EP0340433B1 - Tunnelmodul zum Aufbau eines Reinraumes in Laminar-Flow-Technik - Google Patents

Tunnelmodul zum Aufbau eines Reinraumes in Laminar-Flow-Technik Download PDF

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Publication number
EP0340433B1
EP0340433B1 EP89104834A EP89104834A EP0340433B1 EP 0340433 B1 EP0340433 B1 EP 0340433B1 EP 89104834 A EP89104834 A EP 89104834A EP 89104834 A EP89104834 A EP 89104834A EP 0340433 B1 EP0340433 B1 EP 0340433B1
Authority
EP
European Patent Office
Prior art keywords
chamber
tunnel module
module according
opening
ventilator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP89104834A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0340433A3 (de
EP0340433A2 (de
Inventor
Herbert Eidam
Gerhard Frankenberger
Karl-Heinz Velde
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Grenzebach GmbH and Co KG
Original Assignee
Babcock BSH AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Babcock BSH AG filed Critical Babcock BSH AG
Priority to AT89104834T priority Critical patent/ATE83307T1/de
Publication of EP0340433A2 publication Critical patent/EP0340433A2/de
Publication of EP0340433A3 publication Critical patent/EP0340433A3/de
Application granted granted Critical
Publication of EP0340433B1 publication Critical patent/EP0340433B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/24—Means for preventing or suppressing noise
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Definitions

