DE69712580D1 - Photoempfindliche Harzzusammensetzung - Google Patents
Photoempfindliche HarzzusammensetzungInfo
- Publication number
- DE69712580D1 DE69712580D1 DE69712580T DE69712580T DE69712580D1 DE 69712580 D1 DE69712580 D1 DE 69712580D1 DE 69712580 T DE69712580 T DE 69712580T DE 69712580 T DE69712580 T DE 69712580T DE 69712580 D1 DE69712580 D1 DE 69712580D1
- Authority
- DE
- Germany
- Prior art keywords
- resin composition
- photosensitive resin
- photosensitive
- composition
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/128—Radiation-activated cross-linking agent containing
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Materials For Photolithography (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Paints Or Removers (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8243450A JP2878654B2 (ja) | 1996-09-13 | 1996-09-13 | 感光性樹脂組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69712580D1 true DE69712580D1 (de) | 2002-06-20 |
DE69712580T2 DE69712580T2 (de) | 2003-01-09 |
Family
ID=17104072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69712580T Expired - Fee Related DE69712580T2 (de) | 1996-09-13 | 1997-09-12 | Photoempfindliche Harzzusammensetzung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5998089A (de) |
EP (1) | EP0829765B1 (de) |
JP (1) | JP2878654B2 (de) |
DE (1) | DE69712580T2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100234143B1 (ko) * | 1996-06-07 | 1999-12-15 | 미야즈 쥰이치로 | 레지스트 물질 및 그 제조 방법 |
JP3032833B2 (ja) * | 1997-09-22 | 2000-04-17 | ザ ユニバーシティ オブ バーミンガム | 電子線レジスト |
CA2312140A1 (en) | 1999-06-25 | 2000-12-25 | Matthias Ramm | Charge separation type heterojunction structure and manufacturing method therefor |
US6793967B1 (en) * | 1999-06-25 | 2004-09-21 | Sony Corporation | Carbonaceous complex structure and manufacturing method therefor |
US6794473B2 (en) * | 2001-05-01 | 2004-09-21 | Nippon Shokubai Co., Ltd. | Acrylic acid (salt) polymer, its production process and uses |
KR20030002739A (ko) * | 2001-06-29 | 2003-01-09 | 주식회사 하이닉스반도체 | 반도체 소자의 포토레지스트 제조 방법 및 이를 이용한포토레지스트 패턴 형성 방법 |
US8907323B2 (en) * | 2002-04-23 | 2014-12-09 | Philip D. Freedman | Microprocessor assembly |
AU2003302411A1 (en) * | 2002-11-28 | 2004-06-18 | Jsr Corporation | Photocuring resin composition, medical device using same and method for manufacturing same |
CL2011003025A1 (es) | 2011-11-30 | 2012-07-06 | Univ Arturo Prat 40% | Metodo para obtener un producto alimenticio microencapsulado para peces; producto alimenticio que contiene al menos, alginato, levadura, suero, harina de pescado y otros excipientes; y usos de dicho producto. |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6033751A (ja) * | 1983-08-03 | 1985-02-21 | Nippon Telegr & Teleph Corp <Ntt> | 符・復号器 |
JPS6062105A (ja) * | 1983-09-16 | 1985-04-10 | Sharp Corp | 高透磁率合金膜の製造方法 |
JPS60134413A (ja) * | 1983-12-22 | 1985-07-17 | Seiko Epson Corp | 半導体装置の製造方法 |
US5561026A (en) * | 1992-06-30 | 1996-10-01 | Nippon Oil Co., Ltd. | Photosensitive materials comprising fullerene |
JPH06242543A (ja) * | 1993-02-18 | 1994-09-02 | Fuji Photo Film Co Ltd | ハロゲン化銀感光材料 |
JPH0784337A (ja) * | 1993-09-17 | 1995-03-31 | Toshiba Corp | 光記録素子 |
DE4344840A1 (de) * | 1993-12-30 | 1995-07-06 | Geckeler Kurt E Priv Doz Dr | Synthese von aromatischen, makromolekularen C¶6¶¶0¶-Materialien |
JP3615263B2 (ja) * | 1995-04-13 | 2005-02-02 | 日本化薬株式会社 | フラーレン誘導体、樹脂組成物及びその硬化物 |
-
1996
- 1996-09-13 JP JP8243450A patent/JP2878654B2/ja not_active Expired - Fee Related
-
1997
- 1997-09-12 DE DE69712580T patent/DE69712580T2/de not_active Expired - Fee Related
- 1997-09-12 US US08/928,337 patent/US5998089A/en not_active Expired - Fee Related
- 1997-09-12 EP EP97115899A patent/EP0829765B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH1090893A (ja) | 1998-04-10 |
EP0829765B1 (de) | 2002-05-15 |
US5998089A (en) | 1999-12-07 |
DE69712580T2 (de) | 2003-01-09 |
EP0829765A1 (de) | 1998-03-18 |
JP2878654B2 (ja) | 1999-04-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |