DE69837912D1 - Vorrichtung und verfahren zum auftrag einer dünnen schicht und verfahren zur herstellung eines lcd-elementes - Google Patents
Vorrichtung und verfahren zum auftrag einer dünnen schicht und verfahren zur herstellung eines lcd-elementesInfo
- Publication number
- DE69837912D1 DE69837912D1 DE69837912T DE69837912T DE69837912D1 DE 69837912 D1 DE69837912 D1 DE 69837912D1 DE 69837912 T DE69837912 T DE 69837912T DE 69837912 T DE69837912 T DE 69837912T DE 69837912 D1 DE69837912 D1 DE 69837912D1
- Authority
- DE
- Germany
- Prior art keywords
- applying
- producing
- thin layer
- lcd element
- lcd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
- B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133784—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by rubbing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/167—X-ray
- Y10S430/168—X-ray exposure process
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22649597 | 1997-08-22 | ||
JP22649597A JP3223142B2 (ja) | 1997-08-22 | 1997-08-22 | 液晶表示素子の製造法 |
PCT/JP1998/003713 WO1999010107A1 (fr) | 1997-08-22 | 1998-08-21 | Machine a appliquer des revetements de type films minces, procede d'application de revetements et procede de fabrication d'un element d'affichage a cristal liquide |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69837912D1 true DE69837912D1 (de) | 2007-07-26 |
DE69837912T2 DE69837912T2 (de) | 2008-02-21 |
Family
ID=16846010
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69837912T Expired - Lifetime DE69837912T2 (de) | 1997-08-22 | 1998-08-21 | Vorrichtung und verfahren zum auftrag einer dünnen schicht und verfahren zur herstellung eines lcd-elementes |
Country Status (8)
Country | Link |
---|---|
US (2) | US6322956B1 (de) |
EP (1) | EP0933139B1 (de) |
JP (1) | JP3223142B2 (de) |
KR (1) | KR100518105B1 (de) |
CN (1) | CN1104291C (de) |
DE (1) | DE69837912T2 (de) |
TW (1) | TW482935B (de) |
WO (1) | WO1999010107A1 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100848556B1 (ko) * | 2002-03-25 | 2008-07-25 | 엘지디스플레이 주식회사 | 액정 패널의 회전 버퍼 및 이를 이용한 러빙장치 |
AU2003246262A1 (en) * | 2002-08-20 | 2004-03-11 | Nippon Mektron, Limited | Novel polyimide copolymer and metal laminate comprising the same |
JP2005032825A (ja) * | 2003-07-08 | 2005-02-03 | Sony Corp | 相補分割方法、マスク作製方法およびプログラム |
CN100350559C (zh) * | 2003-08-05 | 2007-11-21 | 大日本网目版制造株式会社 | 基板处理装置及基板处理方法 |
JP2005072559A (ja) * | 2003-08-05 | 2005-03-17 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
JPWO2005098927A1 (ja) * | 2004-03-31 | 2008-03-06 | コニカミノルタホールディングス株式会社 | Tftシートおよびその製造方法 |
JP2006013289A (ja) * | 2004-06-29 | 2006-01-12 | Hitachi Ltd | 半導体装置の製造方法および半導体製造装置 |
CN1300638C (zh) * | 2004-11-25 | 2007-02-14 | 上海交通大学 | 用x射线曝光制造不同深宽比的微机械构件的方法 |
JP2006155983A (ja) * | 2004-11-26 | 2006-06-15 | Sii Nanotechnology Inc | 電子ビーム欠陥修正装置の除電方法およびその装置 |
KR101108345B1 (ko) * | 2004-12-09 | 2012-01-25 | 엘지디스플레이 주식회사 | 액정표시패널의 제조장치 및 방법 |
JP4367347B2 (ja) * | 2005-01-21 | 2009-11-18 | セイコーエプソン株式会社 | 膜形成方法及び電気光学装置の製造方法並びに電子機器 |
TWI335455B (en) * | 2005-09-22 | 2011-01-01 | Ind Tech Res Inst | Liquid crystal display device |
TWI387812B (zh) * | 2006-11-13 | 2013-03-01 | Ind Tech Res Inst | 具有光學補償功能之透明基板及其液晶顯示器 |
JP5783971B2 (ja) * | 2012-08-10 | 2015-09-24 | 株式会社東芝 | 塗布装置および塗布方法 |
KR20160039957A (ko) * | 2014-10-02 | 2016-04-12 | 삼성전자주식회사 | 이온 발생기를 갖는 기판 이송 시스템 |
CN104923443B (zh) * | 2015-07-17 | 2017-06-30 | 深圳晶华显示器材有限公司 | Pin脚点碳浆方法和点碳浆系统 |
JP2020013124A (ja) * | 2018-07-12 | 2020-01-23 | シャープ株式会社 | 配向膜付きカラーフィルタ基板の製造方法および液晶パネルの製造方法 |
CN113275204A (zh) * | 2020-03-19 | 2021-08-20 | 安泰科技股份有限公司 | 一种用于非晶纳米晶带材连续涂覆绝缘涂层的设备及方法 |
CN112530794A (zh) * | 2020-12-01 | 2021-03-19 | 泉芯集成电路制造(济南)有限公司 | 一种光刻方法、半导体器件及其制作方法 |
CN114527529B (zh) * | 2022-02-18 | 2024-03-05 | 江苏传艺科技股份有限公司 | 一种高分辨率结构色器件的制备方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6465254A (en) * | 1987-09-07 | 1989-03-10 | Matsushita Electric Ind Co Ltd | Production of thin metallic film |
FR2625827B1 (fr) | 1988-01-11 | 1993-07-16 | Commissariat Energie Atomique | Ecran d'affichage en couleur a matrice active sans croisement des conducteurs lignes d'adressage et des conducteurs colonnes de commande |
JP2553636B2 (ja) * | 1988-06-16 | 1996-11-13 | 松下電器産業株式会社 | 液晶用配向膜の製法 |
US5438421A (en) * | 1991-04-24 | 1995-08-01 | Alps Electric Co., Ltd. | Orientation film of liquid crystal having bilaterally asymmetric ridges separated by grooves |
DE69333576T2 (de) * | 1992-08-14 | 2005-08-25 | Hamamatsu Photonics K.K., Hamamatsu | Verfahren und Vorrichtung zur Erzeugung von gasförmigen Ionen unter Verwendung von Röntgenstrahlen |
JP3081952B2 (ja) * | 1994-08-05 | 2000-08-28 | チッソ株式会社 | 液晶表示素子用の配向膜の処理方法および液晶表示素子の製造方法 |
TW339415B (en) | 1994-04-28 | 1998-09-01 | Chisso Corp | Processing and manufacturing method of LCD elements |
JP2648286B2 (ja) * | 1994-08-04 | 1997-08-27 | 株式会社飯沼ゲージ製作所 | 基板の洗浄乾燥装置 |
JPH07294928A (ja) * | 1994-04-28 | 1995-11-10 | Iinuma Geeji Seisakusho:Kk | 液晶配向処理装置 |
JP3696904B2 (ja) | 1994-08-02 | 2005-09-21 | シシド静電気株式会社 | 軟x線を利用した除電装置 |
JP2668512B2 (ja) | 1994-10-24 | 1997-10-27 | 株式会社レヨーン工業 | 軟x線による物体表面の静電気除去装置 |
JPH08211622A (ja) | 1995-02-07 | 1996-08-20 | Hitachi Ltd | レジスト塗布装置 |
-
1997
- 1997-08-22 JP JP22649597A patent/JP3223142B2/ja not_active Expired - Fee Related
-
1998
- 1998-08-21 WO PCT/JP1998/003713 patent/WO1999010107A1/ja active IP Right Grant
- 1998-08-21 CN CN98801372A patent/CN1104291C/zh not_active Expired - Fee Related
- 1998-08-21 US US09/284,750 patent/US6322956B1/en not_active Expired - Fee Related
- 1998-08-21 EP EP98938933A patent/EP0933139B1/de not_active Expired - Lifetime
- 1998-08-21 TW TW087113850A patent/TW482935B/zh not_active IP Right Cessation
- 1998-08-21 KR KR10-1999-7003494A patent/KR100518105B1/ko not_active IP Right Cessation
- 1998-08-21 DE DE69837912T patent/DE69837912T2/de not_active Expired - Lifetime
-
2001
- 2001-09-28 US US09/964,660 patent/US6623913B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH1164812A (ja) | 1999-03-05 |
TW482935B (en) | 2002-04-11 |
WO1999010107A1 (fr) | 1999-03-04 |
US20020018966A1 (en) | 2002-02-14 |
EP0933139A1 (de) | 1999-08-04 |
CN1104291C (zh) | 2003-04-02 |
KR20000068814A (ko) | 2000-11-25 |
EP0933139B1 (de) | 2007-06-13 |
KR100518105B1 (ko) | 2005-10-04 |
EP0933139A4 (de) | 2002-01-16 |
CN1239445A (zh) | 1999-12-22 |
US6322956B1 (en) | 2001-11-27 |
JP3223142B2 (ja) | 2001-10-29 |
DE69837912T2 (de) | 2008-02-21 |
US6623913B2 (en) | 2003-09-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: HAMAMATSU PHOTONICS K.K., HAMAMATSU, SHIZUOKA, JP Owner name: IINUMA GAUGE MANUFACTURING CO. LTD., CHINO, NA, JP |