DE69929042T2 - Herstellungsverfahren für ein halbleiterscheibenpaar mit versiegelten kammern - Google Patents
Herstellungsverfahren für ein halbleiterscheibenpaar mit versiegelten kammern Download PDFInfo
- Publication number
- DE69929042T2 DE69929042T2 DE69929042T DE69929042T DE69929042T2 DE 69929042 T2 DE69929042 T2 DE 69929042T2 DE 69929042 T DE69929042 T DE 69929042T DE 69929042 T DE69929042 T DE 69929042T DE 69929042 T2 DE69929042 T2 DE 69929042T2
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor wafer
- silicon
- wafer
- layer
- silicon semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 81
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 235000012431 wafers Nutrition 0.000 claims description 108
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 26
- 229910052710 silicon Inorganic materials 0.000 claims description 26
- 239000010703 silicon Substances 0.000 claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 18
- 238000007789 sealing Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 238000000137 annealing Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 238000005086 pumping Methods 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims 3
- 230000000873 masking effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 30
- 230000001012 protector Effects 0.000 description 13
- 229910000679 solder Inorganic materials 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 238000013459 approach Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- BGTFCAQCKWKTRL-YDEUACAXSA-N chembl1095986 Chemical class C1[C@@H](N)[C@@H](O)[C@H](C)O[C@H]1O[C@@H]([C@H]1C(N[C@H](C2=CC(O)=CC(O[C@@H]3[C@H]([C@@H](O)[C@H](O)[C@@H](CO)O3)O)=C2C=2C(O)=CC=C(C=2)[C@@H](NC(=O)[C@@H]2NC(=O)[C@@H]3C=4C=C(C(=C(O)C=4)C)OC=4C(O)=CC=C(C=4)[C@@H](N)C(=O)N[C@@H](C(=O)N3)[C@H](O)C=3C=CC(O4)=CC=3)C(=O)N1)C(O)=O)=O)C(C=C1)=CC=C1OC1=C(O[C@@H]3[C@H]([C@H](O)[C@@H](O)[C@H](CO[C@@H]5[C@H]([C@@H](O)[C@H](O)[C@@H](C)O5)O)O3)O[C@@H]3[C@H]([C@@H](O)[C@H](O)[C@@H](CO)O3)O[C@@H]3[C@H]([C@H](O)[C@@H](CO)O3)O)C4=CC2=C1 BGTFCAQCKWKTRL-YDEUACAXSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 238000009461 vacuum packaging Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/56—Compression moulding under special conditions, e.g. vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
- G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N19/00—Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/56—Compression moulding under special conditions, e.g. vacuum
- B29C2043/561—Compression moulding under special conditions, e.g. vacuum under vacuum conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Micromachines (AREA)
- Radiation Pyrometers (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US52645 | 1987-05-21 | ||
| US09/052,645 US6036872A (en) | 1998-03-31 | 1998-03-31 | Method for making a wafer-pair having sealed chambers |
| PCT/US1999/006890 WO1999050913A1 (en) | 1998-03-31 | 1999-03-30 | A method of making a wafer-pair having sealed chambers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69929042D1 DE69929042D1 (de) | 2006-01-26 |
| DE69929042T2 true DE69929042T2 (de) | 2006-08-03 |
Family
ID=21978963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69929042T Expired - Lifetime DE69929042T2 (de) | 1998-03-31 | 1999-03-30 | Herstellungsverfahren für ein halbleiterscheibenpaar mit versiegelten kammern |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US6036872A (ja) |
| EP (1) | EP1070353B1 (ja) |
| JP (3) | JP4434488B2 (ja) |
| CA (1) | CA2326677C (ja) |
| DE (1) | DE69929042T2 (ja) |
| WO (1) | WO1999050913A1 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013106596A1 (de) * | 2013-03-13 | 2014-09-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Verfahren für die Ausbildung von Biochips sowie Biochips mit nicht-organischen Kontaktauflagen für einen verbesserten Wärmehaushalt |
| DE102005055083B4 (de) * | 2005-11-18 | 2018-10-25 | Robert Bosch Gmbh | Thermoelektrischer Sensor und Verfahren zur Herstellung |
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| EP2270845A3 (en) * | 1996-10-29 | 2013-04-03 | Invensas Corporation | Integrated circuits and methods for their fabrication |
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| US6036872A (en) | 1998-03-31 | 2000-03-14 | Honeywell Inc. | Method for making a wafer-pair having sealed chambers |
| US6252229B1 (en) | 1998-07-10 | 2001-06-26 | Boeing North American, Inc. | Sealed-cavity microstructure and microbolometer and associated fabrication methods |
| US6236096B1 (en) | 1998-10-06 | 2001-05-22 | National Science Council Of Republic Of China | Structure of a three-electrode capacitive pressure sensor |
| JP2000186931A (ja) * | 1998-12-21 | 2000-07-04 | Murata Mfg Co Ltd | 小型電子部品及びその製造方法並びに該小型電子部品に用いるビアホールの成形方法 |
| WO2001036320A2 (en) * | 1999-11-15 | 2001-05-25 | Amkor Technology, Inc. | Micromachine package |
| US6415505B1 (en) | 1999-11-15 | 2002-07-09 | Amkor Technology, Inc. | Micromachine package fabrication method |
| DE19964638B3 (de) * | 1999-12-21 | 2013-08-29 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Sensors mit zumindest einer mikromechanischen Struktur |
| US6479320B1 (en) | 2000-02-02 | 2002-11-12 | Raytheon Company | Vacuum package fabrication of microelectromechanical system devices with integrated circuit components |
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| JP2002192394A (ja) * | 2000-12-28 | 2002-07-10 | Mitsubishi Gas Chem Co Inc | 無機基板のプレス加工法およびプレス装置 |
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- 1999-03-30 WO PCT/US1999/006890 patent/WO1999050913A1/en active IP Right Grant
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005055083B4 (de) * | 2005-11-18 | 2018-10-25 | Robert Bosch Gmbh | Thermoelektrischer Sensor und Verfahren zur Herstellung |
| DE102013106596A1 (de) * | 2013-03-13 | 2014-09-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Verfahren für die Ausbildung von Biochips sowie Biochips mit nicht-organischen Kontaktauflagen für einen verbesserten Wärmehaushalt |
| US8846416B1 (en) | 2013-03-13 | 2014-09-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for forming biochips and biochips with non-organic landings for improved thermal budget |
| DE102013106596B4 (de) * | 2013-03-13 | 2015-07-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Verfahren für die Ausbildung von Biochips mit nicht-organischen Kontaktauflagen für einen verbesserten Wärmehaushalt |
| US10145847B2 (en) | 2013-03-13 | 2018-12-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for forming biochips and biochips with non-organic landings for improved thermal budget |
| US11280786B2 (en) | 2013-03-13 | 2022-03-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for forming biochips and biochips with non-organic landings for improved thermal budget |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4434488B2 (ja) | 2010-03-17 |
| DE69929042D1 (de) | 2006-01-26 |
| CA2326677C (en) | 2008-06-10 |
| US6036872A (en) | 2000-03-14 |
| EP1070353B1 (en) | 2005-12-21 |
| JP2014179608A (ja) | 2014-09-25 |
| JP2002510865A (ja) | 2002-04-09 |
| CA2326677A1 (en) | 1999-10-07 |
| JP2010080967A (ja) | 2010-04-08 |
| JP5775617B2 (ja) | 2015-09-09 |
| WO1999050913A1 (en) | 1999-10-07 |
| USRE39143E1 (en) | 2006-06-27 |
| EP1070353A1 (en) | 2001-01-24 |
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