DE69839468D1 - Brennofen und Kontrollverfahren dafür - Google Patents

Brennofen und Kontrollverfahren dafür

Info

Publication number
DE69839468D1
DE69839468D1 DE69839468T DE69839468T DE69839468D1 DE 69839468 D1 DE69839468 D1 DE 69839468D1 DE 69839468 T DE69839468 T DE 69839468T DE 69839468 T DE69839468 T DE 69839468T DE 69839468 D1 DE69839468 D1 DE 69839468D1
Authority
DE
Germany
Prior art keywords
kiln
control method
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69839468T
Other languages
English (en)
Inventor
Fumio Yamazaki
Hiroshi Asanuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69839468D1 publication Critical patent/DE69839468D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • F27B9/2407—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor the conveyor being constituted by rollers (roller hearth furnace)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/3005—Details, accessories, or equipment peculiar to furnaces of these types arrangements for circulating gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/40—Arrangements of controlling or monitoring devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
DE69839468T 1997-10-09 1998-10-08 Brennofen und Kontrollverfahren dafür Expired - Lifetime DE69839468D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27683297A JP3783366B2 (ja) 1997-10-09 1997-10-09 焼成炉

Publications (1)

Publication Number Publication Date
DE69839468D1 true DE69839468D1 (de) 2008-06-26

Family

ID=17575032

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69839468T Expired - Lifetime DE69839468D1 (de) 1997-10-09 1998-10-08 Brennofen und Kontrollverfahren dafür

Country Status (6)

Country Link
US (1) US5993202A (de)
EP (1) EP0908928B1 (de)
JP (1) JP3783366B2 (de)
KR (3) KR100609296B1 (de)
DE (1) DE69839468D1 (de)
TW (1) TW432262B (de)

