EP0489184A1 - Dispositif de rayonnement à haute puissance - Google Patents

Dispositif de rayonnement à haute puissance Download PDF

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Publication number
EP0489184A1
EP0489184A1 EP90123090A EP90123090A EP0489184A1 EP 0489184 A1 EP0489184 A1 EP 0489184A1 EP 90123090 A EP90123090 A EP 90123090A EP 90123090 A EP90123090 A EP 90123090A EP 0489184 A1 EP0489184 A1 EP 0489184A1
Authority
EP
European Patent Office
Prior art keywords
cooling
cooling channels
voltage source
heat sink
hollow body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP90123090A
Other languages
German (de)
English (en)
Other versions
EP0489184B1 (fr
Inventor
Ulrich Dr. Kogelschatz
Christoph Von Arx
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Noblelight GmbH
Original Assignee
ABB Asea Brown Boveri Ltd
Heraeus Noblelight GmbH
Asea Brown Boveri AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ABB Asea Brown Boveri Ltd, Heraeus Noblelight GmbH, Asea Brown Boveri AB filed Critical ABB Asea Brown Boveri Ltd
Priority to EP90123090A priority Critical patent/EP0489184B1/fr
Priority to DE59010169T priority patent/DE59010169D1/de
Priority to CA002055709A priority patent/CA2055709A1/fr
Priority to US07/797,058 priority patent/US5198717A/en
Priority to JP3317789A priority patent/JP2783712B2/ja
Publication of EP0489184A1 publication Critical patent/EP0489184A1/fr
Application granted granted Critical
Publication of EP0489184B1 publication Critical patent/EP0489184B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

Definitions

  • the invention relates to a high-power radiator, in particular for ultraviolet light, with a discharge space which is filled with a filling gas which emits radiation under discharge conditions, formed by the interior of a cooled hollow body made of a material which is permeable to the radiation produced, with from the inner walls of the hollow body, with dielectric channels spaced apart and provided with cooling channels, in which internal electrodes are embedded or inserted, with a high-voltage source for supplying the discharge.
  • the invention relates to a state of the art, such as that which results from the EP application with the publication number 0 363 832.
  • UV sources The industrial use of photochemical processes depends heavily on the availability of suitable UV sources.
  • the classic UV lamps deliver low to medium UV intensities at some discrete wavelengths, such as the low-pressure mercury lamps at 185 nm and especially at 254 nm.
  • Really high UV powers can only be obtained from high-pressure lamps (Xe, Hg), which then have theirs Distribute radiation over a larger wavelength range.
  • the new excimer lasers have some new wavelengths for photochemical Basic experiments provided. You are. For cost reasons, currently only suitable for an industrial process in exceptional cases.
  • the effective cooling of the radiator is also crucial for its economical use.
  • the outer electrode which is at ground potential, is regularly cooled.
  • cooling of the inner electrode (which is at high voltage potential) is also provided, with only the following being stated: that a liquid or gaseous coolant is passed through the hollow inner electrode. Due to the potential conditions, a coolant that has a very low conductivity, eg demineralized water or oil, must be used for liquid cooling. In addition, the cooling of the inner electrode must take place in a closed circuit for economic reasons.
  • the object of the invention is to create a high-performance radiator, in particular for UV or VUV light, which can be cooled in a technically simple and economical manner.
  • the invention provides that the hollow body is in thermal contact with a heat sink, in which cooling channels () are provided which are connected to the cooling channels of the dielectric tubes and form a closed coolant circuit, and that a cooling liquid with a low electrical conductivity can be passed through these cooling channels.
  • the already necessary cooling device for the (outer) hollow body forms the heat exchanger for the coolant circuit of the dielectric tubes.
  • the hollow body can be cooled with ordinary tap water. This either saves you large amounts of expensive fully demineralized or distilled water or you save an additional circulation cooling unit for the dielectric tubes.
  • the 1 and 2 consists of four cylindrical individual radiators 1, the construction of which is known per se.
  • a dielectric tube 3 is arranged at a distance from it.
  • the annular space between the two tubes forms the discharge space 4 of the radiator.
  • the inner wall of the dielectric tube 3 is provided with a metal layer 5 (shown excessively thick in FIG. 2), which forms the inner electrode of the radiator.
  • Metal pipes are used, which are coated with a dielectric layer, for example on a ceramic basis.
  • the outer electrode of the radiator consists of a wire mesh or a wire mesh 6 that extends over the entire length and a large part of the outer circumference of the outer quartz tube 2.
  • a high-voltage source 7 for supplying the discharge is connected to this outer electrode and the inner electrode (FIG. 1).
  • the inside of the quartz tube 1 is filled with a filling gas which emits radiation under discharge conditions, e.g. Mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally using an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.
  • a filling gas which emits radiation under discharge conditions, e.g. Mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally using an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.
  • the four individual radiators 1 are located in grooves 8 on the broad side of a heat sink 9 made of thermally highly conductive material. These grooves 8 are adapted in cross section to the outer contour of the outer quartz tube 2.
  • the heat sink 9 is provided with two groups of cooling channels 10 and 11 which run in the longitudinal direction of the groove.
  • the cooling channels 10 of the first group lead to an outer cooling circuit, which is not shown any further. In the simplest case, ordinary tap water flows through them in the direction of the arrow.
  • the cooling channels 11 of the other group are connected to the interior 13 of the dielectric tubes 3 via connecting lines 12 and suitable connection fittings (not shown).
  • a pump 14 ensures the circulation of a cooling liquid with low electrical conductivity, for example demineralized water or oil, in the cooling circuit just described.
  • the heat sink 9 acts as a heat exchanger between the primary cooling system (cooling channels 10) and the secondary cooling system (cooling channels 11, connecting lines 12, inner space 13 of the dielectric tubes 3, pump 14). Potential isolation is ensured by the practically electrically non-conductive coolant in the secondary cooling system.
