DE69840480D1 - Herstellung von mikro- oder nanostrukturen auf einem träger - Google Patents

Herstellung von mikro- oder nanostrukturen auf einem träger

Info

Publication number
DE69840480D1
DE69840480D1 DE69840480T DE69840480T DE69840480D1 DE 69840480 D1 DE69840480 D1 DE 69840480D1 DE 69840480 T DE69840480 T DE 69840480T DE 69840480 T DE69840480 T DE 69840480T DE 69840480 D1 DE69840480 D1 DE 69840480D1
Authority
DE
Germany
Prior art keywords
nanostructures
micro
carrier
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69840480T
Other languages
German (de)
English (en)
Inventor
Michel Bruel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69840480D1 publication Critical patent/DE69840480D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P10/00—Bonding of wafers, substrates or parts of devices
    • H10P10/12—Bonding of semiconductor wafers or semiconductor substrates to semiconductor wafers or semiconductor substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Composite Materials (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Recrystallisation Techniques (AREA)
DE69840480T 1997-07-22 1998-07-20 Herstellung von mikro- oder nanostrukturen auf einem träger Expired - Lifetime DE69840480D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9709264A FR2766620B1 (fr) 1997-07-22 1997-07-22 Realisation de microstructures ou de nanostructures sur un support
PCT/FR1998/001585 WO1999005711A1 (fr) 1997-07-22 1998-07-20 Realisation de microstructures ou de nanostructures sur un support

Publications (1)

Publication Number Publication Date
DE69840480D1 true DE69840480D1 (de) 2009-03-05

Family

ID=9509456

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69840480T Expired - Lifetime DE69840480D1 (de) 1997-07-22 1998-07-20 Herstellung von mikro- oder nanostrukturen auf einem träger

Country Status (6)

