DE69920606T2 - Anordnung mit verbundenen dichten Wafern, die eine Struktur mit einer Vakuumkammer bilden und Verfahren zu ihrer Herstellung - Google Patents
Anordnung mit verbundenen dichten Wafern, die eine Struktur mit einer Vakuumkammer bilden und Verfahren zu ihrer Herstellung Download PDFInfo
- Publication number
- DE69920606T2 DE69920606T2 DE69920606T DE69920606T DE69920606T2 DE 69920606 T2 DE69920606 T2 DE 69920606T2 DE 69920606 T DE69920606 T DE 69920606T DE 69920606 T DE69920606 T DE 69920606T DE 69920606 T2 DE69920606 T2 DE 69920606T2
- Authority
- DE
- Germany
- Prior art keywords
- wafer
- seal
- wafers
- palladium
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/124,311 US6090687A (en) | 1998-07-29 | 1998-07-29 | System and method for bonding and sealing microfabricated wafers to form a single structure having a vacuum chamber therein |
| US124311 | 1998-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69920606D1 DE69920606D1 (de) | 2004-11-04 |
| DE69920606T2 true DE69920606T2 (de) | 2005-10-06 |
Family
ID=22414109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69920606T Expired - Fee Related DE69920606T2 (de) | 1998-07-29 | 1999-03-18 | Anordnung mit verbundenen dichten Wafern, die eine Struktur mit einer Vakuumkammer bilden und Verfahren zu ihrer Herstellung |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6090687A (enExample) |
| EP (1) | EP0982773B1 (enExample) |
| JP (1) | JP2000101019A (enExample) |
| DE (1) | DE69920606T2 (enExample) |
Families Citing this family (58)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6287850B1 (en) * | 1995-06-07 | 2001-09-11 | Affymetrix, Inc. | Bioarray chip reaction apparatus and its manufacture |
| US6168963B1 (en) * | 1999-06-21 | 2001-01-02 | Lucent Technologies, Inc. | System for adhering parts |
| KR100343211B1 (ko) * | 1999-11-04 | 2002-07-10 | 윤종용 | 웨이퍼 레벨 진공 패키징이 가능한 mems의 구조물의제작방법 |
| US6669802B2 (en) * | 2000-12-21 | 2003-12-30 | Spenco | Composite riser |
| US6584416B2 (en) * | 2001-08-16 | 2003-06-24 | Hewlett-Packard Development Company | System and methods for forming data storage devices |
| DE10157848B4 (de) * | 2001-11-24 | 2005-01-13 | Eads Deutschland Gmbh | Verfahren zur Herstellung eines mikromechanischen Bauelements mit abgeschlossenem Innenraum und mikromechanisches Bauelement mit abgeschlossenem Innenraum |
| FR2834283B1 (fr) | 2001-12-28 | 2005-06-24 | Commissariat Energie Atomique | Procede et zone de scellement entre deux substrats d'une microstructure |
| AU2003209564A1 (en) * | 2002-03-19 | 2003-09-29 | Koninklijke Philips Electronics N.V. | Chip stack with intermediate cavity |
| US20040082058A1 (en) * | 2002-10-29 | 2004-04-29 | Arthur Schleifer | Array hybridization apparatus and method for making uniform sample volumes |
| US7275292B2 (en) * | 2003-03-07 | 2007-10-02 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Method for fabricating an acoustical resonator on a substrate |
| US20040214310A1 (en) * | 2003-04-25 | 2004-10-28 | Parker Russell A. | Apparatus and method for array alignment |
| DE10323394B4 (de) * | 2003-05-20 | 2006-09-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Erzeugen einer elektrischen Kontaktierung zwischen zwei Halbleiterstücken und Verfahren zum Herstellen einer Anordnung von Halbleiterstücken |
| US6946928B2 (en) * | 2003-10-30 | 2005-09-20 | Agilent Technologies, Inc. | Thin-film acoustically-coupled transformer |
| US7294919B2 (en) * | 2003-11-26 | 2007-11-13 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Device having a complaint element pressed between substrates |
| US20050196761A1 (en) * | 2004-03-08 | 2005-09-08 | Thompson Allen C. | Array hybridization apparatus and method |
| US20050202445A1 (en) * | 2004-03-09 | 2005-09-15 | Thompson Allen C. | Thermoplastic array hybridization apparatus and method |
| US7615833B2 (en) * | 2004-07-13 | 2009-11-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator package and method of fabricating same |
| US7388454B2 (en) | 2004-10-01 | 2008-06-17 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using alternating frame structure |
| US7274050B2 (en) * | 2004-10-29 | 2007-09-25 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Packaging and manufacturing of an integrated circuit |
| US8981876B2 (en) | 2004-11-15 | 2015-03-17 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Piezoelectric resonator structures and electrical filters having frame elements |
| DE102004056970B4 (de) * | 2004-11-25 | 2008-07-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zum Erzeugen einer elektrischen Kontaktierung zwischen zwei Halbleiterstücken durch ein mechanisches Element |
