EP0385205B1 - Dispositif de radiation à haute puissance - Google Patents

Dispositif de radiation à haute puissance Download PDF

Info

Publication number
EP0385205B1
EP0385205B1 EP90103082A EP90103082A EP0385205B1 EP 0385205 B1 EP0385205 B1 EP 0385205B1 EP 90103082 A EP90103082 A EP 90103082A EP 90103082 A EP90103082 A EP 90103082A EP 0385205 B1 EP0385205 B1 EP 0385205B1
Authority
EP
European Patent Office
Prior art keywords
dielectric
high power
power emitter
emitter according
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90103082A
Other languages
German (de)
English (en)
Other versions
EP0385205A1 (fr
Inventor
Ulrich Dr. Kogelschatz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Noblelight GmbH
Original Assignee
Heraeus Noblelight GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Noblelight GmbH filed Critical Heraeus Noblelight GmbH
Priority to AT90103082T priority Critical patent/ATE98050T1/de
Publication of EP0385205A1 publication Critical patent/EP0385205A1/fr
Application granted granted Critical
Publication of EP0385205B1 publication Critical patent/EP0385205B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

Definitions

  • the invention relates to a high-power radiator, in particular for ultraviolet light, with a discharge space filled with filling gas emitting radiation under discharge conditions, the walls of which are formed by a first tubular and a second radiation-permeable dielectric, which has first and second electrodes on its surfaces facing away from the discharge space is provided with an AC power source connected to the first and second electrodes for feeding the discharge.
  • the invention relates to a state of the art, such as that derived from EP-A 054 111, US patent application 07/076 926 or EP patent application 88113393.3 from 08/22/1988 or US patent application 07 / 260,869 from October 21, 1988.
  • UV sources The industrial use of photochemical processes depends heavily on the availability of suitable UV sources.
  • the classic UV lamps deliver low to medium UV intensities at some discrete wavelengths, such as the mercury low-pressure lamps at 185 nm and especially at 254 nm.
  • Really high UV powers can only be obtained from high-pressure lamps (Xe, Hg), which then but their radiation over you distribute a larger wavelength range.
  • the new excimer lasers have provided some new wavelengths for basic photochemical experiments. for cost reasons for an industrial process probably only suitable in exceptional cases.
  • the high-performance radiators mentioned are characterized by high efficiency, economical structure and enable the creation of large area radiators, with the restriction that large-area flat radiators require a rather large technical effort.
  • omnidirectional radiators on the other hand, a not inconsiderable proportion of the radiation due to the shadow effect of the inner electrode is not used.
  • the invention has for its object to provide a high-performance radiator, in particular for UV or VUV radiation, which is characterized in particular by high efficiency, is economical to manufacture, enables the construction of very large area radiators and in which the Shadow effect of the inner electrode (s) is reduced to a minimum.
  • the second dielectric is a rod made of dielectric material which is arranged within the first tubular dielectric and in the interior of which an electrical conductor is inserted or embedded, which conductor forms the second electrode.
  • the outer diameter of the rod which is preferably made of quartz glass, is preferably five to ten times smaller than the inner diameter of the outer tube.
  • the radiation should preferably be coupled out in one direction, for example in order to irradiate a surface.
  • the ideal discharge geometry for this purpose is a flat radiator mirrored on the back (for example according to EP-A-0254 111).
  • the production of flat quartz cells is associated with great technical effort and correspondingly high costs.