  • the invention relates to a tunnel module according to the preamble of claim 1.
  • the clean room tunnel system shown on sheet 004 is a portable module that can be strung together in any number.
  • a tunnel module of the system shown consists of an upper part and two side walls with double walls.
  • the upper part has a chamber system with two return air inlets, a fan and superimposed chambers, the lower chamber being limited at the bottom by an arrangement of high-performance particulate filters.
  • the air returned between the side walls and their double walls is conveyed through the upper chambers from both sides into the lower chamber and fed into the clean room through the high-performance suspended matter filters.
  • a prerequisite for laminar flow in the clean room is an even speed distribution behind the high-performance particulate filters, which can be generated by applying the filters evenly.
  • the high-performance particulate filters have very high air resistances, which significantly reduce the flow velocities. Only the static pressure component of an air flow upstream of the high-performance particulate filters is therefore effective.
  • Laminar flow technology therefore requires an air flow with as little turbulence as possible and with the highest possible static pressure in the chamber in front of the high-performance particulate filters.
  • a low-turbulence flow is promoted by a one-sided air supply to the chamber in front of the high-performance particulate filters.
  • the static pressure component of a flow can be increased by converting dynamic pressure into static pressure.
  • Such a conversion is achieved by passing the air through a multi-chamber system, thereby reducing the flow rate.
  • the conversion from dynamic to static pressure leads to large energy losses and high energy requirements for the fans.
  • a generic tunnel module is shown schematically in the brochure "ias / Clean Room Tunnels, LVT Tunnel Series 2 (CRT-5-84)".
  • this tunnel module In the upper part of this tunnel module there are two chamber systems arranged side by side in mirror image and separated by a central wall.
  • Each chamber system has three chambers, one above the other, divided by two intermediate floors, a fan and a return air opening.
  • the fan is located in a box in front of the upper chamber on one side of the upper part and the return air opening in the fan box.
  • the three chambers are connected to one another by openings in the intermediate floors, the opening of the upper intermediate floor being opposite to the return air opening Side and that of the lower intermediate floor is on the side of the return air opening.
  • the lower chamber is limited at the bottom by an arrangement of high-performance filters.
  • the object of the invention is to develop a tunnel module for building a clean room using laminar flow technology, in which a uniform speed distribution in the clean room is ensured with the lowest possible energy requirement.
  • the fan for generating a low-turbulence, high-static pressure air flow in the lower chamber in front of the high-performance filters requires significantly less energy.
  • the arrangement of the fan in the middle chamber on the side opposite the return air opening leads to significantly lower friction losses. Flow obstacles through a fan box in front of the upper chamber are avoided. Sucking in the return air through the upper chamber smoothes the air flow to the fan.
  • the energy requirement is further reduced by the construction of the fan with backward curved blades and external rotor motor. Flow obstacles through a housing are avoided.
  • the position of the fan described in the feature of claim 4 leads to the greatest degrees of efficiency of the fan compared to a greater distance from the side wall or asymmetrical position between the front and rear walls.
  • the advantage of the feature of claim 5 is a guidance of the air flow into the inlet nozzle of the fan.
  • the feature of claim 6 leads to an equalization of the air flow in the upper chamber above the fan.
  • the advantage of the feature of claim 7 is a simultaneous equalization and guidance of the air flow to the fan.
  • the feature of claim 9 leads to an advantageous reduction in the noise level in the clean room.
  • the noise level is further reduced by the arrangement of the middle silencing backdrops described in the feature of claim 10. It also promotes low-loss conversion from dynamic to static pressure.
  • the feature of claim 11 leads to an advantageous, low-turbulence flow in the chamber before the high-performance filters.
  • the feature of claim 13 is advantageous for tunnel modules of the open design if conditioned air is required.
  • the advantage of the feature of claim 15 is the simple construction of a tunnel module.
  • Tunnel modules with the feature of claim 16 are particularly suitable for building wider clean rooms.
  • Figure 1 shows a section through a tunnel module of the open design with prefilter and cooler and Figure 2 shows an arrangement of tunnel modules of the open design.
  • FIG. 3 shows an example of the closed construction and FIG. 4 shows an arrangement of three tunnel modules of this type one behind the other.
  • FIG. 5 shows an arrangement of several tunnel modules with two chamber systems.
  • Example 1 Tunnel module with an open design
  • a tunnel module consists of an upper part 1, which is supported by two U-profiles 2, and two side walls 3, 4.
  • the upper part 1 is approximately cuboid and has a chamber system which extends over the entire width of the upper part 1. Its side walls 5, 6 and the front and rear walls, which are not visible in the drawing and are parallel to the plane of the drawing, consist of bent metal sheets.
  • the upper part 1 is divided by two intermediate floors 7, 8 into three flat chambers 9, 10, 11, one above the other, on levels.
  • the chamber heights of the upper and middle chambers 9, 10 are approximately the same size, those of the lower chamber 11 about half as large as that of the middle chamber 9.
  • the chambers 9, 10, 11 are through mutually arranged openings 12, 13 in the intermediate floors 7 , 8 connected to each other.
  • the upper chamber 9 has a return air opening 14 in the side wall 6.
  • the opening 12 of the upper intermediate floor 7 is located in the vicinity of the opposite side wall 5.
  • the opening 13 of the lower intermediate floor 8 is a gap which is between the edge of the lower intermediate floor 8, which does not quite reach the side wall 6 which has the return air opening 14, and the side wall 6 remains free.
  • the lower chamber 11 is delimited at the bottom by six high-performance suspended matter filters 15 which are placed next to one another in a tile-like manner and are suspended in a grid-like frame construction. Of the six high-performance particulate filters 15, two are arranged one behind the other and three next to one another.
  • the high-performance suspended matter filters 15 are provided with dry and liquid seal seals.
  • the inlet nozzle 17 of which is seated in the opening 12 of the upper intermediate floor 7 and which is fastened to the upper intermediate floor 7.
  • the fan 16 is designed as a housing-free radial fan with an external rotor motor 18 and has backward curved blades 19.
  • the distance of the fan axis 20 from the side wall 5 lying next to it corresponds to approximately 0.8 times the diameter of the fan 16.
  • the fan axis 20 lies in the middle between front and back wall.
  • a ceiling 21 and the upper intermediate floor 7 are covered with silencing baffles 22, which extend from the side wall 6 to close to the inlet nozzle 17.
