EP0224245A3 - Verfahren zur zerstörungsfreien Analyse der Oberflächenschicht von Proben - Google Patents
Verfahren zur zerstörungsfreien Analyse der Oberflächenschicht von Proben Download PDFInfo
- Publication number
- EP0224245A3 EP0224245A3 EP86116369A EP86116369A EP0224245A3 EP 0224245 A3 EP0224245 A3 EP 0224245A3 EP 86116369 A EP86116369 A EP 86116369A EP 86116369 A EP86116369 A EP 86116369A EP 0224245 A3 EP0224245 A3 EP 0224245A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- sample
- radiation
- samples
- detector
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
Definitions
- the invention relates to a method for non-destructive Analysis of the surface layer of samples for their element composition in which the surface by means of X-ray Radiation applied and with a be over the sample solidified detector spectrometrically from the sample outgoing radiation is examined.
- the object of the invention is to provide the Ver drive the e. G. Kind to design in such a way that the element to composition of the flat surfaces of z. B. massive Samples can be recorded quantitatively and non-destructively.
- the invention therefore provides a technical solution give that allows the physical effects of the total reflection of X-rays on flat surfaces like this to use that the low penetration depth of the totalreflek oriented X-rays of about 10 nm the radiation field the incident X-rays on these surfaces surface layer limited. In this way, exclusive Lich the atoms of the surface to emit fluorescent zenz radiation stimulated.
- the fluorescence radiation can with With the help of a commercially available semiconductor detector, it is easy to Identification and quantification of the surface atoms can be used. With the solution according to the invention so at the same time an extremely thin surface layer was measured technically isolated and their elemental composition recorded.
- the penetration depth of the X-ray radiation and thus the depth the examined surface layer can be in the area from approx. 10 - 100 nm regardless of the thickness of the workpiece by adjusting the one used in this facility Mirror and screen systems as well as the tube height achieved become.
- the essential novelty of the solution according to the invention is therefore it can be seen that the effect of total reflection from Röntgen gene radiation with the help of a suitable apparatus to do this is used, the surface layer of solids - of their base isolated and non-destructive - on theirs To analyze elemental composition.
- a detector 1 On the side of the specimen 3 there is an X-ray source 5 with a Exit window 4 X-ray source 5 is with a Adjustment device provided, which gives the possibility the vertical axis of the X-ray tube in terms of height and relation aligned with the horizontal axis.
- the positio kidney device 7 can be operated from the outside with the help of an Drive 8 are moved so that the sample 3 on the Detek gate axis D is aligned. Between the X-ray tube 5 and the sample 3 has a vertically upward protrusion the bearing block 9, which carries a reflector plate 10.
- the X-ray When working with the measuring arrangement, the X-ray is turn on tube 5, which then through the window 4 a X-ray beam 6 sends through. This X-ray 6 reaches the bottom past an adjustable panel 11 side of the reflector plate 10 and is then turned down steers to the surface 17 of the sample 3 to be examined to reach. Characterized in that the X-ray 6 initially on the Reflector plate 10 strikes, becomes the high-energy part suppresses radiation, d. H. he no longer reaches that actual measuring plane. For example, an X-ray tube used with molybdenum anode, the bremsstrahlung penetrates part of more than 20 keV in the reflector plate 10, so that he can no longer get to sample 3.
- the X-ray can separate the high-energy radiation genrschreibe 5 now in the favorable for the radiation yield can be operated in the most voltage range.
- the radiation path can be measured by height and angular adjustment of the reflector plate 10, the Aperture 11 and the base plate 7 with respect to the reference plane change, so that then, for example, a radiation gear 6, 6 'and 6' 'results.
- fluorescence radiation 16 emanating from sample 3 is indicated, which goes into the detector 1.
- Fig. 2 is an element analysis for the metal traces shown in the surface of a Si wafer as they are after the method according to the invention was carried out.
- Above the X-ray excitation energies in KEV are the counts pulse plotted from which spectrum the metal traces of Ca, Fe, Cu, Zn and Pb with their concentrations in Atoms / cm2.
