DK171662B1 - Højfrekvensionkilde - Google Patents

Højfrekvensionkilde Download PDF

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Publication number
DK171662B1
DK171662B1 DK642888A DK642888A DK171662B1 DK 171662 B1 DK171662 B1 DK 171662B1 DK 642888 A DK642888 A DK 642888A DK 642888 A DK642888 A DK 642888A DK 171662 B1 DK171662 B1 DK 171662B1
Authority
DK
Denmark
Prior art keywords
plasma
ion
container
vessel
coil
Prior art date
Application number
DK642888A
Other languages
Danish (da)
English (en)
Other versions
DK642888D0 (da
DK642888A (da
Inventor
Hans Oechsner
Original Assignee
Hans Oechsner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hans Oechsner filed Critical Hans Oechsner
Publication of DK642888D0 publication Critical patent/DK642888D0/da
Publication of DK642888A publication Critical patent/DK642888A/da
Application granted granted Critical
Publication of DK171662B1 publication Critical patent/DK171662B1/da

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • General Induction Heating (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electrotherapy Devices (AREA)
  • Plasma Technology (AREA)
DK642888A 1987-03-18 1988-11-17 Højfrekvensionkilde DK171662B1 (da)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE3708716 1987-03-18
DE3708716A DE3708716C2 (de) 1987-03-18 1987-03-18 Hochfrequenz-ionenquelle
DE8800152 1988-03-16
PCT/DE1988/000152 WO1988007259A1 (fr) 1987-03-18 1988-03-16 Source d'ions de haute frequence

Publications (3)

Publication Number Publication Date
DK642888D0 DK642888D0 (da) 1988-11-17
DK642888A DK642888A (da) 1988-11-17
DK171662B1 true DK171662B1 (da) 1997-03-03

Family

ID=6323318

Family Applications (1)

Application Number Title Priority Date Filing Date
DK642888A DK171662B1 (da) 1987-03-18 1988-11-17 Højfrekvensionkilde

Country Status (9)

Country Link
US (1) US5017835A (fr)
EP (1) EP0349555B1 (fr)
JP (1) JP2776855B2 (fr)
KR (1) KR960008925B1 (fr)
AT (1) ATE90811T1 (fr)
AU (1) AU1423888A (fr)
DE (2) DE3708716C2 (fr)
DK (1) DK171662B1 (fr)
WO (1) WO1988007259A1 (fr)