  • One can easily achieve a preferred direction of the radiation if the discharge is distributed unevenly in the discharge gap, which can be achieved most simply by an eccentric arrangement of the dielectric rod. It is thereby achieved that the electrical discharge takes place predominantly on the side on which the optical radiation is to be coupled out.
  • the layer simultaneously serving as an electrode and reflector is sufficient, the layer simultaneously serving as an electrode and reflector.
  • Aluminum which is provided with a suitable protective layer (anodized, MgF2 coating), is a suitable material that is both easy to vaporize and has a high UV reflection.
  • the (semi-cylindrical) recesses in the aluminum block also serve as a holder for the quartz discharge tubes, as an (earth) electrode and as a reflector. Any number of these discharge tubes can be connected in parallel by placing the internal electrodes on a common AC voltage source. For special applications you can combine tubes with different gas filling and therefore different (UV) wavelengths.
  • the aluminum blocks described do not necessarily have to have flat surfaces. One can also imagine cylindrical arrangements in which the recesses for receiving the discharge tubes are either outside or inside.
  • the individual gas discharge tubes can also be cooled if, for example, forms the inner electrode as a cooling channel.
  • UV treatment in the absence of air is indicated.
  • the first reason is when the radiation is so short-wave that it is absorbed by air and thus weakened (wavelengths ⁇ 190 nm). This radiation leads to the splitting of oxygen and thus to the undesirable Ozone formation.
  • the second reason is when the intended photochemical effect of UV radiation is hindered by the presence of oxygen (oxygen inhibition). This occurs, for example, in the photo crosslinking (UV polymerization, UV drying) of paints and inks.
  • a quartz tube 1 with a wall thickness of approximately 0.5 to 1.5 mm and an outer diameter of approximately 20 to 30 mm is provided with an outer electrode 2 in the form of a wire mesh.
  • a second quartz tube 3 is arranged concentrically in the quartz tube 1 and has a substantially smaller outside diameter than the inside diameter of the quartz tube 1, typically 3 to 5 mm outside diameter.
  • a wire 4 is inserted into the inner quartz tube 3. This forms the inner electrode of the radiator, the wire mesh 2 the outer electrode of the radiator.
  • the outer quartz tube 1 is closed at both ends.
  • the space between the two tubes 1 and 3, the discharge space 5, is filled with a gas / gas mixture which emits radiation under discharge conditions.
  • the two electrodes 2, 4 are connected to the two poles of an alternating current source 6.
  • the AC power source basically corresponds to those used to feed ozone generators. It typically delivers an adjustable AC voltage in the order of magnitude of several 100 volts to 20,000 volts at frequencies in the range of technical alternating current up to a few 1000 kHz - depending on the electrode geometry, pressure in the discharge space and composition of the filler gas.
  • the fill gas is e.g. Mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally using an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.
  • a substance / substance mixture according to the following table can be used: Filling gas radiation helium 60-100 nm neon 80 - 90 nm argon 107 - 165 nm Argon + fluorine 180-200 nm Argon + chlorine 165-190 nm Argon + krypton + chlorine 165-190, 200-240 nm xenon 160-190 nm nitrogen 337 - 415 nm krypton 124, 140-160 nm Krypton + fluorine 240 - 255 nm Krypton + chlorine 200-240 nm mercury 185, 254, 320-370, 390-420 nm selenium 196, 204, 206 nm deuterium 150-250 nm Xenon + fluorine 340 - 360 nm, 400 - 550 nm Xenon + chlorine 300-320 nm
  • the electron energy distribution can be optimally adjusted by the thickness of the dielectrics and their properties, pressure and / or temperature in the discharge space.
  • quartz rods into which a metal wire is melted can also be used.
  • Metal rods covered with a dielectric also lead to success.
  • a perforated metal foil or a UV-transparent, electrically conductive covering can also be used.