  • the high voltage source 7 basically corresponds to those used for feeding ozone generators. Typically, it supplies an adjustable AC voltage in the order of magnitude of several 100 volts to 20,000 volts at frequencies in the range of technical alternating current up to a few MHz, depending on the electrode geometry, pressure in the discharge space and composition of the filling gas. With the UV high-power lamps in question here, the frequencies of the supply voltage are regularly considerably higher than the technical AC voltage; they can reach several hundred kilohertz.
  • a suitable high-voltage source 7 is generally constructed according to the principle of a switched-mode power supply and accordingly contains electrical and electronic components that have to be cooled and are accordingly mounted on cooling profiles.
  • the heat sink 9, which is necessary anyway for cooling the radiator, is also used for cooling the components of the high-voltage source 7.
  • FIG. 2 illustrates that the cooling profile or profiles 15 of the high voltage source 7 are attached directly to the underside of the heat sink 9 of the radiator. In this way, the fan in the high voltage source 7 can be omitted. Due to the spatial proximity of the source and consumer, the effort for electromagnetic shielding is lower.
  • the structure of the entire radiation device can be designed to be extremely modular.
  • surface radiators for example according to EP-A-0 254 111, can of course also be provided with a primary and a secondary cooling circuit.
  • UV cooling lamps with a completely different geometry can also be equipped with the cooling concept according to the invention. This is explained in more detail below with the aid of FIG. 3.
  • dielectric tubes 26 with hollow internal electrodes 27 are arranged in a quartz tube 21 with a rectangular cross section with the broad sides 22, 23 and the narrow sides 24, 25.
  • the dielectric tubes 26 are spaced apart from one another and also from the walls of the quartz tube 21.
  • the dielectric tubes 26 are, for example, quartz tubes, the inner electrodes 27 are metal tubes. Instead, a metal tube encased in dielectric material can also be used.
  • the two narrow sides 24, 25 and one of the broad sides 23 of the quartz tube 21 are each provided with an aluminum layer 28 on the outside.
  • the aluminum layer 28 is preferably vapor-deposited, flame-sprayed, plasma-sprayed or sputtered and serves as a reflector.
  • the aluminum layers 28 on the narrow sides 24, 25 of the quartz tube 21 can also serve as additional outer electrodes for feeding with a high-voltage source 7 with an earth-symmetrical output.
  • the quartz tube 21 is closed on both ends by plates 30, 31 made of insulating material. These plates are glued to the end faces, for example, or, in the case of quartz or glass plates, are fused to said end walls.
  • the plates 30, 31 are provided with openings 32 into which the dielectric tubes 26 are inserted and fastened and sealed therein.
  • the interior of the quartz tube 1 can be evacuated via a filler neck 34 and then filled with a filler gas.
  • the radiator is electrically supplied from an alternating current source 7 in such a way that adjacent inner electrodes (metal tubes 27) are alternately connected to the alternating current source 7.
  • alternating current source 7 When a voltage is applied, a large number of discharge channels are formed 19 between adjacent dielectric tubes 26, which emit the UV light, which then penetrates through the transparent broad side 22 of the quartz tube 21 to the outside.
  • the proposed feed allows the use of a high-voltage source 7 with an earth-symmetrical output.
  • the heat sink 9a can then be connected to earth potential.
  • the quartz tube 21 is inserted into a heat sink 9a with a U-shaped cross-section to cool the radiator externally. Lateral strands 18 serve for the electrical contact between the aluminum layer 28 and the legs of the heat sink 9a. An optional heat-conducting paste 29 between the lower broad side 23 of the quartz tube 21 serves to improve the heat transfer.
  • a plurality of cooling channels 10, 11 running in the longitudinal direction of the heat sink are provided in the bottom section of the heat sink 9a.
  • the group designated 10 serves analogously to the embodiment according to FIGS. 1 and 2 as the primary cooling circuit and is flowed through, for example, by ordinary tap water.
  • the other group, designated 11 is connected to all hydraulic tubes 27 connected in series or in parallel via suitable connecting lines 12a and (not shown) connection fittings.
  • the pump 14 ensures the circulation of a cooling liquid with a very low electrical conductivity in this secondary cooling circuit.
  • the heat sink 9a serves as a heat exchanger between the two coolant circuits.
  • two groups of cooling channels 10, 11 were provided in the heat sink of the radiator. It is of course within the scope of the invention to design the primary cooling circuit in a different way.
  • the heat sink can be partially immersed in a coolant or provided with large-area cooling fins and can also be forced-cooled with air. With such alternatives, there is no need to change the secondary cooling circuit for the radiator.
  • the heat sink 9 serves both as a heat exchanger for the internal cooling of the radiator and as a heat exchanger for a further cooling circuit for cooling the high-voltage source 7.
  • additional channels 11a are provided in the heat sink 9, which channels 12b and a further pump 14a with cooling channels 33 in the high voltage source 7 are connected.

