
| Country | Link |
|---|---|
| EP (1) | EP0695438A1 (cs) |
| JP (1) | JPH08508602A (cs) |
| CN (1) | CN1120866A (cs) |
| AU (1) | AU675125B2 (cs) |
| BR (1) | BR9406451A (cs) |
| CA (1) | CA2159100A1 (cs) |
| CZ (1) | CZ283292B6 (cs) |
| FI (1) | FI954769A7 (cs) |
| GB (1) | GB9307239D0 (cs) |
| HU (1) | HUT73543A (cs) |
| IL (1) | IL109238A (cs) |
| NO (1) | NO953933D0 (cs) |
| NZ (1) | NZ263235A (cs) |
| RU (1) | RU2107893C1 (cs) |
| SG (1) | SG44328A1 (cs) |
| TW (1) | TW255966B (cs) |
| WO (1) | WO1994023343A1 (cs) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7016026B2 (en) * | 2002-04-10 | 2006-03-21 | Baker Hughes Incorporated | Method and apparatus for a downhole refractometer and attenuated reflectance spectrometer |
| US8576686B2 (en) | 2005-01-25 | 2013-11-05 | Cinram Group, Inc. | Apparatus for multilevel optical recording |
| US8472020B2 (en) | 2005-02-15 | 2013-06-25 | Cinram Group, Inc. | Process for enhancing dye polymer recording yields by pre-scanning coated substrate for defects |
| US7535806B2 (en) | 2005-07-07 | 2009-05-19 | Cinram International Inc. | Apparatus and method for detecting laser dropout |
| EP1965383A1 (en) * | 2007-03-02 | 2008-09-03 | Singulus Mastering B.V. | Diffraction order measurement |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5857843U (ja) * | 1981-10-16 | 1983-04-19 | パイオニア株式会社 | フオトレジスト湿式現像装置 |
| JPS59121337A (ja) * | 1982-12-24 | 1984-07-13 | Fujitsu Ltd | レジスト現像装置 |
| EP0379281A3 (en) * | 1989-01-19 | 1991-03-20 | Cosmopolitan Textile Company Limited | Web inspecting method and apparatus |
| JP2861073B2 (ja) * | 1989-07-05 | 1999-02-24 | ソニー株式会社 | 現像装置 |
| US5124216A (en) * | 1990-07-31 | 1992-06-23 | At&T Bell Laboratories | Method for monitoring photoresist latent images |
| JPH04141840A (ja) * | 1990-10-01 | 1992-05-15 | Matsushita Electric Ind Co Ltd | フォトレジスト自動現像装置 |
| JPH04311837A (ja) * | 1991-04-10 | 1992-11-04 | Tdk Corp | 光ディスク原盤の現像方法 |
| US5357304A (en) * | 1992-03-25 | 1994-10-18 | Sony Corporation | Image development apparatus and method |
-
1993
- 1993-04-07 GB GB939307239A patent/GB9307239D0/en active Pending
-
1994
- 1994-04-05 SG SG1995001399A patent/SG44328A1/en unknown
- 1994-04-05 HU HU9502729A patent/HUT73543A/hu unknown
- 1994-04-05 RU RU95121761A patent/RU2107893C1/ru active
- 1994-04-05 CN CN94191725.8A patent/CN1120866A/zh active Pending
- 1994-04-05 AU AU63841/94A patent/AU675125B2/en not_active Ceased
- 1994-04-05 WO PCT/GB1994/000720 patent/WO1994023343A1/en active IP Right Grant
- 1994-04-05 BR BR9406451A patent/BR9406451A/pt not_active Application Discontinuation
- 1994-04-05 CA CA002159100A patent/CA2159100A1/en not_active Abandoned
- 1994-04-05 CZ CZ952571A patent/CZ283292B6/cs unknown
- 1994-04-05 JP JP6521868A patent/JPH08508602A/ja active Pending
- 1994-04-05 EP EP94911284A patent/EP0695438A1/en not_active Withdrawn
- 1994-04-05 NZ NZ263235A patent/NZ263235A/en unknown
- 1994-04-06 TW TW083102979A patent/TW255966B/zh active
- 1994-04-06 IL IL109238A patent/IL109238A/xx not_active IP Right Cessation
-
1995
- 1995-10-03 NO NO953933A patent/NO953933D0/no unknown
- 1995-10-06 FI FI954769A patent/FI954769A7/fi not_active Application Discontinuation
Non-Patent Citations (1)
| Title |
|---|
| See references of WO9423343A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| IL109238A (en) | 1997-07-13 |
| IL109238A0 (en) | 1994-07-31 |
| AU6384194A (en) | 1994-10-24 |
| FI954769A0 (fi) | 1995-10-06 |
| CZ257195A3 (en) | 1996-09-11 |
| HUT73543A (en) | 1996-08-28 |
| CA2159100A1 (en) | 1994-10-13 |
| HU9502729D0 (en) | 1995-11-28 |
| GB9307239D0 (en) | 1993-06-02 |
| WO1994023343A1 (en) | 1994-10-13 |
| FI954769A7 (fi) | 1995-10-06 |
| RU2107893C1 (ru) | 1998-03-27 |
| NO953933L (no) | 1995-10-03 |
| BR9406451A (pt) | 1996-01-02 |
| NO953933D0 (no) | 1995-10-03 |
| TW255966B (cs) | 1995-09-01 |
| AU675125B2 (en) | 1997-01-23 |
| CZ283292B6 (cs) | 1998-02-18 |
| NZ263235A (en) | 1996-07-26 |
| JPH08508602A (ja) | 1996-09-10 |
| SG44328A1 (en) | 1997-12-19 |
| CN1120866A (zh) | 1996-04-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| 17P | Request for examination filed |
Effective date: 19951027 |
|
| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE |
|
| 17Q | First examination report despatched |
Effective date: 19970915 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
| 18D | Application deemed to be withdrawn |
Effective date: 19980127 |