  • the discharge is distributed unevenly in the discharge space.
  • the easiest way to do this is by eccentrically arranging the inner dielectric tube 3 in the outer tube 1, as is illustrated in FIG. 2, for example.
  • the inner quartz tube 3 is arranged outside the center near the inner wall of the tube 1. In the limit case, the tube 3 can even rest against the tube 1 and be glued there linearly or at certain points to the inner wall.
  • the eccentric arrangement of the inner quartz tube and thus the inner electrode 4 has no decisive influence on the quality of the discharge.
  • the peak voltage is set just a small area in the immediate vicinity of the quartz tube 3 ignites.
  • the discharge zone can be gradually enlarged until the entire discharge space 5 is filled with luminous plasma.
  • an electrode 2 (FIG. 2) applied to the entire outer circumference of the outer dielectric tube 1 (FIG. 2) is sufficient also a partial coating of the outer surface of the tube 1, as illustrated in Figure 3.
  • an eccentric arrangement of the inner quartz tube 3 is also possible here, the coating 7 only extending symmetrically over the outer wall section facing the inner quartz tube 3. This layer 7 is simultaneously the outer electrode and the reflector.
  • Aluminum is particularly suitable as a material that is both easy to vaporize and has a high UV reflection.
  • FIG. 5 illustrates the manner in which a multiplicity of concentric radiators according to FIG. 3 can be combined to form a surface radiator.
  • 6 shows a corresponding arrangement with eccentrically arranged inner quartz tubes 3 according to FIG.
  • an aluminum body 8 is provided with a plurality of parallel grooves 9 with a circular cross section, which are spaced apart from one another by more than one outer tube diameter.
  • the grooves 9 are adapted to the outer quartz tubes 1 and treated by polishing or the like so that they reflect well. Additional bores 10, which run in the direction of the tubes 1, serve to cool the radiators.
  • the AC source 6 leads with one pole to the aluminum body 8, the inner electrodes 4 of the radiators are connected in parallel and connected to the other pole of the source 6.
  • the groove walls serve both as an outer electrode and as reflectors.
  • single emitters can be combined with different gas fillings and thus different (UV) wavelengths.
  • the aluminum bodies 8 do not necessarily have to have flat surfaces.
  • E.g. 7 and 8 illustrate a variant with a hollow cylindrical aluminum body 8a with axially parallel grooves 9 regularly distributed over its inner circumference, in each of which a radiator element according to FIGS. 3 and 4 is inserted.
  • the radiator according to Fig. 9 basically corresponds to that according to Fig. 5. with additional channels 11 running in the longitudinal direction of the metal block 8. These channels are connected to the treatment room 12 via a multiplicity of bores or slots 13 in the metal block 8, specifically via the comparatively narrow gap between the outer ones, which is caused by inevitable manufacturing tolerances of the quartz tubes 1 Quartz tubes 1 and the grooves 9 in the metal block 8 in connection.
  • the channels 11 are connected to an inert gas source, not shown, e.g. Nitrogen or argon source connected.
  • the pressurized inert gas reaches the treatment room 12 from the channels 11 in the manner described. This treatment room is delimited on the one hand by legs 14 on the metal block 8 and by the substrate 15 to be irradiated.
  • FIG. 9 A further possibility of supplying inert gas to the treatment room 12 is illustrated in FIG.
  • the emitter largely corresponds to that according to Fig. 6.
  • Metal blocks 8 extending channels 11 are provided, which are connected directly to the treatment room 12 via bores or slots 13. Otherwise the structure and mode of operation correspond to those according to Fig. 9.
  • the cylinder emitters according to FIGS. 7 and 8 can also be provided with means for supplying inert gas to the treatment room (there the inside of the tube 8a) without leaving the scope of the invention.

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Claims (10)

  1. Dispositif de rayonnement de forte puissance, en particulier pour lumière ultraviolette, comportant un espace de décharge (5) qui est rempli d'un gaz de remplissage émettant un rayonnement sous des conditions de décharge et dont les parois sont formées par un premier diélectrique tubulaire (1) et par un second diélectrique (3) qui est transparent au rayonnement et qui, sur ses surfaces situées du côté opposé à l'espace de décharge (5), est muni d'une première (2, 7) et d'une seconde (4) électrodes, et comportant aussi une source de courant alternatif (6), reliée à la première et à la seconde électrodes, pour alimenter la décharge, dispositif caractérisé par le fait que le second diélectrique est un barreau (3) de matériau diélectrique qui est disposé à l'intérieur du premier délectrique tubulaire (1) et à l'intérieur duquel est inséré, enrobé, un conducteur électrique (4) qui forme la seconde électrode.
  2. Dispositif de rayonnement de forte puissance selon la revendication 1, caractérisé par le fait que le diamètre extérieur du barreau (3) est de cinq à dix fois plus petit que le diamètre intérieur du premier diélectrique tubulaire (1).
  3. Dispositif de rayonnement de forte puissance selon la revendication 1 ou 2, caractérisé par le fait que le barreau en matériau diélectrique est disposé excentriquement dans le premier diélectrique tubulaire (1).
  4. Dispositif de rayonnement de forte puissance selon la revendication 3, caractérisé par le fait que la première électrode (7) ne recouvre la paroi extérieure du premier diélectrique (1) que par la portion qui correspond au second diélectrique (3) et qui est conçue comme réflecteur.
  5. Dispositif de rayonnement de forte puissance selon la revendication 4, caractérisé par le fait que la première électrode et le réflecteur sont conçus sous forme d'évidements dans le matériau, de préférence sous forme de rainures (9), dans une pièce métallique (8).
  6. Dispositif de rayonnement de forte puissance selon la revendication 5, caractérisé par le fait que dans la pièce métallique (10) sont prévus des perçages de refroidissement (10) qui n'intersectent pas les évidements (9) dans le matériau.
  7. Dispositif de rayonnement de forte puissance selon la revendication 5, caractérisé par le fait que la section des évidements (9) dans le matériau est adaptée au diamètre extérieur du premier diélectrique (1) et que les parois des évidements sont conçues sous forme de réflecteurs UV.
  8. Dispositif de rayonnement de forte puissance selon l'une des revendications 5 à 7, caractérisé par le fait que des moyens (11,13) sont prévus pour amener du gaz inerte dans l'espace (12) en dehors du premier diélectrique tubulaire (1).
  9. Dispositif de rayonnement de forte puissance selon la revendication 8, caractérisé par le fait que dans la pièce métallique (8,8a) sont prévus des canaux (11) qui sont en liaison, directe ou indirecte, avec l'espace de traitement (12), canaux (11) par lesquels on peut amener un gaz inerte, de préférence de l'azote ou de l'argon.
  10. Dispositif de rayonnement de forte puissance selon la revendication 9, caractérisé par le fait que les canaux (11) sont chacun disposés entre les tubes de diélectrique voisins (1) et sont en liaison avec l'espace de traitement (12) par l'intermédiaire de perçages ou de fentes (13).
EP90103082A 1989-02-27 1990-02-17 Dispositif de radiation à haute puissance Expired - Lifetime EP0385205B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT90103082T ATE98050T1 (de) 1989-02-27 1990-02-17 Hochleistungsstrahler.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH720/89A CH677292A5 (fr) 1989-02-27 1989-02-27
CH720/89 1989-02-27

Publications (2)

Publication Number Publication Date
EP0385205A1 EP0385205A1 (fr) 1990-09-05
EP0385205B1 true EP0385205B1 (fr) 1993-12-01

Family

ID=4193615

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90103082A Expired - Lifetime EP0385205B1 (fr) 1989-02-27 1990-02-17 Dispositif de radiation à haute puissance

Country Status (6)

Country Link
US (1) US5013959A (fr)
EP (1) EP0385205B1 (fr)
JP (1) JP2823637B2 (fr)
AT (1) ATE98050T1 (fr)
CH (1) CH677292A5 (fr)
DE (1) DE59003641D1 (fr)

Families Citing this family (91)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4010190A1 (de) * 1990-03-30 1991-10-02 Asea Brown Boveri Bestrahlungseinrichtung
CH680099A5 (fr) * 1990-05-22 1992-06-15 Asea Brown Boveri
EP0482230B1 (fr) * 1990-10-22 1995-06-21 Heraeus Noblelight GmbH Dispositif de rayonnement à haute puissance
EP0489184B1 (fr) * 1990-12-03 1996-02-28 Heraeus Noblelight GmbH Dispositif de rayonnement à haute puissance
US5220236A (en) * 1991-02-01 1993-06-15 Hughes Aircraft Company Geometry enhanced optical output for rf excited fluorescent lights
CA2059209C (fr) * 1991-02-01 1997-05-27 William J. Council Systeme d'eclairage fluorescent rf
DE59105798D1 (de) * 1991-04-15 1995-07-27 Heraeus Noblelight Gmbh Bestrahlungseinrichtung.
DE59104972D1 (de) * 1991-06-01 1995-04-20 Heraeus Noblelight Gmbh Bestrahlungseinrichtung mit einem Hochleistungsstrahler.
DE69210113T2 (de) * 1991-07-01 1996-11-21 Philips Patentverwaltung Hochdrucksglimmentladungslampe
DE4140497C2 (de) * 1991-12-09 1996-05-02 Heraeus Noblelight Gmbh Hochleistungsstrahler
DE4222130C2 (de) * 1992-07-06 1995-12-14 Heraeus Noblelight Gmbh Hochleistungsstrahler
DE4235743A1 (de) * 1992-10-23 1994-04-28 Heraeus Noblelight Gmbh Hochleistungsstrahler
US5384515A (en) * 1992-11-02 1995-01-24 Hughes Aircraft Company Shrouded pin electrode structure for RF excited gas discharge light sources
US5334913A (en) * 1993-01-13 1994-08-02 Fusion Systems Corporation Microwave powered lamp having a non-conductive reflector within the microwave cavity
US6211383B1 (en) 1993-08-05 2001-04-03 Kimberly-Clark Worldwide, Inc. Nohr-McDonald elimination reaction
US6017471A (en) 1993-08-05 2000-01-25 Kimberly-Clark Worldwide, Inc. Colorants and colorant modifiers
US5643356A (en) 1993-08-05 1997-07-01 Kimberly-Clark Corporation Ink for ink jet printers
US5721287A (en) 1993-08-05 1998-02-24 Kimberly-Clark Worldwide, Inc. Method of mutating a colorant by irradiation
US5773182A (en) 1993-08-05 1998-06-30 Kimberly-Clark Worldwide, Inc. Method of light stabilizing a colorant
US6017661A (en) 1994-11-09 2000-01-25 Kimberly-Clark Corporation Temporary marking using photoerasable colorants
US5733693A (en) 1993-08-05 1998-03-31 Kimberly-Clark Worldwide, Inc. Method for improving the readability of data processing forms
US5681380A (en) 1995-06-05 1997-10-28 Kimberly-Clark Worldwide, Inc. Ink for ink jet printers
US5645964A (en) 1993-08-05 1997-07-08 Kimberly-Clark Corporation Digital information recording media and method of using same
US5865471A (en) 1993-08-05 1999-02-02 Kimberly-Clark Worldwide, Inc. Photo-erasable data processing forms
CA2120838A1 (fr) 1993-08-05 1995-02-06 Ronald Sinclair Nohr Substance a couleur en aplat variable a l'ultraviolet
US5914564A (en) * 1994-04-07 1999-06-22 The Regents Of The University Of California RF driven sulfur lamp having driving electrodes which face each other
US5739175A (en) 1995-06-05 1998-04-14 Kimberly-Clark Worldwide, Inc. Photoreactor composition containing an arylketoalkene wavelength-specific sensitizer
US6242057B1 (en) 1994-06-30 2001-06-05 Kimberly-Clark Worldwide, Inc. Photoreactor composition and applications therefor
US5685754A (en) 1994-06-30 1997-11-11 Kimberly-Clark Corporation Method of generating a reactive species and polymer coating applications therefor
US6071979A (en) 1994-06-30 2000-06-06 Kimberly-Clark Worldwide, Inc. Photoreactor composition method of generating a reactive species and applications therefor
DE4430300C1 (de) * 1994-08-26 1995-12-21 Abb Research Ltd Excimerstrahler und dessen Verwendung