Country Link
US (1) US6261928B1 (https=)
EP (1) EP1008169B1 (https=)
JP (1) JP4920131B2 (https=)
DE (1) DE69840480D1 (https=)
FR (1) FR2766620B1 (https=)
WO (1) WO1999005711A1 (https=)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19853023A1 (de) * 1998-11-18 2000-05-31 Forschungszentrum Juelich Gmbh Verfahren zur Herstellung von Nanostrukturen in dünnen Filmen
JP2003516241A (ja) * 1999-12-09 2003-05-13 コーネル・リサーチ・ファンデーション・インコーポレイテッド ナノメートル規模の間隔で周期的表面構造を製作する方法
FR2815026B1 (fr) * 2000-10-06 2004-04-09 Commissariat Energie Atomique Procede d'auto-organisation de microstructures ou de nanostructures et dispositif a microstructures ou a nanostructures
FR2815121B1 (fr) * 2000-10-06 2002-12-13 Commissariat Energie Atomique Procede de revelation de defauts cristallins et/ou de champs de contraintes a l'interface d'adhesion moleculaire de deux materiaux solides
FR2819099B1 (fr) * 2000-12-28 2003-09-26 Commissariat Energie Atomique Procede de realisation d'une structure empilee
US6913697B2 (en) 2001-02-14 2005-07-05 Science & Technology Corporation @ Unm Nanostructured separation and analysis devices for biological membranes
US6699770B2 (en) * 2001-03-01 2004-03-02 John Tarje Torvik Method of making a hybride substrate having a thin silicon carbide membrane layer
JP2002265831A (ja) * 2001-03-13 2002-09-18 Ricoh Co Ltd インク組成物及びそれを使用する記録方法
US7045878B2 (en) 2001-05-18 2006-05-16 Reveo, Inc. Selectively bonded thin film layer and substrate layer for processing of useful devices
US6956268B2 (en) 2001-05-18 2005-10-18 Reveo, Inc. MEMS and method of manufacturing MEMS
KR100425092B1 (ko) * 2001-05-29 2004-03-30 엘지전자 주식회사 실리콘 컴플라이언트 기판 제조방법
CN1164488C (zh) * 2001-07-25 2004-09-01 中山大学 一种纳米碳化硅材料的制备方法
US7163826B2 (en) 2001-09-12 2007-01-16 Reveo, Inc Method of fabricating multi layer devices on buried oxide layer substrates
US6875671B2 (en) 2001-09-12 2005-04-05 Reveo, Inc. Method of fabricating vertical integrated circuits
DE50205771D1 (de) * 2001-11-23 2006-04-13 Univ Duisburg Essen Implantat
JP2005279843A (ja) * 2004-03-29 2005-10-13 Univ Of Tokyo 細線を含む結晶材料とその製造方法、およびこれを用いたナノ細線デバイス
FR2876498B1 (fr) * 2004-10-12 2008-03-14 Commissariat Energie Atomique Procede de realisation d'heterostructures resonnantes a transport planaire
FR2877662B1 (fr) 2004-11-09 2007-03-02 Commissariat Energie Atomique Reseau de particules et procede de realisation d'un tel reseau.
FR2895391B1 (fr) * 2005-12-27 2008-01-25 Commissariat Energie Atomique Procede d'elaboration de nanostructures ordonnees
FR2895419B1 (fr) 2005-12-27 2008-02-22 Commissariat Energie Atomique Procede de realisation simplifiee d'une structure epitaxiee
FR2895571B1 (fr) * 2005-12-28 2008-04-18 Commissariat Energie Atomique Procede de realisation d'une jonction pn electroluminescente en materiau semi-conducteur par collage moleculaire
FR2896493B1 (fr) * 2006-01-23 2008-02-22 Commissariat Energie Atomique Procede d'elaboration d'un support pour la croissance de nanostructures allongees localisees
FR2903810B1 (fr) * 2006-07-13 2008-10-10 Commissariat Energie Atomique Procede de nanostructuration de la surface d'un substrat
JP2008060355A (ja) * 2006-08-31 2008-03-13 Sumco Corp 貼り合わせウェーハの製造方法および貼り合わせウェーハ
FR2925748B1 (fr) 2007-12-21 2010-01-29 Commissariat Energie Atomique Support de stockage de donnees et procede associe
FR2937797B1 (fr) * 2008-10-28 2010-12-24 S O I Tec Silicon On Insulator Tech Procede de fabrication et de traitement d'une structure de type semi-conducteur sur isolant, permettant de deplacer des dislocations, et structure correspondante
FR2978600B1 (fr) 2011-07-25 2014-02-07 Soitec Silicon On Insulator Procede et dispositif de fabrication de couche de materiau semi-conducteur
JP6355540B2 (ja) * 2014-12-04 2018-07-11 株式会社ディスコ ウエーハの生成方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2681472B1 (fr) * 1991-09-18 1993-10-29 Commissariat Energie Atomique Procede de fabrication de films minces de materiau semiconducteur.
DE4133820A1 (de) * 1991-10-12 1993-04-15 Bosch Gmbh Robert Verfahren zur herstellung von halbleiterelementen
JP3237888B2 (ja) * 1992-01-31 2001-12-10 キヤノン株式会社 半導体基体及びその作製方法
JP3192000B2 (ja) * 1992-08-25 2001-07-23 キヤノン株式会社 半導体基板及びその作製方法
JP2908150B2 (ja) * 1992-11-27 1999-06-21 日本電気株式会社 Ｓｏｉ基板構造及びその製造方法
FR2714524B1 (fr) 1993-12-23 1996-01-26 Commissariat Energie Atomique Procede de realisation d'une structure en relief sur un support en materiau semiconducteur
FR2715502B1 (fr) 1994-01-26 1996-04-05 Commissariat Energie Atomique Structure présentant des cavités et procédé de réalisation d'une telle structure.
FR2715501B1 (fr) 1994-01-26 1996-04-05 Commissariat Energie Atomique Procédé de dépôt de lames semiconductrices sur un support.
JPH07263721A (ja) * 1994-03-25 1995-10-13 Nippondenso Co Ltd 半導体装置及びその製造方法
FR2725074B1 (fr) * 1994-09-22 1996-12-20 Commissariat Energie Atomique Procede de fabrication d'une structure comportant une couche mince semi-conductrice sur un substrat
US5932048A (en) * 1995-04-06 1999-08-03 Komatsu Electronic Metals Co., Ltd. Method of fabricating direct-bonded semiconductor wafers
JP3441277B2 (ja) * 1995-12-26 2003-08-25 株式会社東芝 半導体装置およびその製造方法
FR2756973B1 (fr) 1996-12-09 1999-01-08 Commissariat Energie Atomique Procede d'introduction d'une phase gazeuse dans une cavite fermee
US6159824A (en) * 1997-05-12 2000-12-12 Silicon Genesis Corporation Silicon-on-silicon wafer bonding process using a thin film blister-separation method
US5877070A (en) * 1997-05-31 1999-03-02 Max-Planck Society Method for the transfer of thin layers of monocrystalline material to a desirable substrate
US5882987A (en) * 1997-08-26 1999-03-16 International Business Machines Corporation Smart-cut process for the production of thin semiconductor material films
US5981400A (en) * 1997-09-18 1999-11-09 Cornell Research Foundation, Inc. Compliant universal substrate for epitaxial growth
US5897362A (en) * 1998-04-17 1999-04-27 Lucent Technologies Inc. Bonding silicon wafers

Also Published As

Publication number Publication date
FR2766620A1 (fr) 1999-01-29
JP2001511599A (ja) 2001-08-14
US6261928B1 (en) 2001-07-17
EP1008169A1 (fr) 2000-06-14
JP4920131B2 (ja) 2012-04-18
WO1999005711A1 (fr) 1999-02-04
FR2766620B1 (fr) 2000-12-01
EP1008169B1 (fr) 2009-01-14

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