DE69807770T2 - Zusammensetzung und Verfahren zum Bilden von elektrisch isolierenden Dünnschichten - Google Patents
Zusammensetzung und Verfahren zum Bilden von elektrisch isolierenden DünnschichtenInfo
- Publication number
- DE69807770T2 DE69807770T2 DE69807770T DE69807770T DE69807770T2 DE 69807770 T2 DE69807770 T2 DE 69807770T2 DE 69807770 T DE69807770 T DE 69807770T DE 69807770 T DE69807770 T DE 69807770T DE 69807770 T2 DE69807770 T2 DE 69807770T2
- Authority
- DE
- Germany
- Prior art keywords
- composition
- electrically insulating
- thin films
- insulating thin
- forming electrically
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
- H01L21/02134—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material comprising hydrogen silsesquioxane, e.g. HSQ
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
- C09D183/04—Polysiloxanes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
- H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
- H01B3/46—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes silicones
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/312—Organic layers, e.g. photoresist
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Wood Science & Technology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Formation Of Insulating Films (AREA)
- Paints Or Removers (AREA)
- Organic Insulating Materials (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP09647697A JP3415741B2 (ja) | 1997-03-31 | 1997-03-31 | 電気絶縁性薄膜形成用組成物および電気絶縁性薄膜の形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69807770D1 DE69807770D1 (de) | 2002-10-17 |
DE69807770T2 true DE69807770T2 (de) | 2003-05-22 |
Family
ID=14166109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69807770T Expired - Fee Related DE69807770T2 (de) | 1997-03-31 | 1998-03-30 | Zusammensetzung und Verfahren zum Bilden von elektrisch isolierenden Dünnschichten |
Country Status (7)
Country | Link |
---|---|
US (2) | US6074695A (de) |
EP (1) | EP0869516B1 (de) |
JP (1) | JP3415741B2 (de) |
KR (1) | KR19980080834A (de) |
DE (1) | DE69807770T2 (de) |
SG (1) | SG74621A1 (de) |
TW (1) | TW419750B (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1140558A (ja) * | 1997-07-22 | 1999-02-12 | Sony Corp | 誘電体膜の製造方法 |
US6231989B1 (en) | 1998-11-20 | 2001-05-15 | Dow Corning Corporation | Method of forming coatings |
EP1083775B1 (de) * | 1999-03-29 | 2010-10-13 | Seiko Epson Corporation | Zusammensetzung mit einem organischen elektrolumineszierenden Material |
JP2001214127A (ja) | 2000-01-31 | 2001-08-07 | Dow Corning Toray Silicone Co Ltd | 電気絶縁性薄膜形成性樹脂組成物、および電気絶縁性薄膜の形成方法 |
JP2001247819A (ja) * | 2000-03-03 | 2001-09-14 | Dow Corning Toray Silicone Co Ltd | 電気絶縁性架橋薄膜形成性有機樹脂組成物、および電気絶縁性架橋薄膜の形成方法 |
JP2001291427A (ja) | 2000-04-06 | 2001-10-19 | Dow Corning Toray Silicone Co Ltd | 電気絶縁性薄膜形成性樹脂組成物、および電気絶縁性薄膜の形成方法 |
US6605993B2 (en) | 2000-05-16 | 2003-08-12 | Fujitsu Limited | Operational amplifier circuit |
US6271273B1 (en) * | 2000-07-14 | 2001-08-07 | Shipley Company, L.L.C. | Porous materials |
WO2002031596A1 (en) | 2000-10-12 | 2002-04-18 | University Of North Carolina At Chapel Hill | Co2-processes photoresists, polymers, and photoactive compounds for microlithography |
US6740685B2 (en) * | 2001-05-30 | 2004-05-25 | Honeywell International Inc. | Organic compositions |
JP3886779B2 (ja) | 2001-11-02 | 2007-02-28 | 富士通株式会社 | 絶縁膜形成用材料及び絶縁膜の形成方法 |
EP1466356A2 (de) * | 2002-01-15 | 2004-10-13 | Honeywell International Inc. | Organische zusammensetzungen |