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims (2)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19853542003 DE3542003A1 (de) | 1985-11-28 | 1985-11-28 | Verfahren zur zerstoerungsfreien analyse der oberflaechenschicht von proben |
DE3542003 | 1985-11-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0224245A2 EP0224245A2 (de) | 1987-06-03 |
EP0224245A3 true EP0224245A3 (de) | 1989-06-07 |
Family
ID=6287037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP86116369A Withdrawn EP0224245A3 (de) | 1985-11-28 | 1986-11-25 | Verfahren zur zerstörungsfreien Analyse der Oberflächenschicht von Proben |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0224245A3 (de) |
JP (1) | JPS62222150A (de) |
DE (1) | DE3542003A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0725684Y2 (ja) * | 1988-09-20 | 1995-06-07 | 理学電機工業株式会社 | 全反射蛍光x線分析装置 |
EP0372278A3 (de) * | 1988-12-02 | 1991-08-21 | Gkss-Forschungszentrum Geesthacht Gmbh | Verfahren und Anordung zur Untersuchung von Proben nach der Methode der Röntgenfluoreszenzanalyse |
JP2853261B2 (ja) * | 1989-05-16 | 1999-02-03 | 三菱マテリアル株式会社 | 金属分析方法および分析装置 |
DE4015275C2 (de) * | 1990-05-12 | 1994-07-21 | Geesthacht Gkss Forschung | Anordnung mit beschichtetem Spiegel zur Untersuchung von Proben nach der Methode der Röntgenfluoreszenzanalyse |
EP0456897A1 (de) * | 1990-05-15 | 1991-11-21 | Siemens Aktiengesellschaft | Messanordnung für die Röntgenfluoreszenzanalyse |
DE4130556C2 (de) * | 1991-09-13 | 1996-07-04 | Picolab Oberflaechen Und Spure | Vorrichtung zur Totalreflexions-Röntgenfluoreszenzanalyse |
CH684903A5 (de) * | 1992-08-27 | 1995-01-31 | Balzers Hochvakuum | Verfahren zur Beurteilung der Beschichtbarkeit von Metallen. |
DE19644936C2 (de) * | 1996-10-29 | 1999-02-04 | Geesthacht Gkss Forschung | Anordnung zur Elementanalyse von Proben mittels einer Röntgenstrahlungsquelle |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2358653A1 (fr) * | 1976-07-16 | 1978-02-10 | Kernenergieverwert Ges Fuer | Dispositif de mesure pour analyses par fluorescence aux rayons x |
DE2736960A1 (de) * | 1977-08-17 | 1979-03-01 | Kernenergieverwert Ges Fuer | Messanordnung zur roentgenfluoreszenzanalyse |
US4169228A (en) * | 1977-06-18 | 1979-09-25 | International Business Machines Corporation | X-ray analyzer for testing layered structures |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US169228A (en) * | 1875-10-26 | Improvement in rocking-chairs |
-
1985
- 1985-11-28 DE DE19853542003 patent/DE3542003A1/de not_active Ceased
-
1986
- 1986-11-25 EP EP86116369A patent/EP0224245A3/de not_active Withdrawn
- 1986-11-28 JP JP61282205A patent/JPS62222150A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2358653A1 (fr) * | 1976-07-16 | 1978-02-10 | Kernenergieverwert Ges Fuer | Dispositif de mesure pour analyses par fluorescence aux rayons x |
US4169228A (en) * | 1977-06-18 | 1979-09-25 | International Business Machines Corporation | X-ray analyzer for testing layered structures |
DE2736960A1 (de) * | 1977-08-17 | 1979-03-01 | Kernenergieverwert Ges Fuer | Messanordnung zur roentgenfluoreszenzanalyse |
Non-Patent Citations (1)
Title |
---|
ANALYTICAL CHEMISTRY, Band 56, Nr. 9, August 1984, Seiten 1711-1715, American Chemical Society, Washington, US; G. ANDERMANN et al.: "Some fundamental aspects of surface-film analysis with variable angle ultrasoft X-ray fluorescence spectrometry" * |
Also Published As
Publication number | Publication date |
---|---|
DE3542003A1 (de) | 1987-06-04 |
JPS62222150A (ja) | 1987-09-30 |
EP0224245A2 (de) | 1987-06-03 |
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Legal Events
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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STAA | Information on the status of an ep patent application or granted ep patent |
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18D | Application deemed to be withdrawn |
Effective date: 19881201 |
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RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: KNOTH, JOACHIM Inventor name: SCHNEIDER, HARALD Inventor name: SCHWENKE, HEINRICH |