| US7202560B2 (en) | 2004-12-15 | 2007-04-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Wafer bonding of micro-electro mechanical systems to active circuitry |
| US7791434B2 (en) | 2004-12-22 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric |
| US7369013B2 (en) | 2005-04-06 | 2008-05-06 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using filled recessed region |
| US20070004079A1 (en) * | 2005-06-30 | 2007-01-04 | Geefay Frank S | Method for making contact through via contact to an offset contactor inside a cap for the wafer level packaging of FBAR chips |
| US7737807B2 (en) * | 2005-10-18 | 2010-06-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators |
| DE102006000687B4 (de) * | 2006-01-03 | 2010-09-09 | Thallner, Erich, Dipl.-Ing. | Kombination aus einem Träger und einem Wafer, Vorrichtung zum Trennen der Kombination und Verfahren zur Handhabung eines Trägers und eines Wafers |
| US7746677B2 (en) * | 2006-03-09 | 2010-06-29 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | AC-DC converter circuit and power supply |
| US20070210748A1 (en) * | 2006-03-09 | 2007-09-13 | Mark Unkrich | Power supply and electronic device having integrated power supply |
| US7479685B2 (en) | 2006-03-10 | 2009-01-20 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Electronic device on substrate with cavity and mitigated parasitic leakage path |
| US20080164606A1 (en) * | 2007-01-08 | 2008-07-10 | Christoffer Graae Greisen | Spacers for wafer bonding |
| US7732977B2 (en) | 2008-04-30 | 2010-06-08 | Avago Technologies Wireless Ip (Singapore) | Transceiver circuit for film bulk acoustic resonator (FBAR) transducers |
| US7855618B2 (en) | 2008-04-30 | 2010-12-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator electrical impedance transformers |
| US8058143B2 (en) * | 2009-01-21 | 2011-11-15 | Freescale Semiconductor, Inc. | Substrate bonding with metal germanium silicon material |
| US8202741B2 (en) * | 2009-03-04 | 2012-06-19 | Koninklijke Philips Electronics N.V. | Method of bonding a semiconductor device using a compliant bonding structure |
| EP2230683B1 (de) | 2009-03-18 | 2016-03-16 | EV Group GmbH | Vorrichtung und Verfahren zum Ablösen eines Wafers von einem Träger |
| US8248185B2 (en) | 2009-06-24 | 2012-08-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator structure comprising a bridge |
| US8902023B2 (en) | 2009-06-24 | 2014-12-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator structure having an electrode with a cantilevered portion |
| EP2667407B1 (de) | 2009-09-01 | 2019-01-23 | EV Group GmbH | Verfahren zum Ablösen eines Produktsubstrats (z.B. eines Halbleiterwafers) von einem Trägersubstrat mittels eines Lösungsmittels und Schallwellen durch Verformung eines auf einem Filmrahmen montierten flexiblen Films |
| US8193877B2 (en) | 2009-11-30 | 2012-06-05 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Duplexer with negative phase shifting circuit |
| US8796904B2 (en) | 2011-10-31 | 2014-08-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer |
| US9243316B2 (en) | 2010-01-22 | 2016-01-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method of fabricating piezoelectric material with selected c-axis orientation |
| EP2381464B1 (de) | 2010-04-23 | 2012-09-05 | EV Group GmbH | Vorrichtung und Verfahren zum Ablösen eines Produktsubstrats von einem Trägersubstrat |
| JP6342033B2 (ja) * | 2010-06-30 | 2018-06-13 | キヤノン株式会社 | 固体撮像装置 |
| FR2963982B1 (fr) | 2010-08-20 | 2012-09-28 | Soitec Silicon On Insulator | Procede de collage a basse temperature |
| US8962443B2 (en) | 2011-01-31 | 2015-02-24 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Semiconductor device having an airbridge and method of fabricating the same |
| US9048812B2 (en) | 2011-02-28 | 2015-06-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer |
| US9154112B2 (en) | 2011-02-28 | 2015-10-06 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Coupled resonator filter comprising a bridge |
| US9425764B2 (en) | 2012-10-25 | 2016-08-23 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having composite electrodes with integrated lateral features |
| US9203374B2 (en) | 2011-02-28 | 2015-12-01 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator comprising a bridge |
| US9083302B2 (en) | 2011-02-28 | 2015-07-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator |
| US9136818B2 (en) | 2011-02-28 | 2015-09-15 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked acoustic resonator comprising a bridge |
| US9148117B2 (en) | 2011-02-28 | 2015-09-29 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Coupled resonator filter comprising a bridge and frame elements |
