DE69822314D1 - Verfahren zur nichtlinearen echzzeitzustandsschätzung und steuerung - Google Patents

Verfahren zur nichtlinearen echzzeitzustandsschätzung und steuerung

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Publication number
DE69822314D1
DE69822314D1 DE69822314T DE69822314T DE69822314D1 DE 69822314 D1 DE69822314 D1 DE 69822314D1 DE 69822314 T DE69822314 T DE 69822314T DE 69822314 T DE69822314 T DE 69822314T DE 69822314 D1 DE69822314 D1 DE 69822314D1
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real
linear
control
time estimate
estimate
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DE69822314T
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DE69822314T2 (de
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C Shah
Pradeep Pandey
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
DE69822314T 1997-08-22 1998-08-21 Verfahren zur nichtlinearen echzzeitzustandsschätzung und steuerung Expired - Lifetime DE69822314T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/917,053 US5991525A (en) 1997-08-22 1997-08-22 Method for real-time nonlinear system state estimation and control
US917053 1997-08-22
PCT/US1998/017439 WO1999010783A1 (en) 1997-08-22 1998-08-21 A method for real-time nonlinear system state estimation and control

Publications (2)

Publication Number Publication Date
DE69822314D1 true DE69822314D1 (de) 2004-04-15
DE69822314T2 DE69822314T2 (de) 2004-12-30

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DE69822314T Expired - Lifetime DE69822314T2 (de) 1997-08-22 1998-08-21 Verfahren zur nichtlinearen echzzeitzustandsschätzung und steuerung

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US (2) US5991525A (de)
EP (1) EP1015943B1 (de)
AU (1) AU9030898A (de)
DE (1) DE69822314T2 (de)
WO (1) WO1999010783A1 (de)

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