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Lasers (AREA)
EP90123090A 1990-12-03 1990-12-03 Dispositif de rayonnement à haute puissance Expired - Lifetime EP0489184B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP90123090A EP0489184B1 (fr) 1990-12-03 1990-12-03 Dispositif de rayonnement à haute puissance
DE59010169T DE59010169D1 (de) 1990-12-03 1990-12-03 Hochleistungsstrahler
CA002055709A CA2055709A1 (fr) 1990-12-03 1991-11-15 Radiateur a grande puissance
US07/797,058 US5198717A (en) 1990-12-03 1991-11-25 High-power radiator
JP3317789A JP2783712B2 (ja) 1990-12-03 1991-12-02 高出力放射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90123090A EP0489184B1 (fr) 1990-12-03 1990-12-03 Dispositif de rayonnement à haute puissance

Publications (2)

Publication Number Publication Date
EP0489184A1 true EP0489184A1 (fr) 1992-06-10
EP0489184B1 EP0489184B1 (fr) 1996-02-28

Family

ID=8204785

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90123090A Expired - Lifetime EP0489184B1 (fr) 1990-12-03 1990-12-03 Dispositif de rayonnement à haute puissance

Country Status (5)

Country Link
US (1) US5198717A (fr)
EP (1) EP0489184B1 (fr)
JP (1) JP2783712B2 (fr)
CA (1) CA2055709A1 (fr)
DE (1) DE59010169D1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012059382A1 (fr) * 2010-11-02 2012-05-10 Osram Ag Émetteur de rayonnement doté d'un socle pour exposer des surfaces à un rayonnement

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4140497C2 (de) * 1991-12-09 1996-05-02 Heraeus Noblelight Gmbh Hochleistungsstrahler
KR100212704B1 (ko) * 1996-10-16 1999-08-02 윤종용 오존발생장치
JP3282798B2 (ja) * 1998-05-11 2002-05-20 クォークシステムズ株式会社 エキシマランプおよびエキシマ発光装置
US6015759A (en) * 1997-12-08 2000-01-18 Quester Technology, Inc. Surface modification of semiconductors using electromagnetic radiation
US6049086A (en) * 1998-02-12 2000-04-11 Quester Technology, Inc. Large area silent discharge excitation radiator
JP2003167100A (ja) * 2001-12-03 2003-06-13 Ushio Inc 紫外線照射装置
JP2003224117A (ja) * 2002-01-31 2003-08-08 Advanced Lcd Technologies Development Center Co Ltd 絶縁膜の製造装置
US20030157000A1 (en) * 2002-02-15 2003-08-21 Kimberly-Clark Worldwide, Inc. Fluidized bed activated by excimer plasma and materials produced therefrom
US20090052187A1 (en) * 2007-08-24 2009-02-26 Weiping Li Heat-Dissipating Lighting System
US8596826B2 (en) * 2010-08-23 2013-12-03 Abl Ip Holding Llc Active cooling systems for optics
JP6036740B2 (ja) 2014-04-08 2016-11-30 ウシオ電機株式会社 光照射装置
RU2557013C1 (ru) * 2014-04-15 2015-07-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Иркутский государственный технический университет" (ФГБОУ ВПО "ИрГТУ") Рентгеновская трубка электрического газового барьерного разряда для контроля металлических и газовых включений в полимерной кабельной изоляции
RU2559806C1 (ru) * 2014-04-21 2015-08-10 Федеральное государственное бюджетное учреждение науки Институт сильноточной электроники Сибирского отделения Российской академии наук (ИСЭ СО РАН) Источник излучения
US9722550B2 (en) 2014-04-22 2017-08-01 Hoon Ahn Power amplifying radiator (PAR)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0324953A1 (fr) * 1988-01-15 1989-07-26 Heraeus Noblelight GmbH Source de radiation à haute puissance
EP0385205A1 (fr) * 1989-02-27 1990-09-05 Heraeus Noblelight GmbH Dispositif de radiation à haute puissance
EP0254111B1 (fr) * 1986-07-22 1992-01-02 BBC Brown Boveri AG Dispositif de rayonnement ultraviolet

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2342412A (en) * 1941-08-28 1944-02-22 Bell Telephone Labor Inc Electron discharge device
CH676168A5 (fr) * 1988-10-10 1990-12-14 Asea Brown Boveri

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0254111B1 (fr) * 1986-07-22 1992-01-02 BBC Brown Boveri AG Dispositif de rayonnement ultraviolet
EP0324953A1 (fr) * 1988-01-15 1989-07-26 Heraeus Noblelight GmbH Source de radiation à haute puissance
EP0385205A1 (fr) * 1989-02-27 1990-09-05 Heraeus Noblelight GmbH Dispositif de radiation à haute puissance

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012059382A1 (fr) * 2010-11-02 2012-05-10 Osram Ag Émetteur de rayonnement doté d'un socle pour exposer des surfaces à un rayonnement
US8796640B2 (en) 2010-11-02 2014-08-05 Osram Ag Radiating element for irradiating surfaces, having a socket

Also Published As

Publication number Publication date
DE59010169D1 (de) 1996-04-04
JP2783712B2 (ja) 1998-08-06
JPH04301357A (ja) 1992-10-23
EP0489184B1 (fr) 1996-02-28
CA2055709A1 (fr) 1992-06-04
US5198717A (en) 1993-03-30

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