DE69835184D1 - DRAM-Zelle mit Graben-Kondensator und vertikalem Transistor - Google Patents
DRAM-Zelle mit Graben-Kondensator und vertikalem TransistorInfo
- Publication number
- DE69835184D1 DE69835184D1 DE69835184T DE69835184T DE69835184D1 DE 69835184 D1 DE69835184 D1 DE 69835184D1 DE 69835184 T DE69835184 T DE 69835184T DE 69835184 T DE69835184 T DE 69835184T DE 69835184 D1 DE69835184 D1 DE 69835184D1
- Authority
- DE
- Germany
- Prior art keywords
- dram cell
- vertical transistor
- trench capacitor
- trench
- capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000003990 capacitor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/39—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench
- H10B12/395—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench the transistor being vertical
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
- H10B12/0383—Making the capacitor or connections thereto the capacitor being in a trench in the substrate wherein the transistor is vertical
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US87278097A | 1997-06-11 | 1997-06-11 | |
US872780 | 1997-06-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69835184D1 true DE69835184D1 (de) | 2006-08-24 |
DE69835184T2 DE69835184T2 (de) | 2007-06-14 |
Family
ID=25360277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69835184T Expired - Fee Related DE69835184T2 (de) | 1997-06-11 | 1998-05-28 | DRAM-Zelle mit Graben-Kondensator und vertikalem Transistor |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0884785B1 (de) |
JP (1) | JPH1117151A (de) |
KR (1) | KR100481035B1 (de) |
CN (1) | CN1202012A (de) |
DE (1) | DE69835184T2 (de) |
TW (1) | TW425718B (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6080618A (en) * | 1998-03-31 | 2000-06-27 | Siemens Aktiengesellschaft | Controllability of a buried device layer |
US6197641B1 (en) * | 1998-08-28 | 2001-03-06 | Lucent Technologies Inc. | Process for fabricating vertical transistors |
US6255683B1 (en) * | 1998-12-29 | 2001-07-03 | Infineon Technologies Ag | Dynamic random access memory |
US6204140B1 (en) * | 1999-03-24 | 2001-03-20 | Infineon Technologies North America Corp. | Dynamic random access memory |
US6190971B1 (en) * | 1999-05-13 | 2001-02-20 | International Business Machines Corporation | Formation of 5F2 cell with partially vertical transistor and gate conductor aligned buried strap with raised shallow trench isolation region |
US6339239B1 (en) * | 2000-06-23 | 2002-01-15 | International Business Machines Corporation | DRAM cell layout for node capacitance enhancement |
US6551874B2 (en) * | 2001-06-22 | 2003-04-22 | Infineon Technologies, Ag | Self-aligned STI process using nitride hard mask |
US6617213B2 (en) * | 2002-01-25 | 2003-09-09 | Infineon Technologies Ag | Method for achieving high self-aligning vertical gate studs relative to the support isolation level |
DE10220584B3 (de) * | 2002-05-08 | 2004-01-08 | Infineon Technologies Ag | Dynamische Speicherzelle und Verfahren zum Herstellen derselben |
US6579759B1 (en) * | 2002-08-23 | 2003-06-17 | International Business Machines Corporation | Formation of self-aligned buried strap connector |
US7459743B2 (en) * | 2005-08-24 | 2008-12-02 | International Business Machines Corporation | Dual port gain cell with side and top gated read transistor |
US9837258B2 (en) | 2015-05-22 | 2017-12-05 | Honeywell International Inc. | Ion trap with variable pitch electrodes |
CN105609503A (zh) * | 2016-01-25 | 2016-05-25 | 中国科学院微电子研究所 | 存储单元、存储器件及电子设备 |
US11217589B2 (en) * | 2019-10-04 | 2022-01-04 | Nanya Technology Corporation | Semiconductor device and method of manufacturing the same |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0760859B2 (ja) * | 1985-11-19 | 1995-06-28 | 沖電気工業株式会社 | 半導体装置及びその製造方法 |
US5183774A (en) * | 1987-11-17 | 1993-02-02 | Mitsubishi Denki Kabushiki Kaisha | Method of making a semiconductor memory device |
JPH07112049B2 (ja) * | 1992-01-09 | 1995-11-29 | インターナショナル・ビジネス・マシーンズ・コーポレイション | ダイナミック・ランダム・アクセス・メモリ・デバイスおよび製造方法 |
US5360758A (en) * | 1993-12-03 | 1994-11-01 | International Business Machines Corporation | Self-aligned buried strap for trench type DRAM cells |
US5395786A (en) * | 1994-06-30 | 1995-03-07 | International Business Machines Corporation | Method of making a DRAM cell with trench capacitor |
US5614431A (en) * | 1995-12-20 | 1997-03-25 | International Business Machines Corporation | Method of making buried strap trench cell yielding an extended transistor |
-
1998
- 1998-05-13 TW TW087107377A patent/TW425718B/zh not_active IP Right Cessation
- 1998-05-28 DE DE69835184T patent/DE69835184T2/de not_active Expired - Fee Related
- 1998-05-28 EP EP98109684A patent/EP0884785B1/de not_active Expired - Lifetime
- 1998-05-29 KR KR10-1998-0019649A patent/KR100481035B1/ko not_active IP Right Cessation
- 1998-06-05 CN CN98109717A patent/CN1202012A/zh active Pending
- 1998-06-08 JP JP10159154A patent/JPH1117151A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
KR100481035B1 (ko) | 2005-05-16 |
CN1202012A (zh) | 1998-12-16 |
DE69835184T2 (de) | 2007-06-14 |
EP0884785B1 (de) | 2006-07-12 |
TW425718B (en) | 2001-03-11 |
KR19990006511A (ko) | 1999-01-25 |
EP0884785A2 (de) | 1998-12-16 |
JPH1117151A (ja) | 1999-01-22 |
EP0884785A3 (de) | 2001-10-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |