EP0469879B1 - Vorrichtung und Methode zur Datenaufzeichnung - Google Patents
Vorrichtung und Methode zur Datenaufzeichnung Download PDFInfo
- Publication number
- EP0469879B1 EP0469879B1 EP91307007A EP91307007A EP0469879B1 EP 0469879 B1 EP0469879 B1 EP 0469879B1 EP 91307007 A EP91307007 A EP 91307007A EP 91307007 A EP91307007 A EP 91307007A EP 0469879 B1 EP0469879 B1 EP 0469879B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- recording medium
- recording
- light
- substrate
- information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
- G11B7/005—Reproducing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
- G11B7/0045—Recording
- G11B7/00455—Recording involving reflectivity, absorption or colour changes
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
- G11B7/005—Reproducing
- G11B7/0052—Reproducing involving reflectivity, absorption or colour changes
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1384—Fibre optics
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q80/00—Applications, other than SPM, of scanning-probe techniques
Definitions
- This invention relates to a novel information processing device and an information processing method which perform recording or erazing of information by voltage application and perform reproduction of information by detecting an evanescent wave.
- the present invention relates to an information processing device and an information processing method which is improved in S/N ratio in reproduction of information which is performed by detecting an evanescent wave.
- NFOM near field scanning optical microscope
- the limit of recording capacity is 10 8 bit/cm 2 , which is becoming no longer sufficient for image recording in computers or video instruments in recent years, etc.
- the bit size of recording may be on atomic/molecular order(0.5 to 50 nm)
- the influence of the recorded state on the tunnel current is local, whereby reproduction can be done with difficulty.
- it since there is also the possibility to change the recorded state by the operation of reproduction, it can hardly be said as sufficiently applicable to application for memory.
- WO 90/04753 discloses an apparatus for photon scanning tunnelling microscopy in which information relating to the surface of a sample is obtained by measurement of the photons which tunnel from the surface of the sample to a probe.
- EP-A-0363147 discloses a recording/reproducing apparatus in which recording of information on a recording medium is performed by application of an electric field between a probe and the recording medium such that an electromagnetic wave is projected onto the recording medium. In order to reproduce information recorded on the medium, an electric field is applied the cross the medium and the tunnel current at the recorded information positions is measured.
- an object of the present invention is to provide an information processing device and an information processing method enabling stable writing and reading of information, which are processings of information utilizing evanescnt wave.
- STM utilizes the phenomenon that a tunnel current will flow when a probe of a metal (probe electrode) and an electroconductive substance are approached to a distance of about 1 nm with an application of a voltage therebetween. Such current is very sensitive to the distance change therebetween, and by scanning the probe so as to maintain constantly the tunnel current, the surface structure of the real space can be drawn and at the same time various informations concerning all the electron cloud of the surface atom can be read. In this case, the resolving power in the interplanar direction is about 0.1 nm. Therefore, by utilizing the principle of STM, it is possible to perform high density recording sufficiently at the atomic order (sub-nanometer). For example, when the bit size of recording is made 10 nm, a recording device with a density as high as 10 12 bit/cm 2 is obtained.
- PSTM which is further development of STM utilizes the weak light leaked out from the surface of the sample.
- a laser is permitted to enter from the backside of the sample through a prism, and the angle is controlled so that the laser may be totally reflected at the back surface of the sample. Most of the light is reflected, but only a part will pass through the surface to the surface side by the tunnel effect in spite of the condition of total reflection. This is the light called "evanescent wave", with the wavelength being equal to the incident light and the intensity becoming about 1/1000 to 1/100,000 of that of the incident light.
- the intensity of evanescent wave is weaker as farther from the surface of the sample, and by approximating the optical fiber to the sample surface and scanning it while moving so as to detect the evanescent wave with the same intensity, the structure of the surface on the basis of such movement and at the same time through light absorption, spectral information of the sample itself can be examined.
- the resolving power in the interplanar direction is about 1 nm. Therefore, by applying PSTM, it is possible to perform reproduction of a high density recording medium sufficiently on the order of nanometer. Also, in reproduction by use of light, even a recorded state in which a part of the structure within the molecule may locally change can be observed as the change of the light absorption wavelength of the whole molecule.
- Fig. 1 is a block diagram showing the constitution of the information processing device according to an example of the present invention.