| US9444426B2 (en) | 2012-10-25 | 2016-09-13 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having integrated lateral feature and temperature compensation feature |
| US8575820B2 (en) | 2011-03-29 | 2013-11-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked bulk acoustic resonator |
| US8350445B1 (en) | 2011-06-16 | 2013-01-08 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator comprising non-piezoelectric layer and bridge |
| US8922302B2 (en) | 2011-08-24 | 2014-12-30 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator formed on a pedestal |
| JP5984912B2 (ja) * | 2012-03-23 | 2016-09-06 | オリンパス株式会社 | 積層型半導体の製造方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5988864A (ja) * | 1982-11-12 | 1984-05-22 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
| US4769272A (en) * | 1987-03-17 | 1988-09-06 | National Semiconductor Corporation | Ceramic lid hermetic seal package structure |
| US5262347A (en) * | 1991-08-14 | 1993-11-16 | Bell Communications Research, Inc. | Palladium welding of a semiconductor body |
| DE69321745T2 (de) * | 1992-02-04 | 1999-10-07 | Matsushita Electric Industrial Co., Ltd. | Direktkontakt-Bildsensor und Herstellungsverfahren dafür |
| JP3613838B2 (ja) * | 1995-05-18 | 2005-01-26 | 株式会社デンソー | 半導体装置の製造方法 |
| US5918794A (en) * | 1995-12-28 | 1999-07-06 | Lucent Technologies Inc. | Solder bonding of dense arrays of microminiature contact pads |
-
1998
- 1998-07-29 US US09/124,311 patent/US6090687A/en not_active Expired - Fee Related
-
1999
- 1999-03-18 DE DE69920606T patent/DE69920606T2/de not_active Expired - Fee Related
- 1999-03-18 EP EP99105569A patent/EP0982773B1/en not_active Expired - Lifetime
- 1999-07-28 JP JP11213164A patent/JP2000101019A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE69920606D1 (de) | 2004-11-04 |
| EP0982773B1 (en) | 2004-09-29 |
| EP0982773A3 (en) | 2000-12-20 |
| EP0982773A2 (en) | 2000-03-01 |
| JP2000101019A (ja) | 2000-04-07 |
| US6090687A (en) | 2000-07-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69920606T2 (de) | Anordnung mit verbundenen dichten Wafern, die eine Struktur mit einer Vakuumkammer bilden und Verfahren zu ihrer Herstellung | |
| DE69710248T2 (de) | Bondverfahren für integrierte Schaltung | |
| DE69018846T2 (de) | Keramische Packung vom Halbleiteranordnungstyp und Verfahren zum Zusammensetzen derselben. | |
| DE19619921B4 (de) | Verfahren zum Herstellen einer Halbleitervorrichtung mit Funktionselement und Schutzkappe | |
| DE19941872B4 (de) | Elektronikkomponente, wie z.B. ein Akustikoberflächenwellenbauelement, und Verfahren zum Herstellen derselben | |
| DE102012206869B4 (de) | Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements | |
| DE19915019B4 (de) | Verfahren zum Herstellen einer Schmelzdichtung für eine LCD-Einrichtung | |
| DE3924225C2 (de) | Verfahren zur Herstellung eines Keramik-Metall-Verbundsubstrats sowie Keramik-Metall-Verbundsubstrat | |
| DE4008624A1 (de) | Verfahren zur herstellung einer hybriden halbleiterstruktur und nach dem verfahren hergestellte halbleiterstruktur | |
| DE4019091A1 (de) | Waermeableitungseinrichtung fuer halbleiterbauelemente und verfahren zu deren herstellung | |
| DE102007050865A1 (de) | Funktionsbauteil | |
| DE68903683T2 (de) | Dichtungsstruktur eines moduls. | |
| WO2010094511A2 (de) | Bauteilanordnung und verfahren zu dessen herstellung | |
| DE19522338B4 (de) | Chipträgeranordnung mit einer Durchkontaktierung | |
| DE10338087A1 (de) | Elektronische Schaltungsvorrichtung und deren Herstellungsverfahren | |
| DE19956565B4 (de) | Verfahren zum Herstellen einer Wärmesenke für elektrische Bauelemente | |
| DE3017502A1 (de) | Verfahren zur herstellung von monolithischen halbleiterbauelementen | |
| DE19729785C2 (de) | Kondensatoranordnung und ihr Herstellungsverfahren | |
| DE10257097B4 (de) | Verfahren zur Herstellung von mikroelektromechanischen Systemen (Microelectromechanical Systems: MEMS) mittels Silizium-Hochtemperatur-Fusionsbonden | |
| DE102009000058A1 (de) | Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung | |
| DE19745243A1 (de) | Verfahren zum Herstellen eines mit Harz verschlossenen Halbleiterbauelements und Prägevorrichtung dafür | |
| DE10246101A1 (de) | Verfahren zum Herstellen eines Gehäuses für einen Chip mit einer mikromechanischen Struktur | |
| DE2249209A1 (de) | Leiterrahmen zur verwendung in gehaeusen fuer halbleiterbauelemente | |
| DE102021120935B4 (de) | Verfahren zum Formen eines Halbleiter-Leistungsmoduls | |
| EP0593986B1 (de) | Verfahren zum Verlöten eines Halbleiterkörpers mit einem Trägerelement |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US |
|
| 8339 | Ceased/non-payment of the annual fee |