EP0373229B1 - Mechanische Vakuumpumpe mit einer federbelasteten Rückschlagklappe - Google Patents

Mechanische Vakuumpumpe mit einer federbelasteten Rückschlagklappe Download PDF

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Publication number
EP0373229B1
EP0373229B1 EP88120714A EP88120714A EP0373229B1 EP 0373229 B1 EP0373229 B1 EP 0373229B1 EP 88120714 A EP88120714 A EP 88120714A EP 88120714 A EP88120714 A EP 88120714A EP 0373229 B1 EP0373229 B1 EP 0373229B1
Authority
EP
European Patent Office
Prior art keywords
pump
vacuum pump
mechanical vacuum
return valve
mechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP88120714A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0373229A1 (de
Inventor
Heinz-Dieter Bürger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Hochvakuumtechnik GmbH
Original Assignee
Alcatel Hochvakuumtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Hochvakuumtechnik GmbH filed Critical Alcatel Hochvakuumtechnik GmbH
Publication of EP0373229A1 publication Critical patent/EP0373229A1/de
Application granted granted Critical
Publication of EP0373229B1 publication Critical patent/EP0373229B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type

Definitions

  • the invention relates to a mechanical vacuum pump with a housing which has a vacuum-side inlet channel and a pressure-side outlet channel, the latter being provided with a spring-loaded check valve.
  • Mechanical vacuum pumps have a motor-driven displacement element, e.g. a reciprocating piston, one or more rotary pistons, a rotary valve or a gate valve. At least in the outlet channel of this pump, a spring-loaded check valve is usually provided, which allows the vacuum state of a vessel to be evacuated to be maintained after the pump has been switched off.
  • Mechanical vacuum pumps are often combined with other types of pumps, in particular diffusion pumps and molecular pumps, to achieve a higher vacuum, in which case the mechanical pump acts as a backing pump and works against atmospheric pressure.
  • the mechanical vacuum pump was already preceded by a propellant pump, in particular a water ring pump, so that the mechanical pump no longer has to work against atmospheric pressure, but against a significantly lower pressure, which has an effect on the achievable final vacuum of the mechanical pump.
  • the object of the invention is to improve a mechanical vacuum pump in the direction of a higher ultimate vacuum, while at the same time the cooling is to be improved with comparable power consumption.
  • the invention is therefore particularly suitable for dry-running rotary vane pumps, since the heating of the pump housing poses greater problems here.
  • a gas jet pump is installed in the outlet channel of the mechanical vacuum pump in the flow direction in front of the check valve.
  • the jet direction of the gas jet pump preferably runs parallel to the sealing surface of the check valve.
  • the gas jet pump acts practically only as a cooling element for the compression space, to which the outlet channel of the pump belongs.
  • the non-return valve closes the outlet channel, and the remaining molecules are caught and removed by the jet of the gas jet pump.
  • the selected embodiment relates to a rotary vane pump with a housing 1 and a rotating rotary valve 2.
  • the housing sits in an oil pan, not shown, and has an inlet 3, which can be connected to a vessel to be evacuated, and an outlet channel 4, which with a check valve 5 can be associated with the surrounding atmosphere.
  • the check valve 5 is held in the closed position by a spring 6 as long as the pressure in the outlet channel 4 does not exceed the counter pressure generated by atmospheric pressure and the spring 6.
  • a gas jet pump In the flow direction of the gases to be pumped in front of the check valve 5, a gas jet pump is seated in the outlet channel 4, the jet direction of which runs parallel to the sealing surface of the check valve 5.
  • the pump consists of an injection nozzle 7 and a collecting pipe 8 aligned therewith.
  • the nozzle 7 can be connected to a compressed air source (not shown) via a line 9 incorporated into the housing 1 of the pump, while the Collecting pipe either opens into the outside atmosphere or, as is usually the case, is connected to a treatment tank in which toxic gases from the tank to be evacuated can be separated from the air flow.
  • another gas in particular an inert gas, can also be used as the blowing agent.
  • the pump according to the invention is not comparable to the series connection of a mechanical vacuum pump and a propellant pump, since in such a series connection the propellant pump would sit behind the non-return valve 5 and all the molecules conveyed by the mechanical pump would then be sucked off by the gas jet pump.
  • the gas jet pump By integrating the gas jet pump into the mechanical vacuum pump, namely in the direction of flow in front of the non-return valve of this pump, the high suction capacity of the mechanical vacuum pump becomes fully effective with a small pressure difference between the inlet and outlet channels, while with increasing vacuum the outlet channel 4 in front of the non-return valve through Gas jet pump is brought to a value significantly below atmospheric pressure, whereby the ultimate vacuum to be achieved in the inlet channel 3 is increased by at least a factor of 10.
  • the invention is not restricted in detail to the exemplary embodiment shown.
  • the gas jet pump can also be used in conjunction with a mechanical vacuum pump of another type, e.g. a Roots pump or a gate valve pump.
  • the invention can also be used to advantage with oil-lubricated mechanical vacuum pumps.
  • the gas jet pump works not only in favor of a better final vacuum, but also as a heat-dissipating element, so that the heating of the pump is reduced.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP88120714A 1987-06-30 1988-12-12 Mechanische Vakuumpumpe mit einer federbelasteten Rückschlagklappe Expired - Lifetime EP0373229B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19873721611 DE3721611A1 (de) 1987-06-30 1987-06-30 Mechanische vakuumpumpe mit einer federbelasteten rueckschlagklappe

