DK0600392T3 - Fremgangsmåde til forstærkning af en halvleder-wafer samt en forstærket halvleder-wafer - Google Patents

Fremgangsmåde til forstærkning af en halvleder-wafer samt en forstærket halvleder-wafer

Info

Publication number
DK0600392T3
DK0600392T3 DK93119108T DK93119108T DK0600392T3 DK 0600392 T3 DK0600392 T3 DK 0600392T3 DK 93119108 T DK93119108 T DK 93119108T DK 93119108 T DK93119108 T DK 93119108T DK 0600392 T3 DK0600392 T3 DK 0600392T3
Authority
DK
Denmark
Prior art keywords
semiconductor wafer
reinforcing
well
reinforced
reinforced semiconductor
Prior art date
Application number
DK93119108T
Other languages
English (en)
Inventor
Toshiyuki Nitta
Original Assignee
Sumitomo Electric Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries filed Critical Sumitomo Electric Industries
Application granted granted Critical
Publication of DK0600392T3 publication Critical patent/DK0600392T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319—Arrangement of the layer connectors prior to mounting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838—Bonding techniques
    • H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01013—Aluminum [Al]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01015—Phosphorus [P]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01027—Cobalt [Co]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01049—Indium [In]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01075—Rhenium [Re]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/0132—Binary Alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06—Polymers
    • H01L2924/078—Adhesive characteristics other than chemical
    • H01L2924/07802—Adhesive characteristics other than chemical not being an ohmic electrical conductor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/1026—Compound semiconductors
    • H01L2924/1032—III-V
    • H01L2924/10329—Gallium arsenide [GaAs]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1203—Rectifying Diode
    • H01L2924/12036—PN diode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12041—LED

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Adhesives Or Adhesive Processes (AREA)
DK93119108T 1992-11-26 1993-11-26 Fremgangsmåde til forstærkning af en halvleder-wafer samt en forstærket halvleder-wafer DK0600392T3 (da)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP31738892 1992-11-26
JP11717393 1993-05-19
JP5222459A JPH0737768A (ja) 1992-11-26 1993-09-07 半導体ウェハの補強方法及び補強された半導体ウェハ

Publications (1)

Publication Number Publication Date
DK0600392T3 true DK0600392T3 (da) 2001-12-03

Family

ID=27313317

Family Applications (1)

Application Number Title Priority Date Filing Date
DK93119108T DK0600392T3 (da) 1992-11-26 1993-11-26 Fremgangsmåde til forstærkning af en halvleder-wafer samt en forstærket halvleder-wafer

Country Status (5)

Country Link
US (1) US5445692A (da)
EP (2) EP0890982A3 (da)
JP (1) JPH0737768A (da)
DE (1) DE69330777T2 (da)
DK (1) DK0600392T3 (da)

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DE19610112C2 (de) * 1996-03-14 2000-04-06 Tech Gmbh Antriebstechnik Und Verfahren zum Auflöten von Halbleiterchips
US5972780A (en) * 1996-08-22 1999-10-26 Nippon Telegraph Telephone Corporation Thin film forming apparatus and method
DE19755088A1 (de) * 1997-12-11 1999-06-17 Daimler Chrysler Ag Kalibriervorrichtung zum Verkleben von Scheiben
JP3441382B2 (ja) * 1998-10-14 2003-09-02 日本電信電話株式会社 半導体装置の製造方法
JP2001185519A (ja) 1999-12-24 2001-07-06 Hitachi Ltd 半導体装置及びその製造方法
DE10029791C2 (de) 2000-06-16 2002-04-18 Infineon Technologies Ag Verfahren zur Herstellung einer stabilen Verbindung zwischen zwei Wafern
US6551905B1 (en) * 2000-10-20 2003-04-22 Trw Inc. Wafer adhesive for semiconductor dry etch applications
TW522531B (en) * 2000-10-20 2003-03-01 Matsushita Electric Ind Co Ltd Semiconductor device, method of manufacturing the device and mehtod of mounting the device
DE10054159A1 (de) * 2000-11-02 2002-05-16 Wacker Siltronic Halbleitermat Verfahren zur Montage von Halbleiterscheiben
JP3883929B2 (ja) * 2001-09-25 2007-02-21 大日本スクリーン製造株式会社 薄膜形成装置および薄膜形成方法
US6732905B2 (en) * 2002-04-16 2004-05-11 Agilent Technologies, Inc. Vented cavity, hermetic solder seal
AU2003236251A1 (en) * 2002-04-17 2003-10-27 Matsushita Electric Industrial Co., Ltd. Semiconductor device and method for assembling the same
JP4565804B2 (ja) * 2002-06-03 2010-10-20 スリーエム イノベイティブ プロパティズ カンパニー 被研削基材を含む積層体、その製造方法並びに積層体を用いた極薄基材の製造方法及びそのための装置
FR2842647B1 (fr) * 2002-07-17 2004-09-17 Soitec Silicon On Insulator Procede de transfert de couche
US7063758B2 (en) * 2002-07-29 2006-06-20 Three Bond Co., Ltd. Laminating apparatus and laminating method
JP2006186224A (ja) * 2004-12-28 2006-07-13 Jsr Corp 基板の支持方法および該方法に用いられる支持体
WO2006090650A1 (ja) * 2005-02-23 2006-08-31 Jsr Corporation ウェハ加工方法
JP2007109999A (ja) * 2005-10-17 2007-04-26 Tokyo Electron Ltd 貼り合せ方法
WO2010082342A1 (ja) * 2009-01-16 2010-07-22 トヨタ自動車株式会社 半導体装置、半導体装置の製造方法、半導体装置の製造装置、および半導体装置の評価方法
US20110309467A1 (en) * 2009-03-09 2011-12-22 Sharp Kabushiki Kaisha Semiconductor device and manufacturing method thereof
JP2011254051A (ja) * 2010-06-04 2011-12-15 Sumitomo Electric Ind Ltd 炭化珪素基板の製造方法、半導体装置の製造方法、炭化珪素基板および半導体装置
CN102985364B (zh) * 2010-06-16 2015-05-20 信越化学工业株式会社 钟罩清洁化方法、多晶硅的制造方法以及钟罩用干燥装置
US8652935B2 (en) * 2010-12-16 2014-02-18 Tessera, Inc. Void-free wafer bonding using channels
JP5803549B2 (ja) * 2011-10-13 2015-11-04 株式会社デンソー 半導体装置の製造方法および半導体装置の製造装置
JP5895676B2 (ja) * 2012-04-09 2016-03-30 三菱電機株式会社 半導体装置の製造方法
DE102012219145A1 (de) * 2012-10-19 2014-05-08 Robert Bosch Gmbh Elektronikanordnung mit reduzierter Toleranzkette
JP6534871B2 (ja) * 2015-06-24 2019-06-26 株式会社ディスコ 板状ワークの貼り合わせ方法
JP6916662B2 (ja) * 2017-05-12 2021-08-11 株式会社ダイセル シランカップリング剤処理装置、半導体チップ製造ライン、及び半導体ウェハの製造方法

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Also Published As

Publication number Publication date
JPH0737768A (ja) 1995-02-07
DE69330777T2 (de) 2002-07-04
DE69330777D1 (de) 2001-10-25
EP0600392A2 (en) 1994-06-08
US5445692A (en) 1995-08-29
EP0890982A2 (en) 1999-01-13
EP0600392B1 (en) 2001-09-19
EP0600392A3 (en) 1994-08-24
EP0890982A3 (en) 1999-03-31

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