DE69837060T2 - Verfahren zur Messung von physikalischen Phänomenen oder chemischen Phänomenen und Vorrichtung dafür - Google Patents
Verfahren zur Messung von physikalischen Phänomenen oder chemischen Phänomenen und Vorrichtung dafür Download PDFInfo
- Publication number
- DE69837060T2 DE69837060T2 DE69837060T DE69837060T DE69837060T2 DE 69837060 T2 DE69837060 T2 DE 69837060T2 DE 69837060 T DE69837060 T DE 69837060T DE 69837060 T DE69837060 T DE 69837060T DE 69837060 T2 DE69837060 T2 DE 69837060T2
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- Germany
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- potential
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- Expired - Fee Related
Links
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N hydrofluoric acid Substances F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 8
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
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- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/02—Means for indicating or recording specially adapted for thermometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/02—Means for indicating or recording specially adapted for thermometers
- G01K1/026—Means for indicating or recording specially adapted for thermometers arrangements for monitoring a plurality of temperatures, e.g. by multiplexing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0098—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means using semiconductor body comprising at least one PN junction as detecting element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
- G01N27/4148—Integrated circuits therefor, e.g. fabricated by CMOS processing
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Electrochemistry (AREA)
- Immunology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Computer Hardware Design (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Magnetic Variables (AREA)
- Radiation Pyrometers (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15771697A JP4231560B2 (ja) | 1997-05-29 | 1997-05-29 | 化学量の分布の電気化学的測定方法および装置 |
| JP15771697 | 1997-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69837060D1 DE69837060D1 (de) | 2007-03-29 |
| DE69837060T2 true DE69837060T2 (de) | 2007-11-22 |
Family
ID=15655821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69837060T Expired - Fee Related DE69837060T2 (de) | 1997-05-29 | 1998-05-28 | Verfahren zur Messung von physikalischen Phänomenen oder chemischen Phänomenen und Vorrichtung dafür |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6255678B1 (https=) |
| EP (1) | EP0881486B1 (https=) |
| JP (1) | JP4231560B2 (https=) |
| DE (1) | DE69837060T2 (https=) |
Families Citing this family (64)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1070244A4 (en) * | 1998-04-09 | 2002-04-17 | California Inst Of Techn | ELECTRONIC TECHNIQUES USED FOR THE DETECTION OF ANALYTES |
| JP2001244454A (ja) * | 2000-02-29 | 2001-09-07 | Horiba Ltd | 分子認識型化学ｃｃｄデバイス |
| JP2002009274A (ja) * | 2000-06-21 | 2002-01-11 | Horiba Ltd | 化学ｃｃｄセンサ |
| US7012306B2 (en) * | 2001-03-07 | 2006-03-14 | Acreo Ab | Electrochemical device |
| JP2003014691A (ja) | 2001-06-29 | 2003-01-15 | Horiba Ltd | Ｃｃｄセンサ |
| US7049645B2 (en) | 2001-11-16 | 2006-05-23 | Bio-X Inc. | FET type sensor, ion density detecting method comprising this sensor, and base sequence detecting method |
| TW544752B (en) * | 2002-05-20 | 2003-08-01 | Univ Nat Yunlin Sci & Tech | Method for producing SnO2 gate ion sensitive field effect transistor (ISFET), and method and device for measuring the temperature parameters, drift and hysteresis values thereof |
| US8536661B1 (en) | 2004-06-25 | 2013-09-17 | University Of Hawaii | Biosensor chip sensor protection methods |
| CN100498319C (zh) * | 2004-10-20 | 2009-06-10 | 财团法人工业技术研究院 | 多晶硅薄膜晶体管离子感测装置与制作方法 |
| US7785785B2 (en) | 2004-11-12 | 2010-08-31 | The Board Of Trustees Of The Leland Stanford Junior University | Charge perturbation detection system for DNA and other molecules |
| JP4678676B2 (ja) * | 2004-12-10 | 2011-04-27 | 株式会社堀場製作所 | 物理現象または化学現象の測定方法または測定装置 |
| JP4700335B2 (ja) * | 2004-12-10 | 2011-06-15 | 株式会社堀場製作所 | 物理現象または化学現象の測定方法および測定装置 |
| KR101269508B1 (ko) * | 2005-03-11 | 2013-05-30 | 고꾸리쯔 다이가꾸 호우징 도요하시 기쥬쯔 가가꾸 다이가꾸 | 누적형 화학·물리현상 검출장치 |
| JP4641444B2 (ja) * | 2005-03-31 | 2011-03-02 | 株式会社堀場製作所 | 物理現象または化学現象に係るポテンシャル測定装置 |
| JP5335415B2 (ja) * | 2006-03-20 | 2013-11-06 | 国立大学法人豊橋技術科学大学 | 累積型化学・物理現象検出方法及びその装置 |
| JP4852752B2 (ja) * | 2006-04-04 | 2012-01-11 | 国立大学法人豊橋技術科学大学 | 化学・物理現象検出装置 |
| US7948015B2 (en) | 2006-12-14 | 2011-05-24 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
| US11339430B2 (en) | 2007-07-10 | 2022-05-24 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
| US8262900B2 (en) | 2006-12-14 | 2012-09-11 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
| US8349167B2 (en) | 2006-12-14 | 2013-01-08 | Life Technologies Corporation | Methods and apparatus for detecting molecular interactions using FET arrays |
| US8470164B2 (en) | 2008-06-25 | 2013-06-25 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
| US20100301398A1 (en) | 2009-05-29 | 2010-12-02 | Ion Torrent Systems Incorporated | Methods and apparatus for measuring analytes |
| US20100137143A1 (en) | 2008-10-22 | 2010-06-03 | Ion Torrent Systems Incorporated | Methods and apparatus for measuring analytes |
| JP2010122090A (ja) * | 2008-11-20 | 2010-06-03 | Rohm Co Ltd | イオンイメージセンサ及びダメージ計測装置 |
| CN101592627B (zh) * | 2009-03-19 | 2012-12-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | 多通道高灵敏生物传感器的制作集成方法 |
| US8673627B2 (en) | 2009-05-29 | 2014-03-18 | Life Technologies Corporation | Apparatus and methods for performing electrochemical reactions |
| US8574835B2 (en) | 2009-05-29 | 2013-11-05 | Life Technologies Corporation | Scaffolded nucleic acid polymer particles and methods of making and using |
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| EP2588850B1 (en) | 2010-06-30 | 2016-12-28 | Life Technologies Corporation | Method for dry testing isfet arrays |
| US8487790B2 (en) | 2010-06-30 | 2013-07-16 | Life Technologies Corporation | Chemical detection circuit including a serializer circuit |
| AU2011226767B1 (en) | 2010-06-30 | 2011-11-10 | Life Technologies Corporation | Ion-sensing charge-accumulation circuits and methods |
| US11307166B2 (en) | 2010-07-01 | 2022-04-19 | Life Technologies Corporation | Column ADC |
| CN103168341B (zh) | 2010-07-03 | 2016-10-05 | 生命科技公司 | 具有轻度掺杂的排出装置的化学敏感的传感器 |
| EP2617061B1 (en) | 2010-09-15 | 2021-06-30 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
| JP5913323B2 (ja) | 2010-09-24 | 2016-04-27 | ライフ テクノロジーズ コーポレーション | マッチドペアトランジスタ回路 |
| JP5773357B2 (ja) * | 2011-07-01 | 2015-09-02 | 国立大学法人豊橋技術科学大学 | 化学・物理現象検出装置及び検出方法 |
| JP2013050426A (ja) * | 2011-08-31 | 2013-03-14 | Chiba Univ | Ｆｅｔ型センサを用いたインフルエンザウイルスｒｎａの検出方法 |
| US9970984B2 (en) | 2011-12-01 | 2018-05-15 | Life Technologies Corporation | Method and apparatus for identifying defects in a chemical sensor array |
| US8821798B2 (en) | 2012-01-19 | 2014-09-02 | Life Technologies Corporation | Titanium nitride as sensing layer for microwell structure |
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| US9689837B2 (en) | 2012-08-10 | 2017-06-27 | National University Corporation Toyohashi University Of Technology | Device for measuring oxidation-reduction potential and method for measuring oxidation-reduction potential |
| US9080968B2 (en) | 2013-01-04 | 2015-07-14 | Life Technologies Corporation | Methods and systems for point of use removal of sacrificial material |
| US9841398B2 (en) | 2013-01-08 | 2017-12-12 | Life Technologies Corporation | Methods for manufacturing well structures for low-noise chemical sensors |
| US8962366B2 (en) | 2013-01-28 | 2015-02-24 | Life Technologies Corporation | Self-aligned well structures for low-noise chemical sensors |
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| US20140264471A1 (en) | 2013-03-15 | 2014-09-18 | Life Technologies Corporation | Chemical device with thin conductive element |
| CN105264366B (zh) | 2013-03-15 | 2019-04-16 | 生命科技公司 | 具有一致传感器表面区域的化学传感器 |
| US9835585B2 (en) | 2013-03-15 | 2017-12-05 | Life Technologies Corporation | Chemical sensor with protruded sensor surface |
| US20140336063A1 (en) | 2013-05-09 | 2014-11-13 | Life Technologies Corporation | Windowed Sequencing |
| US10458942B2 (en) | 2013-06-10 | 2019-10-29 | Life Technologies Corporation | Chemical sensor array having multiple sensors per well |
| JP6493955B2 (ja) * | 2014-10-09 | 2019-04-03 | ラピスセミコンダクタ株式会社 | 半導体装置及び半導体装置の製造方法 |
| JP6228098B2 (ja) * | 2014-10-20 | 2017-11-08 | シャープ株式会社 | 化学・物理現象検出装置及びその製造方法 |
| CN111505087A (zh) | 2014-12-18 | 2020-08-07 | 生命科技公司 | 使用大规模 fet 阵列测量分析物的方法和装置 |
| US10077472B2 (en) | 2014-12-18 | 2018-09-18 | Life Technologies Corporation | High data rate integrated circuit with power management |
| EP3234576B1 (en) | 2014-12-18 | 2023-11-22 | Life Technologies Corporation | High data rate integrated circuit with transmitter configuration |
| WO2016114202A1 (ja) * | 2015-01-14 | 2016-07-21 | 国立大学法人豊橋技術科学大学 | 化学・物理現象検出装置 |
| DE102015214387B4 (de) * | 2015-07-29 | 2017-07-27 | Robert Bosch Gmbh | Sensorelement zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum und Verfahren zur Herstellung desselben |
| JP6307058B2 (ja) * | 2015-12-03 | 2018-04-04 | シャープ株式会社 | イオン濃度センサ、およびイオン濃度測定方法 |
| JP6447925B2 (ja) | 2015-12-15 | 2019-01-09 | シャープ株式会社 | イオン濃度センサ |
| JP2017167064A (ja) * | 2016-03-17 | 2017-09-21 | 株式会社東芝 | 電気化学センサ及び電気化学センサを用いた測定方法 |
| JP2024008710A (ja) * | 2022-07-08 | 2024-01-19 | 富士電機株式会社 | 圧力検出装置および製造方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0509141A1 (de) * | 1991-04-11 | 1992-10-21 | Landis & Gyr Business Support AG | Magnetfeldsensor |
| US5374834A (en) * | 1993-10-12 | 1994-12-20 | Massachusetts Institute Of Technology | Ionic liquid-channel charge-coupled device |
| US5591996A (en) * | 1995-03-24 | 1997-01-07 | Analog Devices, Inc. | Recirculating charge transfer magnetic field sensor |
| JP2877047B2 (ja) * | 1995-10-25 | 1999-03-31 | 日本電気株式会社 | 固体撮像装置 |
| US5789745A (en) * | 1997-10-28 | 1998-08-04 | Sandia Corporation | Ion mobility spectrometer using frequency-domain separation |
-
1997
- 1997-05-29 JP JP15771697A patent/JP4231560B2/ja not_active Expired - Lifetime
-
1998
- 1998-05-27 US US09/085,693 patent/US6255678B1/en not_active Expired - Lifetime
- 1998-05-28 DE DE69837060T patent/DE69837060T2/de not_active Expired - Fee Related
- 1998-05-28 EP EP98109769A patent/EP0881486B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0881486A3 (en) | 1999-10-06 |
| US6255678B1 (en) | 2001-07-03 |
| JP4231560B2 (ja) | 2009-03-04 |
| JPH10332423A (ja) | 1998-12-18 |
| DE69837060D1 (de) | 2007-03-29 |
| EP0881486A2 (en) | 1998-12-02 |
| EP0881486B1 (en) | 2007-02-14 |
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Inventor name: SAWADA, KAZUAKI, HAMAMATSU-CITY, SHIZUOKA, JP Inventor name: TOMITA, KATSUHIKO, KYOTO, JP Inventor name: NAKANISHI, TSUYOSHI, KYOTO, JP Inventor name: TANABE, HIROKI, KYOTO, JP Inventor name: MIMURA, SUSUMU, KYOTO, JP |
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