Publications (2)

Publication Number Publication Date
EP0373229A1 EP0373229A1 (de) 1990-06-20
EP0373229B1 true EP0373229B1 (de) 1992-09-16

Family

ID=6330602

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88120714A Expired - Lifetime EP0373229B1 (de) 1987-06-30 1988-12-12 Mechanische Vakuumpumpe mit einer federbelasteten Rückschlagklappe

Country Status (3)

Country Link
US (1) US4921406A (enrdf_load_stackoverflow)
EP (1) EP0373229B1 (enrdf_load_stackoverflow)
DE (1) DE3721611A1 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0798463A3 (en) * 1996-03-29 1998-02-25 Anest Iwata Corporation Oil-free scroll vacuum pump
GB2389875A (en) * 2002-06-21 2003-12-24 Boc Group Plc Vane pump with a non-circular bore
DE102010004657B4 (de) * 2010-01-14 2012-03-22 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH Frischgasversorgungsvorrichtung für eine Verbrennungsmaschine und Verfahren zum Betrieb einer solchen Frischgasversorgungsvorrichtung
US9039385B2 (en) 2011-11-28 2015-05-26 Ford Global Technologies, Llc Jet pump assembly
WO2015165544A1 (fr) * 2014-05-01 2015-11-05 Ateliers Busch Sa Méthode de pompage dans un système de pompage et système de pompes à vide
US11209024B2 (en) * 2015-06-24 2021-12-28 Itt Manufacturing Enterprises Llc Discharge casing insert for pump performance characteristics control

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1073834A (fr) * 1952-04-02 1954-09-29 Daimler Benz Ag Compresseur à piston rotatif, en particulier compresseur root pour moteurs à combustion interne
FR1121079A (fr) * 1955-02-03 1956-07-20 Turbine volumétrique
DE1270215B (de) * 1962-12-07 1968-06-12 Siemen & Hinsch Gmbh Pumpenaggregat
US3556681A (en) * 1969-02-03 1971-01-19 Irving C Jennings High vacuum pump with air jet having automatic cut-in valve
DE2821814C2 (de) * 1978-05-19 1986-10-16 Daimler-Benz Ag, 7000 Stuttgart Saugluftanlage für Kraftfahrzeuge
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法

Also Published As

Publication number Publication date
DE3721611A1 (de) 1989-01-19
DE3721611C2 (enrdf_load_stackoverflow) 1989-04-20
US4921406A (en) 1990-05-01
EP0373229A1 (de) 1990-06-20

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