US6008268A (en) 1994-10-21 1999-12-28 Kimberly-Clark Worldwide, Inc. Photoreactor composition, method of generating a reactive species, and applications therefor
US5811199A (en) 1995-06-05 1998-09-22 Kimberly-Clark Worldwide, Inc. Adhesive compositions containing a photoreactor composition
US5849411A (en) 1995-06-05 1998-12-15 Kimberly-Clark Worldwide, Inc. Polymer film, nonwoven web and fibers containing a photoreactor composition
RU2170943C2 (ru) 1995-06-05 2001-07-20 Кимберли-Кларк Уорлдвайд, Инк. Новые прекрасители
US5747550A (en) 1995-06-05 1998-05-05 Kimberly-Clark Worldwide, Inc. Method of generating a reactive species and polymerizing an unsaturated polymerizable material
US5798015A (en) 1995-06-05 1998-08-25 Kimberly-Clark Worldwide, Inc. Method of laminating a structure with adhesive containing a photoreactor composition
US5786132A (en) 1995-06-05 1998-07-28 Kimberly-Clark Corporation Pre-dyes, mutable dye compositions, and methods of developing a color
JP2000506550A (ja) 1995-06-28 2000-05-30 キンバリー クラーク ワールドワイド インコーポレイテッド 新規な着色剤および着色剤用改質剤
US5855655A (en) 1996-03-29 1999-01-05 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
CA2210480A1 (fr) 1995-11-28 1997-06-05 Kimberly-Clark Worldwide, Inc. Stabilisants ameliores pour colorants
US6099628A (en) 1996-03-29 2000-08-08 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US5782963A (en) 1996-03-29 1998-07-21 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US5891229A (en) 1996-03-29 1999-04-06 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US5998921A (en) * 1997-03-21 1999-12-07 Stanley Electric Co., Ltd. Fluorescent lamp with coil shaped internal electrode
US5834784A (en) * 1997-05-02 1998-11-10 Triton Thalassic Technologies, Inc. Lamp for generating high power ultraviolet radiation
JPH1125921A (ja) * 1997-07-04 1999-01-29 Stanley Electric Co Ltd 蛍光ランプ
US6524379B2 (en) 1997-08-15 2003-02-25 Kimberly-Clark Worldwide, Inc. Colorants, colorant stabilizers, ink compositions, and improved methods of making the same
US5945790A (en) * 1997-11-17 1999-08-31 Schaefer; Raymond B. Surface discharge lamp
US6015759A (en) * 1997-12-08 2000-01-18 Quester Technology, Inc. Surface modification of semiconductors using electromagnetic radiation
CA2224699A1 (fr) 1997-12-12 1999-06-12 Resonance Ltd. Electrode creuse pour lampe sans electrode
US6049086A (en) * 1998-02-12 2000-04-11 Quester Technology, Inc. Large area silent discharge excitation radiator
KR20010042176A (ko) * 1998-03-24 2001-05-25 알프레드 엘. 미첼슨 외부전극 구동형 방전램프
BR9906513A (pt) 1998-06-03 2001-10-30 Kimberly Clark Co Fotoiniciadores novos e aplicações para osmesmos
EP1062285A2 (fr) 1998-06-03 2000-12-27 Kimberly-Clark Worldwide, Inc. Techniques recourant aux neonanoplastes et aux microemulsions relatives aux encres et a l'impression par jets d'encre
US6228157B1 (en) 1998-07-20 2001-05-08 Ronald S. Nohr Ink jet ink compositions
DE69930948T2 (de) 1998-09-28 2006-09-07 Kimberly-Clark Worldwide, Inc., Neenah Chelate mit chinoiden gruppen als photoinitiatoren
DE19844921A1 (de) * 1998-09-30 2000-04-13 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Flache Beleuchtungsvorrichtung
ATE238393T1 (de) 1999-01-19 2003-05-15 Kimberly Clark Co Farbstoffe, farbstoffstabilisatoren, tintenzusammensetzungen und verfahren zu deren herstellung
US6331056B1 (en) 1999-02-25 2001-12-18 Kimberly-Clark Worldwide, Inc. Printing apparatus and applications therefor
US6294698B1 (en) 1999-04-16 2001-09-25 Kimberly-Clark Worldwide, Inc. Photoinitiators and applications therefor