- Fig. 1 as the recording medium 102, for example, built-up films of monomolecular film layer are formed according to the Langmuir-Blodgett method by use of 10,12-pentacosadiynic acid CH 3 (CH 2 ) 11 C ⁇ C-C ⁇ C(CHC 2 ) 8 COOH, amphiphilic diacetylene derivative, on the surface of an electroconductive prism 101 and a polymer is formed by irradiation of X-ray or gamma-ray.
- the material for the electroconductive prism 101 Ag 2 O-AgI-MoO 3 (P 2 O 5 ) type super-ion conducting glass, a glass containing a polyvalent element such as palladium, iron, etc., or one coated on the glass surface with a thin film composed mainly of SnO 2 may be employed.
- the light with wavelength ⁇ 1 generated from the light source 103 and the light with wavelength ⁇ 2 generated from the light source 104 are respectively passed through the beam expanders 105, 106 and the beam mixer 107 to be combined, and permitted to enter the surface of the recording medium 102 in contact with the electroconductive prism 101 under the total reflection condition.
- the electroconductive optical probe 109 is approximated to a distance of about sub-nanometer to the desired position of the recording medium 102.
- the electroconductive optical probe one prepared by polishing one end of the optical fiber made of the same material as the electroconductive prism 101 to have the tip end pointed (radius of curvature ⁇ 1 ⁇ m) is used.
- the evanescent light 100 having thus passed through the recording medium 102 to be oozed out (existing only in the vicinity of the surface) is detected by the electroconductive optical probe 109, introduced into the optical fiber 111, passed through the lens 112, the beam splitter 113, the filters 114, 115 to be divided into the components with wavelengths ⁇ 1 and ⁇ 2 , which are respectively converted by photomultipliers 116, 117 into electrical signals.
- the electrical signals are amplified in the amplifiers 118, 119 (I 1 , I 2 ), then inputted in the dividing circuit 120 to make the ratio I 2 /I 1 of the two signals the reproduction signal.
- the Z-directional position control of the optical probe 109 during recording and reproduction is performed as follows.
- the signal I 1 for the detection light intensity of the wavelength ⁇ 1 is inputted in the feed-back circuit 121, the deviation from the set (light intensity) value is calculated, and after amplification in the amplification circuit 122, as the Z position control signal, by the xyz position control device 108, the Z-directional position of the optical probe 109 is controlled so as to become the set light intensity.
- the optical probe 109 is moved to the desired position of the recording medium 102, and a pulse voltage for recording is applied by the recording signal circuit 124 between the electroconductive optical probe 109 and the electroconductive prism 101 to inject locally electrons into the recording medium. Then, a structural change takes place in the diacetylene derivative polymer through the Joule's heat by the local current, whereby the peak of the absorption band of light is shifted from 640 nm to 580 nm.
- a material of which the absorption band of light can be shifted by electron injection or Joule's heat by current may be available, and otherwise, one decomposable by current Joule's heat such as J associated product of a dye such as squarilium bis-6 octylazulene, etc. (absorption band at wavelength 579 nm to be shifted to 890 nm), or one reduced as follows by electron injection such as polyimide: or one which is greatly changed in absorbance at around 800 nm by intramolecular charge transfer such as copper tetracyanoquinodimethane by electron injection as shown below: may be employed.
Claims (6)
- Informationsverarbeitungsvorrichtung zur Aufzeichung und/ oder Wiedergabe von Informationen auf oder von einem Aufzeichnungsträger (102) auf einer Oberfläche eines für zumindest eine Wellenlänge lichtdurchlässigen Substrats (101), wobei die Vorrichtung eine Bestrahlungseinrichtung (103, 104, 105, 106 und 107) zur Bestrahlung des Übergangs zwischen dem Substrat (101) und dem Aufzeichnungsträger (102) durch das Substrat (101) mit Licht einschließlich der einen Wellenlänge, einen optische Meßfühler (109) zur Erfassung von einer abklingenden Lichtwelle vom Aufzeichnungsträger und eine Wiedergabeeinrichtung (111, 112, 113, 114, 115, 116, 117, 118, 119 und 120) zur Wiedergabe der auf dem Aufzeichnungsträger (102) aufgezeichneten Informationen auf der Grundlage der erfaßten abklingenden Lichtwelle aufweist,
dadurch gekennzeichnet, daß
die Vorrichtung zur Verwendung mit einem Aufzeichnungsträger (102) auf einem elektrisch leitfähigen Substrat geeignet ist, der Meßfühler (109) elektrisch leitfähig ist und die Vorrichtung zusätzlich eine Aufzeichnungseinrichtung (124) zum Anlegen einer Aufzeichungsspannung zwischen dem Meßfühler (109) und dem Substrat (101) auf der Grundlage der aufzuzeichnenden Informationen aufweist. - Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß die Wiedergabeeinrichtung (111-120) zur Wiedergabe der auf dem Aufzeichnungsträger (102) aufgezeichneten Informationen auf der Grundlage der Intensität der erfaßten abklingenden Lichtwelle vorgesehen ist.
- Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß das Substrat (101) für zumindest zwei Wellenlängen lichtdurchlässig ist und die Wiedergabeeinrichutng (112-120) zur Wiedergabe der auf dem Aufzeichnungsträger (102) aufgezeichneten Informationen auf der Grundlage des Intensitätsverhältnisses der erfaßten abklingenden Lichtwelle entsprechend den zwei Wellenlängen vorgesehen ist.
- Vorrichtung nach Anspruch 3, dadurch gekennzeichnet, daß die Vorrichtung außerdem eine Steuereinrichtung (121, 122, 123 und 124) zur Steuerung des Abstands zwischen dem Meßfühler (109) und dem Aufzeichnungsträger aufweist, um eine der erfaßten abklingenden Lichtwellen auf einer konstanten Intensität zu halten.
- Informationsverarbeitungssystem mit einer Informationsverarbeitungsvorrichtung nach einem der Ansprüche 1 bis 4 und einem von einem bei zumindest einer Wellenlänge lichtdurchlässigen Substrat (101) getragenen Aufzeichnungsträger (102).
- Informationsverarbeitungsverfahren zum Aufzeichnen und/oder Wiedergeben von Informationen auf einem Aufzeichnungsträger, mit einem Wiedergabeschritt, der die folgenden Schritte umfaßt: Bestrahlen des Übergangs zwischen einem bei zumindest einer Wellenlänge lichtdurchlässigen Substrat (101) und einem Aufzeichnungsträger (102), der auf einer Oberfläche des Substrats (101) gebildet ist, durch das Substrat (101) mit Licht einschließlich der Wellenlänge; und
Erfassen einer abklingenden Lichtwelle von dem Aufzeichnungsträger (102) unter Verwendung eines optischen Meßfühlers (109) zum Wiedergeben der auf dem Aufzeichnungsträger (102) aufgezeichneten Informationen;
dadurch gekennzeichnet, daß
das Substrat (101) und der Meßfühler (109) elektrisch leitfähig sind und das Verfahren weiterhin einen Aufzeichnungsschritt umfaßt, der ein Anlegen einer Aufzeichnungsspannung zwischen dem Meßfühler (109) und dem Substrat (101) auf der Grundlage der aufzuzeichnenden Informationen umfaßt.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP95201397A EP0676749B1 (de) | 1990-08-03 | 1991-07-31 | Vorrichtung und Verfahren zur Wiedergabe von Information |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2206617A JP2744339B2 (ja) | 1990-08-03 | 1990-08-03 | 情報処理装置及び情報処理方法 |
JP206617/90 | 1990-08-03 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP95201397A Division EP0676749B1 (de) | 1990-08-03 | 1991-07-31 | Vorrichtung und Verfahren zur Wiedergabe von Information |
EP95201397.7 Division-Into | 1991-07-31 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0469879A2 EP0469879A2 (de) | 1992-02-05 |
EP0469879A3 EP0469879A3 (en) | 1992-06-03 |
EP0469879B1 true EP0469879B1 (de) | 1996-10-16 |
Family
ID=16526343
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP95201397A Expired - Lifetime EP0676749B1 (de) | 1990-08-03 | 1991-07-31 | Vorrichtung und Verfahren zur Wiedergabe von Information |
EP91307007A Expired - Lifetime EP0469879B1 (de) | 1990-08-03 | 1991-07-31 | Vorrichtung und Methode zur Datenaufzeichnung |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP95201397A Expired - Lifetime EP0676749B1 (de) | 1990-08-03 | 1991-07-31 | Vorrichtung und Verfahren zur Wiedergabe von Information |
Country Status (6)
Country | Link |
---|---|
US (1) | US5343460A (de) |
EP (2) | EP0676749B1 (de) |
JP (1) | JP2744339B2 (de) |
AT (2) | ATE193142T1 (de) |
CA (1) | CA2048365C (de) |
DE (2) | DE69132212T2 (de) |
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JP3074357B2 (ja) * | 1991-10-03 | 2000-08-07 | セイコーインスツルメンツ株式会社 | 微細表面観察装置 |
EP0568753A1 (de) * | 1992-05-07 | 1993-11-10 | International Business Machines Corporation | Optische Speichereinheit mit hoher Datendichte und Informations-, Schreib- und Leseverfahren |
JPH0696714A (ja) * | 1992-09-14 | 1994-04-08 | Hitachi Ltd | 表面加工装置および記録装置 |
JPH06187675A (ja) * | 1992-09-25 | 1994-07-08 | Canon Inc | 情報処理装置、及びそれを用いる情報処理方法 |
JP3135389B2 (ja) * | 1992-10-23 | 2001-02-13 | 松下電器産業株式会社 | 情報再生方法、情報記録再生方法、情報再生装置、記録媒体及び光ヘッド |
US5502710A (en) * | 1993-03-08 | 1996-03-26 | Canon Kabushiki Kaisha | Recording bit extraction by calculating curvature of pixels in scanning probe microscope |
FR2704349B1 (fr) * | 1993-04-21 | 1995-07-07 | Centre Nat Rech Scient | Sensibilisation d'une surface en emission photonique par microscopie a champ proche. |
US5410151A (en) * | 1993-07-15 | 1995-04-25 | Sumitomo Electric Lightwave Corp. | Fiber optic probe and method of making same |
EP0648049A1 (de) * | 1993-10-08 | 1995-04-12 | Hitachi, Ltd. | Verfahren und Gerät zur Aufzeichnung und Wiedergabe von Information |
US5513168A (en) * | 1993-10-19 | 1996-04-30 | Seiko Instruments Inc. | Optical information read/write apparatus |
JPH087323A (ja) * | 1994-06-17 | 1996-01-12 | Hitachi Ltd | 光ヘッドおよび光情報記録再生装置 |
US6337479B1 (en) | 1994-07-28 | 2002-01-08 | Victor B. Kley | Object inspection and/or modification system and method |
US5751683A (en) | 1995-07-24 | 1998-05-12 | General Nanotechnology, L.L.C. | Nanometer scale data storage device and associated positioning system |
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JP3622800B2 (ja) * | 1995-11-17 | 2005-02-23 | リコープリンティングシステムズ株式会社 | 光記録装置 |
JP3618896B2 (ja) * | 1996-03-29 | 2005-02-09 | キヤノン株式会社 | 微小開口を有するプローブの作製法とそれによるプローブ、並びに該プローブを用いた走査型近接場光顕微鏡と走査型トンネル顕微鏡との複合装置、および該プローブを用いた記録再生装置 |
US5689480A (en) * | 1996-08-13 | 1997-11-18 | The Board Of Trustees Of The Leland Stanford Junior University | Magneto-optic recording system employing near field optics |
US5859814A (en) * | 1996-10-18 | 1999-01-12 | The Board Of Trustees Of The Leland Stanford Junior University | Magneto-optic recording system and method |
JPH10293134A (ja) | 1997-02-19 | 1998-11-04 | Canon Inc | 光検出または照射用のプローブ、及び該プローブを備えた近視野光学顕微鏡・記録再生装置・露光装置、並びに該プローブの製造方法 |
EP0880078A3 (de) * | 1997-05-23 | 2001-02-14 | Canon Kabushiki Kaisha | Vorrichtung zur Detektion einer Position, Apparat unter Verwendung derselben, Belichtungsapparat, und Verfahren zur Herstellung einer Vorrichtung unter Verwendung desselben |
US6806477B1 (en) | 1997-05-23 | 2004-10-19 | Canon Kabushiki Kaisha | Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same |
US5883872A (en) * | 1997-05-29 | 1999-03-16 | The Board Of Trustees Of The Leland Stanford Junior University | Near field magneto-optical recording system employing slit illumination |