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US7196283B2 (en) 2000-03-17 2007-03-27 Applied Materials, Inc. Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface
US8617351B2 (en) * 2002-07-09 2013-12-31 Applied Materials, Inc. Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction
US20070048882A1 (en) * 2000-03-17 2007-03-01 Applied Materials, Inc. Method to reduce plasma-induced charging damage
US6528751B1 (en) 2000-03-17 2003-03-04 Applied Materials, Inc. Plasma reactor with overhead RF electrode tuned to the plasma
US6900596B2 (en) * 2002-07-09 2005-05-31 Applied Materials, Inc. Capacitively coupled plasma reactor with uniform radial distribution of plasma
US7220937B2 (en) * 2000-03-17 2007-05-22 Applied Materials, Inc. Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination
US7030335B2 (en) * 2000-03-17 2006-04-18 Applied Materials, Inc. Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
US7141757B2 (en) * 2000-03-17 2006-11-28 Applied Materials, Inc. Plasma reactor with overhead RF source power electrode having a resonance that is virtually pressure independent
US6894245B2 (en) * 2000-03-17 2005-05-17 Applied Materials, Inc. Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
DE10018143C5 (de) * 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems
DE10058326C1 (de) 2000-11-24 2002-06-13 Astrium Gmbh Induktiv gekoppelte Hochfrequenz-Elektronenquelle mit reduziertem Leistungsbedarf durch elektrostatischen Einschluss von Elektronen
JP2003124096A (ja) * 2001-10-11 2003-04-25 Advantest Corp 電子ビーム露光方法及び露光装置
US6771026B2 (en) * 2002-06-12 2004-08-03 Tokyo Electron Limited Plasma generation by mode-conversion of RF-electromagnetic wave to electron cyclotron wave
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US6876155B2 (en) * 2002-12-31 2005-04-05 Lam Research Corporation Plasma processor apparatus and method, and antenna
US7795153B2 (en) * 2003-05-16 2010-09-14 Applied Materials, Inc. Method of controlling a chamber based upon predetermined concurrent behavior of selected plasma parameters as a function of selected chamber parameters
US7901952B2 (en) * 2003-05-16 2011-03-08 Applied Materials, Inc. Plasma reactor control by translating desired values of M plasma parameters to values of N chamber parameters
US7470626B2 (en) * 2003-05-16 2008-12-30 Applied Materials, Inc. Method of characterizing a chamber based upon concurrent behavior of selected plasma parameters as a function of source power, bias power and chamber pressure
US7247218B2 (en) 2003-05-16 2007-07-24 Applied Materials, Inc. Plasma density, energy and etch rate measurements at bias power input and real time feedback control of plasma source and bias power
US7910013B2 (en) 2003-05-16 2011-03-22 Applied Materials, Inc. Method of controlling a chamber based upon predetermined concurrent behavior of selected plasma parameters as a function of source power, bias power and chamber pressure
US7452824B2 (en) * 2003-05-16 2008-11-18 Applied Materials, Inc. Method of characterizing a chamber based upon concurrent behavior of selected plasma parameters as a function of plural chamber parameters
US7192874B2 (en) * 2003-07-15 2007-03-20 International Business Machines Corporation Method for reducing foreign material concentrations in etch chambers
US7335521B2 (en) * 2004-07-02 2008-02-26 Oc Oerlikon Balzers Ag Method for the production of multilayer discs
JP4440304B2 (ja) * 2005-04-22 2010-03-24 昌伸 布垣 固体イオン源
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US20070007844A1 (en) * 2005-07-08 2007-01-11 Levitronics, Inc. Self-sustaining electric-power generator utilizing electrons of low inertial mass to magnify inductive energy
DE102006062710A1 (de) * 2006-04-27 2007-11-15 Ipt Ionen- Und Plasmatechnik Gmbh Plasmaquelle
DE102008022181B4 (de) * 2008-05-05 2019-05-02 Arianegroup Gmbh Ionentriebwerk
DE102010055889B4 (de) * 2010-12-21 2014-04-30 Ushio Denki Kabushiki Kaisha Verfahren und Vorrichtung zur Erzeugung kurzwelliger Strahlung mittels einer gasentladungsbasierten Hochfrequenzhochstromentladung
US8541758B1 (en) * 2011-06-17 2013-09-24 Aqua Treatment Services, Inc. Ultraviolet reactor
US8481966B1 (en) * 2012-02-28 2013-07-09 Tiza Lab, L.L.C. Microplasma ion source for focused ion beam applications
US8674321B2 (en) * 2012-02-28 2014-03-18 Tiza Lab, L.L.C. Microplasma ion source for focused ion beam applications
CN104411082B (zh) * 2014-11-12 2017-12-19 中国科学院深圳先进技术研究院 等离子源系统和等离子生成方法

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Also Published As

Publication number Publication date
KR890700918A (ko) 1989-04-28
ATE90811T1 (de) 1993-07-15
WO1988007259A1 (fr) 1988-09-22
AU1423888A (en) 1988-10-10
DE3708716A1 (de) 1988-09-29
US5017835A (en) 1991-05-21
DK642888D0 (da) 1988-11-17
DE3708716C2 (de) 1993-11-04
KR960008925B1 (ko) 1996-07-09
JP2776855B2 (ja) 1998-07-16
DK642888A (da) 1988-11-17
JPH02502594A (ja) 1990-08-16
EP0349555A1 (fr) 1990-01-10
EP0349555B1 (fr) 1993-06-16
DE3881879D1 (de) 1993-07-22

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Legal Events

Date Code Title Description
B1 Patent granted (law 1993)
PBP Patent lapsed