US6368395B1 (en) 1999-05-24 2002-04-09 Kimberly-Clark Worldwide, Inc. Subphthalocyanine colorants, ink compositions, and method of making the same
US6201355B1 (en) 1999-11-08 2001-03-13 Triton Thalassic Technologies, Inc. Lamp for generating high power ultraviolet radiation
DE10145648B4 (de) * 2001-09-15 2006-08-24 Arccure Technologies Gmbh Bestrahlungsvorrichtung mit veränderlichem Spektrum
US6891334B2 (en) * 2001-09-19 2005-05-10 Matsushita Electric Industrial Co., Ltd. Light source device and liquid crystal display employing the same
TW558732B (en) 2001-09-19 2003-10-21 Matsushita Electric Ind Co Ltd Light source apparatus and liquid crystal display apparatus using the same
US6806648B2 (en) * 2001-11-22 2004-10-19 Matsushita Electric Industrial Co., Ltd. Light source device and liquid crystal display device
US6906461B2 (en) * 2001-12-28 2005-06-14 Matsushita Electric Industrial Co., Ltd. Light source device with inner and outer electrodes and liquid crystal display device
JP3889987B2 (ja) * 2002-04-19 2007-03-07 パナソニック フォト・ライティング 株式会社 放電灯装置及びバックライト
US20040136885A1 (en) * 2003-01-09 2004-07-15 Hogarth Derek J. Apparatus and method for generating ozone
US7029637B2 (en) * 2003-01-09 2006-04-18 H203, Inc. Apparatus for ozone production, employing line and grooved electrodes
DE10336088A1 (de) * 2003-08-06 2005-03-03 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH UV-Strahler mit rohrförmigem Entladungsgefäß
US8154216B2 (en) * 2005-10-04 2012-04-10 Topanga Technologies, Inc. External resonator/cavity electrode-less plasma lamp and method of exciting with radio-frequency energy
US8102123B2 (en) 2005-10-04 2012-01-24 Topanga Technologies, Inc. External resonator electrode-less plasma lamp and method of exciting with radio-frequency energy
US8258687B2 (en) * 2006-03-28 2012-09-04 Topanga Technologies, Inc. Coaxial waveguide electrodeless lamp
US8022377B2 (en) * 2008-04-22 2011-09-20 Applied Materials, Inc. Method and apparatus for excimer curing
JP2011522381A (ja) * 2008-05-30 2011-07-28 コロラド ステート ユニバーシティ リサーチ ファンデーション プラズマに基づく化学源装置およびその使用方法
US8125333B2 (en) * 2008-06-04 2012-02-28 Triton Thalassic Technologies, Inc. Methods, systems and apparatus for monochromatic UV light sterilization
JP5271762B2 (ja) * 2009-03-13 2013-08-21 株式会社オーク製作所 放電ランプ
TW201202008A (en) * 2010-07-12 2012-01-16 Hon Hai Prec Ind Co Ltd Device and method for making optical film
DE102010043215A1 (de) * 2010-11-02 2012-05-03 Osram Ag Strahler mit Sockel für die Bestrahlung von Oberflächen
CN103318203B (zh) * 2012-10-12 2015-09-23 北京航空航天大学 带有仿机翼的空气动力悬浮列车的轻质复合材料车厢结构
DE102012219064A1 (de) 2012-10-19 2014-04-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. UV-Lichtquelle mit kombinierter Ionisation und Bildung von Excimern
US9117636B2 (en) 2013-02-11 2015-08-25 Colorado State University Research Foundation Plasma catalyst chemical reaction apparatus
US9269544B2 (en) 2013-02-11 2016-02-23 Colorado State University Research Foundation System and method for treatment of biofilms
US9532826B2 (en) 2013-03-06 2017-01-03 Covidien Lp System and method for sinus surgery
US9555145B2 (en) 2013-03-13 2017-01-31 Covidien Lp System and method for biofilm remediation
US10237962B2 (en) 2014-02-26 2019-03-19 Covidien Lp Variable frequency excitation plasma device for thermal and non-thermal tissue effects
US9722550B2 (en) 2014-04-22 2017-08-01 Hoon Ahn Power amplifying radiator (PAR)
US10524849B2 (en) 2016-08-02 2020-01-07 Covidien Lp System and method for catheter-based plasma coagulation
WO2020041403A1 (fr) * 2018-08-22 2020-02-27 Georgia Tech Research Corporation Systèmes et procédés d'interface de détection flexible