  • the thickness of the silencing baffles 22 is approximately one third of the height of the upper chamber 9, so that a gap remains between them, the height of which also is a third of the chamber height.
  • a rectification plate 23 is located transversely above the inlet nozzle 17 and is parallel to the front and rear walls. It protrudes somewhat on both sides beyond the inlet nozzle 17 and ends on the side of the inlet nozzle 17 facing the return air opening 14 just before the silencing backdrops 22.
  • Two inflow plates 24 extend between the front and rear walls, which on one side extend into the gap between the silencing gates 22, are rounded downwards on the other side and extend directly to the inlet nozzle 17. In the gap, the inflow plates 24 abut each other in the middle and in the further course against the rectifying plate 23. In the gap between the silencing baffles 22, the inflow plates 24 are located at about a third of the gap height. The distance between the edges of the inflow plates 24 above the inlet nozzle 17 and the fan axis 20 is approximately 10% of the diameter of the inlet nozzle 17.
  • silencing baffles 25 which extend from the fan 16 in the direction of the side wall 6 and extend approximately to the middle of the middle chamber 10. Their thickness and the thickness of the gap remaining between them each amount to approximately one third of the chamber height.
  • the two intermediate floors 7, 8 are also provided with silencing baffles 26. Its thickness is only about one sixth of the chamber height.
  • Another, middle silencing backdrop 27, the height of which is approximately one third of the chamber height, is located in the middle between the two silencing backdrops 26; Above and below the middle silencing backdrop 27 there is a gap with a height of approximately one sixth of the chamber height. The two gaps continue the gap between the silencing backdrops 26 in the half of the middle chamber 10 facing the fan 16, so that the cross-section of the gap resembles a tuning fork.
  • a baffle 28 extending from the front to the rear wall and extending from the sound-reducing link 27 through the center of the opening 13 of the lower intermediate floor 8 into the lower chamber 11 is fastened.
  • the edge of the guide plate 28 projects horizontally below the lower intermediate floor 8 at about half the height of the lower chamber 11.
  • a sheet metal strip extending from the front to the rear wall, a so-called spoiler 29, is attached on the side wall 6, at a height of approximately 40% of the height of the lower chamber 11, a sheet metal strip extending from the front to the rear wall, a so-called spoiler 29, is attached. It projects horizontally below the opening 13 of the lower intermediate floor 8 into the lower chamber 11. The distance between the edge of the spoiler 29 and the guide plate 28 is approximately half the height of the lower chamber 11.
  • a pre-filter 30 and a water-cooled air cooler 31 are fastened to the side wall 6. Air cooler 31 and pre-filter 30 are sandwiched one above the other, with the pre-filter 30 pointing outwards. Both extend over the entire width of the side wall 6.
  • Exhaust vents 32, 33 are located in the side walls 3, 4 of the tunnel module near the floor.
  • the direction of air flow is symbolized by arrows.
  • the free interiors of the upper chamber 9 and the middle chamber 10 form a hairpin-shaped air duct.
  • the air duct is branched through the middle silencing link 27.
  • the baffle 28 continues the branching in the opening 13 of the lower intermediate floor 8 and in a small, adjoining area of the lower chamber 11.
  • Figure 2 shows an arrangement of four tunnel modules of the open design.
  • the tunnel modules are arranged alternately one behind the other, the fan 16 being located in successive tunnel modules alternately on the right and on the left side of the arrangement.
  • the tunnel modules are screwed together on the U-profiles 2.
  • the arrangement is limited at the front and rear by a front wall 34 and a rear wall 35.
  • the arrows drawn in FIG. 2 symbolize the direction of flow of the air at the level of the upper chambers 9.
  • air is drawn in from the outside through the pre-filters 30, the coolers 31, the return air openings 14 and the upper chambers 9 by the fans 16 and is fed to the clean room via the middle and lower chambers 10, 11 by the high-performance suspended matter filters 15.
  • the cleaned air flows through the clean room in a laminar manner and leaves it through the exhaust air openings 32, 33.
  • Example 2 tunnel module of closed construction
  • the tunnel module of closed construction shown in FIG. 3 corresponds to that of Example 1 except for the following points:
  • the gap on the side of the return air opening 14 between the side wall 4 and its double wall 37 is connected to the upper chamber 9 via the return air opening 14. Its width is approximately the width of the gap that remains free between the silencing backdrops 22 of the upper chamber 9.
  • the gaps between the side walls 3, 4 of the tunnel module and their double walls 36, 37 are connected to the clean room in the vicinity of the floor by the exhaust air openings 32, 33.
  • the gap on the side of the fan 16 is closed off from the chamber system of the upper part 1.
  • the lower chamber 11 is delimited at the bottom by eight high-performance suspended matter filters 15, two being arranged one behind the other and four next to one another.
  • the example 2 shown has an air-permeable double floor 38, which is necessary from a width of 4.5 m to maintain the laminar flow.
  • the exhaust air openings 32, 33 are located below the raised floor 38.
  • the air flows through the double floor 38, under the double floor 38 to the exhaust air openings 32, 33 on both sides and through the exhaust air openings 32, 33 into the interconnected gaps between the side walls 3, 4 and the double walls 36, 37. It becomes sucked out of the columns through the return air openings 14 connected to the columns into the chamber systems of the tunnel modules, conveyed through the chamber systems and returned to the clean room in a cleaned state.
  • FIG. 5 shows an arrangement of four tunnel modules of the example 3 in series.
  • a tunnel module of example 3 differs from that of example 2 in that in the tunnel module of example 3 two chamber systems, separated by a central wall 41, are arranged side by side in mirror image.
  • the two chamber systems of a tunnel module meet with the sides on which the fans 16 are located on the central wall 41.
  • the return air openings 14 are accordingly on the two sides of the tunnel module.
  • the arrangement of the four tunnel modules is limited by a front wall 42 and a rear wall 43.
  • the gaps adjoining on one side between the side walls 3, 4 of the tunnel modules and their double walls 36, 37 are connected to one another.
  • the arrows in FIG. 5 symbolize the direction of flow of the air at the level of the upper chambers 9.
  • the air flowing from the exhaust air openings 32, 33 is sucked through the gaps between the side walls 3, 4 and the double walls 36, 37 into the separate chamber systems, conveyed through the chamber systems and returned to the clean room in a cleaned manner.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Building Environments (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
EP89104834A 1988-04-30 1989-03-17 Tunnelmodul zum Aufbau eines Reinraumes in Laminar-Flow-Technik Expired - Lifetime EP0340433B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT89104834T ATE83307T1 (de) 1988-04-30 1989-03-17 Tunnelmodul zum aufbau eines reinraumes in laminar-flow-technik.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE8805774U 1988-04-30
DE8805774U DE8805774U1 (xx) 1988-04-30 1988-04-30