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DE29921643U1 (de) * 1999-12-09 2001-04-19 Rehm Anlagenbau Gmbh & Co Heizvorrichtung
US7063584B2 (en) 2001-05-30 2006-06-20 Matsushita Electric Industrial Co., Ltd. Method of manufacturing gas discharge display panel, support table, and method of manufacturing support table
JP2003031117A (ja) * 2001-07-10 2003-01-31 Nec Corp 誘電体層の製造方法及び製造装置
ITMI20012628A1 (it) * 2001-12-13 2003-06-13 Eurosolare Spa Forno di cottura di dispositivi fotovoltaici
KR100592257B1 (ko) 2003-11-27 2006-06-22 삼성에스디아이 주식회사 플라즈마 디스플레이 패널용 소성로
KR101130780B1 (ko) * 2004-12-22 2012-03-28 재단법인 포항산업과학연구원 외기유입 방지기능을 가지는 연소로
JP4936567B2 (ja) * 2009-09-18 2012-05-23 東京エレクトロン株式会社 熱処理装置
JP5400751B2 (ja) * 2010-12-09 2014-01-29 東京エレクトロン株式会社 加熱処理装置、およびこれを備える塗布現像装置
JP5849542B2 (ja) * 2011-09-05 2016-01-27 株式会社Ihi 連続加熱炉
JP6240371B2 (ja) 2011-09-05 2017-11-29 株式会社Ihi 加熱炉および連続加熱炉
US10538381B2 (en) 2011-09-23 2020-01-21 Sandbox Logistics, Llc Systems and methods for bulk material storage and/or transport
NL2007658C2 (nl) * 2011-10-26 2013-05-01 Smit Ovens Bv Inrichting voor het verhitten van een substraat.
US10464741B2 (en) 2012-07-23 2019-11-05 Oren Technologies, Llc Proppant discharge system and a container for use in such a proppant discharge system
US8622251B2 (en) 2011-12-21 2014-01-07 John OREN System of delivering and storing proppant for use at a well site and container for such proppant
US9718610B2 (en) 2012-07-23 2017-08-01 Oren Technologies, Llc Proppant discharge system having a container and the process for providing proppant to a well site
US9809381B2 (en) 2012-07-23 2017-11-07 Oren Technologies, Llc Apparatus for the transport and storage of proppant
US9421899B2 (en) 2014-02-07 2016-08-23 Oren Technologies, Llc Trailer-mounted proppant delivery system
US20190135535A9 (en) 2012-07-23 2019-05-09 Oren Technologies, Llc Cradle for proppant container having tapered box guides
US9340353B2 (en) 2012-09-27 2016-05-17 Oren Technologies, Llc Methods and systems to transfer proppant for fracking with reduced risk of production and release of silica dust at a well site
CN102818451B (zh) * 2012-09-10 2014-03-26 常德市科辉墙材有限责任公司 一种全自动隧道窑生产线及其控制方法
USD688351S1 (en) 2012-11-02 2013-08-20 John OREN Proppant vessel
USD688350S1 (en) 2012-11-02 2013-08-20 John OREN Proppant vessel
USD688349S1 (en) 2012-11-02 2013-08-20 John OREN Proppant vessel base
US9446801B1 (en) 2013-04-01 2016-09-20 Oren Technologies, Llc Trailer assembly for transport of containers of proppant material
USD688597S1 (en) 2013-04-05 2013-08-27 Joshua Oren Trailer for proppant containers
USD694670S1 (en) 2013-05-17 2013-12-03 Joshua Oren Trailer for proppant containers
CN104251605A (zh) * 2013-06-26 2014-12-31 董昊南 耐火砖干燥窑
KR101579128B1 (ko) * 2014-06-25 2015-12-21 (주)에이큐에스 흡기압 관리 장치
US11873160B1 (en) 2014-07-24 2024-01-16 Sandbox Enterprises, Llc Systems and methods for remotely controlling proppant discharge system
US9676554B2 (en) 2014-09-15 2017-06-13 Oren Technologies, Llc System and method for delivering proppant to a blender
EP3400188A4 (de) 2016-01-06 2019-08-07 Oren Technologies, LLC Förderer mit integriertem staubsammlersystem
US10518828B2 (en) 2016-06-03 2019-12-31 Oren Technologies, Llc Trailer assembly for transport of containers of proppant material
CN106052382B (zh) * 2016-06-20 2018-08-21 北京机电研究所有限公司 铝合金控制臂高精度加热炉
JP7066525B2 (ja) * 2018-05-30 2022-05-13 東京エレクトロン株式会社 基板処理装置および基板処理方法
KR102112856B1 (ko) 2019-11-05 2020-05-19 주식회사 성조파인세라믹 품질 안정성이 확보된 의료기기용 바이오 세라믹스 소결장치
CN112284142B (zh) * 2020-08-21 2021-07-27 中国测试技术研究院电子研究所 一种自适应调控低温窑炉排烟风机的系统和方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2254769C3 (de) * 1972-11-09 1985-06-05 Vereinigte Aluminium-Werke AG, 1000 Berlin und 5300 Bonn Durchlaufofen zum flußmittellosen Löten von Aluminiumwerkstoffen unter Schutzgas
US4397451A (en) * 1981-06-10 1983-08-09 Chugai Ro Kogyo Co., Ltd. Furnace for the heat treatment of scale-covered steel
JPS6127485A (ja) * 1984-07-17 1986-02-06 中外炉工業株式会社 連続式雰囲気熱処理炉
JPH0714353Y2 (ja) * 1988-07-08 1995-04-05 中外炉工業株式会社 ローラハース型熱処理炉
JPH03125897A (ja) * 1989-10-12 1991-05-29 R I Denshi Kogyo:Kk 酸素濃度極低下雰囲気炉
JPH03255807A (ja) * 1990-03-02 1991-11-14 Inax Corp 焼成物の表面還元処理用バーナ
US5172849A (en) * 1991-09-25 1992-12-22 General Motors Corporation Method and apparatus for convection brazing of aluminum heat exchangers
US5449883A (en) * 1992-08-07 1995-09-12 Mitsubishi Materials Corporation Continuous heat treatment system of semiconductor wafers for eliminating thermal donor
US5266027A (en) * 1992-08-12 1993-11-30 Ngk Insulators, Ltd. Roller-hearth continuous furnace
KR0170050B1 (ko) * 1995-07-26 1999-02-18 다쯔 지사끼 수직형 소성로

Also Published As

Publication number Publication date
KR100609296B1 (ko) 2006-12-04
KR20060006875A (ko) 2006-01-20
EP0908928A3 (de) 2004-01-21
TW432262B (en) 2001-05-01
US5993202A (en) 1999-11-30
KR20050119095A (ko) 2005-12-20
JPH11108559A (ja) 1999-04-23
KR19990036976A (ko) 1999-05-25
KR100628343B1 (ko) 2006-09-27
KR100580295B1 (ko) 2006-05-16
EP0908928A2 (de) 1999-04-14
EP0908928B1 (de) 2008-05-14
JP3783366B2 (ja) 2006-06-07

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)