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4038577A (en) * 1969-04-28 1977-07-26 Owens-Illinois, Inc. Gas discharge display device having offset electrodes
FR2109228A5 (fr) * 1970-10-07 1972-05-26 Mcb
US3828277A (en) * 1971-12-27 1974-08-06 Us Army Integral capacitor lateral discharge laser
JPS5732564A (en) * 1980-08-04 1982-02-22 Toshiba Corp High-frequency flat electric-discharge lamp
JPS5763756A (en) * 1980-09-12 1982-04-17 Chow Shing Cheung Discharge lamp
JPS599849A (ja) * 1982-07-09 1984-01-19 Okaya Denki Sangyo Kk 高周波放電ランプ
CH670171A5 (fr) * 1986-07-22 1989-05-12 Bbc Brown Boveri & Cie

Also Published As

Publication number Publication date
DE59003641D1 (de) 1994-01-13
US5013959A (en) 1991-05-07
JPH03201358A (ja) 1991-09-03
CH677292A5 (fr) 1991-04-30
JP2823637B2 (ja) 1998-11-11
EP0385205A1 (fr) 1990-09-05
ATE98050T1 (de) 1993-12-15

Similar Documents

Publication Publication Date Title
EP0385205B1 (fr) Dispositif de radiation à haute puissance
EP0458140B1 (fr) Radiateur à haute puissance
EP0389980B1 (fr) Dispositif de rayonnement à haute puissance
EP0578953B1 (fr) Emetteur de rayonnement à haute puissance
DE4140497C2 (de) Hochleistungsstrahler
EP0371304B1 (fr) Dispositif de radiation à haute puissance
DE19636965B4 (de) Elektrische Strahlungsquelle und Bestrahlungssystem mit dieser Strahlungsquelle
EP0449018A2 (fr) Dispositif d'irradiation
EP0363832B1 (fr) Dispositif de rayonnement à haute puissance
EP0509110B1 (fr) Dispositif d'irradiation
DE69501196T3 (de) Lichtquellen-Vorrichtung mit einer Dielektrikumbegrenzter Entladungslampe
DE69230895T2 (de) Entladungslampe und Verfahren zu deren Herstellung
EP0482230B1 (fr) Dispositif de rayonnement à haute puissance
CH670171A5 (fr)
EP0517929B1 (fr) Dispositif d'irradiation avec un radiateur à haute puissance
EP0489184B1 (fr) Dispositif de rayonnement à haute puissance
DE4010809A1 (de) Hochleistungsstrahler
DE2502649A1 (de) Verbesserte elektrodenstruktur fuer hochstrom-niederdruck-entladungsvorrichtungen
DE4022279A1 (de) Bestrahlungseinrichtung
EP0393449A1 (fr) Lampe fluorescente
DE102005007370B3 (de) Kompakte UV-Lichtquelle
DE4235743A1 (de) Hochleistungsstrahler
DE4203345A1 (de) Hochleistungsstrahler
DE2354341C3 (de) Gaslaser
DE3035702C2 (fr)

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH DE FR GB IT LI NL

17P Request for examination filed

Effective date: 19910225

17Q First examination report despatched

Effective date: 19930514

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: HERAEUS NOBLELIGHT GMBH

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH DE FR GB IT LI NL

REF Corresponds to:

Ref document number: 98050

Country of ref document: AT

Date of ref document: 19931215

Kind code of ref document: T

ET Fr: translation filed
GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19931215

REF Corresponds to:

Ref document number: 59003641

Country of ref document: DE

Date of ref document: 19940113

ITF It: translation for a ep patent filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
ITTA It: last paid annual fee
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 19951228

Year of fee payment: 7

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 19960205

Year of fee payment: 7

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 19960207

Year of fee payment: 7

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 19960208

Year of fee payment: 7

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 19960229

Year of fee payment: 7

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 19960304

Year of fee payment: 7

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: BE

Payment date: 19960312

Year of fee payment: 7

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Effective date: 19970217

Ref country code: AT

Effective date: 19970217

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Effective date: 19970228

Ref country code: CH

Effective date: 19970228

Ref country code: BE

Effective date: 19970228

BERE Be: lapsed

Owner name: HERAEUS NOBLELIGHT G.M.B.H.

Effective date: 19970228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Effective date: 19970901

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 19970217

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Effective date: 19971030

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Effective date: 19971101

NLV4 Nl: lapsed or anulled due to non-payment of the annual fee

Effective date: 19970901

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED.

Effective date: 20050217