Publications (3)

Publication Number Publication Date
EP0340433A2 EP0340433A2 (de) 1989-11-08
EP0340433A3 EP0340433A3 (de) 1991-11-21
EP0340433B1 true EP0340433B1 (de) 1992-12-09

Family

ID=6823584

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89104834A Expired - Lifetime EP0340433B1 (de) 1988-04-30 1989-03-17 Tunnelmodul zum Aufbau eines Reinraumes in Laminar-Flow-Technik

Country Status (5)

Country Link
EP (1) EP0340433B1 (xx)
JP (1) JPH0229529A (xx)
AT (1) ATE83307T1 (xx)
DE (2) DE8805774U1 (xx)
ES (1) ES2036732T3 (xx)

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DE3836147C2 (de) * 1988-10-23 1996-03-21 Ltg Lufttechnische Gmbh Reinraumdecke
DE9116423U1 (xx) * 1991-07-08 1992-09-17 Babcock-Bsh Ag Vormals Buettner-Schilde-Haas Ag, 4150 Krefeld, De
DE4124808A1 (de) * 1991-07-26 1993-01-28 Prettl Rolf Druckmodul zum erzeugen einer stroemung in einem arbeitsraum
DK183691A (da) * 1991-11-08 1993-05-09 Novenco As Ventilations- og filtermodul til renrumsventilation
DE4238595C2 (de) * 1992-11-16 1996-04-11 Kessler & Luch Gmbh Modulare Lüftungseinheit mit integriertem Ventilator und angeschlossenem Filterrahmen, insbesondere für reinraumtechnische Zwecke
FR2700203A1 (fr) * 1993-01-04 1994-07-08 Cherrier Gerard Unité autonome de diffusion d'air propre à flux laminaire destinée aux chambres dites "stériles" et aux volumes propres.
DE4320162C2 (de) * 1993-06-18 1995-11-16 Krantz Tkt Gmbh Modul für eine Reinraumdecke
DE19538040C2 (de) * 1995-10-13 1998-08-13 Jenoptik Jena Gmbh Einrichtung zur Erzeugung eines gereinigten, turbulenzarmen Luftstromes zur Versorgung lokaler Reinräume
DE19545252A1 (de) * 1995-11-24 1997-05-28 Helmut Kaeufer Aggregatkapsel als Verfahrensbaustein
JP4547873B2 (ja) * 2003-06-16 2010-09-22 ソニー株式会社 画素回路、表示装置、および画素回路の駆動方法
DE202010000030U1 (de) 2010-01-13 2010-03-25 Hürner-Funken GmbH Ventilator-Filter-Einheit
DE102010001319A1 (de) * 2010-01-28 2011-08-18 YIT Germany GmbH, 80992 Luftdurchlass mit einem Gehäuse sowie ein Deckensegel mit Luftdurchlass
DE102011106512A1 (de) * 2011-06-15 2013-01-03 Steinbeis GmbH & Co. für Technologietransfer vertreten durch STZ EURO Steinbeis-Transferzentrum Energie- Umwelt-Reinraumtechnik Filtervorrichtung
CN103075765A (zh) * 2013-01-18 2013-05-01 吴定汉 空气净化器
FI20165583A (fi) * 2016-07-13 2018-01-14 Framery Oy Ilmastointijärjestelmä ja -menetelmä
CN110594884A (zh) * 2018-05-24 2019-12-20 湖南匡为科技有限公司 静音空气净化装置
FI128691B (en) * 2018-06-07 2020-10-15 Framery Oy Air conditioning system and method

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Also Published As

Publication number Publication date
JPH0449018B2 (xx) 1992-08-10
EP0340433A3 (de) 1991-11-21
ATE83307T1 (de) 1992-12-15
EP0340433A2 (de) 1989-11-08
DE8805774U1 (xx) 1988-06-23
ES2036732T3 (es) 1993-06-01
DE58902933D1 (de) 1993-01-21
JPH0229529A (ja) 1990-01-31

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