JP3524343B2 (ja) | 1997-08-26 | 2004-05-10 | キヤノン株式会社 | 微小開口の形成方法と微小開口を有する突起、及びそれらによるプローブまたはマルチプローブ、並びに該プローブを用いた表面観察装置、露光装置、情報処理装置 |
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US6787768B1 (en) | 2001-03-08 | 2004-09-07 | General Nanotechnology Llc | Method and apparatus for tool and tip design for nanomachining and measurement |
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US6752008B1 (en) | 2001-03-08 | 2004-06-22 | General Nanotechnology Llc | Method and apparatus for scanning in scanning probe microscopy and presenting results |
US6466537B1 (en) * | 1998-03-20 | 2002-10-15 | Seiko Instruments Inc. | Recording apparatus |
JP2000036128A (ja) * | 1998-05-11 | 2000-02-02 | Seiko Instruments Inc | 近視野光学ヘッドおよび再生方法 |
EP0959372A3 (de) * | 1998-05-22 | 2000-07-19 | Rohm And Haas Company | Lichtleiter |
DE19822869C2 (de) * | 1998-05-22 | 2001-05-10 | Zeiss Carl Jena Gmbh | Optisches Nahfeldmikroskop |
JP3901867B2 (ja) | 1999-02-08 | 2007-04-04 | 富士フイルム株式会社 | 近接場光記録再生装置 |
EP1196939A4 (de) | 1999-07-01 | 2002-09-18 | Gen Nanotechnology Llc | Vorrichtung und verfahren zur untersuchung und/oder veränderungsobjekt |
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US7053369B1 (en) | 2001-10-19 | 2006-05-30 | Rave Llc | Scan data collection for better overall data accuracy |
US6813937B2 (en) | 2001-11-28 | 2004-11-09 | General Nanotechnology Llc | Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
JP2003202284A (ja) * | 2002-01-09 | 2003-07-18 | Hitachi Ltd | 走査プローブ顕微鏡およびこれを用いた試料観察方法およびデバイス製造方法 |
JP2005538855A (ja) | 2002-09-09 | 2005-12-22 | ジェネラル ナノテクノロジー エルエルシー | 走査型プローブ顕微鏡の流体送達 |
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JPS63317936A (ja) * | 1987-06-19 | 1988-12-26 | Mitsubishi Electric Corp | 光学的波長多重記録再生装置 |
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-
1990
- 1990-08-03 JP JP2206617A patent/JP2744339B2/ja not_active Expired - Fee Related
-
1991
- 1991-07-31 DE DE69132212T patent/DE69132212T2/de not_active Expired - Fee Related
- 1991-07-31 DE DE69122695T patent/DE69122695T2/de not_active Expired - Fee Related
- 1991-07-31 EP EP95201397A patent/EP0676749B1/de not_active Expired - Lifetime
- 1991-07-31 AT AT95201397T patent/ATE193142T1/de not_active IP Right Cessation
- 1991-07-31 AT AT91307007T patent/ATE144346T1/de not_active IP Right Cessation
- 1991-07-31 US US07/738,427 patent/US5343460A/en not_active Expired - Fee Related
- 1991-07-31 EP EP91307007A patent/EP0469879B1/de not_active Expired - Lifetime
- 1991-08-02 CA CA002048365A patent/CA2048365C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69122695T2 (de) | 1997-02-27 |
ATE193142T1 (de) | 2000-06-15 |
EP0469879A3 (en) | 1992-06-03 |
CA2048365A1 (en) | 1992-02-04 |
EP0469879A2 (de) | 1992-02-05 |
DE69132212T2 (de) | 2000-10-26 |
JP2744339B2 (ja) | 1998-04-28 |
EP0676749B1 (de) | 2000-05-17 |
CA2048365C (en) | 1996-12-31 |
US5343460A (en) | 1994-08-30 |
EP0676749A2 (de) | 1995-10-11 |
ATE144346T1 (de) | 1996-11-15 |
JPH0490152A (ja) | 1992-03-24 |
EP0676749A3 (de) | 1996-07-17 |
DE69132212D1 (de) | 2000-06-21 |
DE69122695D1 (de) | 1996-11-21 |
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