JP4092220B2 (ja) * | 2003-01-31 | 2008-05-28 | Necエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
JP2005268405A (ja) * | 2004-03-17 | 2005-09-29 | Dow Corning Toray Co Ltd | 光学装置用金属ベース回路基板およびその製造方法 |
US8901268B2 (en) | 2004-08-03 | 2014-12-02 | Ahila Krishnamoorthy | Compositions, layers and films for optoelectronic devices, methods of production and uses thereof |
JP2009060007A (ja) * | 2007-09-03 | 2009-03-19 | Sekisui Chem Co Ltd | シルセスキオキサン系絶縁膜の製造方法 |
US20100243960A1 (en) * | 2007-11-16 | 2010-09-30 | Sumitomo Chemical Company, Limited | Coating solution for application method of discharging coating solution through slit-like discharge port |
US8557877B2 (en) | 2009-06-10 | 2013-10-15 | Honeywell International Inc. | Anti-reflective coatings for optically transparent substrates |
US8864898B2 (en) | 2011-05-31 | 2014-10-21 | Honeywell International Inc. | Coating formulations for optical elements |
JP6803842B2 (ja) | 2015-04-13 | 2020-12-23 | ハネウェル・インターナショナル・インコーポレーテッドHoneywell International Inc. | オプトエレクトロニクス用途のためのポリシロキサン製剤及びコーティング |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3615272A (en) * | 1968-11-04 | 1971-10-26 | Dow Corning | Condensed soluble hydrogensilsesquioxane resin |
JPS59189126A (ja) * | 1983-04-13 | 1984-10-26 | Fujitsu Ltd | ポリジハイドロジエンシロキサンの製造方法 |
JPS6042426A (ja) * | 1983-08-19 | 1985-03-06 | Fujitsu Ltd | ポリジハイドロジェンシロキサンの製法 |
US4756977A (en) * | 1986-12-03 | 1988-07-12 | Dow Corning Corporation | Multilayer ceramics from hydrogen silsesquioxane |
US5380553A (en) * | 1990-12-24 | 1995-01-10 | Dow Corning Corporation | Reverse direction pyrolysis processing |
US5840774A (en) * | 1991-02-28 | 1998-11-24 | Research Foundation Of State University Of New York | Low density microporous polymers and process |
US5238787A (en) * | 1991-04-22 | 1993-08-24 | Dow Corning Corporation | Photodelineable coatings from hydrogen silsesquioxane resin |
JP3153367B2 (ja) * | 1992-11-24 | 2001-04-09 | ダウ・コ−ニング・コ−ポレ−ション | ポリハイドロジェンシルセスキオキサンの分子量分別方法 |
US5548159A (en) * | 1994-05-27 | 1996-08-20 | Texas Instruments Incorporated | Porous insulator for line-to-line capacitance reduction |
US5618878A (en) * | 1995-04-07 | 1997-04-08 | Dow Corning Corporation | Hydrogen silsesquioxane resin coating composition |
TW367273B (en) * | 1996-12-20 | 1999-08-21 | Dow Corning | Method of producing low dielectric ceramic-like materials |
-
1997
- 1997-03-31 JP JP09647697A patent/JP3415741B2/ja not_active Expired - Fee Related
-
1998
- 1998-03-30 EP EP98105810A patent/EP0869516B1/de not_active Expired - Lifetime
- 1998-03-30 KR KR1019980010949A patent/KR19980080834A/ko active IP Right Grant
- 1998-03-30 SG SG1998000661A patent/SG74621A1/en unknown
- 1998-03-30 DE DE69807770T patent/DE69807770T2/de not_active Expired - Fee Related
- 1998-03-31 US US09/052,379 patent/US6074695A/en not_active Expired - Fee Related
- 1998-03-31 US US09/120,384 patent/US6149966A/en not_active Expired - Fee Related
- 1998-05-20 TW TW087104836A patent/TW419750B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR19980080834A (ko) | 1998-11-25 |
JPH10283843A (ja) | 1998-10-23 |
EP0869516B1 (de) | 2002-09-11 |
DE69807770D1 (de) | 2002-10-17 |
US6149966A (en) | 2000-11-21 |
TW419750B (en) | 2001-01-21 |
JP3415741B2 (ja) | 2003-06-09 |
US6074695A (en) | 2000-06-13 |
EP0869516A1 (de) | 1998-10-07 |
SG74621A1 (en) | 2000-08-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |